JPH08197025A - Washing spray nozzle and washing method - Google Patents

Abstract

PURPOSE: To improve the removing efficiency of fine particles on the surface of a material to be washed by adding gas pressure to hydraulic pressure to jet a mixture of gas and liquid from a nozzle. CONSTITUTION: Inside a nozzle outer cylinder 1, a fluid nozzle inner cylinder 6 for introducing liquid 2 is installed. Gas 7 is introduced into the nozzle outer cylinder 1 from the outside to mix it with the liquid 2. From a tip part 4 of a nozzle arranged on a cover 3, a mixture of the gas 7 and the liquid 2 is jetted onto the surface of a material to be washed 5 to wash fine particle soil 8 off. By thus adding the gas 7 to the liquid 2 and jetting the mixture onto the material to be washed 5, washing is efficiently performed without using a large-sized liquid pump and without increasing the used quantity of the liquid 2. When an inner mixing chip is fixed at right angles to the flow inside the nozzle outer cylinder 1, the gas 7 is added to the liquid 7 with high energy efficiency to mix them.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning spray nozzle and a cleaning method.

[0002]

2. Description of the Related Art In a conventional spray nozzle for cleaning of this kind, as shown in FIG.
Only the liquid passes through, and the cleaning liquid 2 is ejected from the nozzle tip portion 4 provided at the tip of the cover 3 as shown in FIG. 6, for example, to remove fine particles on the surface of the object to be cleaned 5. Therefore, the ability to remove fine particles from the surface of the object to be cleaned 5 (liquid crystal glass substrate, semiconductor wafer substrate, etc.) depends on the force of the liquid ejected from the cleaning spray nozzle to collide with the particles on the surface of the object to be cleaned. It was In other words, it depended on the pressure of the ejected liquid.

In FIG. 8, 1 μm, 3 μm, and 5 μm polylatex standard particles are forcibly adhered to a glass substrate for liquid crystal of 300 × 400 × 1.1 t, and after washing with a conventional washing spray nozzle, before and after washing. The cleaning effect (removing effect) for each particle size is measured by a particle measuring device for the substrate surface using a laser. As shown in FIG. 8, in the conventional spray nozzle for cleaning, the removal rate (%) and the like increased with respect to each particle diameter (1 μm, 3 μm, 5 μm) as the jetting pressure was increased.

[0004]

However, this has a drawback in that the pump for supplying the liquid to the cleaning spray nozzle becomes large in size and the liquid used becomes large, resulting in too high cost.

Therefore, the present invention is to provide a cleaning spray nozzle and method for superimposing the gas ejection pressure on the liquid ejection pressure to efficiently remove fine particles on the surface of the object to be cleaned.

[0006]

SUMMARY OF THE INVENTION In order to solve the above problems, the present invention mounts a nozzle outer cylinder on a cover having a nozzle tip, introduces gas or liquid into the nozzle outer cylinder, and introduces liquid or gas. And a spray nozzle for cleaning provided with a fluid nozzle cylinder.

Further, between the lower end of the fluid nozzle inner cylinder and the lower end inner circumference of the nozzle outer cylinder, a liquid hole and a plurality of gas holes whose flow is converted toward the central portion are provided, and the nozzle outer cylinder of the nozzle outer cylinder is provided. A spray nozzle for cleaning in which a gas-liquid mixing cylinder is provided at the lower end, and a cover having a nozzle tip is fixed to the lower end.

Further, a cleaning method for cleaning by injecting intermittently one or a mixture of liquid and gas is constituted.

[0009]

The present invention is configured as described above, and superimposes gas pressure on liquid pressure to perform efficient cleaning. Further, in order to efficiently superimpose the gas pressure on the liquid pressure, the internal tip superimposes the gas pressure on the liquid pressure, and the mixing cylinder portion for sufficiently superimposing the gas pressure is provided to perform efficient cleaning. Further, in the cleaning method, the cleaning is efficiently performed by intermittently ejecting the mixture.

[0010]

Embodiment An embodiment of the present invention will be described in detail with reference to FIG. The nozzle outer cylinder 1 is formed in the same manner as the conventional one, and a fluid nozzle inner cylinder 6 for introducing a liquid is provided inside the nozzle outer cylinder 1.
A gas 7 is introduced from the outside into the inside to mix the liquid 2 and the gas 7, and a mixture of the gas 7 and the liquid 2 is sprayed onto the surface of the object to be cleaned 5 from the tip 4 of a nozzle provided in the cover 3. Then, the fine particle dirt 8 is washed.

This embodiment is constructed as described above,
The liquid 2 is passed through the fluid nozzle inner cylinder 6, and mixed with the gas 7 that has passed through the nozzle outer cylinder 1 at the nozzle tip portion 4,
By superimposing the gas ejection pressure on the liquid ejection pressure and ejecting the gas onto the object to be cleaned 5, a large liquid pump is not used,
Further, the fine particles on the surface of the object to be cleaned are efficiently removed without increasing the amount of liquid used.

Next, a second embodiment will be described with reference to FIGS. In this embodiment, the liquid 2 that has flowed in from the fluid nozzle inner cylinder 6 of FIG. 1 and the gas from the nozzle outer cylinder 1 are introduced, and the energy of the gas 7 is efficiently superimposed on the liquid 2. Further, the internal mixing tip 9 is fixed in the nozzle outer cylinder 1 in a direction perpendicular to the flow, and a liquid hole 10 through which the liquid 2 flows is provided in the center of the internal mixing tip, and a large number of gas holes 11 are provided around the liquid hole 10. The flow direction of 7 is changed to the flow direction of the liquid 2 in the central portion, and the particulate dirt 8 on the surface of the cleaning target 5 is removed.

In the above embodiment, in order to efficiently superimpose the gas ejection pressure on the liquid ejection pressure, the flow direction of the fluid is changed to the flow direction of the liquid flowing through the center, and the gas and the liquid are easily mixed.

Next, a third embodiment shown in FIG. 4 will be described. In order to sufficiently mix the liquid 2 and the gas 7 which have passed through the internal mixing tip 9, between the lower end of the nozzle outer cylinder 1 and the cover 3. The mixing cylinder 12 is provided, and the mixture in which the liquid 2 and the gas 7 are sufficiently mixed is jetted onto the surface of the cleaning target 5.

In the above-mentioned embodiment, the mixing cylinder can efficiently remove the dirt of the fine particles on the surface of the object to be cleaned.

In each of the above embodiments, liquid and gas may be used in reverse.

Next, a cleaning method will be described using the above apparatus, in which a mixture of liquid and gas is intermittently jetted to perform cleaning. Alternatively, cleaning is performed by intermittently jetting either liquid or gas.

[0018]

The present invention has the above-described structure and action, and as shown in FIGS. 1, 2 to 4, it is not necessary to increase the ejection pressure of the liquid by superimposing the gas on the ejection pressure of the liquid. With the low ejection pressure of the liquid, it is possible to obtain the same removal effect as the conventional high ejection pressure.

Therefore, the cleaning effect can be efficiently obtained without using a large liquid pump.

Further, cleaning can be carried out more efficiently than in the case where the mixture or one of the gases or liquids is intermittently injected to inject the mixture constantly.

[0021]

[Brief description of drawings]

FIG. 1 is a sectional view of a first embodiment of the present invention.

FIG. 2 is a sectional view of a second embodiment.

FIG. 3 is a plan view of only a main part (internal chip) of FIG.

FIG. 4 is a sectional view of a third embodiment.

FIG. 5 is an explanatory diagram showing the ratio of the removal effect between the conventional means and the present invention means.

FIG. 6 is a sectional view of a conventional device.

FIG. 7 is an explanatory diagram showing the removal effect of the conventional device.

[Explanation of symbols]

 1 Nozzle Outer Cylinder 2 Liquid 3 Cover 4 Nozzle Tip 5 Object to be Washed 6 Fluid Nozzle Inner Cylinder 7 Gas 8 Fine Particle Stain 9 Internal Mixing Tip 10 Liquid Hole 11 Gas Hole 12 Mixing Cylinder

Claims (4)

[Claims] 1. A nozzle outer cylinder is attached to a cover having a nozzle tip, and gas or liquid is introduced into the nozzle outer cylinder,
A spray nozzle for cleaning, comprising a fluid nozzle tube for introducing a liquid or a gas. 2. A liquid hole and a plurality of gas holes for converting a flow toward a central portion are provided between the lower end of the fluid nozzle inner cylinder and the lower end inner circumference of the nozzle outer cylinder. The cleaning spray nozzle according to claim 1. 3. A gas-liquid mixing cylinder is provided at the lower end of the nozzle outer cylinder,
The cleaning spray nozzle according to any one of claims 1, 2 and 3, wherein a cover is attached to the lower end of the spray nozzle. 4. A cleaning method, characterized in that cleaning is performed by intermittently injecting a mixture of liquid and gas or one of them.