CN102422195B - 提供耦合至受限旋转的马达的改进性能的扫描镜的系统与方法 - Google Patents

提供耦合至受限旋转的马达的改进性能的扫描镜的系统与方法 Download PDF

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Publication number
CN102422195B
CN102422195B CN201080018344.5A CN201080018344A CN102422195B CN 102422195 B CN102422195 B CN 102422195B CN 201080018344 A CN201080018344 A CN 201080018344A CN 102422195 B CN102422195 B CN 102422195B
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CN
China
Prior art keywords
mirror
rotation
high density
density material
axis
Prior art date
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Application number
CN201080018344.5A
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English (en)
Chinese (zh)
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CN102422195A (zh
Inventor
D·C·布朗
A·I·皮纳德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wanda
Novanta Technologies UK Ltd
Original Assignee
Cambridge Technology Inc
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D3/00—Yielding couplings, i.e. with means permitting movement between the connected parts during the drive
    • F16D3/80—Yielding couplings, i.e. with means permitting movement between the connected parts during the drive in which a fluid is used
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/10—Suppression of vibrations in rotating systems by making use of members moving with the system
    • F16F15/12—Suppression of vibrations in rotating systems by making use of members moving with the system using elastic members or friction-damping members, e.g. between a rotating shaft and a gyratory mass mounted thereon
    • F16F15/1202—Suppression of vibrations in rotating systems by making use of members moving with the system using elastic members or friction-damping members, e.g. between a rotating shaft and a gyratory mass mounted thereon the damping action being at least partially controlled by centrifugal masses
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/10—Suppression of vibrations in rotating systems by making use of members moving with the system
    • F16F15/16—Suppression of vibrations in rotating systems by making use of members moving with the system using a fluid or pasty material
    • F16F15/161—Suppression of vibrations in rotating systems by making use of members moving with the system using a fluid or pasty material characterised by the fluid damping devices, e.g. passages, orifices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F7/00—Vibration-dampers; Shock-absorbers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F7/00—Vibration-dampers; Shock-absorbers
    • F16F7/01—Vibration-dampers; Shock-absorbers using friction between loose particles, e.g. sand
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2222/00—Special physical effects, e.g. nature of damping effects
    • F16F2222/04—Friction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2222/00—Special physical effects, e.g. nature of damping effects
    • F16F2222/08—Inertia

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
CN201080018344.5A 2009-04-23 2010-04-21 提供耦合至受限旋转的马达的改进性能的扫描镜的系统与方法 Active CN102422195B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17195209P 2009-04-23 2009-04-23
US61/171,952 2009-04-23
PCT/US2010/031875 WO2010123977A1 (en) 2009-04-23 2010-04-21 Systems and methods of providing improved performance of scanning mirrors coupled to limited rotation motors

Publications (2)

Publication Number Publication Date
CN102422195A CN102422195A (zh) 2012-04-18
CN102422195B true CN102422195B (zh) 2016-01-13

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CN201080018344.5A Active CN102422195B (zh) 2009-04-23 2010-04-21 提供耦合至受限旋转的马达的改进性能的扫描镜的系统与方法

Country Status (6)

Country Link
US (1) US8284470B2 (cg-RX-API-DMAC7.html)
EP (1) EP2422234B1 (cg-RX-API-DMAC7.html)
JP (1) JP5693564B2 (cg-RX-API-DMAC7.html)
KR (1) KR101757277B1 (cg-RX-API-DMAC7.html)
CN (1) CN102422195B (cg-RX-API-DMAC7.html)
WO (1) WO2010123977A1 (cg-RX-API-DMAC7.html)

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US9077219B2 (en) 2011-09-26 2015-07-07 Pangolin Laser Systems, Inc. Electromechanical limited rotation rotary actuator
US10734857B2 (en) 2011-09-26 2020-08-04 Pangolin Laser Systems, Inc. Electromechanical limited rotation rotary actuator and method employing segmented coils
US9270144B2 (en) 2011-09-26 2016-02-23 William R. Benner, Jr. High torque low inductance rotary actuator
US10284038B1 (en) 2011-09-26 2019-05-07 Pangolin Laser Systems, Inc. Electromechanical limited rotation rotary actuator and method employing segmented coils
US9195061B1 (en) 2013-01-28 2015-11-24 William R. Benner, Jr. Scanning mirror system and associated methods
US9530559B2 (en) 2013-01-30 2016-12-27 William R. Benner, Jr. Multi-turn electrical coil and fabricating device and associated methods
US9366860B1 (en) 2013-02-04 2016-06-14 William R. Benner, Jr. Mirror scanning control system and method
CN111097969B (zh) * 2019-12-17 2024-06-11 天津大学 一种可拓展带宽的旋转超声加工装置
TWI737334B (zh) * 2020-06-03 2021-08-21 國立中央大學 動平衡裝置及維持動平衡且兼具減少振動之方法

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Also Published As

Publication number Publication date
CN102422195A (zh) 2012-04-18
US8284470B2 (en) 2012-10-09
EP2422234A1 (en) 2012-02-29
WO2010123977A1 (en) 2010-10-28
EP2422234B1 (en) 2018-02-28
KR20120024551A (ko) 2012-03-14
US20100271679A1 (en) 2010-10-28
KR101757277B1 (ko) 2017-07-13
JP5693564B2 (ja) 2015-04-01
JP2012524915A (ja) 2012-10-18

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