TW201526736A - Cleaning apparatus and cleaning method - Google Patents

Abstract

A cleaning apparatus includes a jet port component for jetting the detergent from a jet port to a cleaning target with a through-hole; and a sucking port component for sucking the aforementioned detergent of the cleaning target through a sucking port arranged on an opposite side of the aforementioned jet port.

Description

Washing device and washing method Field of invention

The present invention relates to a cleaning device and a cleaning method.

Background of the invention

There is known a deburring cleaning device and a deburring cleaning method for ejecting a cleaning medium containing frozen particles from a ice maker nozzle to a resin substrate to perform deburring of the resin substrate.

Patent Document 1 Japanese Patent Laid-Open Publication No. 2008-307624

In the object to be cleaned in which the through hole is formed, an adhering substance may adhere to the through hole.

Summary of invention

On the other hand, the present invention has an object of improving the ability to remove adhering substances to a cleaning target in which a through hole is formed.

In one aspect, the cleaning agent is sprayed on the object to be cleaned having the through hole from the ejection opening, and the cleaning agent is sucked by the suction opening provided on the opposite side to the ejection opening.

12‧‧‧cleaning device

14‧‧‧ chamber

14A‧‧‧Upper space

14B‧‧‧Lower space

14C‧‧‧ Sidewall

14D‧‧‧Upper wall

14E‧‧‧Bottom wall

16‧‧‧Metal mask

16A‧‧‧mask body

16B‧‧‧Reinforcement components

18‧‧‧through holes

20‧‧‧ solder paste

20A‧‧‧ Flux

20B‧‧‧ solder particles

22‧‧‧ Keeping components

24‧‧‧ detergent nozzle

26‧‧‧Injection port

28‧‧‧Attraction nozzle

30‧‧‧Attraction

32‧‧‧ housing

34‧‧‧ gas jet nozzle

34A‧‧‧1st pose

34B‧‧‧2nd pose

36‧‧‧ shaft

38‧‧‧Control device

40‧‧‧Drug supply device

42‧‧‧ gas supply device

44‧‧‧Return components

46‧‧‧ supply port

48‧‧‧First pump

50‧‧‧buffer tank

52‧‧‧2nd pump

54‧‧‧Party body generating device

56‧‧‧3rd pump

58‧‧‧Filter

60‧‧‧reservoir

62‧‧‧1st valve

64A‧‧‧1st piping (differential part)

64A1‧‧‧1st piping

64B‧‧‧2nd piping

66‧‧‧Recycling device

68‧‧‧Recycling device

70‧‧‧Discharge piping

72‧‧‧2nd valve

74‧‧‧ sprayer

76‧‧‧Cooler

78‧‧‧ freezing point sensor

80‧‧‧ discharge piping

82‧‧‧ opposite side suction nozzle

84‧‧‧ opposite side suction port

86‧‧‧Discharge piping

88‧‧‧4th pump

90‧‧‧Sedimentation tank

92‧‧‧Filter

94‧‧‧3rd valve

96‧‧‧reflecting members

98‧‧‧Sloping surface

104‧‧‧ detergent

106‧‧‧ eddy current

108‧‧‧ eddy current

M1‧‧‧ moving direction

M2‧‧‧ moving direction

P‧‧‧ arrow

P1‧‧‧ arrow

Θ1‧‧‧ angle

Θ2‧‧‧ angle

Fig. 1 is a front elevational view showing the cleaning device of the first embodiment.

Fig. 2 is an enlarged front elevational view showing the cleaning device of the first embodiment.

Fig. 3 is an enlarged front elevational view showing the cleaning device of the first embodiment.

Fig. 4 is an enlarged front elevational view showing the cleaning device of the first embodiment.

Fig. 5 is a plan view showing a suction nozzle of the cleaning device of the first embodiment.

Figure 6 is a perspective view showing a metal mask.

Fig. 7 is a block diagram of the cleaning device of the first embodiment.

Fig. 8A is a longitudinal sectional view showing an enlarged view of a vicinity of a through hole of a metal mask;

Fig. 8B is a cross-sectional view showing the vicinity of the through hole of the metal mask enlarged and displayed.

Fig. 9 is a timing chart showing an example of a washing step of the cleaning device of the first embodiment.

Figure 10 is a front elevational view of the cleaning device in which the gas injection nozzle is disposed in the chamber.

Detailed description of the preferred embodiment

The first embodiment will be described in detail based on the drawings.

In Fig. 1, the cleaning device 12 of the first embodiment is shown.

The cleaning device 12 has a chamber 14. As also shown in Figures 2 to 4, the chamber 14 is a closed container. A metal mask 16 is housed and held inside the chamber 14.

The metal mask 16 is, for example, a plate-shaped member used as a mask when the solder paste 20 (see FIG. 6) is printed on a substrate of a printed circuit board. In the example shown in FIGS. 1 to 4, the metal mask 16 has a plate-shaped mask body 16A and a frame-shaped reinforcing member 16B attached to the periphery of the mask body 16A.

On the metal mask 16, as shown in Fig. 6, a plurality of through holes 18 are formed. In order to apply the solder paste 20 to the base material of the printed circuit board, a part of the solder paste 20 may be adhered to the through hole 18 as the deposit 102 after the metal mask 16 is used. The cream solder 20 is in a state in which, for example, the flux 20A and the solder particles 20B are mixed at a predetermined volume ratio. That is, in the solder paste 20, the solder particles 20B are dispersed in the flux 20A, and the solder paste 20 may remain in the through hole 18 after the metal mask 16 is used. In the present embodiment, the metal mask 16 is an example of a cleaning object, and the solder paste 20 is an example of an attached object.

As shown in detail in FIGS. 2 to 4, a holding member 22 for holding the metal cover 16 is provided in the chamber 14. In the present embodiment, the holding member 22 holds the mask main body 16A and the reinforcing member 16B from the outside and is provided at a predetermined position in the chamber 14. The holding member 22 is an example of a setting portion.

Further, the holding member 22 holds the metal mask 16 in the chamber 14, but does not block the through hole 18 of the metal mask 16. Further, in the chamber 14, a lower space 14B is formed below the metal mask 16, and an upper space 14A is formed above the metal mask 16.

One or a plurality of the side walls 14C of the chamber 14 are attached (in the example shown in FIGS. 2 to 4, two of the left and right side walls 14C are each, for a total of four) Detergent nozzle 24. The detergent nozzle 24 is an example of an injection port member. As shown in FIG. 3, the detergent nozzle 24 injects the detergent 104 supplied from the detergent supply device 40 (shown in FIG. 1) from the injection port 26 into the chamber 14.

One or a plurality of (in the example shown in FIGS. 2 to 4, one in the center of the upper wall 14D) suction nozzles 28 are attached to the upper wall 14D of the chamber 14. The suction nozzle 28 is an example of a suction port member, and the inside of the suction nozzle 28 is a suction port 30. The suction nozzle 28 has a plurality of cylindrical housings 32 that are progressively enlarged in diameter as they exit the chamber 14. In the suction nozzle 28 shown in FIGS. 2 to 4, there are four housings 32 which are gradually enlarged in diameter as they are upward.

As shown in detail in Fig. 5, one or a plurality of (in the example of Fig. 5, each of the housings 32) gas are installed inside the suction port 30, that is, each of the housings 32. The nozzle 34 is sprayed. Each of the gas injection nozzles 34 is rotatably mounted to the housing 32 by a shaft 36.

Each of the gas injection nozzles 34 is rotated about the shaft 36, and the posture is changed between the first posture 34A indicated by a solid line in FIG. 5 and the second posture 34B indicated by a two-dot chain line. In the first posture 34A, the gas injection nozzle 34 is inclined at a constant angle θ1 with respect to the direction toward the center of the casing 32, and is inclined at a constant angle θ2 toward the opposite side of the first posture 34A in the second posture 34B. The angle θ1 and the angle θ2 may also be equal or different. The posture of the gas injection nozzle 34 is controlled by the control unit 38 as shown in FIG.

The gas injection nozzle 34 is a nozzle that injects gas supplied from the gas supply device 42 (shown in FIG. 1) into the casing 32, and is a gas injection. An example of a component. In addition, the gas injection nozzle 34 is an example of an inclined member that inclines the moving direction of the detergent 104 in the chamber 14 with respect to the penetration direction of the through hole 18.

The vortex 106 is generated in the casing 32 and in the chamber 14 in a state where each of the gas injection nozzles 34 is inclined at the predetermined angle θ1 or θ2 described above. Further, in the present embodiment, it is convenient to cause the direction of the eddy current generated in the chamber 14 when the gas injection nozzle 34 is in the first posture 34A (angle θ1) to be rightward (direction shown in FIG. 5). Therefore, the direction of the eddy current generated in the chamber 14 when the second posture 34B (angle θ2) is located is the left direction (the direction opposite to the direction shown in FIG. 5).

The direction of movement of the detergent 104 in the chamber 14 is varied by the vortex 106 generated within the chamber 14. In particular, as shown in FIG. 8A, the moving direction M1 of the detergent 104 is inclined with respect to the through direction of the through hole 18 of the metal mask 16 (the normal direction of the metal mask 16).

Further, as shown in FIG. 8B, when the metal mask 16 is viewed in a plan view, the eddy current 108 is also generated inside the through hole 18. By the eddy current 108, the moving direction M2 of the detergent 104 inside the through hole 18 can take various directions.

As shown in FIG. 1, the cleaning device 12 has a detergent supply device 40 and a recovery device 66. The detergent supply device 40 has a first pipe 64A that branches from the supply port 46 to the detergent injection nozzle 24 in the second pump 52 via the first pump 48 and the buffer tank 50. A granular body generating device 54 is provided in the branch portion 64A1 where the first pipe 64A is divided. The first pipe 64A is an example of a supply pipe.

In contrast, the recovery device 66 has a return member 44. The return member 44 has a third pump 56, a filter 58 and a reservoir from the suction nozzle 28 The groove 60 and the first valve 62 are in the second pipe 64B of the buffer tank 50. Among the first pipes 64A and 64A1, the portion from the buffer tank 50 to the detergent injection nozzle 24 and the second pipe 64B are the return members 44. In other words, in the first pipes 64A and 64A1, the portion from the buffer tank 50 to the detergent injection nozzle 24 serves as both the supply pipe and the return pipe.

The recovery device 66 can be sent to the storage tank 60 by the recovery of the detergent 104 in the chamber 14 through the second pipe 64B by the drive of the third pump 56.

A discharge pipe 70 that is opened and closed by the second valve 72 is connected to the storage tank 60.

The cleaning medium (water in the example of the present embodiment) is supplied from the supply port 46 at one end of the first pipe 64A and is temporarily stored in the buffer tank 50. The cleaning medium in the buffer tank 50 is sent to the granular body generating device 54 when the second pump 52 is driven.

In the present embodiment, the granular body generating device 54 includes a sprayer 74 and a cooler 76 provided in the first pipe 64A1. The liquid cleaning medium is atomized by the atomizer 74 and cooled by the cooler 76, and sent to the detergent spray nozzle 24. A part or all of the liquid water is solidified by atomization and cooling to become ice particles. Then, as shown in FIG. 3, the ice particles are sprayed from the detergent nozzle 24 into the chamber 14 as the detergent 104. Ice particles are an example of a granular body.

A gas other than oxygen (for example, carbon dioxide or nitrogen) may be mixed into the mist water in the cooler 76. A gas other than oxygen is supplied into the chamber 14 to reduce the amount of oxygen in the chamber 14. By reducing the amount of oxygen in the chamber 14, the flux 20A contained in the solder paste 20 is suppressed from being oxidized to increase the viscosity.

A part of the detergent 104 in the chamber 14 is sucked by the suction nozzle 28 by the driving of the third pump 56 provided in the second pipe 64B. The detergent 104 sucked by the suction nozzle 28 passes through the filter 58 and is sent to the storage tank 60.

The filter 58 separates a part of the deposit (the solder paste 20 removed from the metal mask 16 and the like) contained in the detergent 104 from the detergent 104. The detergent 104 from which the deposit has been separated is temporarily stored in the storage tank 60.

The reservoir 60 is provided with a freezing point sensor 78. When a lot of deposits remain in the detergent 104, the freezing point of the detergent 104 becomes low. That is, the freezing point of the detergent 104 is measured by the freezing point sensor 78, whereby it can be judged whether or not the detergent 104 contains a lot of deposits. As shown in FIG. 7, the measurement data measured by the freezing point sensor 78 is sent to the control device 38.

The control device 38 opens the second valve 72 of the discharge pipe 70 when the detergent agent 104 is not reused because of the large amount of deposits remaining on the detergent 104. The detergent 104 in the storage tank 60 can be discharged from the discharge pipe 80.

On the other hand, when the detergent 104 is reused because of the small amount of deposits remaining in the detergent 104, the control device 38 opens the first valve 62, and the detergent in the storage tank 60 can be used. 104 moves to the buffer tank 50. The detergent 104 that has returned to the buffer tank 50 is reused for the cleaning of the metal mask 16 in the chamber 14.

Further, a filter may be provided in a portion between the storage tank 60 of the second pipe 64B and the buffer tank 50, and the deposit may be further separated from the detergent 104.

As shown in FIG. 1 to FIG. 4, the lower wall 14E of the chamber 14 is mounted with a lower wall 14E. Or a plurality of (in the example shown in FIGS. 1 to 4, one is attached to the center of the lower wall 14E), and the nozzle 82 is suctioned on the opposite side. The opposite side suction nozzle 82 is formed in a cylindrical shape, and the inside of the opposite side suction nozzle 82 is an opposite side suction port 84. The opposite side suction nozzle 82 is opposite the metal mask 16 and the suction nozzle 28 on the opposite side. Further, the opposite side suction port 84 is located at a position opposite to the suction port 30 with respect to the metal cover 16.

The opposite side suction nozzle 82 is provided with a recovery device 68. The recovery device 68 has a discharge pipe 86 connected to the opposite side suction nozzle 82.

The fourth pump 88, the sedimentation tank 90, the filter 92, and the third valve 94 are provided in the discharge pipe 86. The recovery device 68 can recover the detergent 104 in the chamber 14 through the discharge pipe 86 by the drive of the fourth pump 88, and send it to the sedimentation tank 90.

In the sedimentation tank 90, the deposits 102 in the detergent 104 are precipitated. The deposit (precipitate) accumulated in the sedimentation tank 90 can be discarded from the sedimentation tank 90 under predetermined conditions (for example, periodically). Further, the control device 38 can open the upper clarified portion of the detergent 104 in the sedimentation tank 90 from the discharge port of the discharge pipe 86 by opening the third valve 94.

As shown in FIGS. 1 to 4, a plurality of reflecting members 96 are formed on the lower surface of the upper wall 14D of the chamber 14. The reflection member 96 is an example of an inclined member.

Each of the reflecting members 96 has one or a plurality of (two in the example of FIGS. 1 to 4) inclined faces 98 that are inclined with respect to the through direction (arrow P1 direction) of the metal mask housed in the chamber 14. In the example shown in Figs. 1 to 4, the adjacent inclined faces 98 are inclined in opposite directions from each other. The detergent 104 that hits the inclined surface 98 is reflected by a reflection angle that is different from the incident angle of the upper wall 14D.

The shape of the reflection member 96 is not limited, and may be, for example, a conical shape or a pyramidal shape (the bottom surface is an upward direction). Although a gap may be interposed between the plurality of reflecting members 96, as shown in FIGS. 1 to 4, when a plurality of reflecting members 96 are formed without a gap, the number of reflecting members 96 that can be formed per predetermined area increases.

In the present embodiment, the inclined surface 98 is formed as a part of the inner surface of the chamber 14. That is, the reflecting member 96 and the chamber 14 are integrated in the chamber 14.

As shown in FIG. 7, the measurement data of the freezing point sensor 78 is sent to the control device 38. The control device 38 controls the first to fourth pumps 48, 52, 56, and 88, the first to third valves 62, 72, and 94 and the gas injection nozzle 34. The control device 38 may be a computer that controls the driving of the first to fourth pumps 48, 52, 56, and 88, the first to third valves 62, 72, and 94, and the gas injection nozzle 34, or may be a control device that performs sequential control.

Next, the action and cleaning method of this embodiment will be described.

In order to wash the metal mask 16 with the cleaning device 12, as shown in FIG. 2, the metal mask 16 is held in the holding member 22 in the chamber 14. Thereby, since the metal mask 16 is provided in a state where the predetermined position is maintained, the positional displacement of the metal mask 16 at the time of washing can be suppressed.

Further, the inside of the chamber 14 is decompressed using a pump or the like as needed. For the pump used at this time, for example, a pump provided for decompression in the chamber 14 can be used.

In FIG. 9, the driving and stopping of the second pump 52, the driving and stopping of the third pump 56, the posture change of the gas injection nozzle 34, and the fourth pump 88 are shown. An example of the timing of driving and stopping. Further, each of the timings (T1 to T10) shown in FIG. 9 is an example for convenience of explanation. For example, although the time intervals between T1 and T10 in FIG. 9 are constant, the time intervals may not be constant.

When the metal mask 16 provided in the chamber 14 is washed, the second pump 52 is driven to supply the detergent 104 into the chamber 14 (T1 to T2). Thereby, as shown in FIG. 3, the detergent 104 is sprayed from the detergent spray nozzle 24 toward the metal mask 16. At this time, the third pump 56 is also driven to suck the inside of the chamber 14 with the suction port 30 while the vortex 106 is generated in the chamber 14. Further, gas is injected from the gas injection nozzle 34 (positioned in the first posture 34A). Thereby, the vortex 106 occurs within the chamber 14. Further, at this time, since the fourth pump 88 is stopped, the detergent 104 is not sucked from the opposite side suction port 84.

Further, when the cleaning agent 104 passes through the through hole 26, it collides with the solder paste 20 to remove the solder paste 20 from the metal mask 16.

In the present embodiment, the injection port 26 and the suction port 30 are located on the opposite side of each other with respect to the metal mask 16. Therefore, the detergent 104 ejected from the ejection port 26 easily passes through the metal cover from the lower space 14B as compared with the configuration without the suction port 30 or the configuration in which the suction port 30 is on the same side as the metal cover 16 with respect to the ejection opening 26. The through hole 18 of the cover 16. Therefore, the ability to remove the deposits 102 in the through holes 18 is high.

In particular, as shown in FIG. 6, the solder paste 20 remains in the through hole 18. However, in the cleaning device 12 of the present embodiment, the ability to remove the solder paste 20 is high. Further, in the metal mask 16, even if it is outside the through hole 18, the detergent 104 is strongly attracted by being attracted by the suction port 30. Profit When the detergent 104 is strongly touched, even in the place other than the through hole 18, the cleaning ability of the cleaning device 12 of the present embodiment is high.

In the present embodiment, the vortex 106 is generated in the chamber 14 by the gas being injected from the gas injection nozzle 34 at the suction port 30. Further, in this state, since the gas injection nozzle 34 is positioned in the first posture 34A, the eddy current 106 is rotated to the right.

By the vortex 106, as shown by an arrow M1 in FIG. 8A, the detergent 104 is inclined with respect to the inner surface 18S of the through hole 18 of the metal mask 16, and the deposit 102 is removed. Further, as shown by an arrow M2 in FIG. 8B, the detergent 104 rotates in the through hole 18, and is inclined with respect to the inner surface 18S of the through hole 18 in a direction different from the arrow M2 to remove the deposit 102. Therefore, the cleaning effect on the metal mask 16 is high compared to the structure in which the vortex 106 does not occur in the chamber 14.

Further, the gas injection nozzle 34 may be provided in the chamber 14 in order to cause the eddy current 106 to occur in the chamber 14. As shown in FIGS. 1 to 4, when the gas injection nozzle 34 is provided inside the suction port 30, a space for providing a plurality of gas injection nozzles 34 in the chamber 14 is not required, and the chamber 14 can be miniaturized. .

On the other hand, as shown in FIG. 10, the gas injection nozzle 34 may be provided in the chamber 14. In the configuration shown in Fig. 10, although it is difficult to provide a plurality of gas injection nozzles 34, eddy currents can be generated at a position close to the metal mask 16.

The detergent 104 that has risen from the lower space 14B through the through hole 18 toward the upper space 14A in the chamber 14 hits the inclined surface 98 and is reflected. Further, as shown in FIG. 4, the through hole 18 is again passed. The inclined surface 98 is opposite to the through hole 18 The through direction is inclined, and the reflected detergent 104 is lowered at an angle different from that at the time of the rise. That is, when the detergent 104 is lowered, it is highly likely that it passes through the through hole 18 at an angle different from that at the time of ascending. Therefore, the cleaning ability of the metal mask 16 is high as compared with the configuration without the inclined surface 98.

Further, in the present embodiment, the inclined directions are different from each other on the adjacent inclined faces 98. Therefore, the detergent 104 can be randomly reflected compared to the configuration in which the angles of all the inclined faces 98 are the same. That is, since the detergent 104 has a high possibility of touching the metal mask 16 at various angles, the cleaning ability of the metal mask 16 is high.

Further, in the example shown in FIGS. 1 to 4, the inclined surface 98 having a symmetrical shape appearing on both sides of each of the reflection members 96 is exemplified, but the angle of the inclined surface 98 may be random.

The reflection member 96 having the inclined surface 98 is formed on the inner surface of the chamber 14 in the above embodiment. The reflecting member 96 having the inclined surface 98 may be a different object from the chamber 14, but when formed on the inner surface of the chamber 14 as described above, since the inclined surface 98 and the chamber 14 are integrated, the number of parts is small. Further, a member for attaching the inclined surface (reflecting member) to the chamber 14 is not required.

As shown in FIG. 9, the second pump 52 and the third pump 56 are stopped after being driven for a predetermined period of time (T2). The gas injection nozzle 34 is also stopped.

Next, the control device 38 drives the fourth pump 88 (T2 to T3). Thereby, the detergent 104 in the chamber 14 is attracted to the opposite side suction port 84. That is, the reflection by the inclined surface 98, or in addition to the gravity acting on the detergent 104 and the suction on the opposite side suction port 84, can actively make The detergent 104 moves downward and passes through the through hole 18.

Further, since the suction timing of the suction port 30 and the suction timing of the suction port 84 on the opposite side are different, the vertical movement of the detergent 104 in the chamber 14 can be efficiently performed interactively.

After the fourth pump 88 is driven for a predetermined period of time, the control device 38 causes the gas injection nozzle 34 to assume the second posture 34B (T3). Then, the second pump 52 and the third pump 56 (T3 to T4) are driven. Thereby, the detergent 104 rises in the chamber 14 and passes through the through hole 18 of the metal mask 16. At this time, since the gas injection nozzle 34 is in the second posture 34B, a vortex to the left occurs in the chamber 14. That is, vortices of different orientations occur in the chamber 14 at times T1 to T2 and times T3 to T4. Therefore, compared with the structure in which the eddy current is generated only in one direction, since the detergent 104 is passed through at the different angles in the through hole 18, the cleaning effect on the metal mask 16 is high.

Thereafter, the control device 38 alternately drives the second pump 52 to attract the detergent 104 from the chamber 14 (suction from above) and the drive of the third pump 56 to attract the chamber 14 from the chamber. Detergent 104 (attraction from below) (T5~T9). In the example shown in FIG. 9, the driving of the second pump 52 and the driving of the third pump 56 are repeated four times at times T1 to T9. Thereby, in the chamber 14, the upward movement of the detergent 104 and the downward movement are allowed to occur, and the detergent 104 is passed through the through hole 18 several times.

Further, each time the control device 38 drives the second pump 52, the posture of the gas injection nozzle 34 is alternately switched to the first posture 34A (T1 to T2, T5 to T6) and the second posture 34B (T3 to T4, T7). ~T8). Thereby, in the chamber 14, the vortex to the right and the vortex to the left are alternately generated, and the detergent 104 is The metal mask 16 is touched at various angles.

The control device 38 drives the second pump 52 and the third pump 56 (T9 to T10) together after driving the second pump 52 and repeatedly driving the third pump 56 a predetermined number of times. By driving the second pump 52, a new detergent 104 is injected from the injection port 26 into the chamber 14. In particular, after the cleaning agent 104 is sucked from the opposite side ejection port 84 for a plurality of times, the detergent in the chamber 14 is reduced, but the detergent 104 is supplied into the chamber 14 by the driving of the second pump 52. The ability to clean the metal mask 16 can be maintained. Further, the detergent 104 in the chamber 14 is sucked upward by the suction port 30 by the driving of the second pump 52.

As described above, when the operation of cleaning the metal mask 16 is performed in the chamber 14, a part of the detergent 104 in the chamber 14 enters the suction port 30 or the opposite side suction port 84.

As described above, in the present embodiment, since the detergent 104 in the chamber 14 can be recovered from both the suction port 84 and the suction port 30 on the opposite side, it is possible to prevent the detergent 104 adhering to the solder paste 20 from remaining in the chamber 14.

The recovery of the detergent 104 from the chamber 14 may be performed only from one of the opposite side suction port 84 and the suction port 30. In particular, since the detergent 104 having a large amount of solder paste adhered is large, it is easier to enter the opposite side suction port 84 than the suction port 30. In other words, since the opposite side suction port 84 is located below the suction port 30, the cleaning agent 104 to which a lot of solder paste is attached and which is not suitable for reuse is easier to enter the opposite side than the suction port 30 above the metal cover 16. Attracting port 84.

Further, by providing the opposite side suction nozzle 82 to the opposite side suction port 84, the suction sucked by the opposite side suction nozzle 82 can be efficiently recovered. Detergent 104.

Thus, the detergent 104 that has entered the suction port 84 on the opposite side is recovered into the sedimentation tank 90.

In the precipitation tank 90, solder particles 20B having a larger specific gravity than the detergent 104 and the flux 20A are precipitated from the detergent 104. Further, when the control device 38 accumulates a certain amount of solder particles in the sedimentation tank 90 at a predetermined timing, the third valve 94 is opened. By opening the first valve 62, the upper clarified component of the detergent 104 can be discarded from the opposite side suction port 84.

The solder particles 20B deposited in the precipitation tank 90 are periodically collected by an operator, for example.

On the other hand, in the detergent 104 sucked by the suction port 30, a part of the solder paste 20 can be separated by the filter 58.

Further, the detergent agent 104 sucking the suction port 30 may be stored in the storage tank 60, and a part of the cream solder 20 in the detergent agent 104 may be precipitated and separated.

The detergent agent 104 sucked by the suction port 30 is smaller than the detergent agent 104 which is attracted by the suction port 84 on the opposite side. The detergent 104 sucked by the suction port 30 is recovered in the storage tank 60.

Further, in the detergent 104 from which a part of the solder paste 20 has been removed, it is determined by the measurement result of the freezing point sensor 78 that the recyclable detergent 104 passes through the second pipe 64 and is returned by a part of the first pipe 64A. To the buffer tank 50. That is, the detergent 104 can be reused.

On the other hand, when the detergent 104 is judged to be reusable by the measurement result of the freezing point sensor 78, the control device 38 opens the second valve 72. valve. The detergent 104 in the storage tank 60 is discharged through the discharge pipe 70.

In the present embodiment, the detergent 104 contains granules (ice particles). The adhering matter of the object to be cleaned is touched by the granular body, and the attached matter is removed from the object to be cleaned. Therefore, the effect of washing the object to be washed is high as compared with the structure using the detergent containing no granules.

Moreover, since the detergent 104 contains ice particles, it is easy to maintain the inside of the chamber 14 at a low temperature. By keeping the inside of the chamber 14 at a low temperature, the adhesion of the solder paste 20 is lowered, so that it is easily removed from the metal mask 16.

Further, in the cleaning device 12 of the present embodiment, ice particles are used when the solder paste 20 (attachment) is removed, and a volatile organic solvent is not used. Compared with the volatile organic solvent, the ice particles (water) are easily handled and reused, and the object to be washed can be washed at a low cost. By recycling the water used as the cleaning crucible 104, the amount of waste of the cleaning crucible can also be reduced.

Further, by using no organic solvent as the cleaning crucible, the influence on the adhesive or the like for adhering the mask main body 16A and the reinforcing member 16B is also small.

Further, when ice particles are used as the cleaning crucible 104, the shape of the ice particles and the degree of freedom of the particle size are large. Therefore, the cleaning effect can be improved while the cleaning time is short in response to the size of the metal mask 16, the size of the through hole 18, and the physical properties of the solder paste 20.

The object to be cleaned of the present embodiment is not limited to the above-described metal mask 16. In short, as long as it is a member having a through hole, the passage of the detergent to the through hole can be improved, and the ability to remove the adhering matter adhering to the object to be cleaned can be improved.

In addition, the object to be cleaned of the present embodiment is not limited to the solder paste, and can be applied to the case where the conductive paste or the polishing paste is removed from the object to be cleaned. For example, in the conductive paste coating, there is a solder paste analog. Further, the polishing paste contains a hard abrasive (diamond powder or the like). When such a conductive paste paint or a polishing paste or the like is removed from the object to be cleaned, the object to be cleaned of the present embodiment has a high ability to remove the deposit from the through hole.

The embodiments of the technology disclosed in the present invention have been described above. However, the technology disclosed in the present invention is not limited to the above, and various modifications may be made without departing from the spirit and scope of the invention.

According to the technique disclosed in the present invention, the attachment removal ability of the object to be cleaned in which the through hole is formed is high.

The entire literature, patent applications, and technical specifications described in the specification are incorporated by reference to each of the documents, patent applications, and technical specifications. And taken in this specification.

12‧‧‧cleaning device

14‧‧‧ chamber

14D‧‧‧Upper space

14E‧‧‧Lower space

16‧‧‧Metal mask

16A‧‧‧mask body

16B‧‧‧Reinforcement components

18‧‧‧through holes

24‧‧‧ detergent nozzle

26‧‧‧Injection port

28‧‧‧Attraction nozzle

30‧‧‧Attraction

34‧‧‧ gas jet nozzle

38‧‧‧Control device

40‧‧‧Drug supply device

42‧‧‧ gas supply device

44‧‧‧Return components

46‧‧‧ supply port

48‧‧‧First pump

50‧‧‧buffer tank

52‧‧‧2nd pump

54‧‧‧Party body generating device

56‧‧‧3rd pump

58‧‧‧Filter

60‧‧‧reservoir

62‧‧‧1st valve

64A‧‧‧1st piping

64A1‧‧‧1st piping (differential part)

64B‧‧‧2nd piping

66‧‧‧Recycling device

68‧‧‧Recycling device

70‧‧‧Discharge piping

72‧‧‧2nd valve

74‧‧‧ sprayer

76‧‧‧Cooler

78‧‧‧ freezing point sensor

82‧‧‧ opposite side suction nozzle

84‧‧‧ opposite side suction port

86‧‧‧Discharge piping

88‧‧‧4th pump

90‧‧‧Sedimentation tank

92‧‧‧Filter

94‧‧‧3rd valve

96‧‧‧reflecting members

P‧‧‧ arrow

Claims (18)

A cleaning device includes: an ejection port member that ejects a cleaning object to a cleaning object having a through hole from an ejection opening; and a suction port member that is disposed on an opposite side of the ejection port from the ejection port The suction port attracts the aforementioned detergent. A cleaning apparatus according to claim 1, comprising a granulating device for causing said detergent to contain granules. The cleaning device according to claim 1 or 2 includes a chamber in which the installation portion of the object to be cleaned is provided and the injection port member and the suction port member are attached. The cleaning device according to claim 3 includes a tilting member that inclines the moving direction of the cleaning agent with respect to the through direction of the through hole. The cleaning device according to claim 4, wherein the inclined member has a gas injection member that injects a gas to the detergent to cause an eddy current. The cleaning device of claim 5, wherein the gas injection member is provided inside the suction port. The cleaning device of claim 4, wherein the inclined member is disposed in the chamber. The cleaning device of claim 4, wherein the inclined member has an inclined surface that is inclined toward a through direction of the through hole. A cleaning device according to claim 8, wherein a part of the inner surface of the chamber is used as the inclined surface. The cleaning device of claim 8, wherein the inclined surface is formed in plural, and the inclined surfaces of the adjacent inclined surfaces are different in inclination. The cleaning device according to claim 1 includes a suction port member on the opposite side that sucks the detergent by a suction port on the opposite side of the suction port. The cleaning device of claim 11, wherein the suction timing and the suction port on the opposite side are different in suction timing. The cleaning device according to claim 11 includes a recovery device for recovering the detergent that is sucked from at least one of the suction port and the opposite side suction port. The cleaning device of claim 13, wherein the opposite side suction port position is lower than the cleaning object. The cleaning device of claim 14, wherein the recovery device recovers the detergent that has been attracted by the opposite side suction member. The cleaning device according to any one of claims 13 to 15, comprising a separation member that separates at least a part of the deposits removed from the object to be cleaned by the detergent collected from the recovery device. The cleaning device according to claim 16, further comprising a return member that returns the cleaning agent that separates at least a part of the deposit from the separating member to the ejection port. In the cleaning method, the cleaning target is sprayed from the ejection opening to the object to be cleaned, and the cleaning target is sucked by the suction opening provided on the side opposite to the ejection opening.