CN103645471B - Laser radar detection light source divergence angle measurement apparatus and method - Google Patents
Laser radar detection light source divergence angle measurement apparatus and method Download PDFInfo
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- CN103645471B CN103645471B CN201310713857.3A CN201310713857A CN103645471B CN 103645471 B CN103645471 B CN 103645471B CN 201310713857 A CN201310713857 A CN 201310713857A CN 103645471 B CN103645471 B CN 103645471B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/497—Means for monitoring or calibrating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/95—Lidar systems specially adapted for specific applications for meteorological use
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Abstract
The invention discloses a kind of laser radar detection light source divergence angle measurement apparatus and method, be mainly used in laser radar emission coefficient calibration procedures, the detection light angle of divergence after expanding is tested and assessed and adjusted.Device is primarily of parts compositions such as probe source, optics lifting table, collimating telescope, liftable optical adjusting frame, tunable double slit aperture, diaphragm, high-accuracy translate stage, light power meters.The tunable double slit aperture of apparatus design, the transmitted beam of measured light is shaped as twin-beam by double slit aperture, only need the dispersion degree measuring twin-beam, just can record the angle of divergence of light beam, do not need to measure whole hot spot light distribution, thus realize measuring the angle of divergence of the laser thunder probe source light beam of different-diameter, it is 2mm that these apparatus and method can measure minimum beam diameter, largest beam diameter is 400mm, can realize the measurement of 0.01mrad beam divergence angle.
Description
Technical field
The present invention relates to a kind of laser radar optical measurement means for correcting, be specially a kind of laser radar detection light source divergence angle measurement apparatus and method, realize the adjustment of laser radar detection light source.
Background technology
Laser radar take laser as probe source, detected Atmospheric particulates by laser and atmospheric interaction.Light wave and air medium interact, and produce air inclusion molecule and particulate radiation signal for information about, utilize the information that inversion method just can therefrom obtain about gas molecule and particulate.Therefore, the technical foundation of laser radar is the various physical processes that the interphase interaction of molecule in optical radiation and air and particulate produces.Laser radar effect one is important remote optical sensing detection means, the detection of the detection of whole atmospheric aerosol delustring Vertical Profile, atmospheric horizontal visibility and particle particle properties can be realized, effectively can make up current China not enough in Atmospheric particulates remote sensing, what contribute to carrying out aerosol granules carrys out source distribution, analyse atmos particle characteristic, resolve the fine particle spatial and temporal distributions of haze weather, the time-evolution of the above sand and dust in analyse atmos boundary layer and cirrus characteristic and mixolimnion thickness and dynamic structure.
Laser radar detection the Lights section is made up of laser instrument and transmitting optics unit two parts.Laser instrument is one of key factor determining laser radar detection performance, and the type of laser instrument and performance requirement depend on the requirement of system and concrete detected object.Available laser instrument main Types has: the laser instrument for scatter-type laser radar mainly contains flash lamp pumping or diode pumping Nd:YAG laser instrument, ruby laser, the carbon dioxide laser etc. of multi-wavelength output.At present, some new lasers (as slab laser, microchip laser, waveguide laser and solidification Raman laser) are in research and development, and they also can be applied among laser radar very soon.The performance index of laser instrument mainly contain output wavelength, energy and stability thereof, repetition frequency, beam divergence angle, laser pulse width etc.Optical maser wavelength determines the kind of laser radar detection composition; The size of energy affects radar effective range investigative range and signal to noise ratio (S/N ratio), and the high repetition frequency of laser instrument can improve the spatial-temporal distribution characteristic of laser radar detection.
And the laser radar detection light source angle of divergence can have influence on the signal to noise ratio (S/N ratio) of laser radar and the stability of system looks, if the laser radar detection light source angle of divergence is greater than design objective, a large amount of bias lights can carry out detector, laser radar detection signal noise is caused to increase, signal to noise ratio (S/N ratio) reduces, and cannot meet the requirement of laser radar data inverting; And when if the laser radar detection light source angle of divergence is less than design objective, the steady decrease of system can be caused, laser radar effectively detects light and can be transmitted into outside laser radar detection visual field, its echoed signal cannot be detected device and receive, so the angle of divergence of General Requirements transmitted beam is less than the value between field angle.
Visible, the laser radar detection light source angle of divergence is one of important parameter of laser radar design, in post laser radar Installation and Debugging process, the test of the laser radar detection light source angle of divergence and to adjust more good and bad be also key factor affect laser radar performance, while be also that laser debugs process technical barrier.Main cause is, the laser radar detection light source angle of divergence is minimum, far away higher than the angle of divergence of general optical precision instrument probe source.The probe source emission angle of general optical precision instrument several between tens milliradians, and laser instrument radar requires that the probe source angle of divergence is in a few milliradian at zero point usually, the angle of divergence of micro-pulse lidar is about 0.01 milliradian, laser radar to the requirement of the probe source angle of divergence far away higher than general precision optical instrument, so propose more harsh requirement to laser radar light source divergence angle measurement device and adjustment method, need more speciality tool with adjust comparatively method.
But at present, in publication or document, the report being exclusively used in laser radar detection light source divergence angle measurement apparatus and method is not yet seen, in published relevant patent documentation, the device described and measuring method are generally used for the measurement of the light source angle of divergence of normal optical exact instrument, mainly contain photodetector mensuration and CCD formation method, a Chinese invention patent CN1180232C(authorized announcement date as Photoelectric Technology Inst., Chinese Academy of Sciences is on Dec 15th, 2004) laser beam divergent angle test method, the method utilizes CCD camera to measure the whole two-dimensional illumination intensity distribution of laser beam focal beam spot, then the light intensity one dimension distribution of required direction of measurement is got as required, light intensity is dropped to maximal value 1/e
2the curve at (namely 0.136) place rises, the size of stop envelope is as the spot diameter size in secondary position of laser beam.The method is inapplicable in laser radar detection light source divergence angle measurement, and first, laser radar detection light source is all collimated and expands, and the Bright efficacy and density after expanding is smaller, and the light distribution difference of whole hot spot is little, and " light intensity drops to maximal value 1/e in use
2(namely 0.136) place " be defined as the large submethod of spot diameter, can accurately spot diameter; Secondly, the spot diameter of laser radar detection light source is comparatively large, and hot spot is directly general between 20mm-400mm, and the method uses CCD measuring light intensity distribution, can be subject to CCD detection bin area constraints, cannot measure large spot.The patent of invention CN100354621C(authorized announcement date of a Institute of Semiconductors,Academia Sinica is on Dec 12nd, 2007 in addition) laser divergence angle measuring instrument and measuring method, this invention describes a kind of measuring method being mainly used in semiconductor laser outgoing beam, optical fiber head is adopted to measure distribution of light intensity, investigative range is little, can measure the laser facula that bore is very little; In measuring process, mobile laser instrument measuring optical fiber maintains static.The method is inapplicable equally, and at laser radar detection light source divergence angle measurement, one is, it is more weak that laser radar detection light beam of light source is expanded rear light intensity, and the coupling efficiency of fibre-optical probe is low, and insertion loss is large, and being coupled to light intensity few in optical fiber cannot be detected; Two, these apparatus and method cannot be used for the measurement compared with the large spot angle of divergence equally.
Tunable double slit aperture is devised in patent of the present invention, this is the fundamental difference with other patents, tunable double slit aperture is provided with two slits, slit width and double aperture slit spacing adjustable, may according to the spot size of tested laser radar detection light source and light intensity, adjustment slit width and double aperture slit spacing, ensure enough energy and pass through by optical power detecting; The transmitted beam of measured light is shaped as twin-beam by double slit aperture, only need the dispersion degree measuring twin-beam, just can record the angle of divergence of light beam, not need to measure whole hot spot light distribution, thus realize measurement to major diameter hot spot, this in the past other measuring methods cannot accomplish; In patent of the present invention, light intensity curve figure is obtained to the measurement of twin-beam light intensity, the spacing of bimodal center line in survey calculation curve map, and by measuring light intensity determination spot size unlike classic method, the measurement of obvious bimodal centreline spacing is more prone to, precision is higher, error is less.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of laser radar detection light source divergence angle measurement apparatus and method, realizes laser radar detection light source divergence angle measurement and adjustment in laser radar assembling and test process.Innovatively devise tunable double slit aperture, the transmitted beam of measured light is shaped as twin-beam by double slit aperture, only need the dispersion degree measuring twin-beam, just can record the angle of divergence of light beam, do not need to measure whole hot spot light distribution, thus the measurement realized major diameter hot spot, this is that traditional measurement method and installation method cannot realize; By measuring twin-beam light intensity curve figure, the spacing of bimodal center line in survey calculation curve map, measures the Measures compare of spot size with classic method, and the measurement of bimodal centreline spacing is more prone to, precision is higher, error is less.
The technical scheme that the present invention solves the problems of the technologies described above employing is: a kind of laser radar detection light source divergence angle measurement device comprises: probe source, optics lifting table, collimating telescope, liftable optical adjusting frame one, tunable double slit aperture, liftable optical adjusting frame two, diaphragm, high-accuracy translate stage, light power meter, and described parts are fixed on measuring table successively; Described probe source level is arranged on lifting optical adjusting frame one, height adjustable, and adjustment optics upgrading platform makes probe source transmitted beam launch along system centre optical axis; Described collimating telescope is fixed on lifting optical adjusting frame one, height adjustable, luffing angle is adjustable, adjustment lifting optical adjusting frame one make the central shaft of collimating telescope and system centre optical axis coaxial, probe source light beam is launched to tunable double slit aperture after collimating telescope collimator and extender; Described tunable double slit aperture is fixed on liftable optical adjusting frame two, height adjustable, luffing angle is adjustable, tunable double slit aperture is provided with two slits, be respectively slit A and slit B, the slit width of slit A and slit B is adjustable, and the slit separation of slit A and slit B is adjustable, slit width scope is 0.5mm-5mm, and slit separation adjustable range is 4mm-120mm; Described light power meter is fixedly mounted in high-accuracy translate stage, and vertical height and horizontal range adjustable, be wherein horizontally disposed with scale mark, and can accurate adjust, horizontal adjustment precision is 0.1mm, and measurement range is 0-120mm; Light power meter has measuring accuracy high feature, measures wavelength coverage 150nm-8um, measures power bracket 60uw-3w, measuring accuracy 3%; Before described diaphragm is fixedly mounted on the detector of light power meter, diaphragm diameter is 30mm, the light hole that Center has aperture adjustable, light hole tunable range 0.5mm-5mm; Diaphragm, high-accuracy translate stage and light power meter are an entirety after installing, can move in parallel on measuring table along system centre optical axis direction, during the tuning high-accuracy translate stage of level, diaphragm and light power meter can move along perpendicular to the horizontal stepping of system centre optical axis direction, and then realize the precision measurement to beam and focus energy axial distribution.
Utilize laser radar detection light source divergence angle measurement device, described divergence angle measurement and adjustment method are:
(1) liftable optical adjusting frame two height is adjusted, tunable double slit aperture is made to be centrally located at on system centre optical axis, adjustment liftable optical adjusting frame two altitude pitching angle, make tunable double slit aperture vertical with system centre optical axis, the slit width of adjustment slit A and slit B, make by the light beam of tunable double slit aperture can to become at diaphragm place relatively clearly as, when the slit width of slit A and slit B is generally adjusted to 0.5mm-2mm, imaging is comparatively clear; Slit separation between adjustment slit A and slit B is B millimeter, makes light beam can by forming twin-beam after slit A and slit B;
(2) on measuring table, move in parallel diaphragm, high-accuracy translate stage and light power meter along system centre optical axis direction, being fixed in double slit aperture distance is the position of L, requires that L is greater than 10m; Tuning high-accuracy translate stage in vertical direction, make the central small hole of diaphragm and central optical axis contour;
(3) spot energy distribution of twin-beam described in measuring process (1), tuning high-accuracy translate stage in the horizontal direction, the central small hole of diaphragm is made to be positioned at twin-beam described in step (1) in the side of diaphragm imaging, then slowly tuning high-accuracy translate stage in the horizontal direction, make diaphragm in the horizontal direction previous step one step to detecting light beam stepping, until pass through twin-beam described in step (1) completely in diaphragm imaging, the every stepping of diaphragm once, records the measured value of the Distance geometry light power meter of stepping; With recorded step distance value for X-axis coordinate figure, the measured value of light power meter is that Y-axis coordinate figure is drawn, and obtains the curve map of a two peak structure, and the spacing d of bimodal center line in calculated curve figure;
(4) spacing of bimodal center line in multiple averaging survey calculation curve map, repeat step (3), duplicate measurements twin-beam is in the energy distribution of diaphragm imaging, the spacing of bimodal center line in computation and measurement curve map, duplicate measurements calculates five times, and the mean value of five survey calculation is designated as D;
(5) according to the survey calculation value in step (1), (2), (4), laser radar detection light source angle of divergence θ is calculated, θ=(D-B)/(1000*L);
(6) laser radar detection light source angle of divergence calculated value θ is compared with laser radar system design objective requirements, if calculated value θ is greater than or less than laser radar system design objective requirements, after needing to change collimating telescope or adjustment collimating telescope structure, repeat step (1) to step (5) survey calculation laser radar detection light source angle of divergence θ again, until laser radar detection light source angle of divergence calculated value θ meets system index request.
The tunable double slit aperture of described laser radar detection light source divergence angle measurement apparatus design, the transmitted beam of measured light is shaped as twin-beam by tunable double slit aperture.
Described laser radar detection light source divergence angle measurement measurement device precision is high, and device can realize the measurement of 0.01mrad beam divergence angle;
Described apparatus and method, can be used for the measurement of the angle of divergence of different-diameter light beam, and can measure minimum beam diameter is 2mm, and largest beam diameter is 400mm.
The present invention's beneficial effect compared with prior art:
(1) laser radar detection light source divergence angle measurement apparatus and method of the present invention can be used for the measurement of the angle of divergence of different-diameter light beam, and can measure minimum beam diameter is 2mm, and largest beam diameter is 400mm.The measurement of large spot diameter is one of innovation of patent of the present invention, and the measuring method of the angle of divergence described in published patent or document, is generally used for the measurement of the small diameter optical beam angle of divergence;
(2) tunable double slit aperture is innovatively devised in the present invention, the transmitted beam of measured light is shaped as twin-beam by double slit aperture, only need the dispersion degree measuring twin-beam, just can record the angle of divergence of light beam, and conventional beam divergence angle measurement method is generally the whole hot spot light distribution of measurement, classic method measures whole hot spot bin, and the method for patent of the present invention only needs two some units in hot spot face, the method of obvious patent of the present invention is more simple, and precision is higher;
(3) the present invention is when measuring twin-beam dispersion degree, by measuring twin-beam light intensity curve figure, utilizing the spacing of bimodal center line in curve map, and then determining the position of hot spot, the measuring beam angle of divergence.And classic method is generally the method determination facula position by measuring luminous intensity measurement spot size, the method precision that patent of the present invention uses is higher, error is less, and therefore apparatus of the present invention and method can realize the measurement of 0.01mrad beam divergence angle.
Accompanying drawing explanation
Fig. 1 is the composition frame chart of sniffer of the present invention;
Fig. 2 is tunable double slit aperture structural representation;
Fig. 3 is the two peak structure curve map of twin-beam.
Embodiment
The present invention is further illustrated below in conjunction with accompanying drawing and specific embodiment.
As shown in Figure 1, laser radar detection light source divergence angle measurement apparatus and method of the present invention form primarily of probe source 1, optics lifting table 2, collimating telescope 3, liftable optical adjusting frame 1, tunable double slit aperture 5, liftable optical adjusting frame 26, diaphragm 7, high-accuracy translate stage 8, light power meter 9, and described parts are fixed on measuring table 10 successively; Described probe source 1 level is arranged on lifting optical adjusting frame 1, height adjustable, and adjustment optics upgrading platform 2 makes probe source 1 transmitted beam launch along system centre optical axis 11; Described collimating telescope 3 is fixed on lifting optical adjusting frame 1, height adjustable, luffing angle is adjustable, adjustment lifting optical adjusting frame 1 make the central shaft of collimating telescope 3 and system centre optical axis 11 coaxial, probe source 1 light beam is launched to tunable double slit aperture 5 after collimating telescope 3 collimator and extender; Described tunable double slit aperture 5 is fixed on liftable optical adjusting frame 26, height adjustable, luffing angle is adjustable, tunable double slit aperture 5 as shown in Figure 2, is provided with two slits, is respectively slit A12 and slit B13, the slit width of slit A12 and slit B13 is adjustable, the slit separation of slit A12 and slit B13 is adjustable, and slit width scope is 0.5mm-5mm, and slit separation adjustable range is 4mm-120mm; Described light power meter 9 is fixedly mounted in high-accuracy translate stage 8, and vertical height and horizontal range adjustable, be wherein horizontally disposed with scale mark, and can accurate adjust, horizontal adjustment precision is 0.1mm, and measurement range is 0-120mm; Light power meter 9 has measuring accuracy high feature, measures wavelength coverage 150nm-8um, measures power bracket 60uw-3w, measuring accuracy 3%; Before described diaphragm 7 is fixedly mounted on the detector of light power meter 9, diaphragm 7 is directly 30mm, is designed with the light hole that aperture is adjustable, light hole tunable range 0.5mm-5mm; Diaphragm 7, high-accuracy translate stage 8 and light power meter 9 are an entirety after installing, can move in parallel on measuring table 10 along system centre optical axis 11 direction, during the tuning high-accuracy translate stage 8 of level, diaphragm 7 and light power meter 9 can move along perpendicular to the horizontal stepping in system centre optical axis 11 direction, and then realize the precision measurement to beam and focus energy axial distribution.Utilize laser radar detection light source divergence angle measurement device, be that the laser radar detection light source divergence angle measurement of 40mm is described for example with beam diameter, described method concrete steps are:
(1) liftable optical adjusting frame 26 height is adjusted, tunable double slit aperture 5 is made to be centrally located at on system centre optical axis 11, adjustment liftable optical adjusting frame 26 altitude pitching angle, make tunable double slit aperture 5 vertical with system centre optical axis 11, the slit width of adjustment slit A12 and slit B13 is 1mm, make by the light beam of tunable double slit aperture 5 can to become at diaphragm 7 place relatively clearly as, when the slit width of slit A12 and slit B13 is generally adjusted to 0.5mm-2mm, imaging is comparatively clear; Slit separation between adjustment slit A12 and slit B13 is 3.6mm, makes light beam can by forming twin-beam after slit A12 and slit B13;
(2) on measuring table 10, move in parallel diaphragm 7, high-accuracy translate stage 8 and light power meter 9 along system centre optical axis 11 direction, be fixed in double slit aperture (5) apart from the position for L, L is 15m; Tuning high-accuracy translate stage 8 in vertical direction, make the central small hole of diaphragm 7 and central optical axis 11 contour;
(3) spot energy distribution of twin-beam described in measuring process (1), tuning high-accuracy translate stage 8 in the horizontal direction, the central small hole of diaphragm 7 is made to be positioned at the side of twin-beam described in step 1 in diaphragm 7 imaging, then slowly tuning high-accuracy translate stage 8 in the horizontal direction, make diaphragm 7 in the horizontal direction previous step one step to detecting light beam stepping, until pass through twin-beam described in step 1 completely in diaphragm 7 imaging, the every stepping of diaphragm (7) once, records the measured value of the Distance geometry light power meter 9 of stepping; With recorded step distance value for X-axis coordinate figure, the measured value of light power meter 9 is that Y-axis coordinate figure is drawn, obtain curve Figure 11 of a two peak structure, as shown in Figure 3, curve peak A and B is respectively detection light by forming the light intensity of twin-beam after slit A12 and slit B13, and the spacing d of bimodal center line in calculated curve figure;
(4) spacing of bimodal center line in multiple averaging survey calculation curve map, repeat step (3), duplicate measurements twin-beam is in the energy distribution of diaphragm 7 imaging, the spacing of bimodal center line in computation and measurement curve map, duplicate measurements calculates five times, and the mean value D of five survey calculation is 3.9mm;
(5) according to the survey calculation value in step (1), (2), (4), laser radar detection light source angle of divergence θ is calculated, θ=(D-B)/(1000*L)=(3.9-3.6)/(1000*15)=0.2mrad;
(6) laser radar detection light source angle of divergence calculated value θ is that 0.2mrad meets laser radar system design objective requirements.If calculated value θ is greater than or less than laser radar system design objective requirements, after needing to change collimating telescope 3 or adjustment collimating telescope 3 structure, repeat step 1 to step 5 survey calculation laser radar detection light source angle of divergence θ again, until laser radar detection light source angle of divergence calculated value θ meets system index request.
The tunable double slit aperture of described laser radar detection light source divergence angle measurement apparatus design, the transmitted beam of measured light is shaped as twin-beam by tunable double slit aperture 5;
Described laser radar detection light source divergence angle measurement apparatus and method, measuring accuracy is high, and described laser radar detection light source divergence angle measurement device can realize the measurement of 0.01mrad beam divergence angle;
Described laser radar detection light source divergence angle measurement apparatus and method can be used for the measurement of the angle of divergence of different-diameter light beam, and can measure minimum beam diameter is 2mm, and largest beam diameter is 400mm;
Non-elaborated part of the present invention belongs to the common practise of those skilled in the art.
Claims (6)
1. a laser radar detection light source divergence angle measurement device, it is characterized in that, comprise: probe source (1), optics lifting table (2), collimating telescope (3), liftable optical adjusting frame one (4), tunable double slit aperture (5), liftable optical adjusting frame two (6), diaphragm (7), high-accuracy translate stage (8), light power meter (9), described probe source (1), optics lifting table (2), collimating telescope (3), liftable optical adjusting frame one (4), tunable double slit aperture (5), liftable optical adjusting frame two (6), diaphragm (7), high-accuracy translate stage (8), light power meter (9) is fixed on measuring table (10) successively, described probe source (1) level is arranged on liftable optical adjusting frame one (4), height adjustable, and adjustment optics lifting table (2) makes probe source (1) transmitted beam launch along system centre optical axis (11), described collimating telescope (3) is fixed on liftable optical adjusting frame one (4), height adjustable, luffing angle is adjustable, adjustment liftable optical adjusting frame one (4) make the central shaft of collimating telescope (3) and system centre optical axis (11) coaxial, probe source (1) light beam is launched to tunable double slit aperture (5) after collimating telescope (3) collimator and extender, described tunable double slit aperture (5) is fixed on liftable optical adjusting frame two (6), height adjustable, luffing angle is adjustable, tunable double slit aperture (5) is provided with two slits, be respectively slit A(12) and slit B(13), slit A(12) and slit B(13) slit width adjustable, slit A(12) and slit B(13) slit separation adjustable, slit width scope is 0.5mm-5mm, and slit separation adjustable range is 4mm-120mm, described light power meter (9) is fixedly mounted in high-accuracy translate stage (8), and vertical height and horizontal range adjustable, be wherein horizontally disposed with scale mark, and can accurate adjust, horizontal adjustment precision is 0.1mm, and measurement range is 0-120mm, light power meter (9) has measuring accuracy high feature, measures wavelength coverage 150nm-8um, measures power bracket 60uw-3w, measuring accuracy 3%, before described diaphragm (7) is fixedly mounted on the detector of light power meter (9), diaphragm (7) external diameter is 30mm, the light hole that Center has aperture adjustable, light hole tunable range 0.5mm-5mm, diaphragm (7), high-accuracy translate stage (8) and light power meter (9) are an entirety after installing, can move in parallel on measuring table (10) along system centre optical axis (11) direction, time level tuning high-accuracy translate stage (8), diaphragm (7) and light power meter (9) can move along being parallel to the horizontal stepping in system centre optical axis (11) direction, and then realize the precision measurement to beam and focus energy axial distribution.
2. laser radar detection light source divergence angle measurement device according to claim 1, is characterized in that: this apparatus design tunable double slit aperture (5), the transmitted beam of measured light is shaped as twin-beam by tunable double slit aperture (5).
3. laser radar detection light source divergence angle measurement device according to claim 1, is characterized in that: this measurement device precision is high, can realize the measurement of 0.01mrad beam divergence angle.
4. laser radar detection light source divergence angle measurement device according to claim 1, is characterized in that: this device can be used for the measurement of the angle of divergence of different-diameter light beam, and can measure minimum beam diameter is 2mm, and largest beam diameter is 400mm.
5. utilize the laser radar detection light source divergence angle measurement device described in claim 1 to carry out the method for divergence angle measurement and debugging, it is characterized in that, described divergence angle measurement and the method for debugging comprise the steps:
Step (1) adjustment liftable optical adjusting frame two (6) highly, tunable double slit aperture (5) is made to be centrally located on system centre optical axis (11), adjustment liftable optical adjusting frame two (6) altitude pitching angle, make tunable double slit aperture (5) vertical with system centre optical axis (11), adjustment slit A(12) and slit B(13) slit width, make by the light beam of tunable double slit aperture (5) can to become at diaphragm (7) place relatively clearly as, slit A(12) and slit B(13) slit width when being generally adjusted to 0.5mm-2mm, imaging is comparatively clear, adjustment slit A(12) and slit B(13) between slit separation be B millimeter,
Step (2) is on measuring table (10), diaphragm (7), high-accuracy translate stage (8) and light power meter (9) is moved in parallel along system centre optical axis (11) direction, being fixed in tunable double slit aperture (5) distance is the position of L, requires that L is greater than 10m; Tuning high-accuracy translate stage (8) in vertical direction, make the central small hole of diaphragm (7) and system centre optical axis (11) contour;
The spot energy distribution of twin-beam in step (3) measuring process (1), tuning high-accuracy translate stage (8) in the horizontal direction, the central small hole of diaphragm (7) is made to be arranged in the side of step (1) twin-beam in diaphragm (7) imaging, then slowly tuning high-accuracy translate stage (8) in the horizontal direction, make diaphragm (7) in the horizontal direction previous step one step to detecting light beam stepping, until pass through the middle twin-beam of step (1) completely in diaphragm (7) imaging, the every stepping of diaphragm (7) once, the measured value of the Distance geometry light power meter (9) of record stepping, with recorded step distance value for X-axis coordinate figure, the measured value of light power meter (9) is that Y-axis coordinate figure is drawn, and obtains the curve map (14) of a two peak structure, and the spacing d of bimodal center line in calculated curve figure,
The spacing of bimodal center line in step (4) multiple averaging survey calculation curve map, repeat step (3), duplicate measurements twin-beam is in the energy distribution of diaphragm (7) imaging, the spacing d of bimodal center line in computation and measurement curve map, duplicate measurements calculates five times, and the mean value of five survey calculation is designated as D;
Step (5), according to the survey calculation value in step (1), (2), (4), calculates laser radar detection light source angle of divergence θ, θ=(D-B)/(1000*L);
Laser radar detection light source angle of divergence calculated value θ compares with laser radar system design objective requirements by step (6), if calculated value θ is greater than or less than laser radar system design objective requirements, after needing to change collimating telescope (3) or adjustment collimating telescope (3) structure, repeat step (1) to step (5) survey calculation laser radar detection light source angle of divergence θ again, until laser radar detection light source angle of divergence calculated value θ meets system index request.
6. method according to claim 5, is characterized in that: the method can be used for the measurement of the angle of divergence of different-diameter light beam, and can measure minimum beam diameter is 2mm, and largest beam diameter is 400mm.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4212540A (en) * | 1978-11-29 | 1980-07-15 | Rca Corporation | Testing the divergence of a beam from a laser |
| CN1635354A (en) * | 2003-12-26 | 2005-07-06 | 中国科学院半导体研究所 | Laser divergence angle measuring instrument and measuring method |
| CN101005191A (en) * | 2006-12-19 | 2007-07-25 | 大连海事大学 | Method and its device for detecting high energy semiconductor laser divergence angle |
| CN201725463U (en) * | 2010-08-09 | 2011-01-26 | 张昊卢 | Teaching experiment teaching aid for measuring divergence angle |
| CN102494639A (en) * | 2011-10-18 | 2012-06-13 | 北京理工大学 | Laser divergence angle measuring device and measuring method based on full-automatic hole alignment method |
-
2013
- 2013-12-20 CN CN201310713857.3A patent/CN103645471B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4212540A (en) * | 1978-11-29 | 1980-07-15 | Rca Corporation | Testing the divergence of a beam from a laser |
| CN1635354A (en) * | 2003-12-26 | 2005-07-06 | 中国科学院半导体研究所 | Laser divergence angle measuring instrument and measuring method |
| CN101005191A (en) * | 2006-12-19 | 2007-07-25 | 大连海事大学 | Method and its device for detecting high energy semiconductor laser divergence angle |
| CN201725463U (en) * | 2010-08-09 | 2011-01-26 | 张昊卢 | Teaching experiment teaching aid for measuring divergence angle |
| CN102494639A (en) * | 2011-10-18 | 2012-06-13 | 北京理工大学 | Laser divergence angle measuring device and measuring method based on full-automatic hole alignment method |
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