CN102203912B - 改善p3i腔室中共形掺杂的方法 - Google Patents

改善p3i腔室中共形掺杂的方法 Download PDF

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Publication number
CN102203912B
CN102203912B CN2009801434414A CN200980143441A CN102203912B CN 102203912 B CN102203912 B CN 102203912B CN 2009801434414 A CN2009801434414 A CN 2009801434414A CN 200980143441 A CN200980143441 A CN 200980143441A CN 102203912 B CN102203912 B CN 102203912B
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China
Prior art keywords
substrate
plasma
ions
gas
implanting ions
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Expired - Fee Related
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CN2009801434414A
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English (en)
Chinese (zh)
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CN102203912A (zh
Inventor
彼得·I·波尔什涅夫
马修·D·斯科特奈伊-卡斯尔
马耶德·阿里·福阿德
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Applied Materials Inc
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Applied Materials Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00—Ion implantation into wafers, substrates or parts of devices
    • H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/12—Diffusion of dopants within, into or out of semiconductor bodies or layers between a solid phase and a gaseous phase
    • H10P32/1204—Diffusion of dopants within, into or out of semiconductor bodies or layers between a solid phase and a gaseous phase from a plasma phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32412—Plasma immersion ion implantation

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
CN2009801434414A 2008-10-31 2009-10-27 改善p3i腔室中共形掺杂的方法 Expired - Fee Related CN102203912B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11047508P 2008-10-31 2008-10-31
US61/110,475 2008-10-31
PCT/US2009/062172 WO2010051266A2 (en) 2008-10-31 2009-10-27 Improving the conformal doping in p3i chamber

Publications (2)

Publication Number Publication Date
CN102203912A CN102203912A (zh) 2011-09-28
CN102203912B true CN102203912B (zh) 2013-11-13

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CN2009801434414A Expired - Fee Related CN102203912B (zh) 2008-10-31 2009-10-27 改善p3i腔室中共形掺杂的方法

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Country Link
US (1) US8129261B2 (enExample)
JP (1) JP5558480B2 (enExample)
KR (1) KR101626565B1 (enExample)
CN (1) CN102203912B (enExample)
TW (1) TWI524391B (enExample)
WO (1) WO2010051266A2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8395132B2 (en) 2007-06-25 2013-03-12 International Rectifier Corporation Ion implanting while growing a III-nitride layer
US9218991B2 (en) 2007-06-25 2015-12-22 Infineon Technologies Americas Corp. Ion implantation at high temperature surface equilibrium conditions
CN103377888A (zh) * 2012-04-13 2013-10-30 南亚科技股份有限公司 掺杂区的制作方法
US20130288469A1 (en) * 2012-04-27 2013-10-31 Applied Materials, Inc. Methods and apparatus for implanting a dopant material
EP2765596B1 (en) * 2013-02-12 2018-07-11 Infineon Technologies Americas Corp. Ion implantation at high temperature surface equilibrium conditions
KR102342328B1 (ko) * 2014-07-03 2021-12-21 어플라이드 머티어리얼스, 인코포레이티드 선택적인 증착을 위한 방법 및 장치
CN108292602B (zh) * 2015-12-18 2023-08-18 应用材料公司 清洁方法
US11761080B2 (en) 2021-01-05 2023-09-19 Applied Materials, Inc. Method for processing a substrate by oscillating a boundary layer of the flow of one or more process gases over a surface of a substrate and systems for processing a substrate using the method
CN118414691A (zh) 2022-01-04 2024-07-30 应用材料公司 电极调谐、沉积与蚀刻方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN87107677A (zh) * 1986-11-04 1988-06-22 英特尔公司 源漏掺杂技术
US5801082A (en) * 1997-08-18 1998-09-01 Vanguard International Semiconductor Corporation Method for making improved shallow trench isolation with dielectric studs for semiconductor integrated circuits
US20060148220A1 (en) * 2005-01-04 2006-07-06 Nick Lindert Plasma implantation of impurities in junction region recesses

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US759521A (en) * 1903-06-01 1904-05-10 Archie G Hohenstein Steam-boiler.
JPS62198124A (ja) * 1986-02-26 1987-09-01 Mitsubishi Electric Corp 半導体装置の製造方法
JPS63200528A (ja) * 1987-02-17 1988-08-18 Toshiba Corp 半導体装置の製造方法
JPS6430224A (en) * 1987-07-27 1989-02-01 Matsushita Electric Industrial Co Ltd Plasma processing method
JPH01143254A (ja) * 1987-11-28 1989-06-05 Mitsubishi Electric Corp 半導体記憶装置
JPH01303718A (ja) * 1988-06-01 1989-12-07 Hitachi Ltd 半導体への不純物導入方法
JPH02159028A (ja) * 1988-12-13 1990-06-19 Matsushita Electric Ind Co Ltd プラズマによる固体表面付着物の除去方法
IT1225636B (it) * 1988-12-15 1990-11-22 Sgs Thomson Microelectronics Metodo di scavo con profilo di fondo arrotondato per strutture di isolamento incassate nel silicio
JP2001267326A (ja) * 2000-03-14 2001-09-28 Nec Yamagata Ltd 半導体装置及びその製造方法
US6312999B1 (en) * 2001-03-29 2001-11-06 Chartered Semiconductor Manufacturing Ltd. Method for forming PLDD structure with minimized lateral dopant diffusion
JP2005260071A (ja) 2004-03-12 2005-09-22 Sharp Corp 半導体記憶装置の製造方法
US20050287307A1 (en) * 2004-06-23 2005-12-29 Varian Semiconductor Equipment Associates, Inc. Etch and deposition control for plasma implantation
US7144673B2 (en) * 2004-10-21 2006-12-05 Taiwan Semiconductor Manufacturing Co., Ltd. Effective photoresist stripping process for high dosage and high energy ion implantation
KR100761829B1 (ko) * 2005-12-15 2007-09-28 삼성전자주식회사 반도체 소자, 시모스 이미지 센서, 반도체 소자의 제조방법및 시모스 이미지 센서의 제조방법
KR100683867B1 (ko) * 2006-02-09 2007-02-15 삼성전자주식회사 반도체 소자 및 그 형성 방법
US7732309B2 (en) * 2006-12-08 2010-06-08 Applied Materials, Inc. Plasma immersed ion implantation process
KR100890256B1 (ko) * 2007-05-29 2009-03-24 삼성전자주식회사 리세스 채널 영역을 갖는 트랜지스터를 채택하는 반도체소자 및 그 제조 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN87107677A (zh) * 1986-11-04 1988-06-22 英特尔公司 源漏掺杂技术
US5801082A (en) * 1997-08-18 1998-09-01 Vanguard International Semiconductor Corporation Method for making improved shallow trench isolation with dielectric studs for semiconductor integrated circuits
US20060148220A1 (en) * 2005-01-04 2006-07-06 Nick Lindert Plasma implantation of impurities in junction region recesses

Also Published As

Publication number Publication date
KR101626565B1 (ko) 2016-06-01
WO2010051266A2 (en) 2010-05-06
JP2012507866A (ja) 2012-03-29
US20100112793A1 (en) 2010-05-06
WO2010051266A3 (en) 2010-07-29
CN102203912A (zh) 2011-09-28
TW201025428A (en) 2010-07-01
TWI524391B (zh) 2016-03-01
KR20110091722A (ko) 2011-08-12
US8129261B2 (en) 2012-03-06
JP5558480B2 (ja) 2014-07-23

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Address after: American California

Applicant after: Applied Materials Inc.

Address before: American California

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Granted publication date: 20131113

Termination date: 20161027

CF01 Termination of patent right due to non-payment of annual fee