CN102208906B - 声表面波装置 - Google Patents
声表面波装置 Download PDFInfo
- Publication number
- CN102208906B CN102208906B CN201110076295.7A CN201110076295A CN102208906B CN 102208906 B CN102208906 B CN 102208906B CN 201110076295 A CN201110076295 A CN 201110076295A CN 102208906 B CN102208906 B CN 102208906B
- Authority
- CN
- China
- Prior art keywords
- layer
- electrode layer
- surface wave
- acoustic surface
- monocrystal substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02149—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02944—Means for compensation or elimination of undesirable effects of ohmic loss
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010076633A JP5341006B2 (ja) | 2010-03-30 | 2010-03-30 | 弾性表面波装置 |
JP2010-076633 | 2010-03-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102208906A CN102208906A (zh) | 2011-10-05 |
CN102208906B true CN102208906B (zh) | 2014-08-20 |
Family
ID=44697591
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110076295.7A Expired - Fee Related CN102208906B (zh) | 2010-03-30 | 2011-03-29 | 声表面波装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8829762B2 (zh) |
JP (1) | JP5341006B2 (zh) |
CN (1) | CN102208906B (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5807715B2 (ja) | 2012-03-23 | 2015-11-10 | 株式会社村田製作所 | 弾性波フィルタ素子及びその製造方法 |
JP6098715B2 (ja) * | 2013-05-14 | 2017-03-22 | 株式会社村田製作所 | 弾性波装置およびその製造方法 |
CN104333341B (zh) * | 2014-11-14 | 2018-01-09 | 中国电子科技集团公司第二十六研究所 | 声表面波器件抗300℃高温剥离方法 |
JPWO2016103953A1 (ja) * | 2014-12-25 | 2017-08-03 | 株式会社村田製作所 | 弾性波装置 |
KR101652297B1 (ko) * | 2015-03-31 | 2016-08-31 | (주)와이솔 | Saw 필터 |
WO2018125101A1 (en) * | 2016-12-28 | 2018-07-05 | Intel Corporation | Surface acoustic wave resonator structure |
WO2021187200A1 (ja) * | 2020-03-18 | 2021-09-23 | 株式会社村田製作所 | 弾性波装置及び複合フィルタ装置 |
CN117529882A (zh) * | 2021-06-17 | 2024-02-06 | 株式会社村田制作所 | 弹性波装置 |
JP7364196B2 (ja) * | 2021-09-24 | 2023-10-18 | 三安ジャパンテクノロジー株式会社 | 弾性波デバイス、モジュール |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0982857A2 (en) * | 1998-08-21 | 2000-03-01 | Murata Manufacturing Co., Ltd. | Surface acoustic wave resonator, surface acoustic wave filter, duplexer, communications apparatus and surface acoustic wave apparatus, and production method of surface acoustic wave device |
CN1273458A (zh) * | 1999-05-07 | 2000-11-15 | 株式会社村田制作所 | 声表面波谐振器、声表面波装置和通信装置 |
JP2001094383A (ja) * | 1999-09-20 | 2001-04-06 | Toshiba Corp | 弾性表面波装置およびその製造方法 |
JP2002135075A (ja) * | 2000-10-26 | 2002-05-10 | Murata Mfg Co Ltd | 弾性表面波素子 |
JP2003101372A (ja) * | 2001-09-21 | 2003-04-04 | Tdk Corp | 弾性表面波装置およびその製造方法 |
JP2006005434A (ja) * | 2004-06-15 | 2006-01-05 | Seiko Epson Corp | 弾性表面波素子の製造方法および弾性表面波素子の温度特性調整方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000074235A1 (fr) * | 1999-05-31 | 2000-12-07 | Tdk Corporation | Dispositif a ondes acoustiques de surface |
JP3376969B2 (ja) * | 1999-09-02 | 2003-02-17 | 株式会社村田製作所 | 弾性表面波装置及びその製造方法 |
US6626026B2 (en) * | 2000-04-07 | 2003-09-30 | Interuniversitair Microelektronica Centrum (Imec) | Acoustic wave based sensor |
US6937114B2 (en) * | 2001-12-28 | 2005-08-30 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave device, electronic component using the device, and composite module |
JP2005269606A (ja) * | 2004-02-18 | 2005-09-29 | Sanyo Electric Co Ltd | 弾性表面波素子及びこれを具えた弾性表面波フィルター |
TWI325687B (en) * | 2006-02-23 | 2010-06-01 | Murata Manufacturing Co | Boundary acoustic wave device and method for producing the same |
-
2010
- 2010-03-30 JP JP2010076633A patent/JP5341006B2/ja not_active Expired - Fee Related
-
2011
- 2011-03-29 CN CN201110076295.7A patent/CN102208906B/zh not_active Expired - Fee Related
- 2011-03-29 US US13/064,490 patent/US8829762B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0982857A2 (en) * | 1998-08-21 | 2000-03-01 | Murata Manufacturing Co., Ltd. | Surface acoustic wave resonator, surface acoustic wave filter, duplexer, communications apparatus and surface acoustic wave apparatus, and production method of surface acoustic wave device |
CN1273458A (zh) * | 1999-05-07 | 2000-11-15 | 株式会社村田制作所 | 声表面波谐振器、声表面波装置和通信装置 |
JP2001094383A (ja) * | 1999-09-20 | 2001-04-06 | Toshiba Corp | 弾性表面波装置およびその製造方法 |
JP2002135075A (ja) * | 2000-10-26 | 2002-05-10 | Murata Mfg Co Ltd | 弾性表面波素子 |
JP2003101372A (ja) * | 2001-09-21 | 2003-04-04 | Tdk Corp | 弾性表面波装置およびその製造方法 |
JP2006005434A (ja) * | 2004-06-15 | 2006-01-05 | Seiko Epson Corp | 弾性表面波素子の製造方法および弾性表面波素子の温度特性調整方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102208906A (zh) | 2011-10-05 |
JP2011211460A (ja) | 2011-10-20 |
JP5341006B2 (ja) | 2013-11-13 |
US20110241480A1 (en) | 2011-10-06 |
US8829762B2 (en) | 2014-09-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170117 Address after: Munich, Germany Patentee after: EPCOS AG Address before: China Hongkong Sha Hongkong Academy of science and technology center of new East Road No. six Patentee before: SAE MAGNETICS (H.K.) Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170522 Address after: California, USA Patentee after: SNAPTRACK, Inc. Address before: Munich, Germany Patentee before: Epcos Ag |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140820 |