CN102254877B - 无金属底板功率模块 - Google Patents

无金属底板功率模块 Download PDF

Info

Publication number
CN102254877B
CN102254877B CN201110190237.7A CN201110190237A CN102254877B CN 102254877 B CN102254877 B CN 102254877B CN 201110190237 A CN201110190237 A CN 201110190237A CN 102254877 B CN102254877 B CN 102254877B
Authority
CN
China
Prior art keywords
copper
base plate
layer
ceramic
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201110190237.7A
Other languages
English (en)
Other versions
CN102254877A (zh
Inventor
庄伟东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NANJING YINMAO MICROELECTRONIC MANUFACTURING CO LTD
Original Assignee
NANJING YINMAO MICROELECTRONIC MANUFACTURING CO LTD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NANJING YINMAO MICROELECTRONIC MANUFACTURING CO LTD filed Critical NANJING YINMAO MICROELECTRONIC MANUFACTURING CO LTD
Priority to CN201110190237.7A priority Critical patent/CN102254877B/zh
Publication of CN102254877A publication Critical patent/CN102254877A/zh
Application granted granted Critical
Publication of CN102254877B publication Critical patent/CN102254877B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124Aluminium (Al) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

本发明涉及无金属底板功率模块,目的是提供一种消除陶瓷覆铜基板内凹的无金属底板功率模块。实现本发明目的的技术方案是:无金属底板功率模块,包括功率芯片和陶瓷覆铜基板,陶瓷覆铜基板由两侧的表面铜层、底侧铜层和中间的陶瓷层组成,陶瓷覆铜基板的表面铜层被蚀刻成所需的形状,功率芯片通过第一无铅焊料层焊接到表面铜层上,高纯铝线通过超声波键合的方式,将功率芯片与表面铜层连接成所需的电路结构;所述表面铜层的表面设有防凹陷装置。

Description

无金属底板功率模块
技术领域
本发明涉及功率电子电力器件,具体涉及一种无金属底板功率模块。
背景技术
常见功率电子模块的剖面如图1所示,功率电子芯片1通过第一无铅焊料层2焊接到陶瓷覆铜基板的表面铜层3上。陶瓷覆铜基板10的表面铜层3通常被蚀刻成设计所需的形状,然后以高纯铝线8,通过超声波键合的方式,将芯片1a、1b表面与陶瓷覆铜基板的表面铜层3连接成所需的电路结构。陶瓷覆铜基板由两侧的表面铜层3和底侧铜层5和中间的陶瓷层4组成。陶瓷材料通常为高密度氧化铝或氮化铝,它提供了功率电子模块的电气绝缘,必须能够承受数千伏的电压。同时,陶瓷层4必须具有良好的导热性能,保证模块在工作时,功率电子芯片1的结温在设计允许的范围之内。陶瓷覆铜基板底侧铜层5通过第二无铅焊料层6焊接到模块的底板7。模块底板7是模块安装到散热器表面的唯一途径。它不仅通过底板7上的安装孔位9提供模块的机械固定,而且也是模块的主要散热途径。因此,模块底板7一般选择具有高热导率的纯铜材料。功率电子模块所用材料的特性见表1。
表1:功率模块所用材料特性
Figure BDA0000074476920000011
由表1可见,功率电子模块中,各种材料的热膨胀系数有着明显的差异。芯片材料单晶硅与纯铜底板之间的热膨胀系数相差五倍以上。而氧化铝陶瓷覆铜基板与纯铜底板之间的热膨胀系数也相差两倍以上。因此,模块在焊料回流温度冷却到室温的过程中,不仅在焊料层会产生显著的热应力,而且热应力会直接导致铜底板的变形内凹。带有内凹底板的功率模块在安装到散热器时,底板与散热器表面就会存在较大的缝隙,严重影响模块的散热,从而导致模块在工作时,芯片的结温过高,引起模块的过早损坏。为了避免此现象,通常模块的底板进行反向预弯,以抵消模块制造过程中热应力的影响。
功率电子模块的焊料层通常采用铅基(有铅焊料)或锡基(无铅焊料)合金。由于这些合金的融点较低,与模块的使用温度差异不大(例如,模块壳温TC=353K时,与SAC305无铅合金的融点比值已经达到了72%!),因此,它们的抗疲劳特性不佳。由于陶瓷覆铜基板底侧铜层5与纯铜底板7之间的第二焊料层6焊接面积大,热应力也大,因而此焊料层最易产生疲劳裂纹,并且在模块的使用过程中,随着模块的温度交变而扩展。扩展的疲劳裂纹不断缩小焊接面积,导致模块传热受阻,芯片结温上升,在超过最高允许结温时,模块发生损坏。由于此失效机理的存在,在寿命和可靠性要求较高的应用中,如航空、轨道交通、新能源汽车等,铜质底板的功率电子模块的使用就会受限。
为了提高模块的使用寿命,一种无底板模块结构已被投入应用,如图2所示。与图1相比,模块去掉了底板7和第二焊料层6,所以彻底去除了上述模块的疲劳损坏机制。模块的底部为陶瓷覆铜基板底侧铜层5,这一层直接安装到散热器的表面。陶瓷覆铜基板表侧铜层3,仍然通过第一焊料层2焊接芯片1,由于芯片1的低热膨胀系数,所以在芯片焊接的冷却过程中,陶瓷覆铜基板仍然会产生内凹现象,如图3所示。此无底板功率模块在芯片焊接后,陶瓷覆铜基板的内凹达到了65微米,所造成的安装缝隙对模块的传热将造成很大的影响。
发明内容
本发明的目的在于克服现有技术的缺陷,提供一种能消除陶瓷覆铜基板内凹的无金属底板功率模块。
实现本发明目的的技术方案是:无金属底板功率模块,包括功率芯片和陶瓷覆铜基板,陶瓷覆铜基板由两侧的表面铜层、底侧铜层和中间的陶瓷层组成,陶瓷覆铜基板的表面铜层被蚀刻成所需的形状,功率芯片通过第一无铅焊料层焊接到表面铜层上,高纯铝线通过超声波键合的方式,将功率芯片与表面铜层连接成所需的电路结构;所述表面铜层的表面设有防凹陷装置。
所述防凹陷装置可以为是:
1.在表面铜层和功率芯片之间设有与芯片相近的金属基板。所述金属基板具有较高的热膨胀系数和良好的导热性能。能同时满足以上要求的有两类金属基板。第一类是纯金属,如铜、银和铁。它们的特性见表1。此类金属基板中,纯铜同时具有高导热、导电和高热膨胀系数,而且价格适中,是达到有效控制陶瓷覆铜基板曲率的最佳选择。根据功率芯片的尺寸和厚度,纯铜基板的厚度可以控制在0.25毫米至1.0毫米的范围。但由于铜与单晶硅之间热膨胀系数的巨大差异,在贴装尺寸较大的功率芯片时,会引起芯片下部的第一焊料层较高的热应力,而降低模块的疲劳寿命。为提高模块芯片焊料层的疲劳寿命,可以采用第二类金属合金,金属合金包括铜-钼和铜-钨合金,它们的材料特性也列于表1。这两种合金中,铜的重量百分比应控制在20%至30%。这样,在兼顾导电、导热特性的同时,钨和钼的含量可以有效控制基板的热膨胀系数,从而达到延长芯片焊料层疲劳寿命的目的。此类合金基板的厚度可以选择在0.38毫米至1.25毫米的范围。
2.在陶瓷覆铜基板的表面铜层,功率芯片邻近位置,贴装高热膨胀系数的金属基板。对此类金属基板的导电和导热性能没有特殊要求,因此,所述金属基板的选择,除了纯银、铁等材料以外,最好的选择是纯铜或铜合金。此类金属基板可以在功率芯片贴装时同时进行,而且可以在不同的部位选择不同的尺寸和厚度。为达到最有效的曲率控制,可以在陶瓷覆铜基板的中心部位,贴装较厚的纯铜基板。纯铜基板的厚度可以控制在0.5毫米至2.0毫米的范围。
3.在陶瓷覆铜基板的铜层表面设有独立回流焊料层,利用焊料的高热膨胀系数,达到控制陶瓷覆铜基板曲率的目的。焊料材料可以采用与功率芯片贴装相同的焊料,但在铜层表面,用于控制曲率的焊料层,其厚度可以远超芯片贴装的焊料层厚度。在使用阻焊层时,回流后焊料层的中心高度可以超过1.0毫米。由于焊材具有较低的杨氏模量,见表1,通常需要在接近陶瓷覆铜基板中心部位的一个以上位置的表面铜层上设有回流独立焊料层。
本发明的有益效果是,因陶瓷覆铜基板的脆性,预弯陶瓷覆铜基板几乎无法做到。本发明提出了在表面铜层设置防凹陷装置,从而达到消除陶瓷覆铜基板内凹的目的。
附图说明
图1是本发明背景技术中具有金属底板的功率模块的剖面图;
图2是本发明背景技术中无金属底板的功率模块的剖面图;
图3是本发明背景技术中无金属底板的功率模块的内陷示意图;
图4是本发明实施例1无金属底板功率模块的剖面图;
图5是本发明实施例2无金属底板功率模块的剖面图;
图6本发明实施例3无金属底板功率模块的剖面图;
图7本发明实施例3的无金属底板功率模块结构示意图。
具体实施方式
下面结合附图和实施例对本发明做进一步说明。
实施例1
如图4所示,无金属底板功率模块100,包括功率芯片1和陶瓷覆铜基板10,陶瓷覆铜基板10由两侧的表面铜层3、底侧铜层5和中间的陶瓷层4组成,陶瓷覆铜基板的表面铜层3被蚀刻成所需的形状,功率芯片1通过第一无铅焊料层2焊接到表面铜层3上,高纯铝线8通过超声波键合的方式,将功率芯片1与表面铜层3连接成所需的电路结构。在功率芯片1之下方,加装热膨胀系数较高,与功率芯片尺寸相近的金属基板11,金属基板11通过第二焊料层12与功率芯片1同时贴装到陶瓷覆铜基板10上。由于高密度氧化铝及氮化铝的覆铜基板的综合热膨胀系数在4-8ppm/k之间,因此金属基板11的热膨胀系数应选择接近或高于8ppm/k。另外,由于功率芯片电流的垂直传导,金属基板11必须有良好的导电性。而且,功率芯片1工作时,其散发的热量必须通过芯片底部,传导至陶瓷覆铜基板10,再由散热器最终将热量带走。这就要求金属基板11同时具有良好的导热性能。能同时满足以上要求的有两类金属基板。第一类是纯金属,如铜、银和铁。它们的特性见表1。此类金属基板中,纯铜同时具有高导热、导电和高热膨胀系数,而且价格适中,是达到有效控制陶瓷覆铜基板曲率的最佳选择。根据功率芯片的尺寸和厚度,纯铜基板的厚度可以控制在0.25毫米至1.0毫米的范围。但由于铜与单晶硅之间热膨胀系数的巨大差异,在贴装尺寸较大的功率芯片时,会引起芯片下部的第一焊料层2较高的热应力,而降低模块的疲劳寿命。为提高模块芯片焊料层的疲劳寿命,可以采用第二类金属基板,其中包括铜-钼和铜-钨合金。它们的材料特性也列于表1。这两类合金中,铜的重量百分比应控制在20%至30%。这样,在兼顾导电、导热特性的同时,钨和钼的含量可以有效控制基板的热膨胀系数,从而达到延长芯片焊料层疲劳寿命的目的。此类合金基板的厚度可以选择在0.38毫米至1.25毫米的范围。
实施例2
本实施例与实施例1的不同之处在于,金属基板11的设置。
如图5所示,在陶瓷覆铜基板的铜层3表面,功率芯片1邻近位置,贴装高热膨胀系数的金属基板11。对金属基板11的导电和导热性能没有特殊要求,因此,除了纯银、铁等材料,最好的选择是纯铜或铜合金。此类金属基板可以在功率芯片贴装时同时进行,而且可以在不同的部位选择不同的尺寸和厚度。为达到最有效的曲率控制,可以在陶瓷覆铜基板的中心部位,贴装较厚的纯铜基板10,如图5所示。纯铜基板的厚度可以控制在0.5毫米至2.0毫米的范围。
实施例3
本实施例适合中、小功率无底板功率模块。
如图6所示,在陶瓷覆铜基板的表面铜层3表面设有独立回流焊料层13,利用焊料的高热膨胀系数,达到控制陶瓷覆铜基板曲率的目的。焊料材料可以采用与功率芯片贴装相同的焊料,但在表面铜层上用于控制曲率的独立回流焊料层13的厚度可以远超芯片贴装的第一焊料层2厚度。在使用阻焊层时,回流后焊料层13的中心高度可以超过1.0毫米。由于焊材较低的杨氏模量,见表1。
图7是一个全桥的无底板功率模块,为抵消芯片贴装引起的陶瓷覆铜基板内凹,在表面铜层3的6个区域增加了独立回流焊料层13,使模块在贴片回流后,陶瓷覆铜基板10底面仍然保持平面或微凸,增强了模块的传热性能。

Claims (3)

1.无金属底板功率模块,包括功率芯片和陶瓷覆铜基板,陶瓷覆铜基板由两侧的表面铜层、底侧铜层和中间的陶瓷层组成,陶瓷覆铜基板的表面铜层被蚀刻成所需的形状,功率芯片通过第一无铅焊料层焊接到表面铜层上,高纯铝线通过超声波键合的方式,将功率芯片与表面铜层连接成所需的电路结构;其特征是,所述表面铜层的表面设有防凹陷装置;所述防凹陷装置为:在陶瓷覆铜基板的表面铜层,功率芯片邻近位置,贴装高膨胀系数的纯金属或金属合金金属基板,或者是在陶瓷覆铜基板的表面铜层上设有独立回流焊料层;所述的高膨胀系数的纯金属为纯铜,所述金属合金为铜合金,纯铜的厚度为0.5毫米至2.0毫米。
2.根据权利要求1所述的无金属底板功率模块,其特征是,回流后的所述独立回流焊料层的中心高度超过1.0毫米。
3.根据权利要求2所述的无金属底板功率模块,其特征是,在接近陶瓷覆铜基板中心部位的一个以上位置的表面铜层上设有所述独立回流焊料层。
CN201110190237.7A 2011-07-08 2011-07-08 无金属底板功率模块 Active CN102254877B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201110190237.7A CN102254877B (zh) 2011-07-08 2011-07-08 无金属底板功率模块

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201110190237.7A CN102254877B (zh) 2011-07-08 2011-07-08 无金属底板功率模块

Publications (2)

Publication Number Publication Date
CN102254877A CN102254877A (zh) 2011-11-23
CN102254877B true CN102254877B (zh) 2014-03-26

Family

ID=44982031

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110190237.7A Active CN102254877B (zh) 2011-07-08 2011-07-08 无金属底板功率模块

Country Status (1)

Country Link
CN (1) CN102254877B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104124213B (zh) * 2013-04-28 2017-10-10 无锡华润安盛科技有限公司 一种平衡dbc板上应力的方法及dbc板封装结构
CN103617967B (zh) * 2013-11-27 2017-01-04 浙江大学 一种采用新型绝缘材料的电力电子模块
CN110379720B (zh) * 2019-07-11 2021-01-22 珠海格力电器股份有限公司 一种dcb衬板的制作方法及igbt模块
CN115483161A (zh) * 2021-11-03 2022-12-16 上海林众电子科技有限公司 一种端子灵活布局的功率模块及其制造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1551340A (zh) * 2003-05-06 2004-12-01 富士电机电子设备技术株式会社 半导体器件及其制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04162756A (ja) * 1990-10-26 1992-06-08 Toshiba Corp 半導体モジュール
JP2000269392A (ja) * 1998-09-04 2000-09-29 Sumitomo Metal Electronics Devices Inc 半導体モジュール及び放熱用絶縁板
US7619302B2 (en) * 2006-05-23 2009-11-17 International Rectifier Corporation Highly efficient both-side-cooled discrete power package, especially basic element for innovative power modules
TW201029224A (en) * 2009-01-20 2010-08-01 Bright Led Electronics Corp Package structure for solid-state light source with low thermal resistance and manufacturing method thereof
CN202363444U (zh) * 2011-07-08 2012-08-01 南京银茂微电子制造有限公司 无金属底板功率模块

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1551340A (zh) * 2003-05-06 2004-12-01 富士电机电子设备技术株式会社 半导体器件及其制造方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP平4-162756A 1992.06.08
JP特开2000-269392A 2000.09.29

Also Published As

Publication number Publication date
CN102254877A (zh) 2011-11-23

Similar Documents

Publication Publication Date Title
KR102122625B1 (ko) 파워 모듈용 기판, 히트 싱크가 형성된 파워 모듈용 기판, 히트 싱크가 형성된 파워 모듈
JP6111764B2 (ja) パワーモジュール用基板の製造方法
KR101690820B1 (ko) 히트 싱크 부착 파워 모듈용 기판의 제조 방법, 히트 싱크 부착 파워 모듈용 기판 및 파워 모듈
US10032648B2 (en) Method of manufacturing power-module substrate with heat-sink
KR102027615B1 (ko) 히트 싱크 장착 파워 모듈용 기판, 냉각기 장착 파워 모듈용 기판 및 파워 모듈
WO2013147144A1 (ja) パワーモジュール用基板、ヒートシンク付パワーモジュール用基板、パワーモジュール、及びパワーモジュール用基板の製造方法
JP2009117428A (ja) パワー半導体モジュールの製造方法、パワー半導体モジュールの製造装置、パワー半導体モジュール、及び接合方法
KR101676230B1 (ko) 접합체 및 파워 모듈용 기판
JP5935292B2 (ja) パワーモジュール用基板の製造方法、ヒートシンク付パワーモジュール用基板の製造方法
TWI661516B (zh) 接合體,附散熱器電源模組用基板,散熱器,接合體的製造方法,附散熱器電源模組用基板的製造方法及散熱器的製造方法
CN102254877B (zh) 无金属底板功率模块
CN202363444U (zh) 无金属底板功率模块
JP2010199251A (ja) 半導体装置の製造方法
JP2009088330A (ja) 半導体モジュール
JP6528559B2 (ja) セラミックス/アルミニウム接合体の製造方法、パワーモジュール用基板の製造方法、及び、セラミックス/アルミニウム接合体、パワーモジュール用基板
JP6790945B2 (ja) 絶縁回路基板の製造方法、及び、ヒートシンク付き絶縁回路基板の製造方法
KR101774586B1 (ko) 히트 싱크 부착 파워 모듈용 기판의 제조 방법, 히트 싱크 부착 파워 모듈용 기판 및 파워 모듈
JP2010238965A (ja) パワーモジュール用基板、パワーモジュール用基板の製造方法及びパワーモジュール
JP2009158715A (ja) 放熱装置及びパワーモジュール
JP2004327711A (ja) 半導体モジュール
CN103871983A (zh) 功率器件的散热装置
JP6139331B2 (ja) パワーモジュール
JP6673635B2 (ja) 接合体の製造方法、ヒートシンク付パワーモジュール用基板の製造方法、ヒートシンクの製造方法、及び、接合体、ヒートシンク付パワーモジュール用基板、ヒートシンク
JP5707278B2 (ja) 絶縁回路基板の製造方法
JP4121827B2 (ja) モジュール構造体の製造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
PE01 Entry into force of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of invention: Power module without metal baseplate

Effective date of registration: 20181211

Granted publication date: 20140326

Pledgee: Jiangsu bank Limited by Share Ltd Lishui branch

Pledgor: Nanjing Yinmao Microelectronic Manufacturing Co.,Ltd.

Registration number: 2018320000353

PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20191213

Granted publication date: 20140326

Pledgee: Jiangsu bank Limited by Share Ltd Lishui branch

Pledgor: Nanjing Yinmao Microelectronic Manufacturing Co.,Ltd.

Registration number: 2018320000353

PC01 Cancellation of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of invention: Power module without metal baseplate

Effective date of registration: 20191216

Granted publication date: 20140326

Pledgee: Jiangsu bank Limited by Share Ltd Lishui branch

Pledgor: Nanjing Yinmao Microelectronic Manufacturing Co.,Ltd.

Registration number: Y2019320000365

PE01 Entry into force of the registration of the contract for pledge of patent right
PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20210705

Granted publication date: 20140326

Pledgee: Jiangsu bank Limited by Share Ltd. Lishui branch

Pledgor: NANJING SILVERMICRO ELECTRONICS, Ltd.

Registration number: Y2019320000365

PC01 Cancellation of the registration of the contract for pledge of patent right