CN102353522B - 合成物方表面的全数值孔径图的方法 - Google Patents

合成物方表面的全数值孔径图的方法 Download PDF

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Publication number
CN102353522B
CN102353522B CN201110170847.0A CN201110170847A CN102353522B CN 102353522 B CN102353522 B CN 102353522B CN 201110170847 A CN201110170847 A CN 201110170847A CN 102353522 B CN102353522 B CN 102353522B
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aperture
error
sub
wavefront
instrument
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Chinese (zh)
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CN102353522A (zh
Inventor
保罗.E.墨菲
德拉吉沙.米拉迪诺维克
格雷格.W.福布斯
加里.M.德弗里斯
乔恩.F.弗莱格
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QED Technologies International LLC
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QED Technologies International LLC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02085—Combining two or more images of different regions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Signal Processing (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CN201110170847.0A 2005-04-05 2006-04-05 合成物方表面的全数值孔径图的方法 Active CN102353522B (zh)

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US66838505P 2005-04-05 2005-04-05
US60/668,385 2005-04-05

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CN2006800099078A Division CN101268331B (zh) 2005-04-05 2006-04-05 非球面的精确高分辨率测量方法

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CN102353522B true CN102353522B (zh) 2014-11-05

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CN201110170847.0A Active CN102353522B (zh) 2005-04-05 2006-04-05 合成物方表面的全数值孔径图的方法
CN2006800099078A Active CN101268331B (zh) 2005-04-05 2006-04-05 非球面的精确高分辨率测量方法
CN201110170466.2A Active CN102288390B (zh) 2005-04-05 2006-04-05 确定波前测量仪表的第一级光学参数和图像共轭的方法

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CN201110170466.2A Active CN102288390B (zh) 2005-04-05 2006-04-05 确定波前测量仪表的第一级光学参数和图像共轭的方法

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US (1) US7433057B2 (enExample)
EP (1) EP1869401B1 (enExample)
JP (1) JP4917088B2 (enExample)
KR (4) KR101393171B1 (enExample)
CN (3) CN102353522B (enExample)
WO (1) WO2006107985A2 (enExample)

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CN103439090B (zh) * 2013-09-01 2015-11-18 中国科学院光电技术研究所 一种用于子孔径拼接检测的数据采样路径规划方法
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JP6306724B2 (ja) 2014-01-09 2018-04-04 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ 非球面およびその他の非平坦面のトポグラフィの測定
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WO2016098469A1 (ja) * 2014-12-16 2016-06-23 富士フイルム株式会社 形状測定装置及び形状測定方法
JP6558975B2 (ja) * 2015-06-22 2019-08-14 キヤノン株式会社 形状計測方法、形状計測装置および形状計測プログラム
CN105423948B (zh) * 2015-12-14 2018-10-16 中国科学院长春光学精密机械与物理研究所 采用变形镜的拼接干涉检测非球面面形的装置
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CN109997010B (zh) * 2016-11-18 2022-06-24 齐戈股份有限公司 用于优化干涉仪的光学性能的方法及设备
CN106768892A (zh) * 2016-12-28 2017-05-31 中国计量大学 基于哈特曼‑夏克波前传感器的自由曲面镜片波面拼接方法
CN109425313B (zh) * 2017-08-30 2022-12-13 上汽通用汽车有限公司 手持光泽仪定位装置及手持光泽仪套件
CN107796329B (zh) * 2017-09-29 2019-08-06 中国科学院长春光学精密机械与物理研究所 一种凸非球面反射镜面形检测装置及检测方法
WO2019147936A1 (en) 2018-01-26 2019-08-01 Vanderbilt University Systems and methods for non-destructive evaluation of optical material properties and surfaces
US11493751B2 (en) 2019-01-23 2022-11-08 Vanderbilt University Systems and methods for compact optical relay
CN109955148B (zh) * 2019-03-18 2023-09-22 中国工程物理研究院激光聚变研究中心 用于非球面光学元件中频波纹误差的在位检测装置及方法
CN109990983B (zh) * 2019-04-19 2020-12-11 北京理工大学 双边错位差动共焦超长焦距测量方法
CN110307962B (zh) * 2019-06-28 2020-10-27 苏州维纳仪器有限责任公司 检测光学系统任意波长透射波前的方法
CN110307963B (zh) * 2019-08-08 2020-11-03 苏州维纳仪器有限责任公司 检测透射式光学系统任意波长焦距的方法
CN111811429B (zh) * 2020-07-14 2021-04-20 北京理工大学 一种子孔径拼接干涉测量方法和装置
CN113916510B (zh) * 2021-11-23 2023-09-26 江苏北方湖光光电有限公司 基于伺服转动下的多光轴图像偏差校准方法
CN115597484B (zh) * 2022-09-26 2025-06-24 南京理工大学 一种基于多球随机的球面参考镜校正方法
CN117906913B (zh) * 2023-12-04 2024-11-15 武汉光谷航天三江激光产业技术研究院有限公司 一种高功率光学元件激光负载能力自动筛选装置及方法
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Also Published As

Publication number Publication date
US20060221350A1 (en) 2006-10-05
KR101393171B1 (ko) 2014-05-08
KR20140008470A (ko) 2014-01-21
CN101268331A (zh) 2008-09-17
CN102288390A (zh) 2011-12-21
JP4917088B2 (ja) 2012-04-18
US7433057B2 (en) 2008-10-07
KR101370171B1 (ko) 2014-03-04
EP1869401A4 (en) 2013-03-20
CN101268331B (zh) 2012-02-22
CN102288390B (zh) 2014-11-26
EP1869401A2 (en) 2007-12-26
WO2006107985A2 (en) 2006-10-12
EP1869401B1 (en) 2016-02-03
KR101459259B1 (ko) 2014-11-12
WO2006107985A3 (en) 2008-02-14
KR20130037723A (ko) 2013-04-16
CN102353522A (zh) 2012-02-15
KR101427425B1 (ko) 2014-08-08
KR20070121663A (ko) 2007-12-27
JP2008534986A (ja) 2008-08-28
KR20140008469A (ko) 2014-01-21

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