CN102494639A - Laser divergence angle measuring device and measuring method based on full-automatic hole alignment method - Google Patents
Laser divergence angle measuring device and measuring method based on full-automatic hole alignment method Download PDFInfo
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Abstract
The invention provides a laser divergence angle measuring device based on the full-automatic hole alignment method, which comprises a computing control unit, a stepping motor controller and a laser. A long-focus length, a hole diaphragm array, a reflector and a CCD (charge coupled device) are sequentially arranged in the horizontal advancing direction of a laser beam generated from the laser, wherein the hole diaphragm array is provided with a plurality of light transmitting holes and located on the focus of the long-focus lens, the reflector and the laser beam form the included angle of 45 degrees, an energy meter is arranged on a vertical light path of the light beam after the light beam is reflected by the reflector, a two-dimensional electric control translation platform is connected to the hole diaphragm array, a one-dimensional electric control translation platform is connected to the reflector, and the computing control unit is connected with the stepping motor controller, the CCD and the energy meter respectively. The two-dimensional translation platform is controlled to move by control signals so that the center of each light transmitting hole is coincided with the center of each laser light spot. High precision in alignment is achieved and the laser divergence angle computed by the device is more accurate.
Description
Technical field
The present invention relates to a kind of measurement mechanism and measuring method, belong to the optical detective technology field based on full-automatic over laser beam divergence.
Background technology
Laser beam divergence is to characterize the good and bad important parameter of laser beam quality, therefore it is measured to be very necessary and to have the practical application meaning.The laser beam divergence measurement is meant far-field divergence angle measured under far field condition, and its focal length and light beam with lens is relevant at the spot radius at lens focus place, with lens distance laser beam location independent with a tight waist.Having now utilizes laser intensity to drop to the 1/e of center usually
2Pairing aperture bore D calculates the angle of divergence of laser beam, the i.e. angle of divergence θ of laser beam=2tan
-1(D/2f), f by laser beam the focal length of lens of process.
Calculating 1/e
2During the pairing aperture bore of light intensity D, need aim at the center of aperture the laser beam center.Adopt at present usually manual method to aim at, but only can't accurately judge beam center and aperture center, thereby cause measuring result error big and can't accurately weigh with human eye; In addition, it is to realize through the aperture that different-diameter is chosen in manual work that original over is measured the angle of divergence, all need aim to each aperture, so measuring process is loaded down with trivial details.
Summary of the invention
The purpose of this invention is to provide a kind of measurement mechanism and measuring method based on full-automatic over laser beam divergence, this measurement mechanism can automatically be measured laser beam divergence, and measuring accuracy is high, and measuring process is simple.
Realize that technical scheme of the present invention is following:
A kind of measurement mechanism based on full-automatic over laser beam divergence; Comprise calculation control unit, controllor for step-by-step motor and laser instrument; Produce on the horizontal working direction of laser beam and be provided with long focus lens successively, have aperture array, catoptron and the CCD of a plurality of printing opacity apertures along laser instrument; Wherein the aperture array is on the focal length of long focus lens, and catoptron and laser beam are in angle of 45 degrees; The vertical optical path that laser beam forms after mirror reflects is provided with energy meter; Be connected with two-dimentional electronic control translation stage on the aperture array, be connected with the one dimension electronic control translation stage on the catoptron; Calculation control unit links to each other with controllor for step-by-step motor, CCD and energy meter respectively;
Calculation control unit comprises that image processing module, image resolve module, signal generation module, control module and data processing module;
Image processing module is used for the light spot image that CCD gathers is carried out Filtering Processing, obtains the light spot image of filter out background noise;
Image resolves module and is used for the light spot image of filter out background noise is resolved the center position coordinates
of obtaining laser facula
The signal generation module is used for according to center and said
generation control signal of each printing opacity aperture of aperture array of storage are transferred to control module in advance;
Control module moves through controllor for step-by-step motor control one dimension electronic control translation stage, and the control signal that the control module utilization receives moves through controllor for step-by-step motor two dimension electronic control translation stage, makes the center of laser facula and the center of light hole overlap;
The laser energy E that data processing module received energy meter transmits utilizes polynomial fitting method to obtain the laser intensity distribution curve that is respectively horizontal ordinate with printing opacity hole diameter D and energy E, calculates laser beam divergence.
More excellent ground; Said image processing module is treated to the light spot image that receives: image processing module receives several light spot images and averages the acquisition the average image; And further utilize gray threshold that the average image is cut apart; Again the image after cutting apart is carried out gray scale and handle, and utilize the image after the grain size analysis method is handled gray scale to carry out denoising, obtain the light spot image of filter out background noise at last.
Based on the measuring method of the measurement mechanism of full-automatic over laser beam divergence, concrete steps are:
Step 1, laser instrument send laser, and the control module of calculation control unit is regulated two dimension control translation stage through controllor for step-by-step motor, make that the maximum transmission aperture on the aperture array is on the laser optical path, and laser beam can without hindrancely pass through; Control module is regulated one dimension control translation stage through controllor for step-by-step motor simultaneously, makes catoptron not be positioned on the laser optical path;
Step 2, CCD continuous acquisition representation of laser facula, and be transferred to image processing module, image processing module is handled the light spot image that receives, and obtains the light spot image of filter out background noise;
Step 3, image resolve module the light spot image of filter out background noise are resolved, and obtain the center position coordinates
of laser facula
Step 4, signal generation module are transferred to control module according to center and said
generation control signal of maximum transmission aperture in the aperture array of storage in advance;
Step 5, control module are controlled two-dimentional electronic control translation stage through controllor for step-by-step motor and are made the center of laser facula overlap with the center of said maximum transmission aperture according to the control signal that receives;
Step 6, control module make catoptron be positioned on the laser optical path through controllor for step-by-step motor control one dimension electronic control translation stage;
Step 7, energy meter collection laser energy E at this moment, and be transferred to data processing module;
Step 8, be directed to each in other printing opacity aperture on the aperture array; The signal generation module generates control signal according to the relative position relation between each printing opacity aperture of storage in advance and is transferred to control module; Control module is regulated moving of two dimension control translation stage according to the control signal that receives; Make the center of printing opacity aperture overlap with the center of laser facula, the laser energy E that each printing opacity aperture of energy meter collection is corresponding also is transferred to data processing module;
Step 9, data processing module are utilized polynomial fitting method to obtain being respectively with diameter D and energy E the laser intensity distribution curve of horizontal ordinate, and then are calculated laser beam divergence according to the diameter D of the laser energy E that is received and each printing opacity aperture.
Beneficial effect
The present invention obtains the laser facula center through gathering light spot image; The center of printing opacity aperture in the aperture array that utilizes spot center and store in advance; Generate control signal and control moving of two-dimentional electronic control translation stage; Make the center of printing opacity aperture overlap with the laser facula center, the degree of accuracy of its aligning is high, and the laser beam divergence of calculating is more accurate.
Secondly; The present invention is owing to the position relative fixed of each printing opacity aperture in the aperture array; Therefore when obtaining the laser energy of each printing opacity aperture correspondence successively; Need not to carry out centering and handle, as long as calculation control unit is according to the relative position relation between each aperture of storage in advance, and the action of controlling two-dimentional electronic control translation stage makes the centering at center and laser facula center of each aperture.
Description of drawings
Fig. 1 is the synoptic diagram that the present invention is based on the measurement mechanism of full-automatic over laser beam divergence.
Fig. 2 is the structural representation of calculation control unit of the present invention.
The process flow diagram that Fig. 3 handles light spot image for calculation control unit of the present invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further elaborated.
As shown in Figure 1; The present invention is based on the measurement mechanism of full-automatic over laser beam divergence; Comprise calculation control unit, controllor for step-by-step motor and laser instrument; Produce on the horizontal working direction of laser beam and be provided with long focus lens successively, have aperture array, catoptron and the CCD of a plurality of printing opacity apertures along laser instrument, wherein the aperture array is on the focal length of long focus lens, and catoptron and laser beam are in angle of 45 degrees; The vertical optical path that laser beam forms after mirror reflects is provided with energy meter; Be connected with two-dimentional electronic control translation stage on the aperture array, be connected with the one dimension electronic control translation stage on the catoptron; Calculation control unit links to each other with controllor for step-by-step motor, CCD and energy meter respectively.Present embodiment is preferable chooses the aperture array that has 12 printing opacity apertures, and the diameter of 12 printing opacity apertures to little order, is followed successively by 12mm, 8mm, 6mm, 4mm, 3mm, 2mm, 1mm, 0.8mm, 0.6mm, 0.4mm, 0.2mm and 0.1mm by big.The selection of hole diameter size is to confirm according to the size of measured laser product kind beam divergence angle, and largest hole 12mm can guarantee that laser is fully unobstructedly through (can measure whole emitted energies of laser).
Calculation control unit has adopted advanced in the world observing and controlling dedicated development instrument LabVIEW to develop, and has improved development efficiency and development quality, and the software interface simple optimizing is convenient to operating personnel and is used and control and test.Calculation control unit comprises that image processing module, image resolve module, signal generation module, control module and data processing module;
Image processing module is used for the light spot image that CCD gathers is handled, and obtains the light spot image of filter out background noise;
Image resolves module and is used for the light spot image of filter out background noise is resolved the center position coordinates
of obtaining laser facula
The signal generation module is used for according to center and said
generation control signal of each printing opacity aperture of aperture array of storage are transferred to control module in advance;
Control module moves through controllor for step-by-step motor control one dimension electronic control translation stage, and the control signal that the control module utilization receives moves through controllor for step-by-step motor two dimension electronic control translation stage, makes the center of laser facula and the center of light hole overlap;
The laser energy E that data processing module received energy meter transmits utilizes polynomial fitting method to obtain the laser intensity distribution curve that is respectively horizontal ordinate with printing opacity hole diameter D and energy E, calculates laser beam divergence.
Concrete processing procedure in the face of image processing module is elaborated down:
In order to calculate the center of laser facula exactly, image processing module receives several light spot images, and preferable reception 5 width of cloth light spot images average the acquisition the average image; And further utilize gray threshold that the average image is cut apart, for example be lower than 200 of threshold values and think the image dark background, thereby roughly from the average image, be partitioned into laser facula; Image processing module carries out gray scale to the light spot image after cutting apart to be handled, and said gray scale is treated to: all gray-scale values in the light spot image are encoded, and every reservation gradation of image value that is higher than threshold value 200, and the gray scale that is lower than threshold value 200 is changed to 0, that is:
G
0(m n) is the original image gray-scale value
Owing to have many spuious bright spots in the image after gray scale is handled, these bright spots need be filtered these bright spots through the method for grain size analysis (Particle Analysis); Therefore utilize the image after the grain size analysis method is handled gray scale to carry out denoising, obtain the light spot image of filter out background noise.Concrete implementation procedure is: at first identify all connection bright spots (comprising maximum connection bright spot hot spot); The filtering area is changed to 0 less than all bright spots of maximum bright spot (hot spot) area 10% and its relevant range gray scale then, and the last image that obtains is the image that removes ground unrest.
As shown in Figure 3, utilize the method for the above-mentioned measurement mechanism Laser Measurement angle of divergence, concrete steps are:
Step 1, laser instrument send laser, and the control module of calculation control unit is regulated two dimension control translation stage through controllor for step-by-step motor, make that the maximum transmission aperture on the aperture array is on the laser optical path, and laser beam can without hindrancely pass through; Control module is regulated one dimension control translation stage through controllor for step-by-step motor simultaneously, makes catoptron not be positioned on the laser optical path.
Step 2, CCD continuous acquisition representation of laser facula, and be transferred to image processing module, image processing module carries out Filtering Processing to the light spot image that receives, and obtains the light spot image of filter out background noise.
Step 3, image resolve module the light spot image of filter out background noise are resolved the center position coordinates
of obtaining laser facula
Step 4, signal generation module are transferred to control module according to center and said
generation control signal of maximum transmission aperture in the aperture array of storage in advance; Wherein said control signal is represented said center and
corresponding residual quantity, i.e. the amount that expression two dimension control translation stage need move on x direction and y direction.
Step 5, control module are controlled two-dimentional electronic control translation stage through controllor for step-by-step motor and are made the center of laser facula overlap with the center of said maximum transmission aperture according to the control signal that receives.
Step 6, control module make catoptron be positioned on the laser optical path through controllor for step-by-step motor control one dimension electronic control translation stage.
Step 7, energy meter collection laser energy E at this moment, and be transferred to data processing module.
Step 8, since the aperture array in processing with when installing; Guaranteed the relative fixed at each printing opacity aperture center; Therefore the center of each printing opacity aperture and relative position can obtain when installing, and only need carry out the centering at spot center and aperture center in whole measuring process, when obtaining energy to other printing opacity aperture; As long as realize moving to two dimension control translation stage according to the relative position relation of being stored; Therefore when not reducing measuring accuracy, reduce the time of measuring greatly, simplified the step of measuring.
This step is directed to each in other printing opacity aperture on the aperture array; The signal generation module generates control signal according to the relative position relation between each printing opacity aperture of storage in advance and is transferred to control module; Control module is regulated moving of two dimension control translation stage according to the control signal that receives; Make the center of printing opacity aperture overlap with the center of laser facula, the laser energy E that each printing opacity aperture of energy meter collection is corresponding also is transferred to data processing module.
Step 9, this moment, data processing unit received 12 pairing laser energy E of aperture; Data processing module utilizes polynomial fitting method to obtain being respectively with diameter D and energy E the laser intensity distribution curve of horizontal ordinate according to the diameter D of the laser energy E that is received and each printing opacity aperture, utilizes this curve acquisition to seek E
0With the ratio of E be 1/e
2I.e. 0.86 o'clock hole diameter, and then calculate laser beam divergence.
Though described embodiment of the present invention in conjunction with accompanying drawing, for the technician in present technique field,, can also do some distortion, replacement and improvement not breaking away under the prerequisite of the present invention, these also are regarded as belonging to protection scope of the present invention.
Claims (3)
1. measurement mechanism based on full-automatic over laser beam divergence; It is characterized in that; Comprise calculation control unit, controllor for step-by-step motor and laser instrument; Produce on the horizontal working direction of laser beam and be provided with long focus lens successively, have aperture array, catoptron and the CCD of a plurality of printing opacity apertures along laser instrument, wherein the aperture array is on the focal length of long focus lens, and catoptron and laser beam are in angle of 45 degrees; The vertical optical path that laser beam forms after mirror reflects is provided with energy meter; Be connected with two-dimentional electronic control translation stage on the aperture array, be connected with the one dimension electronic control translation stage on the catoptron; Calculation control unit links to each other with controllor for step-by-step motor, CCD and energy meter respectively;
Calculation control unit comprises that image processing module, image resolve module, signal generation module, control module and data processing module;
Image processing module is used for the light spot image that CCD gathers is carried out Filtering Processing, obtains the light spot image of filter out background noise;
Image resolves module and is used for the light spot image of filter out background noise is resolved the center position coordinates
of obtaining laser facula
The signal generation module is used for according to center and said
generation control signal of each printing opacity aperture of aperture array of storage are transferred to control module in advance;
Control module moves through controllor for step-by-step motor control one dimension electronic control translation stage, and the control signal that the control module utilization receives moves through controllor for step-by-step motor two dimension electronic control translation stage, makes the center of laser facula and the center of light hole overlap;
The laser energy E that data processing module received energy meter transmits utilizes polynomial fitting method to obtain the laser intensity distribution curve that is respectively horizontal ordinate with printing opacity hole diameter D and energy E, calculates laser beam divergence.
2. measurement mechanism according to claim 1; It is characterized in that; Said image processing module is treated to the light spot image that receives: image processing module receives several light spot images and averages the acquisition the average image, and further utilizes gray threshold that the average image is cut apart, and again the image after cutting apart is carried out gray scale and handles; And utilize the image after the grain size analysis method is handled gray scale to carry out denoising, obtain the light spot image of filter out background noise at last.
3. utilize the measuring method of the said measurement mechanism of claim 1, it is characterized in that, it is characterized in that,
Step 1, laser instrument send laser, and the control module of calculation control unit is regulated two dimension control translation stage through controllor for step-by-step motor, make that the maximum transmission aperture on the aperture array is on the laser optical path, and laser beam can without hindrancely pass through; Control module is regulated one dimension control translation stage through controllor for step-by-step motor simultaneously, makes catoptron not be positioned on the laser optical path;
Step 2, CCD continuous acquisition representation of laser facula, and be transferred to image processing module, image processing module is handled the light spot image that receives, and obtains the light spot image of filter out background noise;
Step 3, image resolve module the light spot image of filter out background noise are resolved, and obtain the center position coordinates
of laser facula
Step 4, signal generation module are transferred to control module according to center and said
generation control signal of maximum transmission aperture in the aperture array of storage in advance;
Step 5, control module are controlled two-dimentional electronic control translation stage through controllor for step-by-step motor and are made the center of laser facula overlap with the center of said maximum transmission aperture according to the control signal that receives;
Step 6, control module make catoptron be positioned on the laser optical path through controllor for step-by-step motor control one dimension electronic control translation stage;
Step 7, energy meter collection laser energy E at this moment, and be transferred to data processing module;
Step 8, be directed to each in other printing opacity aperture on the aperture array; The signal generation module generates control signal according to the relative position relation between each printing opacity aperture of storage in advance and is transferred to control module; Control module is regulated moving of two dimension control translation stage according to the control signal that receives; Make the center of printing opacity aperture overlap with the center of laser facula, the laser energy E that each printing opacity aperture of energy meter collection is corresponding also is transferred to data processing module;
Step 9, data processing module are utilized polynomial fitting method to obtain being respectively with diameter D and energy E the laser intensity distribution curve of horizontal ordinate, and then are calculated laser beam divergence according to the diameter D of the laser energy E that is received and each printing opacity aperture.
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