CN102208390A - 一种高密度凸点基板及其制造方法 - Google Patents
一种高密度凸点基板及其制造方法 Download PDFInfo
- Publication number
- CN102208390A CN102208390A CN2011101304373A CN201110130437A CN102208390A CN 102208390 A CN102208390 A CN 102208390A CN 2011101304373 A CN2011101304373 A CN 2011101304373A CN 201110130437 A CN201110130437 A CN 201110130437A CN 102208390 A CN102208390 A CN 102208390A
- Authority
- CN
- China
- Prior art keywords
- substrate
- salient point
- high density
- column lead
- adhesives
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 72
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 10
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 7
- 238000001259 photo etching Methods 0.000 claims abstract description 5
- 239000000853 adhesive Substances 0.000 claims description 23
- 230000001070 adhesive effect Effects 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 230000004888 barrier function Effects 0.000 claims description 18
- 229910000679 solder Inorganic materials 0.000 claims description 16
- 230000005496 eutectics Effects 0.000 claims description 14
- 239000004020 conductor Substances 0.000 claims description 12
- 238000009413 insulation Methods 0.000 claims description 6
- 239000011368 organic material Substances 0.000 claims description 5
- 238000005260 corrosion Methods 0.000 claims description 4
- 230000007797 corrosion Effects 0.000 claims description 4
- 238000006664 bond formation reaction Methods 0.000 claims description 3
- 230000003628 erosive effect Effects 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 33
- 229910052710 silicon Inorganic materials 0.000 abstract description 14
- 239000010703 silicon Substances 0.000 abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 11
- 238000009713 electroplating Methods 0.000 abstract description 8
- 238000005553 drilling Methods 0.000 abstract description 6
- 238000005530 etching Methods 0.000 abstract description 4
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000000708 deep reactive-ion etching Methods 0.000 abstract description 3
- 230000008021 deposition Effects 0.000 abstract description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 238000004806 packaging method and process Methods 0.000 description 7
- 238000007747 plating Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000001459 lithography Methods 0.000 description 5
- 238000005538 encapsulation Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- 229910000846 In alloy Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000012536 packaging technology Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910001152 Bi alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- -1 billon Inorganic materials 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000007530 organic bases Chemical class 0.000 description 1
- 239000012766 organic filler Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
- H01L2924/15172—Fan-out arrangement of the internal vias
- H01L2924/15174—Fan-out arrangement of the internal vias in different layers of the multilayer substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
- H01L2924/15182—Fan-in arrangement of the internal vias
- H01L2924/15184—Fan-in arrangement of the internal vias in different layers of the multilayer substrate
Landscapes
- Wire Bonding (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201110130437 CN102208390B (zh) | 2011-05-19 | 2011-05-19 | 一种高密度凸点基板及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201110130437 CN102208390B (zh) | 2011-05-19 | 2011-05-19 | 一种高密度凸点基板及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102208390A true CN102208390A (zh) | 2011-10-05 |
CN102208390B CN102208390B (zh) | 2013-03-06 |
Family
ID=44697147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201110130437 Active CN102208390B (zh) | 2011-05-19 | 2011-05-19 | 一种高密度凸点基板及其制造方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102208390B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103904054A (zh) * | 2014-03-31 | 2014-07-02 | 华进半导体封装先导技术研发中心有限公司 | 基于玻璃基板的互连结构及方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1106580A (zh) * | 1993-11-10 | 1995-08-09 | 惠特克公司 | 各向异性导电膜的制造方法以及使用该膜的连接器 |
JPH08279570A (ja) * | 1995-04-04 | 1996-10-22 | Fujitsu Ltd | 半導体装置 |
CN1862799A (zh) * | 2006-04-12 | 2006-11-15 | 江苏长电科技股份有限公司 | 半导体元器件平面凸点式超薄封装基板及其制作方法 |
US20080251948A1 (en) * | 2005-09-22 | 2008-10-16 | Chipmos Technologies Inc. | Chip package structure |
CN101714537A (zh) * | 2008-09-30 | 2010-05-26 | 阿尔特拉公司 | 通用凸点阵列结构 |
CN101770994A (zh) * | 2008-12-31 | 2010-07-07 | R·阿迪穆拉 | 具有金属突点的半导体封装基板 |
CN101850593A (zh) * | 2009-03-31 | 2010-10-06 | 本田技研工业株式会社 | 嵌件成型方法及装置 |
-
2011
- 2011-05-19 CN CN 201110130437 patent/CN102208390B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1106580A (zh) * | 1993-11-10 | 1995-08-09 | 惠特克公司 | 各向异性导电膜的制造方法以及使用该膜的连接器 |
JPH08279570A (ja) * | 1995-04-04 | 1996-10-22 | Fujitsu Ltd | 半導体装置 |
US20080251948A1 (en) * | 2005-09-22 | 2008-10-16 | Chipmos Technologies Inc. | Chip package structure |
CN1862799A (zh) * | 2006-04-12 | 2006-11-15 | 江苏长电科技股份有限公司 | 半导体元器件平面凸点式超薄封装基板及其制作方法 |
CN101714537A (zh) * | 2008-09-30 | 2010-05-26 | 阿尔特拉公司 | 通用凸点阵列结构 |
CN101770994A (zh) * | 2008-12-31 | 2010-07-07 | R·阿迪穆拉 | 具有金属突点的半导体封装基板 |
CN101850593A (zh) * | 2009-03-31 | 2010-10-06 | 本田技研工业株式会社 | 嵌件成型方法及装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103904054A (zh) * | 2014-03-31 | 2014-07-02 | 华进半导体封装先导技术研发中心有限公司 | 基于玻璃基板的互连结构及方法 |
CN103904054B (zh) * | 2014-03-31 | 2016-08-17 | 华进半导体封装先导技术研发中心有限公司 | 基于玻璃基板的互连结构及方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102208390B (zh) | 2013-03-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10177130B2 (en) | Semiconductor assembly having anti-warping controller and vertical connecting element in stiffener | |
CN104851842B (zh) | 包括嵌入式表面安装器件的半导体器件及其形成方法 | |
CN105228341B (zh) | 印刷电路板、封装基板及其制造方法 | |
CN104428892B (zh) | 用于基板核心层的方法和装置 | |
CN106328604B (zh) | 芯片封装 | |
US9881859B2 (en) | Substrate block for PoP package | |
CN106165554A (zh) | 印刷电路板、封装基板及其制造方法 | |
CN110233112A (zh) | 电子封装件及其制法 | |
US10217710B2 (en) | Wiring board with embedded component and integrated stiffener, method of making the same and face-to-face semiconductor assembly using the same | |
KR102194722B1 (ko) | 패키지 기판, 패키지 기판의 제조 방법 및 이를 포함하는 적층형 패키지 | |
CN103871998A (zh) | 单层无芯基板 | |
CN103794569A (zh) | 封装结构及其制法 | |
CN102915995B (zh) | 半导体封装件、基板及其制造方法 | |
CN103178044A (zh) | 具有一体化金属芯的多层电子支撑结构 | |
US20120056319A1 (en) | Embedded package and method for manufacturing the same | |
CN101364586B (zh) | 封装基板结构 | |
CN102693955A (zh) | 封装载板及其制造方法 | |
US9728507B2 (en) | Cap chip and reroute layer for stacked microelectronic module | |
US10062649B2 (en) | Package substrate | |
CN101930960B (zh) | 集成电路芯片封装和形成方法 | |
CN107946282B (zh) | 三维扇出型封装结构及其制造方法 | |
US20130308289A1 (en) | Tape for electronic devices with reinforced lead crack | |
CN101360388B (zh) | 电路板的电性连接端结构及其制法 | |
JP5599860B2 (ja) | 半導体パッケージ基板の製造方法 | |
CN113299613A (zh) | 半导体封装结构及其制造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: NATIONAL CENTER FOR ADVANCED PACKAGING Free format text: FORMER OWNER: INST OF MICROELECTRONICS, C. A. S Effective date: 20150228 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100029 CHAOYANG, BEIJING TO: 214135 WUXI, JIANGSU PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20150228 Address after: Taihu international science and Technology Park in Jiangsu province Wuxi City Linghu road 214135 Wuxi national hi tech Industrial Development Zone No. 200 Chinese Sensor Network International Innovation Park building D1 Patentee after: National Center for Advanced Packaging Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Institute of Microelectronics Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |
|
TR01 | Transfer of patent right |
Effective date of registration: 20170816 Address after: 200331 room 155-2, ginkgo Road, Shanghai, Putuo District, China, 4 Patentee after: Shanghai State Intellectual Property Services Co.,Ltd. Address before: Taihu international science and Technology Park in Jiangsu province Wuxi City Linghu road 214135 Wuxi national hi tech Industrial Development Zone No. 200 Chinese Sensor Network International Innovation Park building D1 Patentee before: National Center for Advanced Packaging Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191205 Address after: 214028 Jiangsu New District of Wuxi City Linghu Road No. 200 Chinese Sensor Network International Innovation Park building D1 Patentee after: National Center for Advanced Packaging Co.,Ltd. Address before: 200331 room 155-2, ginkgo Road, Shanghai, Putuo District, China, 4 Patentee before: Shanghai State Intellectual Property Services Co.,Ltd. |
|
TR01 | Transfer of patent right |