CN103645471A - Laser radar detecting light source divergence angle measuring device and method - Google Patents
Laser radar detecting light source divergence angle measuring device and method Download PDFInfo
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- CN103645471A CN103645471A CN201310713857.3A CN201310713857A CN103645471A CN 103645471 A CN103645471 A CN 103645471A CN 201310713857 A CN201310713857 A CN 201310713857A CN 103645471 A CN103645471 A CN 103645471A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/497—Means for monitoring or calibrating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/95—Lidar systems specially adapted for specific applications for meteorological use
Abstract
The invention discloses a laser radar detecting light source divergence angle measuring device and method which is mainly applied to the adjustment process of a laser radar launch system and used for performing measurement and adjustment on detecting light divergence angles after beam expansion. The laser radar detecting light source divergence angle measuring device is mainly formed by a detecting light source, an optical lifting platform, a collimating telescope, a lifting optical adjustment frame, a tunable double-slit diaphragm, a diaphragm, a high precision translation platform, an optical power meter and the like. The laser radar detecting light source divergence angle measuring device is provided with the double-slit diaphragm, emission beams of a detected light source are shaped into double beams through the double-slit diaphragm, and accordingly the divergence angles of the beams can be measured only through the measurement of the dispersion degree of the double beams, the integral light spot and light intensity distribution does not need to be measured, and accordingly the measurement on the divergence angles of the different diameters of laser radar detecting light source beams can be achieved. According to the laser radar detecting light source divergence angle measuring device and method, the measurable minimum beam diameter is 2 mm, the measurable maximum beam diameter is 400 mm, and accordingly the measurement on the 0.01 mrad beam divergence angle can be achieved.
Description
Technical field
The present invention relates to a kind of laser radar optical measurement means for correcting, be specially a kind of laser radar detection light source divergence angle measurement apparatus and method, realize the adjustment of laser radar detection light source.
Background technology
Laser radar is to take laser as probe source, by laser and atmospheric interaction, Atmospheric particulates is surveyed.Light wave and atmosphere medium interact, and produce air inclusion molecule and particulate radiation signal for information about, utilize inversion method just can therefrom obtain the information about gas molecule and particulate.Therefore, the technical foundation of laser radar is the produced various physical processes that interact between molecule in optical radiation and atmosphere and particulate.One of laser radar effect is important remote optical sensing detection means, can realize the detection of detection, atmospheric horizontal visibility and the particle particle properties of whole atmospheric aerosol delustring Vertical Profile, can effectively make up current China not enough in Atmospheric particulates remote sensing, contribute to carry out the source distribution that comes of aerosol granules, analyse atmos particle characteristic, resolve the fine particle spatial and temporal distributions of haze weather, the time-evolution of the above sand and dust in analyse atmos boundary layer and cirrus characteristic and mixolimnion thickness and dynamic structure.
Laser radar detection the Lights section is comprised of laser instrument and transmitting optics unit two parts.Laser instrument is one of key factor determining laser radar detection performance, and the type of laser instrument and performance requirement depend on the requirement of system and concrete detected object.Available laser instrument main Types has: for the laser instrument of scatter-type laser radar, mainly contain the flash lamp pumping of multi-wavelength output or diode pumping Nd:YAG laser instrument, ruby laser, carbon dioxide laser etc.At present, some new lasers (as slab laser, microchip laser, waveguide laser and curing Raman laser) are in research and development, and they also can be applied among laser radar very soon.The performance index of laser instrument mainly contain output wavelength, energy and stability thereof, repetition frequency, beam divergence angle, laser pulse width etc.Optical maser wavelength has determined the kind of laser radar detection composition; The size of energy affects radar effective range investigative range and signal to noise ratio (S/N ratio), and the high repetition frequency of laser instrument can improve the spatial-temporal distribution characteristic of laser radar detection.
And the laser radar detection light source angle of divergence can have influence on the signal to noise ratio (S/N ratio) of laser radar and the stability that system is surveyed, if the laser radar detection light source angle of divergence is greater than design objective, a large amount of bias lights can carry out detector, cause laser radar detection signal noise to increase, signal to noise ratio (S/N ratio) reduces, and cannot meet the requirement of laser radar data inverting; And if the laser radar detection light source angle of divergence is while being less than design objective, can cause the steady decrease of system, laser radar is effectively surveyed light and can be transmitted into outside laser radar detection visual field, its echoed signal cannot be detected device and receive, so the angle of divergence of General Requirements transmitting light beam is less than the value between field angle.
Visible, the laser radar detection light source angle of divergence is one of important parameter of laser radar design, in later stage laser radar Installation and Debugging process, the test of the laser radar detection light source angle of divergence and tune are more good and bad is also the key factor that affects laser radar performance, is also that laser is debug technical barrier of process simultaneously.Main cause is, the laser radar detection light source angle of divergence is minimum, far away higher than the angle of divergence of general optical precision instrument probe source.The probe source emission angle of general optical precision instrument several between tens milliradians, and laser instrument radar requires the probe source angle of divergence in several milliradians at zero point conventionally, the angle of divergence of micro-pulse lidar is in 0.01 milliradian left and right, laser radar to the requirement of the probe source angle of divergence far away higher than general precision optical instrument, so laser radar light source divergence angle measurement device and adjustment method are proposed to more harsh requirement, more speciality tool and tune are compared with method.
But at present, in publication or document, the report that is exclusively used in laser radar detection light source divergence angle measurement apparatus and method is not yet seen, in published relevant patent documentation, the measurement of the light source angle of divergence that the device of describing and measuring method are generally used for conventional optical precision instrument, mainly contain photodetector mensuration and CCD formation method, if a Chinese invention patent CN1180232C(Granted publication day of Photoelectric Technology Inst., Chinese Academy of Sciences is on Dec 15th, 2004) laser beam divergent angle test method, the method utilizes CCD camera to measure the whole two-dimensional illumination intensity distribution of laser beam focal beam spot, then the light intensity one dimension of getting as required required direction of measurement distributes, light intensity is dropped to maximal value 1/e
2the curve that (0.136) located rises, the size of stop envelope is as the size of the spot diameter in inferior position of laser beam.The method is inapplicable aspect laser radar detection light source divergence angle measurement, and first, laser radar detection light source is all collimated and expands, and the Bright efficacy and density after expanding is smaller, and the light distribution difference of whole hot spot is little, and " light intensity drops to maximal value 1/e in use
2(0.136) located " be defined as the large submethod of spot diameter, can accurately spot diameter; Secondly, the spot diameter of laser radar detection light source is larger, and hot spot is directly generally between 20mm-400mm, and the method is used CCD measuring light intensity distribution, limited by CCD test surface elemental area, cannot measure large spot.The patent of invention CN100354621C(Granted publication day of a Institute of Semiconductors,Academia Sinica is on Dec 12nd, 2007 in addition) laser divergence angle measuring instrument and measuring method, a kind of measuring method that is mainly used in semiconductor laser outgoing beam has been described in this invention, adopt optical fiber head to measure distribution of light intensity, investigative range is little, can measure the laser facula that bore is very little; In measuring process, mobile laser instrument measuring optical fiber maintains static.The method is same inapplicable at laser radar detection light source divergence angle measurement, the one,, laser radar detection light beam of light source expanded rear light intensity a little less than, and the coupling efficiency of fibre-optical probe is low, insertion loss is large, is coupled to light intensity few in optical fiber cannot be detected; Two, these apparatus and method equally cannot be for compared with the measurement of the large spot angle of divergence.
In patent of the present invention, designed tunable double slit aperture, this is the fundamental difference with other patents, tunable double slit aperture is provided with two slits, slit width and double aperture slit spacing are adjustable, may be according to the spot size of tested laser radar detection light source and light intensity, adjust slit width and double aperture slit spacing, ensure enough energy and pass through by optical power detecting; Double slit aperture is shaped as twin-beam by the transmitting light beam of measured light, only need to measure the dispersion degree of twin-beam, just can record the angle of divergence of light beam, do not need to measure whole hot spot light distribution, thereby realize the measurement to major diameter hot spot, this in the past other measuring methods cannot accomplish; In patent of the present invention, the measurement of twin-beam light intensity is obtained to light intensity curve figure, distance between bimodal center line in measurement calculating curve map, and by measuring light intensity, determine spot size unlike classic method, the measurement of obvious bimodal centreline spacing is more prone to, precision is higher, error is less.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of laser radar detection light source divergence angle measurement apparatus and method, in laser radar assembling and test process, realizes laser radar detection light source divergence angle measurement and adjustment.Designed to innovation tunable double slit aperture, double slit aperture is shaped as twin-beam by the transmitting light beam of measured light, only need to measure the dispersion degree of twin-beam, just can record the angle of divergence of light beam, do not need to measure whole hot spot light distribution, thereby realize the measurement to major diameter hot spot, this is that traditional measurement method and installation method cannot be realized; By measuring twin-beam light intensity curve figure, distance between bimodal center line in measurement calculating curve map, with the method comparison that classic method is measured spot size, the measurement of bimodal centreline spacing is more prone to, precision is higher, error is less.
The technical scheme that the present invention solves the problems of the technologies described above employing is: a kind of laser radar detection light source divergence angle measurement device comprises: probe source, optics lifting table, collimating telescope, liftable optical adjusting frame one, tunable double slit aperture, liftable optical adjusting frame two, diaphragm, high-accuracy translate stage, light power meter, and described parts are fixed on measuring table successively; Described probe source level is arranged on lifting optical adjusting frame one, highly adjustable, adjusts optics upgrading platform probe source transmitting light beam is launched along system centre optical axis; Described collimating telescope is fixed on lifting optical adjusting frame one, highly adjustable, luffing angle is adjustable, adjust lifting optical adjusting frame one make the central shaft of collimating telescope and system centre optical axis coaxial, probe source light beam is launched to tunable double slit aperture after collimating telescope collimator and extender; Described tunable double slit aperture is fixed on liftable optical adjusting frame two, highly adjustable, luffing angle is adjustable, tunable double slit aperture is provided with two slits, be respectively slit A and slit B, the slit width of slit A and slit B is adjustable, and the slit separation of slit A and slit B is adjustable, slit width scope is 0.5mm-5mm, and slit separation adjustable range is 4mm-120mm; Described light power meter is fixedly mounted in high-accuracy translate stage, and vertical height and horizontal range capable of regulating, be wherein horizontally disposed with scale mark, can accurately adjust, and horizontal adjustment precision is 0.1mm, and measurement range is 0-120mm; Light power meter has the high feature of measuring accuracy, measures wavelength coverage 150nm-8um, measures power bracket 60uw-3w, measuring accuracy 3%; Described diaphragm is fixedly mounted on before the detector of light power meter, and diaphragm diameter is 30mm, and Center has the adjustable light hole in aperture, light hole tunable range 0.5mm-5mm; Diaphragm, high-accuracy translate stage and light power meter are an integral body after installing, can be along system centre optical axis direction parallel on measuring table, during the tuning high-accuracy translate stage of level, diaphragm and light power meter can be along moving perpendicular to the horizontal stepping of system centre optical axis direction, and then realize the precision measurement to beam and focus energy axial distribution.
Utilize laser radar detection light source divergence angle measurement device, described divergence angle measurement and adjustment method are:
(1) adjust liftable optical adjusting frame two height, make tunable double slit aperture be centered close to system centre optical axis on, adjust liftable optical adjusting frame two altitude pitching angles, make tunable double slit aperture vertical with system centre optical axis, adjust the slit width of slit A and slit B, make light beam by tunable double slit aperture at diaphragm place, can become relatively clearly as, when the slit width of slit A and slit B is generally adjusted into 0.5mm-2mm, imaging is comparatively clear; The slit separation of adjusting between slit A and slit B is B millimeter, makes the light beam can be by forming twin-beam after slit A and slit B;
(2), along system centre optical axis direction parallel diaphragm, high-accuracy translate stage and light power meter on measuring table, being fixed in double slit aperture distance is the position of L, requires L to be greater than 10m; Tuning high-accuracy translate stage, makes the central small hole of diaphragm and central optical axis contour in vertical direction;
(3) spot energy distribution of twin-beam described in measuring process (1), tuning high-accuracy translate stage in the horizontal direction, make the central small hole of diaphragm be positioned at twin-beam described in step (1) in a side of diaphragm imaging, then tuning high-accuracy translate stage slowly in the horizontal direction, make diaphragm along continuous straight runs previous step one step to detecting light beam stepping, until pass through twin-beam described in step (1) completely in diaphragm imaging, the every stepping of diaphragm once, is recorded the distance of stepping and the measured value of light power meter; The step distance value being recorded of take is X-axis coordinate figure, and the measured value of light power meter is that Y-axis coordinate figure is drawn, and obtains the curve map of a two peak structure, and distance d between bimodal center line in calculated curve figure;
(4) distance between bimodal center line measure is calculated in curve map in multiple averaging, repeating step (3), duplicate measurements twin-beam is in the energy distribution of diaphragm imaging, distance between bimodal center line in computation and measurement curve map, duplicate measurements is calculated five times, measures the mean value calculating be designated as D by five times;
(5) according to the measurement calculated value in step (1), (2), (4), calculate laser radar detection light source angle of divergence θ, θ=(D-B)/(1000*L);
(6) by laser radar detection light source angle of divergence calculated value θ and the comparison of laser radar system design objective requirements, if calculated value θ is greater than or less than laser radar system design objective requirements, need to change collimating telescope or adjust after collimating telescope structure, repeating step (1) to step (5) is again measured and is calculated laser radar detection light source angle of divergence θ, until laser radar detection light source angle of divergence calculated value θ meets system index request.
Described laser radar detection light source divergence angle measurement device has designed tunable double slit aperture, and tunable double slit aperture is shaped as twin-beam by the transmitting light beam of measured light.
Described laser radar detection light source divergence angle measurement measurement device precision is high, and device can be realized the measurement of 0.01mrad beam divergence angle;
Described apparatus and method, can be used for the measurement of the angle of divergence of different-diameter light beam, and can measure minimum beam diameter is 2mm, and largest beam diameter is 400mm.
The present invention's beneficial effect compared with prior art:
(1) laser radar detection light source divergence angle measurement apparatus and method of the present invention can be used for the measurement of the angle of divergence of different-diameter light beam, and can measure minimum beam diameter is 2mm, and largest beam diameter is 400mm.The measurement of large spot diameter is one of innovation of patent of the present invention, and the measuring method of the angle of divergence of describing in published patent or document is generally used for the measurement of the small diameter optical beam angle of divergence;
(2) in the present invention, designed to innovation tunable double slit aperture, double slit aperture is shaped as twin-beam by the transmitting light beam of measured light, only need to measure the dispersion degree of twin-beam, just can record the angle of divergence of light beam, and conventional beam divergence angle measurement method is generally the whole hot spot light distribution of measurement, classic method is to measure whole hot spot bin, and the method for patent of the present invention only needs two some units in hot spot face, obviously the method for patent of the present invention is simpler, and precision is higher;
(3) the present invention is when measuring twin-beam dispersion degree, by measuring twin-beam light intensity curve figure, utilizes in curve map distance between bimodal center line, and then the position of definite hot spot, the measuring beam angle of divergence.And classic method is generally to determine facula position by measuring the method for luminous intensity measurement spot size, method precision that patent of the present invention is used is higher, error is less, so apparatus of the present invention and method can realize the measurement of 0.01mrad beam divergence angle.
Accompanying drawing explanation
Fig. 1 is the composition frame chart of sniffer of the present invention;
Fig. 2 is tunable double slit aperture structural representation;
Fig. 3 is the two peak structure curve map of twin-beam.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention.
As shown in Figure 1, laser radar detection light source divergence angle measurement apparatus and method of the present invention are mainly comprised of probe source 1, optics lifting table 2, collimating telescope 3, liftable optical adjusting frame 1, tunable double slit aperture 5, liftable optical adjusting frame 26, diaphragm 7, high-accuracy translate stage 8, light power meter 9, and described parts are fixed on measuring table 10 successively; Described probe source 1 level is arranged on lifting optical adjusting frame 1, highly adjustable, adjusts optics upgrading platform 2 and makes probe source 1 transmitting light beam along 11 transmittings of system centre optical axis; Described collimating telescope 3 is fixed on lifting optical adjusting frame 1, highly adjustable, luffing angle is adjustable, adjust lifting optical adjusting frame 1 make the central shaft of collimating telescope 3 and system centre optical axis 11 coaxial, probe source 1 light beam is launched to tunable double slit aperture 5 after collimating telescope 3 collimator and extenders; Described tunable double slit aperture 5 is fixed on liftable optical adjusting frame 26, highly adjustable, luffing angle is adjustable, tunable double slit aperture 5 as shown in Figure 2, is provided with two slits, is respectively slit A12 and slit B13, the slit width of slit A12 and slit B13 is adjustable, the slit separation of slit A12 and slit B13 is adjustable, and slit width scope is 0.5mm-5mm, and slit separation adjustable range is 4mm-120mm; Described light power meter 9 is fixedly mounted in high-accuracy translate stage 8, and vertical height and horizontal range capable of regulating, be wherein horizontally disposed with scale mark, can accurately adjust, and horizontal adjustment precision is 0.1mm, and measurement range is 0-120mm; Light power meter 9 has the high feature of measuring accuracy, measures wavelength coverage 150nm-8um, measures power bracket 60uw-3w, measuring accuracy 3%; Described diaphragm 7 is fixedly mounted on before the detector of light power meter 9, and diaphragm 7 is directly 30mm, is designed with the adjustable light hole in aperture, light hole tunable range 0.5mm-5mm; Diaphragm 7, high-accuracy translate stage 8 and light power meter 9 are an integral body after installing, can be along system centre optical axis 11 directions parallel on measuring table 10, during the tuning high-accuracy translate stage 8 of level, diaphragm 7 and light power meter 9 can be along moving perpendicular to the horizontal stepping of system centre optical axis 11 direction, and then realize the precision measurement to beam and focus energy axial distribution.Utilize laser radar detection light source divergence angle measurement device, the laser radar detection light source divergence angle measurement that the beam diameter of take is 40mm describes as example, and described method concrete steps are:
(1) adjust liftable optical adjusting frame 26 height, make tunable double slit aperture 5 be centered close to system centre optical axis 11 on, adjust liftable optical adjusting frame 26 altitude pitching angles, make tunable double slit aperture 5 vertical with system centre optical axis 11, the slit width of adjusting slit A12 and slit B13 is 1mm, make light beam by tunable double slit aperture 5 at diaphragm 7 places, can become relatively clearly as, when the slit width of slit A12 and slit B13 is generally adjusted into 0.5mm-2mm, imaging is comparatively clear; The slit separation of adjusting between slit A12 and slit B13 is 3.6mm, makes the light beam can be by forming twin-beam after slit A12 and slit B13;
(2) along system centre optical axis 11 directions parallel diaphragm 7, high-accuracy translate stage 8 and light power meter 9 on measuring table 10, being fixed in double slit aperture (5) distance is the position of L, and L is 15m; Tuning high-accuracy translate stage 8, makes the central small hole of diaphragm 7 and central optical axis 11 contour in vertical direction;
(3) spot energy distribution of twin-beam described in measuring process (1), tuning high-accuracy translate stage 8 in the horizontal direction, make the central small hole of diaphragm 7 be positioned at twin-beam described in step 1 in a side of diaphragm 7 imagings, then tuning high-accuracy translate stage 8 slowly in the horizontal direction, make diaphragm 7 along continuous straight runs previous step one steps to detecting light beam stepping, until pass through twin-beam described in step 1 completely in diaphragm 7 imagings, the every stepping of diaphragm (7) once, is recorded the distance of stepping and the measured value of light power meter 9; The step distance value being recorded of take is X-axis coordinate figure, the measured value of light power meter 9 is that Y-axis coordinate figure is drawn, obtain curve Figure 11 of a two peak structure, as shown in Figure 3, curve peak A and B are respectively and survey the light intensity that light forms twin-beam after by slit A12 and slit B13, and distance d between bimodal center line in calculated curve figure;
(4) distance between bimodal center line measure is calculated in curve map in multiple averaging, repeating step (3), duplicate measurements twin-beam is in the energy distribution of diaphragm 7 imagings, distance between bimodal center line in computation and measurement curve map, duplicate measurements is calculated five times, and five times are measured the mean value D calculating is 3.9mm;
(5), according to the measurement calculated value in step (1), (2), (4), calculate laser radar detection light source angle of divergence θ, θ=(D-B)/(1000*L)=(3.9-3.6)/(1000*15)=0.2mrad;
(6) laser radar detection light source angle of divergence calculated value θ is that 0.2mrad meets laser radar system design objective requirements.If calculated value θ is greater than or less than laser radar system design objective requirements, need to change collimating telescope 3 or adjust after collimating telescope 3 structures, repeating step 1 to step 5 is again measured and is calculated laser radar detection light source angle of divergence θ, until laser radar detection light source angle of divergence calculated value θ meets system index request.
Described laser radar detection light source divergence angle measurement device has designed tunable double slit aperture, and tunable double slit aperture 5 is shaped as twin-beam by the transmitting light beam of measured light;
Described laser radar detection light source divergence angle measurement apparatus and method, measuring accuracy is high, and described laser radar detection light source divergence angle measurement device can be realized the measurement of 0.01mrad beam divergence angle;
Described laser radar detection light source divergence angle measurement apparatus and method can be used for the measurement of the angle of divergence of different-diameter light beam, and can measure minimum beam diameter is 2mm, and largest beam diameter is 400mm;
Non-elaborated part of the present invention belongs to those skilled in the art's common practise.
Claims (6)
1. a laser radar detection light source divergence angle measurement device, it is characterized in that, comprise: probe source (1), optics lifting table (2), collimating telescope (3), liftable optical adjusting frame one (4), tunable double slit aperture (5), liftable optical adjusting frame two (6), diaphragm (7), high-accuracy translate stage (8), light power meter (9), described parts are fixed on measuring table (10) successively; It is upper, highly adjustable that described probe source (1) level is arranged on lifting optical adjusting frame one (4), adjusts optics upgrading platform (2) probe source (1) transmitting light beam is launched along system centre optical axis (11); Described collimating telescope (3) is fixed on lifting optical adjusting frame one (4), highly adjustable, luffing angle is adjustable, adjust lifting optical adjusting frame one (4) make the central shaft of collimating telescope (3) and system centre optical axis (11) coaxial, probe source (1) light beam is launched to tunable double slit aperture (5) after collimating telescope (3) collimator and extender; Described tunable double slit aperture (5) is fixed on liftable optical adjusting frame two (6), highly adjustable, luffing angle is adjustable, tunable double slit aperture (5) is provided with two slits, be respectively slit A(12) and slit B(13), slit A(12) and slit B(13) slit width adjustable, slit A(12) and slit B(13) slit separation adjustable, slit width scope is 0.5mm-5mm, and slit separation adjustable range is 4mm-120mm; It is upper that described light power meter (9) is fixedly mounted on high-accuracy translate stage (8), and vertical height and horizontal range capable of regulating, be wherein horizontally disposed with scale mark, can accurately adjust, and horizontal adjustment precision is 0.1mm, and measurement range is 0-120mm; Light power meter (9) has the high feature of measuring accuracy, measures wavelength coverage 150nm-8um, measures power bracket 60uw-3w, measuring accuracy 3%; Described diaphragm (7) is fixedly mounted on before the detector of light power meter (9), and diaphragm (7) external diameter is 30mm, and Center has the adjustable light hole in aperture, light hole tunable range 0.5mm-5mm; Diaphragm (7), high-accuracy translate stage (8) and light power meter (9) are an integral body after installing, can be along system centre optical axis (11) direction at the upper parallel of measuring table (10), during the tuning high-accuracy translate stage of level (8), diaphragm (7) and light power meter (9) can be along moving perpendicular to the horizontal stepping of system centre optical axis (11) direction, and then realize the precision measurement to beam and focus energy axial distribution.
2. laser radar detection light source divergence angle measurement device according to claim 1, is characterized in that: this device has designed tunable double slit aperture (5), and tunable double slit aperture (5) is shaped as twin-beam by the transmitting light beam of measured light.
3. laser radar detection light source divergence angle measurement device according to claim 1, is characterized in that: this measurement device precision is high, can realize the measurement of 0.01mrad beam divergence angle.
4. laser radar detection light source divergence angle measurement device according to claim 1, is characterized in that: this device can be used for the measurement of the angle of divergence of different-diameter light beam, and can measure minimum beam diameter is 2mm, and largest beam diameter is 400mm.
5. the method for utilizing the laser radar detection light source divergence angle measurement device described in claim 1 to carry out divergence angle measurement and debugging, is characterized in that, described divergence angle measurement and the method for debugging comprise the steps:
Step (1) is adjusted liftable optical adjusting frame two (6) highly, make tunable double slit aperture (5) be centered close to system centre optical axis (11) on, adjust liftable optical adjusting frame two (6) altitude pitching angles, make tunable double slit aperture (5) vertical with system centre optical axis (11), adjust slit A(12) and slit B(13) slit width, make light beam by tunable double slit aperture (5) diaphragm (7) locate to become relatively clearly as, slit A(12) and slit B(13) slit width while being generally adjusted into 0.5mm-2mm, imaging is comparatively clear, adjust slit A(12) and slit B(13) between slit separation be B millimeter,
Step (2) is on measuring table (10), along system centre optical axis (11) direction parallel diaphragm (7), high-accuracy translate stage (8) and light power meter (9), being fixed in double slit aperture (5) distance is the position of L, requires L to be greater than 10m; Tuning high-accuracy translate stage (8), makes the central small hole of diaphragm (7) and central optical axis (11) contour in vertical direction;
The spot energy distribution of twin-beam described in step (3) measuring process (1), tuning high-accuracy translate stage (8) in the horizontal direction, make the central small hole of diaphragm (7) be positioned at twin-beam described in step (1) in a side of diaphragm (7) imaging, then tuning high-accuracy translate stage (8) slowly in the horizontal direction, make diaphragm (7) along continuous straight runs previous step one step to detecting light beam stepping, until pass through twin-beam described in step (1) completely in diaphragm (7) imaging, the every stepping of diaphragm (7) once, record the distance of stepping and the measured value of light power meter (9), the step distance value being recorded of take is X-axis coordinate figure, and the measured value of light power meter (9) is that Y-axis coordinate figure is drawn, and obtains the curve map (14) of a two peak structure, and distance d between bimodal center line in calculated curve figure,
Distance between bimodal center line in step (4) multiple averaging measurement calculating curve map, repeating step (3), duplicate measurements twin-beam is in the energy distribution of diaphragm (7) imaging, distance d between bimodal center line in computation and measurement curve map, duplicate measurements is calculated five times, measures the mean value calculating be designated as D by five times;
Step (5), according to the measurement calculated value in step (1), (2), (4), is calculated laser radar detection light source angle of divergence θ, θ=(D-B)/(1000*L);
Step (6) is by laser radar detection light source angle of divergence calculated value θ and the comparison of laser radar system design objective requirements, if calculated value θ is greater than or less than laser radar system design objective requirements, need to change collimating telescope (3) or adjust after collimating telescope (3) structure, repeating step (1) to step (5) is again measured and is calculated laser radar detection light source angle of divergence θ, until laser radar detection light source angle of divergence calculated value θ meets system index request.
6. method according to claim 5, is characterized in that: the method can be used for the measurement of the angle of divergence of different-diameter light beam, and can measure minimum beam diameter is 2mm, and largest beam diameter is 400mm.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105928689A (en) * | 2016-06-24 | 2016-09-07 | 中国科学院云南天文台 | Laser far field divergence angle measurement method and device in satellite laser ranging |
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| CN104502909A (en) * | 2014-12-19 | 2015-04-08 | 中国科学院长春光学精密机械与物理研究所 | Composite detection system with optics and millimeter-wave radar sharing aperture |
| CN106706476A (en) * | 2015-07-22 | 2017-05-24 | 天津同阳科技发展有限公司 | Mechanical installation and adjustment mechanism of open type fugitive dust on-line monitoring system |
| CN105928689A (en) * | 2016-06-24 | 2016-09-07 | 中国科学院云南天文台 | Laser far field divergence angle measurement method and device in satellite laser ranging |
| CN105928689B (en) * | 2016-06-24 | 2018-02-27 | 中国科学院云南天文台 | Laser far field divergence measuring method and device in a kind of satellite laser ranging (SLR) |
| CN109959446A (en) * | 2017-12-22 | 2019-07-02 | 深圳先进技术研究院 | Analysis and the adjusting method of analysis and regulating system and thz beam or millimeter wave for thz beam or millimeter wave |
| CN109959446B (en) * | 2017-12-22 | 2023-11-21 | 深圳先进技术研究院 | Analysis and adjustment system for terahertz light beam or millimeter wave and analysis and adjustment method for terahertz light beam or millimeter wave |
| CN109186757A (en) * | 2018-07-23 | 2019-01-11 | 江苏天元激光科技有限公司 | A kind of semiconductor laser beam quality test device and its test method |
| CN111398937A (en) * | 2020-04-07 | 2020-07-10 | 广东博智林机器人有限公司 | Optical performance adjusting device and optical performance adjusting method |
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| CN111595779A (en) * | 2020-05-11 | 2020-08-28 | 中国科学院西安光学精密机械研究所 | Debugging-free slit light source module with light path purification function |
| CN111521994A (en) * | 2020-05-13 | 2020-08-11 | 广东博智林机器人有限公司 | Method and testing device for measuring angular resolution and vertical field angle of laser radar |
| CN112596253A (en) * | 2020-12-30 | 2021-04-02 | 合肥中科领谱科技有限公司 | Light beam superposition adjusting device and method |
| CN112596253B (en) * | 2020-12-30 | 2023-10-31 | 合肥中科领谱科技有限公司 | Light beam superposition adjusting device and adjusting method |
| CN112945521A (en) * | 2021-01-27 | 2021-06-11 | 广东天讯达资讯科技股份有限公司 | Laser device divergence angle testing device based on camera two-point testing method |
| CN113050072A (en) * | 2021-03-05 | 2021-06-29 | 北京经纬恒润科技股份有限公司 | Laser radar test system and method |
| CN113029527A (en) * | 2021-03-25 | 2021-06-25 | 苏州阿格斯医疗技术有限公司 | Measuring device and measuring method of lateral optical fiber lens |
| CN113029527B (en) * | 2021-03-25 | 2024-04-16 | 苏州阿格斯医疗技术有限公司 | Measuring device and measuring method for lateral optical fiber lens |
| CN113375576A (en) * | 2021-06-09 | 2021-09-10 | 上海光之虹光电通讯设备有限公司 | Light spot diameter detection system and method and light spot energy distribution detection method |
| CN113759350B (en) * | 2021-09-29 | 2023-10-27 | 宁波未感半导体科技有限公司 | Laser radar debugging device and debugging method |
| CN113759350A (en) * | 2021-09-29 | 2021-12-07 | 宁波未感半导体科技有限公司 | Laser radar debugging device and method |
| CN114354135A (en) * | 2021-12-22 | 2022-04-15 | 广东粤港澳大湾区硬科技创新研究院 | Laser light spot measuring device and measuring method thereof |
| CN114659470A (en) * | 2022-03-23 | 2022-06-24 | 北京无线电计量测试研究所 | Device and method for measuring atomic beam collimation characteristics of calcium atomic beam optical clock |
| CN114935310A (en) * | 2022-05-06 | 2022-08-23 | 北京航空航天大学 | Device and method for measuring micro displacement of liquid jet surface |
| CN114935310B (en) * | 2022-05-06 | 2023-03-14 | 北京航空航天大学 | Device and method for measuring micro displacement of liquid jet surface |
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