CN102403027B - 存储元件和存储装置 - Google Patents
存储元件和存储装置 Download PDFInfo
- Publication number
- CN102403027B CN102403027B CN201110259029.8A CN201110259029A CN102403027B CN 102403027 B CN102403027 B CN 102403027B CN 201110259029 A CN201110259029 A CN 201110259029A CN 102403027 B CN102403027 B CN 102403027B
- Authority
- CN
- China
- Prior art keywords
- layer
- magnetization
- film
- memory element
- accumulation layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
- H10B61/20—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
- H10B61/22—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Materials of the active region
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010201526A JP2012059906A (ja) | 2010-09-09 | 2010-09-09 | 記憶素子、メモリ装置 |
| JP2010-201526 | 2010-09-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102403027A CN102403027A (zh) | 2012-04-04 |
| CN102403027B true CN102403027B (zh) | 2016-09-07 |
Family
ID=45806599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110259029.8A Active CN102403027B (zh) | 2010-09-09 | 2011-09-02 | 存储元件和存储装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (3) | US9025362B2 (enExample) |
| JP (1) | JP2012059906A (enExample) |
| CN (1) | CN102403027B (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9299923B2 (en) | 2010-08-24 | 2016-03-29 | Samsung Electronics Co., Ltd. | Magnetic devices having perpendicular magnetic tunnel junction |
| US8907436B2 (en) | 2010-08-24 | 2014-12-09 | Samsung Electronics Co., Ltd. | Magnetic devices having perpendicular magnetic tunnel junction |
| JP5786341B2 (ja) * | 2010-09-06 | 2015-09-30 | ソニー株式会社 | 記憶素子、メモリ装置 |
| JP5742142B2 (ja) * | 2010-09-08 | 2015-07-01 | ソニー株式会社 | 記憶素子、メモリ装置 |
| JP2012059906A (ja) | 2010-09-09 | 2012-03-22 | Sony Corp | 記憶素子、メモリ装置 |
| US9647202B2 (en) * | 2011-02-16 | 2017-05-09 | Avalanche Technology, Inc. | Magnetic random access memory with perpendicular enhancement layer |
| US9337417B2 (en) * | 2010-12-10 | 2016-05-10 | Avalanche Technology, Inc. | Magnetic random access memory with perpendicular interfacial anisotropy |
| JP2012064623A (ja) * | 2010-09-14 | 2012-03-29 | Sony Corp | 記憶素子、メモリ装置 |
| CN104285291B (zh) * | 2012-05-16 | 2017-06-20 | 索尼公司 | 存储设备和存储器件 |
| JP6244617B2 (ja) * | 2012-09-28 | 2017-12-13 | ソニー株式会社 | 記憶素子、記憶装置、磁気ヘッド |
| JP6182993B2 (ja) | 2013-06-17 | 2017-08-23 | ソニー株式会社 | 記憶素子、記憶装置、記憶素子の製造方法、磁気ヘッド |
| US20170200884A1 (en) * | 2014-08-05 | 2017-07-13 | Intel Corporation | Configurations and techniques to increase interfacial anisotropy of magnetic tunnel junctions |
| US9385307B2 (en) | 2014-10-01 | 2016-07-05 | Kabushiki Kaisha Toshiba | Magnetoresistive element and method of manufacturing the same |
| US10672420B2 (en) * | 2015-03-05 | 2020-06-02 | Sony Corporation | Storage device, storage apparatus, magnetic head, and electronic apparatus |
| CN107564931A (zh) * | 2016-07-06 | 2018-01-09 | 中电海康集团有限公司 | 一种基于共源电阻技术的磁性随机存取存储器及其共源结构制造工艺 |
| US9934798B1 (en) * | 2016-09-28 | 2018-04-03 | Seagate Technology Llc | Lateral spin valve reader with vertically-integrated two-dimensional semiconducting channel |
| CN108008326B (zh) * | 2016-10-31 | 2020-11-24 | 南京大学 | 一种调控mram材料阻尼因子的方法 |
| WO2019049244A1 (ja) * | 2017-09-06 | 2019-03-14 | Tdk株式会社 | トンネル磁気抵抗効果素子及び磁気メモリ |
| US10381403B1 (en) * | 2018-06-21 | 2019-08-13 | Globalfoundries Singapore Pte. Ltd. | MRAM device with improved seal ring and method for producing the same |
| US10892299B2 (en) * | 2018-07-31 | 2021-01-12 | International Business Machines Corporation | Magnetic field controlled transistor |
| JP2020043134A (ja) | 2018-09-06 | 2020-03-19 | キオクシア株式会社 | 磁気記憶装置 |
| CN114068613B (zh) * | 2020-08-05 | 2025-11-25 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构及其形成方法 |
| JP2023042247A (ja) | 2021-09-14 | 2023-03-27 | キオクシア株式会社 | メモリデバイス |
| CN115188882A (zh) * | 2022-07-08 | 2022-10-14 | 中国科学技术大学 | 一种用于调控金属性铁磁体磁性的器件、制备方法及其应用 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101064358A (zh) * | 2006-04-28 | 2007-10-31 | 株式会社东芝 | 磁阻元件及其制造方法 |
| CN101154707A (zh) * | 2006-09-29 | 2008-04-02 | 株式会社东芝 | 磁阻效应器件以及使用它的磁性随机存取存储器 |
| CN101266831A (zh) * | 2007-03-15 | 2008-09-17 | 索尼株式会社 | 存储元件和存储器 |
| US7576956B2 (en) * | 2004-07-26 | 2009-08-18 | Grandis Inc. | Magnetic tunnel junction having diffusion stop layer |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6130814A (en) | 1998-07-28 | 2000-10-10 | International Business Machines Corporation | Current-induced magnetic switching device and memory including the same |
| JP2002329905A (ja) * | 2001-05-02 | 2002-11-15 | Fujitsu Ltd | Cpp構造磁気抵抗効果素子およびその製造方法 |
| JP2003017782A (ja) | 2001-07-04 | 2003-01-17 | Rikogaku Shinkokai | キャリヤスピン注入磁化反転型磁気抵抗効果膜と該膜を用いた不揮発性メモリー素子及び該素子を用いたメモリー装置 |
| JP4300117B2 (ja) * | 2002-02-28 | 2009-07-22 | 明治製菓株式会社 | ダニのガレクチン |
| JP4100025B2 (ja) | 2002-04-09 | 2008-06-11 | ソニー株式会社 | 磁気抵抗効果素子及び磁気メモリ装置 |
| US6654278B1 (en) * | 2002-07-31 | 2003-11-25 | Motorola, Inc. | Magnetoresistance random access memory |
| EP2249356A1 (en) * | 2002-12-13 | 2010-11-10 | Japan Science and Technology Agency | Spin injection device, magnetic apparatus using the same, and magnetic thin film used for them |
| US7075822B2 (en) * | 2002-12-31 | 2006-07-11 | Intel Corporation | High bandwidth datapath load and test of multi-level memory cells |
| US6845038B1 (en) * | 2003-02-01 | 2005-01-18 | Alla Mikhailovna Shukh | Magnetic tunnel junction memory device |
| DE602005001850T2 (de) * | 2004-01-26 | 2008-04-17 | Nimblegen Systems, Inc., Madison | Computersoftware zur unterstützung der identifikation von snps mit microarrays |
| US7242045B2 (en) | 2004-02-19 | 2007-07-10 | Grandis, Inc. | Spin transfer magnetic element having low saturation magnetization free layers |
| US7241631B2 (en) * | 2004-12-29 | 2007-07-10 | Grandis, Inc. | MTJ elements with high spin polarization layers configured for spin-transfer switching and spintronics devices using the magnetic elements |
| US7289356B2 (en) * | 2005-06-08 | 2007-10-30 | Grandis, Inc. | Fast magnetic memory devices utilizing spin transfer and magnetic elements used therein |
| TWI304586B (en) * | 2006-03-20 | 2008-12-21 | Univ Nat Yunlin Sci & Tech | System for reducing critical current of magnetic random access memory |
| ATE527527T1 (de) * | 2006-05-30 | 2011-10-15 | Acreo Ab | Vorrichtung, kit und verfahren zur überwachung einer parameterhistorie |
| JP2008085208A (ja) * | 2006-09-28 | 2008-04-10 | Fujitsu Ltd | トンネル磁気抵抗素子、磁気ヘッドおよび磁気メモリ |
| JP2008109118A (ja) * | 2006-09-29 | 2008-05-08 | Toshiba Corp | 磁気抵抗効果素子およびそれを用いた磁気ランダムアクセスメモリ |
| JP2008130807A (ja) * | 2006-11-21 | 2008-06-05 | Toshiba Corp | 磁気ランダムアクセスメモリ及びその製造方法 |
| US7598579B2 (en) * | 2007-01-30 | 2009-10-06 | Magic Technologies, Inc. | Magnetic tunnel junction (MTJ) to reduce spin transfer magnetization switching current |
| JP2009081315A (ja) * | 2007-09-26 | 2009-04-16 | Toshiba Corp | 磁気抵抗素子及び磁気メモリ |
| US20090122450A1 (en) * | 2007-11-08 | 2009-05-14 | Headway Technologies, Inc. | TMR device with low magnetostriction free layer |
| WO2009133650A1 (ja) * | 2008-05-02 | 2009-11-05 | 国立大学法人大阪大学 | 磁化制御方法、情報記憶方法、情報記憶素子及び磁気機能素子 |
| JP4952725B2 (ja) * | 2009-01-14 | 2012-06-13 | ソニー株式会社 | 不揮発性磁気メモリ装置 |
| WO2011111473A1 (ja) * | 2010-03-10 | 2011-09-15 | 株式会社日立製作所 | 磁気抵抗効果素子及び磁気メモリ |
| JP5725735B2 (ja) * | 2010-06-04 | 2015-05-27 | 株式会社日立製作所 | 磁気抵抗効果素子及び磁気メモリ |
| US8604572B2 (en) * | 2010-06-14 | 2013-12-10 | Regents Of The University Of Minnesota | Magnetic tunnel junction device |
| JP2012059906A (ja) * | 2010-09-09 | 2012-03-22 | Sony Corp | 記憶素子、メモリ装置 |
| JP5740878B2 (ja) * | 2010-09-14 | 2015-07-01 | ソニー株式会社 | 記憶素子、メモリ装置 |
-
2010
- 2010-09-09 JP JP2010201526A patent/JP2012059906A/ja active Pending
-
2011
- 2011-08-29 US US13/219,875 patent/US9025362B2/en active Active
- 2011-09-02 CN CN201110259029.8A patent/CN102403027B/zh active Active
-
2015
- 2015-01-06 US US14/590,339 patent/US9735343B2/en active Active
-
2017
- 2017-07-11 US US15/646,544 patent/US10374146B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7576956B2 (en) * | 2004-07-26 | 2009-08-18 | Grandis Inc. | Magnetic tunnel junction having diffusion stop layer |
| CN101064358A (zh) * | 2006-04-28 | 2007-10-31 | 株式会社东芝 | 磁阻元件及其制造方法 |
| CN101154707A (zh) * | 2006-09-29 | 2008-04-02 | 株式会社东芝 | 磁阻效应器件以及使用它的磁性随机存取存储器 |
| CN101266831A (zh) * | 2007-03-15 | 2008-09-17 | 索尼株式会社 | 存储元件和存储器 |
Also Published As
| Publication number | Publication date |
|---|---|
| US9735343B2 (en) | 2017-08-15 |
| US20180006211A1 (en) | 2018-01-04 |
| US10374146B2 (en) | 2019-08-06 |
| US20120063220A1 (en) | 2012-03-15 |
| JP2012059906A (ja) | 2012-03-22 |
| US9025362B2 (en) | 2015-05-05 |
| CN102403027A (zh) | 2012-04-04 |
| US20150145080A1 (en) | 2015-05-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |