CN102189609B - Scoring device - Google Patents
Scoring device Download PDFInfo
- Publication number
- CN102189609B CN102189609B CN201110038407.XA CN201110038407A CN102189609B CN 102189609 B CN102189609 B CN 102189609B CN 201110038407 A CN201110038407 A CN 201110038407A CN 102189609 B CN102189609 B CN 102189609B
- Authority
- CN
- China
- Prior art keywords
- bridge portion
- adjusting mechanism
- scoring
- engraving head
- leading edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/027—Scoring tool holders; Driving mechanisms therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/10—Glass-cutting tools, e.g. scoring tools
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a scoring device, which can simplify maintenance work and form a scoring groove better in lasting precision. The scoring device comprises a supporting table, a pair of bridge parts, an optical reading part, a movable adjusting mechanism and a control part, wherein the supporting table is used for holding fragile materials; the pair of bridge parts is deployed over the supporting table in a parallel manner and provided with scoring heads respectively; the optical reading part reads aiming marks arranged on the supporting table; the movable adjusting mechanism enables the bridge parts to shift so as to adjust the relative position of the supporting table and the scoring heads; and the control part controls the actions of the movable adjusting mechanism according to the shift information of the aiming marks so that the blade front edge of a cutter of the scoring head faces towards a given direction. The direction of the blade front edge of the cutter mounted on the scoring head of the bridge part and the direction of the blade front edge of the cutter of the scoring head mounted on the other bridge part are mutually orthogonal.
Description
Technical field
The present invention forms the scoring device of scored groove about fragile materials such as the substrates in glass substrate, semiconductor substrate, thin film solar cell.
Background technology
Scoring device is in the past such as shown in patent document 1, the support table transferred under possessing the state remaining level at fragile materials such as the substrates making glass substrate, semiconductor substrate, thin film solar cell, the bridge portion be set up across support table, the engraving head that is slidably mounted on bridge portion, be provided with the cutter of delineation processing in the front end of this engraving head.The transfer direction that the direction (the relative travel direction relative to fragile material) of its sword leading edge of cutter can be adjusted to relative brittleness material is set angle.In addition, by making fragile material transfer and make engraving head slide in bridge portion making engraving head decline under with the state that the sword leading edge of wheel is pressed on fragile material, the transfer direction that can form relative brittleness material in fragile material becomes the scored groove of set angle.
In order to form scored groove well in fragile material precision, when the operation of scoring device starts or when safeguarding, first the direction angulation of the transfer direction of fragile material and sword leading edge must be adjusted to set angle.Therefore, utilize the tool preparing to be processed into set angle, manually angle adjustment is carried out in the position of the relative support table in correction bridge portion.Specifically, in the set position configuration tool of support table, with by the part being processed into set angle of tool by breaking the bridge portion to adjust the angle of the relative support table in bridge portion.
Patent document 1: Japanese invention patent No. 3078668 publication
Summary of the invention
[problem of invention for solving]
At scoring device in the past described above, even if first the direction angulation of the transfer direction of fragile material and sword leading edge to be adjusted to the occasion of set angle when operation is opened or when safeguarding, along with repeating the operation forming scored groove, displacement may be had in the position of the relative support table in bridge portion because of vibration when scored groove is formed to produce, change from set angle in the transfer direction of fragile material and the direction angulation of sword leading edge.In addition, also itself may have distortion generation in bridge portion because being provided with the environment (such as temperature or moisture) of scoring device, relative angle is from the set angles shifts preset formed by the transfer direction of fragile material and the direction of sword leading edge.
If the variation having this kind to determine angle produces, just cannot continue precision and form scored groove well.Therefore, have variation to produce if having at scoring device in the past in set angle, just have and use tool manually to re-start necessity of the adjustment of angle once again, upkeep operation becomes miscellaneous problem.
In addition, form the scored groove of larger width, such as, in the scoring device of the scored groove of 40 μm of degree, precision can form scored groove fully in the occasion manually adjusting the direction angulation of fragile material and sword leading edge again.But in the scoring device forming the narrower scored groove of the width as less than 10 μm, the direction angulation itself of the transfer direction and sword leading edge that manually adjust fragile material again, just for difficult, cannot continue precision and form scored groove well.
In addition, at general scoring device as Patent Document 1, the bridge portion possessing engraving head is set to across support table, by making the support table of maintenance fragile material transfer in the direction (being called Y-direction) orthogonal to bridge portion, forms the scored groove of Y-direction in fragile material.In addition, by making engraving head slide in the direction (being called X-direction) along bridge portion, the scored groove of X-direction is formed in fragile material.Therefore, the occasion of the scored groove of Y-direction or X-direction is formed after the scored groove forming X-direction or Y-direction, all have at every turn and reinstall as delineation direction, edge by the direction of the sword leading edge of cutter or make fragile material necessity that 90 degree of rotations reset in support table, its operation is very miscellaneous.
For this problem, the 1st object of the present invention is to provide and can solves above-mentioned problem in the past, and simplify upkeep operation, lasting precision forms the scoring device of scored groove well.
In addition, the 2nd object of the present invention is to provide and need not reinstalls cutter or reset the scoring device that the fragile material that should process just easily and promptly can carry out the scored groove in two different directions.
[solving the technological means of problem]
The of the present invention a kind of scoring device be done to solve above-mentioned problem is by the support table keeping fragile material, a pair bridge portion of engraving head is possessed respectively by configured in parallel across support table, read the optical reading portion of the alignment mark be located in support table, bridge portion is conjugated mobile with the moving adjusting mechanism of the relative position adjusting support table and engraving head, the action controlling aforementioned moving adjusting mechanism according to the displacement information of alignment mark is formed with the control part of the direction making to be located at the sword leading edge of the cutter of engraving head towards set direction, the direction that the direction being configured to the sword leading edge of the cutter of the engraving head being installed on a bridge portion is orthogonal toward each other with the direction of the sword leading edge of the cutter of the engraving head being installed on another bridge portion.
[effect of invention]
In the present invention owing to being utilize control part to make aforementioned moving adjusting mechanism action be set angle to make the direction of sword leading edge with the relative transfer direction angulation of fragile material according to the displacement information of the alignment mark read with optical reading portion, the relative position of automatic compensation support table and engraving head, therefore use necessity of adjusting again of tool to disappear, upkeep operation can be simplified and continue precision and form scored groove well.
In addition, the present invention due to two bridge portions are set and the direction being configured to the sword leading edge of the cutter of the engraving head being installed on a bridge portion be installed on the direction of sword leading edge of cutter of engraving head in another bridge portion towards direction orthogonal respectively, therefore to fragile material in orthogonal X, Y-direction forms the occasion of scored groove, by making the sword leading edge of the cutter of the engraving head being installed on a bridge portion towards X-direction and making the sword leading edge of the cutter of the engraving head being installed on another bridge portion towards Y-direction, as long as select arbitrary bridge portion, the scored groove that cutter just can form X-direction and Y-direction need not be reinstalled, there is the excellent results of the operation easily and promptly can carrying out the scored groove forming two different directions.
(solving means and the effect of other problem)
Aforementioned moving adjusting mechanism can by the one end in bridge portion is supported for only can turn hinge portion, by the other end support in bridge portion be can aforementioned hinge portion be fulcrum turn slip support sector, be that fulcrum makes the drive division of bridge portion turn form with hinge portion.
Thus, by making drive division start that bridge portion can be made to be that fulcrum correctly conjugates turn and can simple formation of structure moving adjusting mechanism with hinge portion.
In addition, the occasion that aforementioned control part can have displacement to produce in the process of the scored groove forming operation of scoring device in the position of alignment mark controls aforementioned moving adjusting mechanism action according to the displacement information obtained by optical reading portion becomes below set value to make aforementioned displacement.
Thus, in the direction of the sword leading edge of cutter in the process of the scored groove forming operation of scoring device, have with the relative transfer direction angulation of fragile material the occasion changing and produce in the direction of sword leading edge, this variation can be detected and be automatically adjusted to set angle rapidly.
Accompanying drawing explanation
Fig. 1 is the top view of scoring device of the present invention.
Fig. 2 is the side view of above-mentioned scoring device.
Fig. 3 is the front view observed from the A-A line of Fig. 1.
Fig. 4 is a part of cross-section side view of the slip support sector of the moving adjusting mechanism in the bridge portion shown in above-mentioned scoring device.
Fig. 5 is a part of cross-section side view of the hinge portion of the moving adjusting mechanism in display bridge portion.
Fig. 6 is the expansion top view that the bridge portion showing above-mentioned scoring device conjugates the state after turn a little.
Fig. 7 is the top view of other embodiment of display scoring device.
[main element symbol description]
1 scoring device
2 fragile materials
3 support table
4A, 4B bridge portion
5 engraving heads
6 video cameras (optically reading portion)
7 control parts
40 moving adjusting mechanisms
45 hinge portions
46 slip support sectors
Detailed description of the invention
In following, be pursuant to the embodiment that figure shows and describe in detail in detail of the present invention.
Fig. 1 is the top view of scoring device of the present invention, and Fig. 2 is the side view of above-mentioned scoring device, and Fig. 3 is the front view observed from the A-A line of Fig. 1.This scoring device 1 possesses the support table 3 in the level keeping the fragile materials 2 such as the substrate of glass substrate, semiconductor substrate, thin film solar cell also to transfer above.Support table 3 can keep fragile material 2 and transfer toward the Y-direction in Fig. 1 display.Therefore, support table 3 is mounted through the support table transfer mechanism 32 along track 31 movement be laid toward Y-direction.
In addition, scoring device 1 possesses a pair bridge portion 4A, 4B being set up across support table 3.Each bridge portion 4A, 4B are formed the beam portion 41 of the roughly orthogonal horizontal-extending in X direction of Y-direction, the vertical foot 42,43 at two ends that is linked to this beam portion 41 by above support table 3.
Be provided with engraving head 5 and optical reading portion and video camera 6,6 in the beam portion 41 of bridge portion 4A, 4B, make can read the alignment mark of the position preset be located in support table 3.Though the special icon of alignment mark, also can even if be not directly located on the scale substrate support table 3 being located at and being placed in support table 3.
The engraving head travel mechanism 52 keeping motor in engraving head 5 is configured to can pass through is elevated, and is provided with break bar 51 in the front end of engraving head 5.In addition, engraving head 5 can be moved in X-direction along the chute 44 being located at beam portion 41 by aforementioned engraving head travel mechanism 52.
In bridge portion 4A, 4B, the direction (direction of rotation) being installed on the sword leading edge of the break bar 51 of the engraving head 5 of a bridge portion 4A is set to towards X-direction.Thus, make engraving head 5 move in X-direction by the sword leading edge fragile material 2 in support table 3 being pressed to break bar 51 simultaneously, the scored groove of X-direction can be formed fragile material 2.
The direction (direction of rotation) being installed on the sword leading edge of the break bar 51 of the engraving head 5 of another bridge portion 4B is set to towards Y-direction.Thus, make support table 3 move in Y-direction by the sword leading edge fragile material 2 in support table 3 being pressed to break bar 51 simultaneously, the scored groove of Y-direction can be formed fragile material 2.In this occasion, as shown in Figure 7, as long as install plural number, such as 4 engraving heads 5 side by side in advance, 4 row scored groove can be formed simultaneously.
In addition, aforementioned each bridge portion 4A, 4B, as shown in Fig. 4 ~ Fig. 6, are configured to can pass through moving adjusting mechanism 40 with the one end in the beam portion 41 extended in X-direction for fulcrum turn displacement.This moving adjusting mechanism 40 due to bridge portion 4A, 4B be identical, therefore for bridge portion 4A moving adjusting mechanism 40 specifically describe.
Moving adjusting mechanism 40 is supported as only can the hinge portion 45 of turn, the slip support sector 46 of lower end that carries another foot 42 forming by the lower end of the foot 43 of the one end by being linked to bridge portion 4A.Slip support sector 46 possesses can by drive division 48 along the bearing carrier 49 of trapped orbit 47 movement being layed in Y-direction, the elongated hole 49a extended in X-direction is provided with, in this elongated hole 49a chimeric sliding axle 42a having the lower end being formed at foot 42 slidably in aforementioned bearing carrier 49.Thus, bearing carrier 49 is slided, make bridge portion 4A with hinge portion 45 for fulcrum turn displacement, the direction of the sword leading edge of fine-tuning whole break bar 51.
In addition, scoring device 1 possesses the control parts 7 such as the computer of the angle that action that displacement information according to alignment mark (vector difference between the alignment mark before and after displacement) controls moving adjusting mechanism 40 first sets for tool with the direction correction of the sword leading edge by break bar 51.
Utilize as the above-mentioned scoring device 1 be configured, make engraving head 5 move in X-direction by the sword leading edge of break bar 51 of the engraving head 5 fragile material 2 being pressed to a bridge portion 4A simultaneously, the scored groove of X-direction can be formed fragile material 2.Make support table 3 transfer in Y-direction by the sword leading edge of the break bar 51 of pressing another bridge portion 4B simultaneously, the scored groove of Y-direction can be formed fragile material 2.In this occasion, owing to establishing bridge portion 4A, 4B bis-bridge portions and being provided with the break bar 51 making sword leading edge towards X-direction in a bridge portion 4A, the break bar 51 making sword leading edge towards Y-direction is provided with in another bridge portion 4B, as long as therefore select arbitrary bridge portion, the scored groove that break bar 51 just can form X-direction and Y-direction need not be reinstalled, and can easily and promptly carry out operation.
In addition, when the starting of scoring device 1, though be use tool to install break bar 51 correctly to become right angle to make the direction (direction of rotation) of the transfer direction of fragile material 2 and each sword leading edge, but along with the long-term scored groove that repeats forms operation and distortion may be had in bridge portion etc. to produce because of the change of vibration or environment (temperature or moisture) etc., relative angle has to change and produces formed by the transfer direction of fragile material 2 and the sword leading edge of break bar 51.If this kind of variation becomes more than setting value, then according to the displacement information (vector difference between the alignment mark before and after displacement) of alignment mark, the action that control part 7 controls moving adjusting mechanism 40 conjugates turn (angle [alpha] of such as Fig. 6) with hinge portion 45 for fulcrum to make bridge portion 4A, 4B, the angle after aforementioned variation is adjusted to automatically again the angle preset.Thus, upkeep operation can be simplified and continue precision and form scored groove well.
In addition, control part 7 can read alignment mark when the formation operation of scored groove becomes more than predetermined number of times, as long as have variation just automatically to adjust in angle.
Above, though illustrate for representative embodiment of the present invention, the present invention is not for only to construct specific to the above embodiments.Such as, in bridge portion 4A, 4B, though be the one end in bridge portion is configured to by hinge portion 45 only turn, also can to establish with support sector 46 same mechanism of sliding to replace this hinge portion 45.In addition, as long as no matter the mechanism that bridge portion precision also can be conjugated turn by slip support sector 46 is well which kind of all can.In addition, the break bar being installed on engraving head 5 also can be in the directive fixed blade of sword leading edge tool to replace break bar.In addition, in the present invention, can reaching its object and suitably revise in the scope not departing from claim, change.
[utilizability in industry]
The present invention be applicable to glass substrate, semiconductor substrate, thin film solar cell the fragile material such as substrate form the scoring device of scored groove.
Claims (2)
1. a scoring device, it is characterized in that, by keeping the support table of fragile material, across support table configured in parallel and possess respectively engraving head a pair bridge portion, read be located at alignment mark in support table optical reading portion, a pair bridge portion is not conjugated mobilely to be formed with the control part of the direction making to be located at the tool blade leading edge of engraving head towards set direction with a pair moving adjusting mechanism of the relative position adjusting support table and engraving head, the action that controls aforementioned moving adjusting mechanism according to the displacement information of alignment mark;
Be installed on the direction of the tool blade leading edge of the engraving head in a bridge portion, with the direction of tool blade leading edge of engraving head being installed on another bridge portion, be configured to direction orthogonal toward each other;
Aforementioned moving adjusting mechanism by the one end in bridge portion is supported for only can turn hinge portion, by the other end support in bridge portion be can aforementioned hinge portion be fulcrum turn slip support sector, be that fulcrum makes the drive division of bridge portion turn form with hinge portion.
2. scoring device as claimed in claim 1, it is characterized in that, aforementioned control part is that the position of alignment mark in the process of the scored groove forming operation of scoring device produces the occasion conjugated, and controls the action of aforementioned moving adjusting mechanism to make aforementioned displacement below set value according to the displacement information obtained by optical reading portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010029904A JP5091961B2 (en) | 2010-02-15 | 2010-02-15 | Scribing equipment |
| JP2010-029904 | 2010-02-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102189609A CN102189609A (en) | 2011-09-21 |
| CN102189609B true CN102189609B (en) | 2015-04-08 |
Family
ID=44593108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110038407.XA Expired - Fee Related CN102189609B (en) | 2010-02-15 | 2011-02-14 | Scoring device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5091961B2 (en) |
| KR (1) | KR101167502B1 (en) |
| CN (1) | CN102189609B (en) |
| TW (1) | TWI439433B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5767595B2 (en) * | 2012-02-23 | 2015-08-19 | 三星ダイヤモンド工業株式会社 | Scribing device for brittle material substrate |
| JP2013237133A (en) * | 2012-05-17 | 2013-11-28 | Mitsuboshi Diamond Industrial Co Ltd | Scribing system |
| US9932429B2 (en) | 2014-07-29 | 2018-04-03 | W. L. Gore & Associates, Inc. | Method for producing porous articles from alternating poly(ethylene tetrafluoroethylene) and articles produced therefrom |
| CN106082619A (en) * | 2016-06-15 | 2016-11-09 | 苏州众显电子科技有限公司 | A kind of glass with cutting alignment mark |
| CN107871801A (en) * | 2017-08-16 | 2018-04-03 | 莫金连 | A kind of modified form photovoltaic panel assembly |
| CN112624594B (en) * | 2020-12-30 | 2022-06-10 | 中国建材国际工程集团有限公司 | Automatic longitudinal breaking device and method for tracking longitudinal cutting tool marks |
| WO2023239754A1 (en) * | 2022-06-09 | 2023-12-14 | Corning Incorporated | Glass scoring apparatus and method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1958490A (en) * | 2006-05-08 | 2007-05-09 | 塔工程有限公司 | Apparatus and method for substrate marking by synchronous multi-shaft |
| CN101439926A (en) * | 2007-11-21 | 2009-05-27 | 细美事有限公司 | Marking-out device and method and substrate cutting device by the same |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0436887Y2 (en) * | 1987-03-31 | 1992-08-31 | ||
| JP3078668B2 (en) * | 1992-04-24 | 2000-08-21 | 三星ダイヤモンド工業株式会社 | Automatic glass scriber |
| JP4290784B2 (en) * | 1998-09-09 | 2009-07-08 | 三星ダイヤモンド工業株式会社 | Glass scriber |
| JP4447299B2 (en) * | 2003-12-18 | 2010-04-07 | 株式会社ディスコ | Plate cutting machine |
| KR100713793B1 (en) | 2006-07-14 | 2007-05-04 | (주)조방 | The glass processing apparatus |
| JP2009126780A (en) * | 2007-11-21 | 2009-06-11 | Semes Co Ltd | Scribing device and method, and substrate cutoff device using the same |
| KR100883176B1 (en) * | 2007-12-03 | 2009-02-12 | 세호로보트산업 주식회사 | Apparatus for blanking printed circuit board |
| KR100924083B1 (en) * | 2008-03-05 | 2009-11-02 | 세메스 주식회사 | Scribing apparatus, apparatus and method for cutting substrate using the same |
| CN102056719B (en) * | 2008-06-05 | 2015-01-07 | 三星钻石工业股份有限公司 | Scribing wheel and method for scribing brittle material substrate |
-
2010
- 2010-02-15 JP JP2010029904A patent/JP5091961B2/en not_active Expired - Fee Related
-
2011
- 2011-02-10 TW TW100104370A patent/TWI439433B/en not_active IP Right Cessation
- 2011-02-10 KR KR1020110011725A patent/KR101167502B1/en not_active IP Right Cessation
- 2011-02-14 CN CN201110038407.XA patent/CN102189609B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1958490A (en) * | 2006-05-08 | 2007-05-09 | 塔工程有限公司 | Apparatus and method for substrate marking by synchronous multi-shaft |
| CN101439926A (en) * | 2007-11-21 | 2009-05-27 | 细美事有限公司 | Marking-out device and method and substrate cutting device by the same |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201206852A (en) | 2012-02-16 |
| JP5091961B2 (en) | 2012-12-05 |
| KR101167502B1 (en) | 2012-07-20 |
| TWI439433B (en) | 2014-06-01 |
| JP2011161886A (en) | 2011-08-25 |
| CN102189609A (en) | 2011-09-21 |
| KR20110094243A (en) | 2011-08-23 |
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| PB01 | Publication | ||
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