JP2009018250A - Cleaning method, cleaning device, and cleaning nozzle - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently clean soiling on a fine-rugged surface to be cleaned. <P>SOLUTION: A nozzle body 11 is provided with a gas jet outlet 15 and liquid jet outlets 16. Three liquid jet outlets 16 are formed at a fixed pitch on a concentric circle with the gas jet outlet 15 as the center. Compressed air 36 is jetted from the gas jet outlet 15, so as to form a gas jet 66. A cleaning liquid 46 is jetted from the gas liquid jet outlets 16, so as to form liquid jets 65. Pores composing the liquid jet outlets 16 are tilted so as to be crossed with the gas jet 66 at a cross angle θof 7°. By colliding the crossed part 70 of the liquid jets 65 with the gas jets 66, the cleaning liquid 46 is crushed and divided, so as to be fine liquid grains 71. The fine liquid grains 71 are accelerated with the gas jet 66, and are collided against the surface 75 to be cleaned. The fine liquid grains 71 enter the fine recessed parts of the surface 75, so as to remove stain. The surface 75 is vibrated by shock waves by the collision of the gas jet 66 to the surface 75, so as to float away stain and garbage. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a cleaning method and apparatus for cleaning metal surfaces and painted surfaces of transportation equipment, plant equipment, and the like, and a cleaning nozzle.

  Vehicle cleaning devices are used to clean transport equipment, such as railcar skins. The vehicle cleaning device includes a chemical solution application unit that applies a chemical solution such as a detergent to the surface of the vehicle, a cleaning water injection unit that injects cleaning water onto the surface on which the chemical solution is applied, and a cleaning that cleans the surface on which the chemical solution is applied. A brush and an air blower for injecting airflow onto the cleaned vehicle surface are provided. Then, while running the vehicle at a low speed, after applying a chemical solution to the surface of the vehicle, the cleaning brush is rotated while spraying cleaning water on the surface of the vehicle to clean the surface of the vehicle, and then an air current is injected. Thus, water droplets attached to the surface of the vehicle are blown off (for example, Patent Document 1).

  In recent years, stainless steel vehicles have increased in place of painted vehicles. The surface of such a stainless steel vehicle has a matte finish, and fine irregularities are formed on the surface. Therefore, when dirt adheres to the concave portion, the concave portion is small with respect to the fiber thickness of the cleaning bran, so that there is a problem that the brush tip does not reach the bottom of the concave portion and the dirt cannot be removed.

  Further, instead of the cleaning brush, cleaning using a high-pressure water flow is also performed. However, such a cleaning method has a problem that water penetrates into the vehicle through a gap of the vehicle because the water pressure is as high as 5 MPa to 20 MPa. In addition, since it is a high-pressure water stream, there is a problem in that it requires a post-treatment such as waste water in addition to a large consumption of water and an increase in running cost.

In place of the high-pressure water washing described above, it has also been proposed to inject a mixture of washing particles and fluid with a compressed gas or to inject the washing particles under pressure with a liquid (see, for example, Patent Document 2). This injection device includes a suction port for sucking a mixed liquid composed of cleaning particles and water, an injection port for ejecting compressed air, a gun body for stirring while sucking the mixed liquid from the suction port by compressed air from the injection port, and a gun The nozzle part etc. which inject the injection water which consists of washing | cleaning particle | grains, water, and air from a body are provided, and injection water is injected with the low discharge pressure of about 0.2 MPa-0.8 MPa. Since the cleaning particles are finer than the recesses, the cleaning particles can surely reach the recesses and remove the dirt attached to the recesses.
JP 7-002064 A JP 2006-061791 A

  However, in the thing of patent document 2, in order to inject spray water with a low discharge pressure, it is necessary to wash | clean to the washing | cleaning surface, and when a washing | cleaning surface has a projection part and a dent part, an appropriate injection distance Is difficult to set, and cleaning may be insufficient. In addition to the time and effort required to mix the cleaning particles, clogging due to the cleaning particles may occur, resulting in inconvenience such as taking time for maintenance. Furthermore, in the thing of patent document 2, since cleaning particle | grains, water, and air are made to merge in a gun body, there also exists a problem that a pressure loss becomes large and the delivery effect by air etc. cannot fully be acquired. .

  In view of the above problems, the present invention provides a cleaning method and apparatus, and a cleaning nozzle that can ensure a sufficient distance between the surface to be cleaned and the nozzle, and that enables efficient cleaning while suppressing the consumption of the cleaning liquid. The purpose is to do.

  In order to achieve the above object, the present invention provides a cleaning method in which a liquid is jetted onto a surface to be cleaned, and a gas is jetted toward the surface to be cleaned to form a gas jet. The liquid is ejected to form a liquid jet, and at the intersection with the gas jet, the liquid in the liquid jet is crushed into fine liquid particles by the gas jet, and the fine liquid particles are accelerated by the gas jet to accelerate the liquid. It is made to collide with a cleaning surface.

  In the present invention, the crossing angle of the liquid jet with respect to the gas jet is set to 1 degree to 20 degrees, the discharge pressure Pa of the liquid jet is 0.01 MPa to 1 MPa, and the discharge amount Qa is 1 L / min to 100 L / min. Hereinafter, the discharge pressure Pb of the gas jet is 0.5 MPa to 10 MPa, the discharge amount Qb is 100 L / min to 10000 L / min, and Pa <Pb and Qa <Qb.

  The present invention is characterized in that a plurality of the liquid jets are formed and intersected, and the gas jet is ejected toward the intersecting portion of the liquid jets. Further, the liquid jet ports are arranged at a constant pitch on a concentric circle with the gas jet port as a center.

  The present invention relates to a cleaning apparatus for jetting and cleaning a liquid on a surface to be cleaned, a gas jet for forming a gas jet by jetting a gas toward the surface to be cleaned, and a liquid jet toward the gas jet A liquid jet forming a liquid jet, and supplying the gas to the gas jet and supplying the liquid to the liquid jet, and the liquid is generated by the gas jet at the intersection of the gas jet and the liquid jet. A fluid supply unit that pulverizes the jet liquid into fine liquid particles and accelerates the fine liquid particles by a gas jet to collide with the surface to be cleaned.

  In the present invention, the liquid jet outlet is provided to be inclined so that the crossing angle of the liquid jet with respect to the gas jet is 1 degree or more and 20 degrees or less, and the liquid supply unit supplies the liquid with a pressure Pa of 0. .01 MPa to 1 MPa and a discharge rate Qa of 1 L / min to 100 L / min and supply the gas at a pressure Pb of 0.5 MPa to 10 MPa and a discharge rate Qb of 100 L / min to 10000 L / min And Pa <Pb and Qa <Qb.

  The present invention provides a nozzle body, a gas outlet provided on the nozzle face of the nozzle body, and a plurality of nozzles formed at a constant pitch on a concentric circle provided on the nozzle face and centering on the gas outlet. Provided in the nozzle body, and a liquid jet formed so that the liquid jet intersects at the same position at an intersecting angle of 1 to 20 degrees with respect to the gas jet exited from the gas jet And a gas supply passage for supplying gas to the gas jetting port, and a liquid supply passage provided in the nozzle body for supplying liquid to the liquid jetting port.

  According to the present invention, the gas jet and the liquid jet are crossed, and the liquid jet liquid is pulverized into fine liquid particles by the gas jet at the intersection, and the fine liquid particles are accelerated by the gas jet to be cleaned. Since they are caused to collide, fine liquid particles enter the concave portion of the surface to be cleaned having fine irregularities, and the dirt attached to the concave portion is impacted and can be reliably dropped. Moreover, since the gas jet collides with the surface to be cleaned and vibrates the plate-shaped surface to be cleaned instead of impact energy, fine dirt in micron units that have entered the recess can be lifted from the inside. Can be blown away. In addition, since the liquid jet is pulverized as fine liquid particles by the gas jet and collides with the surface to be cleaned by the gas jet, the amount of liquid to be used can be reduced compared with the conventional high-pressure water cleaning method, and the running cost is excellent. In addition, water does not enter the interior through the gaps on the surface as in the high pressure water flow cleaning method. In this way, the effect of splitting into fine liquid particles by colliding the gas jet with the liquid jet, the acceleration effect of the fine liquid particles by the gas jet, and the surface of the surface to be cleaned by the impact energy due to the collision of the gas jet with the surface to be cleaned By virtue of the vibration effect and the blow-off effect by the gas jet, it is possible to remove from the minute dirt adhered to the minute recess to the large dust in a non-contact manner.

  In particular, the crossing angle of the liquid jet with respect to the gas jet is set to 1 to 20 degrees, the discharge pressure Pa of the liquid jet is 0.01 MPa to 1 MPa, the discharge amount Qa is 1 L / min to 100 L / min, and the gas jet is discharged. When the pressure Pb is 0.5 MPa or more and 10 MPa or less and the discharge amount Qb is 100 L / min or more and 10000 L / min or less, and Pa <Pb and Qa <Qb, the formation and acceleration of fine liquid particles, and the application to the surface to be cleaned Application of impact and blowing off of adhered dirt and the like are performed efficiently.

  In addition, by forming a plurality of liquid jets and intersecting at the same position, by jetting the gas jet toward the intersection of the liquid jet, the liquid is aggregated at the intersection and then crushed and divided by the gas jet, The liquid can be crushed and divided efficiently. Furthermore, the liquid jets are arranged at a constant pitch on a concentric circle with the gas jets as the center, so that the liquid jets can be more efficiently concentrated and pulverized.

  Hereinafter, embodiments of the present invention will be described in detail. However, the present invention is not limited to the embodiments listed here. As shown in FIG. 1, the cleaning nozzle 10 is configured by fixing a nozzle tip 12 to one end of a cylindrical nozzle body 11 and a cap 13 to the other end, and disposing a gas communication pipe 14 therein.

  As shown in FIG. 2, the nozzle tip 12 is formed in a disk shape, and a gas outlet 15 is opened at the center. In addition, three liquid jets 16 are opened at a 120-degree pitch on a concentric circle with the gas jets 15 as the center. As shown in FIG. 1, the liquid jet port 16 is formed to be inclined inward with respect to the center line CL <b> 1 of the gas jet port 15 so that the tilt angle θ is 7 °. Thereby, as shown in FIG. 3, the liquid jet 65 ejected from the liquid jet 16 intersects at the same position P <b> 1 on the center line CL <b> 1 of the gas jet 66.

  As shown in FIG. 1, a pipe mounting hole 30 is formed concentrically with the gas outlet 15 on the back surface of the nozzle tip 12, and the gas communication pipe 14 is fixed to the pipe mounting hole 30. The other end 14 a of the gas communication pipe 14 protrudes from the through hole 13 a of the cap 13 to the outside. A nipple 31 is attached around the through hole 13 a on the outer surface of the cap 13.

  As shown in FIG. 3, a high-pressure air tube 33 is connected via a connector 32 after a spherical packing or the like (not shown) is placed at the end of the gas communication pipe 14. The high-pressure air tube 33 is connected to the air compressor 35 via the header pipe 34, and the compressed air 36 is supplied to the gas outlet 15. Further, since the through-hole 13a is blocked by a spherical packing, an O-ring or the like, the cleaning liquid 46 in the nozzle body 11 does not leak.

  A nipple 40 is welded to the peripheral surface of the nozzle body 11 near the cap 13. A cleaning water supply hose 42 is connected to the nipple 40 via a connector 41. The cleaning water supply hose 42 is connected to the pump 44 via the header pipe 43. The pump 44 is connected to the tank 45, and sends the cleaning liquid 46 in the tank 45 to the cleaning nozzle 10. In this embodiment, water is used as the cleaning liquid 46.

  As shown in FIG. 4, the cleaning nozzle 10 is attached to a nozzle attachment plate 49. A nozzle header 50 is configured by the cleaning nozzle 10 and the nozzle mounting plate 49. A necessary number of cleaning nozzles 10 are attached to the nozzle header 50 in one or more rows so as to cover the area to be cleaned.

  As shown in FIG. 5, in this embodiment, the cleaning nozzle 10 is used for cleaning the railway vehicle 60. For this reason, the two nozzle headers 50 are attached to the attachment frame 51 side by side in the vertical direction. The mounting frame 51 is disposed along the rail 61 of the railway vehicle 60. Therefore, the entire side surface of the railway vehicle 60 can be washed by ejecting the liquid jet 65 and the gas jet 66 from the cleaning nozzle 10 and causing the railway vehicle 60 to travel at a low speed.

  As shown in FIG. 3, during cleaning, compressed air 36 is ejected from the gas ejection port 15 to form a gas jet 66. Further, the cleaning liquid 46 is ejected from the three liquid ejection ports 16 to form a liquid jet 65. Since the liquid jet port 16 is formed at an angle θ intersecting the center line CL1 of the gas jet port 15, these three liquid jets 65 intersect at the same position P1 on the center line CL1 of the gas jet port 15. To do. Since the gas jet 66 collides with the liquid jet 65 at the intersection 70, the cleaning liquid 46 is pulverized and divided by the gas jet 66 into substantially spherical micron-order liquid droplets 71 (see FIG. 6). The fine liquid particles 71 are accelerated by receiving the straight traveling energy by the gas jet 66 and collide with the surface 75 to be cleaned. In particular, since the gas jet 66 is applied to the liquid jet 65 in an open atmospheric pressure state, the expansion energy when the gas jet 66 is released into the atmosphere can be used, and the liquid jet 65 is efficiently divided into fine liquid particles 71. Can be crushed and divided.

  As shown in FIG. 6, the dirt 76 and dust 77 adhering to the surface 75 to be cleaned can be removed by peeling or scraping off due to the impact of the collision of the fine liquid particles 71 on the surface 75 to be cleaned. In particular, when the surface 75 to be cleaned is a matte finish stainless steel plate, the distance La between the top and bottom of the fine irregularities on the surface is about 20 μm. Micron-order fine liquid particles 71 enter into such fine recesses 75a, so that tar-like dirt 76 adhering to the recesses 75a and dust 77 such as fine metal pieces that have entered the recesses 75a are also reliably detected. Removed.

  The gas jet 66 also collides with the surface 75 to be cleaned, and vibration is generated on the surface 75 to be cleaned by the shock wave energy resulting from the collision, and the micron-sized dirt 76 and dust 77 are knocked down. Also, the dirt 76 and dust 77 that have been knocked off are blown off by the gas jet 66.

  Thus, the crushing / splitting effect on the fine liquid particles 71 caused by the collision of the gas jet 66 with the liquid jet 65, the acceleration effect of the fine liquid particles 71 by the gas jet 66, and the gas jet 66 collide with the surface 75 to be cleaned. The vibration effect of the surface 75 to be cleaned due to the shock wave and the blowing effect of the gas jet 66 act as a synergistic effect, and the non-micron dirt 76, dust 77, large dust, etc. adhered to the fine recess 75a. It can be cleaned reliably by contact type. Moreover, compared to the conventional high-pressure water flow type jet cleaning, the amount of cleaning water used can be reduced, and there is no inconvenience that the high-pressure water flow enters from the gap of the surface 75 to be cleaned. Further, since a contact method such as a brush method is not used, a linear trace due to the brush does not remain.

  The pressure Pa of the liquid supplied to the cleaning nozzle 10 to eject the liquid jet 65 is 0.01 MPa to 1 MPa, the discharge amount Qa is 1 L / min to 100 L / min, and the gas jet 66 is ejected. When the pressure Pb of the gas supplied to the cleaning nozzle 10 is 0.5 MPa or more and 10 MPa or less, the discharge amount Qb is 100 L / min or more and 10000 L / min or less, and Pa <Pb, Qa <Qb, formation of fine liquid particles , Spraying, application of shock wave by gas jet, and blowing effect are obtained. Preferably, Pa is 0.1 MPa to 0.3 MPa, Qa is 3 L / min to 10 L / min, Pb is 0.5 MPa to 1.5 MPa, and Qb is 500 L / min to 3000 L / min. Preferably, Pa is 0.1 MPa to 0.3 MPa, Qa is 5 L / min to 8 L / min, Pb is 0.6 MPa to 0.9 MPa, and Qb is 900 L / min to 1400 L / min. At this time, the diameter of the gas jet 15 is 3.8 mm, and the diameter of the liquid jet 16 is 1.8 mm. The distance Lb between the nozzle tip 12a and the surface 75 to be cleaned is 75 mm.

  When the discharge pressure Pa of the liquid jet 65 is less than 0.01 MPa, the collision energy becomes weak due to insufficient liquid jet, and when Pa exceeds 1 MPa, the gas jet 65 does not act effectively due to excessive liquid jet, and the collision occurs. Energy is weakened. Further, when the discharge pressure Pb of the gas jet 66 is less than 0.5 MPa, the collision energy becomes weak. The higher the Pb, the greater the collision energy and the cleaning effect. However, if the Pb exceeds 10 MPa, the surface to be cleaned is destroyed. Similarly, when the discharge amount Qa of the liquid jet 65 is less than 1 L / min, the collision energy is weak, and when it exceeds 100 L / min, the gas jet does not act effectively due to excessive liquid jet, and the collision energy becomes weak. Further, when the discharge amount Qb of the gas jet 66 is less than 300 L / min, the collision energy acting on the liquid becomes weak, and when it exceeds 10000 L / min, the surface to be cleaned is destroyed.

  In addition, when the crossing angle θ of the liquid jet 65 with respect to the gas jet 66 is 1 degree or more and 20 degrees or less, the formation and spraying of fine liquid particles, the application of a shock wave by the gas jet, and the blowing off effect are obtained. The crossing angle θ is preferably 3 degrees or more and 15 degrees or less, and more preferably 5 degrees or more and 8 degrees or less. When the intersection angle θ is less than 1 degree or minus, the position where the liquid jet and the gas jet intersect is too far from the nozzle, and no collision energy is generated. If the intersecting angle θ exceeds 20 degrees, the intersecting position is close to the nozzle, and an appropriate cleaning distance cannot be ensured.

  In the above embodiment, water is jetted as the liquid jet 65, but a chemical solution (for example, water containing 2-3% phosphoric acid) or the like may be jetted in addition to water. Further, micron-sized fine particles may be dispersed in the liquid.

  In the said embodiment, although it was set as the one washing nozzle 10 which has the gas jet nozzle 15 and the liquid jet nozzle 16, it replaces with this and provides a liquid jet nozzle and a gas jet nozzle separately, and it is the same The gas jet may be crossed with the liquid jet to form fine liquid particles, which may collide with the surface to be cleaned by the gas jet.

  One or more liquid jets 16 may be provided for one gas jet 15. However, in order to effectively perform the pulverization of the liquid by the gas jet 66 at the intersection, the number is preferably plural, and particularly preferably three or more. Further, when three or more liquid jets 16 are provided, it is preferable that these liquid jets 65 are gathered to intersect at an acute angle and the gas jet 66 collides with the intersection 70. In this case, the gas jet 66 can collide with the inner surface of the intersecting portion 70 which is surrounded by three or more liquid jets 65 and has a substantially conical shape. can get.

  In the above-described embodiment, the present invention is implemented as the apparatus for cleaning the outer plate of the railway vehicle 60. However, the object to be cleaned is not limited to the railway vehicle 60, and may be other transportation equipment such as an automobile, an aircraft, and a ship. The present invention is not limited to transportation equipment, and the present invention can be carried out on all surfaces having minute irregularities that require cleaning. Further, the surface to be cleaned 75 is not limited to a flat surface and may be a curved surface. In this case, the nozzle header to which the cleaning nozzle 10 is attached is shaped to match the curved surface so that the distance Lb between the nozzle tip and the surface to be cleaned is the same. Further, in the surface cleaning, in addition to moving the surface to be cleaned, the cleaning nozzle 10 side may be moved, or both of them may be moved.

  1 and 2 are used as the cleaning nozzle 10, the outer diameter of the nozzle body 11 is 34 mm, the length is 195 mm, the diameter of the gas outlet 15 is 3.8 mm, and the diameter of the liquid outlet 16 is 1. 8 mm, the inclination angle θ of the holes constituting the liquid jet 16 was 7 °, and the diameter D1 of the concentric circles of the liquid jets 16 was 18.4 mm. The gas used was 1 MPa compressed air, the ejection amount per nozzle was 1200 L (liter) / min, the liquid was 0.5 MPa water, and the ejection amount per nozzle was 6 L / min. Due to the pressure loss at the gas jet port 15 of compressed air, the gas was actually discharged to the atmosphere at 0.8 MPa to form a gas jet 66. The distance Lb from the nozzle tip to the surface to be cleaned was 75 mm. This cleaning nozzle 10 was attached to the nozzle header 50 shown in FIG. 5, and the side surface of the stainless steel vehicle was used as the surface to be cleaned.

  The cleaning effect was evaluated by photographing the surface to be cleaned with a VH-6300 microscope manufactured by Keyence Corporation at a magnification of 75 times, comparing photographic images before and after cleaning, and evaluating dirt and dust visually. did. As the surface to be cleaned, a vehicle painted surface (A surface) of a railway vehicle, a vehicle stainless steel surface ((matte finish surface) B surface), and a window glass surface (C surface) were arbitrarily selected and photographed. Each surface before cleaning is in a state in which dirt is distributed over the entire valley of the surface where the A surface is gentle, and the dirt that has entered the groove (hairline) of the matte finish is widely distributed on the B surface. It was in the state where the dirt was scattered also in the top part in between, and the C surface was in the state where oily and fat-like dirt was scattered. After cleaning according to the present example, the A side was in a state where no stain was seen and was at an OK level. In addition, on the B surface, no stain was seen on the top, and the stain inside the hairline was thin but left a trace in the innermost part, but the cleaning was at an OK level. On the C side, large dirt such as fats and oils has been removed, but since the water was not drained after washing, a spot where the alkali contained in the washing water was crystallized in white remained, but the cleaning was OK level. there were.

It is a side view which notches and shows a part of washing nozzle of this invention. It is a front view of a washing nozzle. It is a schematic side view which shows typically the use condition of a washing | cleaning apparatus. It is a perspective view which shows an example of a nozzle header. It is a schematic front view which shows the washing | cleaning apparatus of a railway vehicle. It is general | schematic sectional drawing which expands and shows a to-be-cleaned surface.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Washing nozzle 11 Nozzle body 12 Nozzle tip 13 Cap 14 Gas communication pipe 15 Gas ejection hole 16 Liquid ejection hole 35 Air compressor 36 Compressed air 44 Pump 45 Tank 46 Cleaning liquid 50 Nozzle header 60 Railway vehicle 65 Liquid jet 66 Gas jet 70 Crossing part 71 Fine liquid particle 75 Surface to be cleaned 75a Concave portion 76 Dirt 77 Dust

Claims (9)

In the cleaning method of jetting and cleaning liquid on the surface to be cleaned,
A gas jet is formed by jetting gas toward the surface to be cleaned,
A liquid is ejected toward the gas jet to form a liquid jet, and at the intersection with the gas jet, the liquid of the liquid jet is pulverized into fine liquid particles by the gas jet, and the fine liquid particles are discharged by the gas jet. A cleaning method comprising accelerating and colliding with the surface to be cleaned.   An intersection angle of the liquid jet with respect to the gas jet is set to 1 degree to 20 degrees, a discharge pressure Pa of the liquid jet is 0.01 MPa to 1 MPa, a discharge amount Qa is 1 L / min to 100 L / min, The cleaning method according to claim 1, wherein the discharge pressure Pb is 0.5 MPa or more and 10 MPa or less, the discharge amount Qb is 100 L / min or more and 10000 L / min or less, and Pa <Pb and Qa <Qb.   The cleaning method according to claim 1, wherein a plurality of the liquid jets are formed and intersected at the same position, and the gas jets are ejected toward an intersection of the liquid jets.   4. The cleaning method according to claim 3, wherein the liquid jet outlets are arranged at a constant pitch on a concentric circle with the gas jet outlet as a center. In a cleaning device that jets liquid onto the surface to be cleaned and cleans it,
A gas ejection port for ejecting gas toward the surface to be cleaned to form a gas jet;
A liquid jet for ejecting liquid toward the gas jet to form a liquid jet; and
Supplying the gas to the gas jet and supplying the liquid to the liquid jet, pulverizing the liquid jet liquid into fine liquid particles by a gas jet at the intersection of the gas jet and the liquid jet, A cleaning apparatus comprising: a fluid supply unit that accelerates fine liquid particles by a gas jet to collide with the surface to be cleaned.   The liquid jet outlet is provided to be inclined so that the crossing angle of the liquid jet with respect to the gas jet is not less than 1 degree and not more than 20 degrees, and the liquid supply unit supplies the liquid with a pressure Pa of 0.01 MPa to 1 MPa. The discharge amount Qa is supplied at 1 L / min to 100 L / min, and the gas is supplied at a pressure Pb of 0.5 MPa to 10 MPa and a discharge amount Qb of 100 L / min to 10000 L / min, Pa <Pb, The cleaning apparatus according to claim 5, wherein Qa <Qb.   The cleaning apparatus according to claim 5 or 6, wherein a plurality of the liquid jets are provided, the plurality of liquid jets are crossed at the same position, and the gas jet is jetted toward an intersection of the liquid jets.   The cleaning apparatus according to claim 7, wherein the liquid jet outlets are arranged at a constant pitch on a concentric circle around the gas jet outlet. A nozzle body;
A gas ejection port provided on the nozzle surface of the nozzle body and ejecting gas;
A plurality of concentric circles that are provided on the nozzle face and are formed at a constant pitch on the concentric circle centered on the gas outlet, and at the same position at an intersecting angle of 1 degree or more and 20 degrees or less with respect to the gas jet flowing out of the gas outlet. A liquid jet formed so that the liquid jets intersect;
A gas supply passage that is provided in the nozzle body and supplies gas to the gas outlet;
A cleaning nozzle comprising a liquid supply passage provided in the nozzle body and configured to supply a liquid to the liquid ejection port.

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