JP3530270B2 - Precision cleaning equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] BACKGROUND OF THE INVENTION 1. Field of the Invention
The substrate for liquid crystal and wafer for semiconductor are
Precision cleaning equipment for cleaning plate-like objects to be cleaned
Things. [0002] 2. Description of the Related Art Conventional precision cleaning apparatus of this kindToIs a brush etc.
That use the physical force of liquid, or mix liquid and gas
Shower nozzleSuch as using
You. [0003]Using a brush etc.High detergency for contact type
However, the object to be cleaned may be scratched or touched with a brush etc.
When doing so, make the brush stains adhere to the
MaThere was a drawback. [0004]on the other hand, Liquid-only shower nozzle or liquid
Using a shower nozzle that injects gas and gas simultaneously
Is,It does not damage the object to be cleaned,
PowerWeaklyRemoving strongly adherent particles
Iscould not. For example, the liquid and gas shown in FIG.
In the shower nozzle 1, gas is introduced to one side of the main body 2.
An inlet 3 is provided, and a liquid inlet 4 is opened on the opposite side.
A gas introduction passage 6 and a liquid introduction passage 7 are provided in a guide member 5 provided in
At the tipSmall capacityGas and liquid in the mixing chamber 8
Are mixed through the slit-shaped opening 9 to be cleaned (not shown).
Abbreviation)TowardsI was spraying.Meanwhile, the shower shown in FIG.
In the nozzle, the upper part of the long outer cylinder 10
A short inner cylinder 11 is arranged coaxially, and on the upper peripheral wall of the outer cylinder 10
Gas inlet 3 and liquid inlet 4 at the upper end of inner cylinder 11
Open each, mix gas and liquid in outer cylinder 10
Then, injection is performed from the lower end opening of the outer cylinder 10. [0006] [Problems to be solved by the invention]But,In FIG.Also show
ThoughIn this case, the mixing chamber is small enough to
Can not be mixed, as shown in FIG.To showIn addition,
Since the lower end opening of the outer periphery 10 is straight,
Inside the perimeter 10About sealedhandMixing under pressure
There is no joint and the liquid is ejected without acceleration.
IWashingPowerWas inadequate. Therefore, in the present invention
Mixes liquid and gas wellDone,And the gas-liquid mixture
sufficientToaccelerationLarge cleaning powerAttempt to provide equipment
Things. [0007] [Means for Solving the Problems] In a cleaning roomInstalledSuffered
Roller for transporting the cleaning objectWhenAbove and below the rollerInstalled
Cleaning shower nozzleConsisting ofA shower for this
NozzleThatBodyInsideIntroduce liquid and gas separately into a book
Provided on the extension of the body1 for the width . 5 to 20 times
It has a length in the vertical direction, the opening at the tip is narrowed and the slit is
Shaped mixing roomGas-liquid mixing with the tipslit
LikePrecision cleaning so that gas-liquid mixture is ejected from the opening
Configure the deviceThis has solved the above problem. [0008] The present invention is constructed as described above, and is used for
With gasIn the mixing chamber provided on the extension of the main body
Mix,Pressurized in this mixing chamber,Gas-liquid mixture
handSlit-shapedAccelerated injection from opening to wash object
Remove attached particles. [0009] DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail with reference to FIGS.
explain. Carry-in port 13 and carry-out port 14 provided in cleaning room 12
And a large number of transport rollers 15, 15,.ButEstablishmentLa
AndConveys the article to be cleaned 1Like. Then, the upper portion between the two transport rollers 15, 15
Bottom shower nozzle 17, 17ButInstallationIs, Wash
A gas-liquid mixture in which a liquid and a gas are mixed from above and below the purified material 16
Inject 18, 18,Particles on the object 16 to be cleaned
Float, Change the position up and down on the exit 14 sideEstablishment
WasShower curtain 19,19soLiquid in curtain form
Is sprayed to perform cleaning. The shower nozzles 17 for cleaning are shown in FIG.
As shown in 2,Block shapedGas conduction to one side of main body 2
Entrance 3But, Liquid inlet 4 on the other sideButEstablishmentHave beenYou. So
And provided on the body 2BeGuide member 5IsLiquid introduction path 7
Is a figure2At the center in the vertical directionIf you are
ToGas introduction path 6IsMultiple around liquid introduction channel 7
(For example, 6)Have beenYou.And this guide
At the lower end of the material 5, the gas introduction path 6 and the liquid introduction path 7
A mixing chamber 20 is provided for communication. This mixing chamber
20 has a vertical length of 20 to 200 mm and its width
The vertical length is 1 . 5 to 20 times
The width of the end opening is narrowed and formed in a slit shape.
Immediately above is the mixing section 8 '. This embodiment is configured as described above.
The liquid coming out of the liquid introduction path 7 and the gas introduction paths 6, 6, ...
The gas that came outMixing room20InsideMixing on the way through
SaAt the same time, the width of the tip opening is narrowed and
By this, this is in a sealed state to some extent
Pressurization in the mixing chamber 20Into a gas-liquid mixture 18
Spray from opening 9IsThe object 16 to be cleaned is washed. In addition,Mixing room 20ofLongitudinal directionLength isIts widthof
1.5 to 20 times is good. 1 μm or smaller particles
LeofAs a result of experimenting the removal rate,WidthWater flow when 1.5 times or less
Acceleration is insufficient and the removal rate is 75%, more than 20 times
Pressure loss is greater than accelerationIt has becomeRemoval rate
About 75%Both are not at a satisfactory level,
In the case of 1.5 to 20 times, the removal rate is 90.1%Become
AlmostSatisfactory results can be obtained. Thus, the cleaning shower nozzles 17, 1
7 and floating on the object 16 to be cleaned.
The articles are sprayed from the shower curtains 19, 19
Curtain-like liquid completely dropsBe. [0015] The present invention has the above-described configuration and operation.
BecauseThe gas-liquid mixture is sufficiently mixed by the mixing chamber.
As well as being sufficiently accelerated by the pressure in the mixing chamber.To be cleaned
Injected into thingsBecause, ConventionalofEquivalent to contact cleaning method
Has detergencyWhileScratching the surface of glass, glass etc.
NotHigh qualityWashing can be performed. [0017]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front view showing an arrangement of a precision cleaning device according to the present invention. FIG. 2 is a vertical sectional view of a shower nozzle for cleaning. FIG. 3 is a cross-sectional view illustrating an example of a conventional device. FIG. 4 is a sectional view showing another example of the conventional device. [Description of Signs] 1 Shower nozzle 1 'Shower nozzle 2 Main body 3 Gas inlet 4 Liquid inlet 5 Guide member 6 Gas inlet 7 Liquid inlet 8 Mixing chamber 8' Mixing unit 9 Opening 10 Outer cylinder 11 Inside Cylinder 12 Cleaning chamber 13 Carry-in port 14 Carry-out port 15 Transport roller 16 Cleaning object 17 Cleaning shower nozzle 18 Gas-liquid mixture 19 Shower curtain 20 Mixing chamber

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B08B 3/02 B05B 7/04

Claims (1)

(57) and rollers for conveying the object to be cleaned to Patent Claims 1] placed in the cleaning chamber consists of a washing shower nozzle disposed above and below the rollers, the cleaning shower nozzle the liquid and gas separately introduced into the book <br/> body, provided on an extension of the body, have a 1.5 to 20 times the longitudinal length of the width
The opening at the tip is narrowed and slit-shaped
Mixing chamber and mixed gas-liquid, the precision cleaning apparatus characterized by being adapted to eject a gas-liquid mixture from the slit-shaped opening at the tip.