CN102195604A - 振动片、传感器元件、传感器以及电子设备 - Google Patents

振动片、传感器元件、传感器以及电子设备 Download PDF

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Publication number
CN102195604A
CN102195604A CN2011100637849A CN201110063784A CN102195604A CN 102195604 A CN102195604 A CN 102195604A CN 2011100637849 A CN2011100637849 A CN 2011100637849A CN 201110063784 A CN201110063784 A CN 201110063784A CN 102195604 A CN102195604 A CN 102195604A
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CN
China
Prior art keywords
vibrating
wiring
vibrating arm
electrode
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011100637849A
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English (en)
Chinese (zh)
Inventor
西泽竜太
市川想
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN102195604A publication Critical patent/CN102195604A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measuring Fluid Pressure (AREA)
  • Gyroscopes (AREA)
CN2011100637849A 2010-03-17 2011-03-16 振动片、传感器元件、传感器以及电子设备 Pending CN102195604A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2010-060336 2010-03-17
JP2010060336 2010-03-17
JP2010-248165 2010-11-05
JP2010248165A JP5633319B2 (ja) 2010-03-17 2010-11-05 振動片、センサー素子、センサーおよび電子機器

Publications (1)

Publication Number Publication Date
CN102195604A true CN102195604A (zh) 2011-09-21

Family

ID=44603090

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011100637849A Pending CN102195604A (zh) 2010-03-17 2011-03-16 振动片、传感器元件、传感器以及电子设备

Country Status (3)

Country Link
US (1) US8198948B2 (enExample)
JP (1) JP5633319B2 (enExample)
CN (1) CN102195604A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103546115A (zh) * 2012-07-10 2014-01-29 精工爱普生株式会社 振动片、振子、电子装置、电子设备、移动体
CN110553634A (zh) * 2018-05-31 2019-12-10 精工爱普生株式会社 物理量传感器及其制造方法、复合传感器及惯性测量单元
CN116659648A (zh) * 2023-05-09 2023-08-29 温州市泰芯电子有限公司 一种新型片式振动传感器
CN119469034A (zh) * 2025-01-13 2025-02-18 保定市东利机械制造股份有限公司 一种自动检用的弹性体

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9201528B2 (en) * 2011-06-07 2015-12-01 Stmicroelectronics Sa Method of manufacturing a vibratory actuator for a touch panel with haptic feedback
FR2976370A1 (fr) 2011-06-07 2012-12-14 St Microelectronics Grenoble 2 Procede de controle d'un objet destine a etre tenu a la main a l'aide d'un retour haptique
JP6186696B2 (ja) * 2012-10-25 2017-08-30 セイコーエプソン株式会社 超音波測定装置、ヘッドユニット、プローブ及び診断装置
US10693393B2 (en) * 2017-06-02 2020-06-23 University Of Manitoba Electrostatic actuator with tri-electrode topology

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5285127A (en) * 1989-11-30 1994-02-08 New Sd, Inc. Single mode resonator and method
CN1576785A (zh) * 2003-07-25 2005-02-09 精工爱普生株式会社 压电振动片及其支撑结构、压电振子及振动型压电陀螺仪
CN1711680A (zh) * 2002-12-17 2005-12-21 精工爱普生株式会社 压电振动片和使用压电振动片的压电器件、使用压电器件的便携电话装置和使用压电器件的电子设备

Family Cites Families (16)

* Cited by examiner, † Cited by third party
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JPS49123788A (enExample) 1973-03-30 1974-11-27
US4415827A (en) * 1981-05-27 1983-11-15 Statek Corporation Microresonator of tuning fork configuration operating at its second overtone frequency
US4469979A (en) * 1983-05-27 1984-09-04 Statek Corporation Microresonator of double-ended tuning fork configuration
US4531073A (en) * 1983-05-31 1985-07-23 Ohaus Scale Corporation Piezoelectric crystal resonator with reduced impedance and sensitivity to change in humidity
JPS59161723U (ja) * 1984-03-28 1984-10-30 セイコーインスツルメンツ株式会社 音叉型水晶振動子
JPS61215932A (ja) * 1985-03-22 1986-09-25 Seiko Electronic Components Ltd 圧電振動子
JP2625511B2 (ja) 1988-07-21 1997-07-02 株式会社クボタ 穀粒選別装置用穀粒分布検出装置
JPH04131032U (ja) * 1991-05-27 1992-12-01 日本航空電子工業株式会社 捻れ振動双音叉型振動子
JPH10206162A (ja) 1997-01-22 1998-08-07 Citizen Watch Co Ltd 振動ジャイロセンサー
WO2000044092A1 (en) 1999-01-20 2000-07-27 Seiko Epson Corporation Vibrator and electronic device with vibrator
JP2005197946A (ja) 2004-01-06 2005-07-21 Seiko Epson Corp 音叉型水晶振動子
JP4609196B2 (ja) 2005-06-20 2011-01-12 セイコーエプソン株式会社 圧電振動片および圧電デバイスならびに電子機器および携帯電話装置
JP4895716B2 (ja) 2006-08-10 2012-03-14 シチズンホールディングス株式会社 圧電デバイスの製造方法
US7802475B2 (en) * 2006-10-13 2010-09-28 Seiko Epson Corporation Acceleration sensor
JP5067033B2 (ja) 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器
JP2010048643A (ja) * 2008-08-21 2010-03-04 Epson Toyocom Corp 加速度検知ユニット、及び加速度センサ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5285127A (en) * 1989-11-30 1994-02-08 New Sd, Inc. Single mode resonator and method
CN1711680A (zh) * 2002-12-17 2005-12-21 精工爱普生株式会社 压电振动片和使用压电振动片的压电器件、使用压电器件的便携电话装置和使用压电器件的电子设备
CN1576785A (zh) * 2003-07-25 2005-02-09 精工爱普生株式会社 压电振动片及其支撑结构、压电振子及振动型压电陀螺仪

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103546115A (zh) * 2012-07-10 2014-01-29 精工爱普生株式会社 振动片、振子、电子装置、电子设备、移动体
CN110553634A (zh) * 2018-05-31 2019-12-10 精工爱普生株式会社 物理量传感器及其制造方法、复合传感器及惯性测量单元
CN110553634B (zh) * 2018-05-31 2024-01-12 精工爱普生株式会社 物理量传感器及其制造方法、复合传感器及惯性测量单元
CN116659648A (zh) * 2023-05-09 2023-08-29 温州市泰芯电子有限公司 一种新型片式振动传感器
CN119469034A (zh) * 2025-01-13 2025-02-18 保定市东利机械制造股份有限公司 一种自动检用的弹性体

Also Published As

Publication number Publication date
US8198948B2 (en) 2012-06-12
JP5633319B2 (ja) 2014-12-03
US20110227657A1 (en) 2011-09-22
JP2011217348A (ja) 2011-10-27

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Application publication date: 20110921