CN102494639B - Laser divergence angle measuring device and measuring method based on full-automatic hole alignment method - Google Patents
Laser divergence angle measuring device and measuring method based on full-automatic hole alignment method Download PDFInfo
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- CN102494639B CN102494639B CN201110317316XA CN201110317316A CN102494639B CN 102494639 B CN102494639 B CN 102494639B CN 201110317316X A CN201110317316X A CN 201110317316XA CN 201110317316 A CN201110317316 A CN 201110317316A CN 102494639 B CN102494639 B CN 102494639B
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Abstract
The invention provides a laser divergence angle measuring device based on the full-automatic hole alignment method, which comprises a computing control unit, a stepping motor controller and a laser. A long-focus length, a hole diaphragm array, a reflector and a CCD (charge coupled device) are sequentially arranged in the horizontal advancing direction of a laser beam generated from the laser, wherein the hole diaphragm array is provided with a plurality of light transmitting holes and located on the focus of the long-focus lens, the reflector and the laser beam form the included angle of 45 degrees, an energy meter is arranged on a vertical light path of the light beam after the light beam is reflected by the reflector, a two-dimensional electric control translation platform is connected to the hole diaphragm array, a one-dimensional electric control translation platform is connected to the reflector, and the computing control unit is connected with the stepping motor controller, the CCD and the energy meter respectively. The two-dimensional translation platform is controlled to move by control signals so that the center of each light transmitting hole is coincided with the center of each laser light spot. High precision in alignment is achieved and the laser divergence angle computed by the device is more accurate.
Description
Technical field
The present invention relates to a kind of measurement mechanism based on full-automatic over laser beam divergence and measuring method, belong to the optical detective technology field.
Background technology
Laser beam divergence is the Important Parameters that characterizes the laser beam quality quality, therefore it is measured and is very necessary and has the practical application meaning.The laser beam divergence measurement refers to far-field divergence angle measured under far field condition, and its focal length and light beam with lens is relevant at the spot radius at lens focus place, with a tight waist location-independent of lens distance laser beam.Having now utilizes laser intensity to drop to the 1/e of center usually
2Corresponding aperture bore D calculates the angle of divergence of laser beam, the i.e. angle of divergence θ of laser beam=2tan
-1(D/2f), f by laser beam the focal length of lens of process.
Calculating 1/e
2During the corresponding aperture bore of light intensity D, need to aim at the center of aperture the laser beam center.Adopt at present usually manual method to aim at, but only with human eye, can't accurately judge beam center and aperture center, thereby cause measuring result error large and can't accurately weigh; In addition, it is to realize by the aperture of manually choosing different-diameter that original over is measured the angle of divergence, need aim at for each aperture, so measuring process is loaded down with trivial details.
Summary of the invention
The purpose of this invention is to provide a kind of measurement mechanism based on full-automatic over laser beam divergence and measuring method, this measurement mechanism can automatically be measured laser beam divergence, and measuring accuracy is high, and measuring process is simple.
Realize that technical scheme of the present invention is as follows:
A kind of measurement mechanism based on full-automatic over laser beam divergence, comprise calculation control unit, controllor for step-by-step motor and laser instrument, produce along laser instrument on the horizontal working direction of laser beam and be provided with successively long focus lens, with aperture array, catoptron and the CCD of a plurality of printing opacity apertures, wherein the aperture array is on the focal length of long focus lens, and catoptron and laser beam are in angle of 45 degrees; Laser beam forms after mirror reflects vertical optical path is provided with energy meter; Be connected with two-dimentional electronic control translation stage on the aperture array, be connected with the one dimension electronic control translation stage on catoptron; Calculation control unit is connected with controllor for step-by-step motor, CCD and energy meter respectively;
Calculation control unit comprises image processing module, image calculation module, signal generation module, control module and data processing module;
Image processing module is used for that the light spot image that CCD gathers is carried out filtering to be processed, and obtains the light spot image of filter out background noise;
The image calculation module is used for the light spot image of filter out background noise is resolved the center position coordinates of obtaining laser facula
The signal generation module is used for according to the center of each printing opacity aperture of aperture array of storing in advance and described
Generate control signal and be transferred to control module;
Control module is controlled the movement of one dimension electronic control translation stage by controllor for step-by-step motor, the control signal that the control module utilization receives, by the movement of controllor for step-by-step motor two dimension electronic control translation stage, makes the center of laser facula and the center superposition of light hole;
The laser energy E that data processing module received energy meter transmits, utilize polynomial fitting method to obtain the laser intensity distribution curve that is respectively the transverse and longitudinal coordinate with printing opacity hole diameter D and energy E, calculates laser beam divergence.
More preferably, described image processing module is treated to the light spot image that receives: image processing module receives several light spot images and averages the acquisition the average image, and further utilize gray threshold to cut apart the average image, again the image after cutting apart being carried out gray scale processes, and utilize the image after the grain size analysis method is processed gray scale to carry out denoising, obtain finally the light spot image of filter out background noise.
Based on the measuring method of the measurement mechanism of full-automatic over laser beam divergence, concrete steps are:
Step 1, laser instrument send laser, and the control module of calculation control unit is regulated two dimension by controllor for step-by-step motor and controlled translation stage, make the maximum transmission aperture on the aperture array be on laser optical path, and laser beam can without hindrancely pass through; Control module is regulated one dimension by controllor for step-by-step motor and is controlled translation stage simultaneously, makes catoptron not be positioned on laser optical path;
Step 2, CCD continuous acquisition representation of laser facula, and be transferred to image processing module, image processing module is processed the light spot image that receives, and obtains the light spot image of filter out background noise;
Step 3, image calculation module are resolved the light spot image of filter out background noise, obtain the center position coordinates of laser facula
The center of maximum transmission aperture and described in the aperture array of step 4, the storage in advance of signal generation module basis
Generate control signal and be transferred to control module;
Step 5, control module, according to the control signal that receives, are controlled two-dimentional electronic control translation stage by controllor for step-by-step motor and are made the center of laser facula and the center superposition of described maximum transmission aperture;
Step 6, control module are controlled the one dimension electronic control translation stage by controllor for step-by-step motor, make catoptron be positioned on laser optical path;
Step 7, energy meter collection laser energy E at this moment, and be transferred to data processing module;
Step 8, be directed to each in other printing opacity aperture on the aperture array, the signal generation module generates control signal according to the relative position relation between each printing opacity aperture of storage in advance and is transferred to control module, control module is regulated two dimension according to the control signal that receives and is controlled the movement of translation stage, make the center of printing opacity aperture and the center superposition of laser facula, energy meter gathers laser energy E corresponding to each printing opacity aperture and is transferred to data processing module;
Step 9, data processing module, according to the diameter D of the laser energy E that receives and each printing opacity aperture, are utilized polynomial fitting method to obtain being respectively with diameter D and energy E the laser intensity distribution curve of transverse and longitudinal coordinate, and then are calculated laser beam divergence.
Beneficial effect
The present invention obtains laser spot center by gathering light spot image, the center of printing opacity aperture in the aperture array that utilizes spot center and store in advance, generate control signal and control the movement of two-dimentional electronic control translation stage, make the center of printing opacity aperture overlap with laser spot center, the degree of accuracy of its aligning is high, and the laser beam divergence of calculating is more accurate.
Secondly, the present invention is because the position of each printing opacity aperture in the aperture array is relatively fixing, therefore when obtaining successively laser energy corresponding to each printing opacity aperture, need not to carry out centering processes, as long as calculation control unit is according to the relative position relation between each aperture of storage in advance, and the action of controlling two-dimentional electronic control translation stage makes the center of each aperture and the centering of laser spot center.
Description of drawings
Fig. 1 is the schematic diagram that the present invention is based on the measurement mechanism of full-automatic over laser beam divergence.
Fig. 2 is the structural representation of calculation control unit of the present invention.
Fig. 3 is the process flow diagram that calculation control unit of the present invention is processed light spot image.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further elaborated.
As shown in Figure 1, the present invention is based on the measurement mechanism of full-automatic over laser beam divergence, comprise calculation control unit, controllor for step-by-step motor and laser instrument, produce along laser instrument on the horizontal working direction of laser beam and be provided with successively long focus lens, with aperture array, catoptron and the CCD of a plurality of printing opacity apertures, wherein the aperture array is on the focal length of long focus lens, and catoptron and laser beam are in angle of 45 degrees; Laser beam forms after mirror reflects vertical optical path is provided with energy meter; Be connected with two-dimentional electronic control translation stage on the aperture array, be connected with the one dimension electronic control translation stage on catoptron; Calculation control unit is connected with controllor for step-by-step motor, CCD and energy meter respectively.The present embodiment is better chooses aperture array with 12 printing opacity apertures, and the diameter of 12 printing opacity apertures is order from large to small, is followed successively by 12mm, 8mm, 6mm, 4mm, 3mm, 2mm, 1mm, 0.8mm, 0.6mm, 0.4mm, 0.2mm and 0.1mm.The selection of hole diameter size is to determine according to the size of measured laser product kind beam divergence angle, and largest hole 12mm can guarantee that laser is fully unobstructedly by (can measure whole emitted energies of laser).
Calculation control unit has adopted advanced in the world observing and controlling dedicated development instrument LabVIEW to develop, and has improved development efficiency and development quality, software interface simple optimizing, convenient operation librarian use and control and test.Calculation control unit comprises image processing module, image calculation module, signal generation module, control module and data processing module;
Image processing module is used for the light spot image that CCD gathers is processed, and obtains the light spot image of filter out background noise;
The image calculation module is used for the light spot image of filter out background noise is resolved the center position coordinates of obtaining laser facula
The signal generation module is used for according to the center of each printing opacity aperture of aperture array of storing in advance and described
Generate control signal and be transferred to control module;
Control module is controlled the movement of one dimension electronic control translation stage by controllor for step-by-step motor, the control signal that the control module utilization receives, by the movement of controllor for step-by-step motor two dimension electronic control translation stage, makes the center of laser facula and the center superposition of light hole;
The laser energy E that data processing module received energy meter transmits, utilize polynomial fitting method to obtain the laser intensity distribution curve that is respectively the transverse and longitudinal coordinate with printing opacity hole diameter D and energy E, calculates laser beam divergence.
Below the concrete processing procedure of image processing module is elaborated:
In order to calculate exactly the center of laser facula, image processing module receives several light spot images, and better reception 5 width light spot images average the acquisition the average image; And further utilize gray threshold to cut apart the average image, for example lower than 200 of threshold values, think the image dark background, thereby roughly be partitioned into laser facula from the average image; Image processing module carries out gray scale to the light spot image after cutting apart to be processed, and described gray scale is treated to: all gray-scale values in light spot image are encoded, and the every gradation of image of reservation higher than threshold value 200 value, and lower than the gray scale of threshold value 200, be set to 0, that is:
G
0(m, n) is the original image gray-scale value
Owing to having many spuious bright spots in the image after the gray scale processing, these bright spots need to be filtered these bright spots by the method for grain size analysis (Particle Analysis); Therefore utilize the image after the grain size analysis method is processed gray scale to carry out denoising, obtain the light spot image of filter out background noise.The specific implementation process is: at first identify all connection bright spots (comprising maximum connection bright spot hot spot), then the filtering area is less than all bright spots of maximum bright spot (hot spot) area 10% and its relevant range gray scale is set to 0, and the last image that obtains is the image that removes ground unrest.
As shown in Figure 3, utilize above-mentioned measurement mechanism to measure the method for laser beam divergence, concrete steps are:
Step 1, laser instrument send laser, and the control module of calculation control unit is regulated two dimension by controllor for step-by-step motor and controlled translation stage, make the maximum transmission aperture on the aperture array be on laser optical path, and laser beam can without hindrancely pass through; Control module is regulated one dimension by controllor for step-by-step motor and is controlled translation stage simultaneously, makes catoptron not be positioned on laser optical path.
Step 2, CCD continuous acquisition representation of laser facula, and be transferred to image processing module, image processing module carries out filtering to the light spot image that receives to be processed, and obtains the light spot image of filter out background noise.
Step 3, image calculation module resolve to the light spot image of filter out background noise the center position coordinates of obtaining laser facula
The center of maximum transmission aperture and described in the aperture array of step 4, the storage in advance of signal generation module basis
Generate control signal and be transferred to control module; Wherein said control signal represent described center with
Corresponding residual quantity, i.e. expression two dimension is controlled translation stage need to move on x direction and y direction amount.
Step 5, control module, according to the control signal that receives, are controlled two-dimentional electronic control translation stage by controllor for step-by-step motor and are made the center of laser facula and the center superposition of described maximum transmission aperture.
Step 6, control module are controlled the one dimension electronic control translation stage by controllor for step-by-step motor, make catoptron be positioned on laser optical path.
Step 7, energy meter collection laser energy E at this moment, and be transferred to data processing module.
Step 8, due to the aperture array in processing with while installing, guaranteed the relatively fixing of each printing opacity aperture center, therefore the center of each printing opacity aperture and relative position can obtain when installing, only need to carry out the centering at spot center and aperture center in whole measuring process, while for other printing opacity aperture, obtaining energy, as long as realize two dimension is controlled the movement of translation stage according to the relative position relation of storing, therefore when not reducing measuring accuracy, greatly reduce the time of measuring, simplified the step of measuring.
This step is directed to each in other printing opacity aperture on the aperture array, the signal generation module generates control signal according to the relative position relation between each printing opacity aperture of storage in advance and is transferred to control module, control module is regulated two dimension according to the control signal that receives and is controlled the movement of translation stage, make the center of printing opacity aperture and the center superposition of laser facula, energy meter gathers laser energy E corresponding to each printing opacity aperture and is transferred to data processing module.
Step 9, this moment, data processing unit received 12 corresponding laser energy E of aperture; Data processing module, according to the diameter D of the laser energy E that receives and each printing opacity aperture, utilizes polynomial fitting method to obtain being respectively with diameter D and energy E the laser intensity distribution curve of transverse and longitudinal coordinate, utilizes this curve acquisition to find E
0With the ratio of E be 1/e
2The i.e. hole diameter of 0.86 o'clock, and then calculate laser beam divergence.
Although described by reference to the accompanying drawings the specific embodiment of the present invention,, for those skilled in the art, under the premise of not departing from the present invention, can also do some distortion, replacement and improvement, these also are considered as belonging to protection scope of the present invention.
Claims (3)
1. measurement mechanism based on full-automatic over laser beam divergence, it is characterized in that, comprise calculation control unit, controllor for step-by-step motor and laser instrument, produce along laser instrument on the horizontal working direction of laser beam and be provided with successively long focus lens, with aperture array, catoptron and the CCD of a plurality of printing opacity apertures, wherein the aperture array is on the focal length of long focus lens, and catoptron and laser beam are in angle of 45 degrees; Laser beam forms after mirror reflects vertical optical path is provided with energy meter; Be connected with two-dimentional electronic control translation stage on the aperture array, be connected with the one dimension electronic control translation stage on catoptron; Calculation control unit is connected with controllor for step-by-step motor, CCD and energy meter respectively;
Calculation control unit comprises image processing module, image calculation module, signal generation module, control module and data processing module;
Image processing module is used for that the light spot image that CCD gathers is carried out filtering to be processed, and obtains the light spot image of filter out background noise;
The image calculation module is used for the light spot image of filter out background noise is resolved the center position coordinates of obtaining laser facula
The signal generation module is used for center and the described center position coordinates according to each printing opacity aperture of aperture array of storing in advance
Generate control signal and be transferred to control module;
Control module is controlled the movement of one dimension electronic control translation stage by controllor for step-by-step motor, the control signal that the control module utilization receives, by the movement of controllor for step-by-step motor two dimension electronic control translation stage, makes the center of laser facula and the center superposition of light hole;
The laser energy E that data processing module received energy meter transmits, utilize polynomial fitting method to obtain the laser intensity distribution curve that is respectively the transverse and longitudinal coordinate with printing opacity hole diameter D and energy E, calculates laser beam divergence.
2. measurement mechanism according to claim 1, it is characterized in that, described image processing module is treated to the light spot image that receives: image processing module receives several light spot images and averages the acquisition the average image, and further utilize gray threshold to cut apart the average image, again the image after cutting apart being carried out gray scale processes, and utilize the image after the grain size analysis method is processed gray scale to carry out denoising, obtain finally the light spot image of filter out background noise.
3. utilize the measuring method of the described measurement mechanism of claim 1, it is characterized in that, it is characterized in that,
Step 1, laser instrument send laser, and the control module of calculation control unit is regulated two dimension by controllor for step-by-step motor and controlled translation stage, make the maximum transmission aperture on the aperture array be on laser optical path, and laser beam can without hindrancely pass through; Control module is regulated one dimension by controllor for step-by-step motor and is controlled translation stage simultaneously, makes catoptron not be positioned on laser optical path;
Step 2, CCD continuous acquisition representation of laser facula, and be transferred to image processing module, image processing module is processed the light spot image that receives, and obtains the light spot image of filter out background noise;
Step 3, image calculation module are resolved the light spot image of filter out background noise, obtain the center position coordinates of laser facula
Center and the described center position coordinates of maximum transmission aperture in the aperture array of step 4, the storage in advance of signal generation module basis
Generate control signal and be transferred to control module;
Step 5, control module, according to the control signal that receives, are controlled two-dimentional electronic control translation stage by controllor for step-by-step motor and are made the center of laser facula and the center superposition of described maximum transmission aperture;
Step 6, control module are controlled the one dimension electronic control translation stage by controllor for step-by-step motor, make catoptron be positioned on laser optical path;
Step 7, energy meter collection laser energy E at this moment, and be transferred to data processing module;
Step 8, be directed to each in other printing opacity aperture on the aperture array, the signal generation module generates control signal according to the relative position relation between each printing opacity aperture of storage in advance and is transferred to control module, control module is regulated two dimension according to the control signal that receives and is controlled the movement of translation stage, make the center of printing opacity aperture and the center superposition of laser facula, energy meter gathers laser energy E corresponding to each printing opacity aperture and is transferred to data processing module;
Step 9, data processing module, according to the diameter D of the laser energy E that receives and each printing opacity aperture, are utilized polynomial fitting method to obtain being respectively with diameter D and energy E the laser intensity distribution curve of transverse and longitudinal coordinate, and then are calculated laser beam divergence.
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