201206852 六、發明說明： 【發明所屬之技術領域】 2發明係關於於玻璃基板、半導體基板、薄膜太陽電 /之土板等脆性材料形成刻劃槽之刻劃裝置。 【先前技術】 以往之刻劃裝置係例如專利文獻i所示，具備在使玻 璃基板、半導體基板、薄膜太陽電池之基板等脆性材料保 持為水平之狀態下移送之支持台'跨支持台被設置之橋 二，地安裝於橋部之刻劃㉟，於此刻劃頭之前端設 有刻劃加工用之刀且。刀且在甘义 刀具係其刃則緣之方向（相對於脆 性材料^目對進行方向）可調整為相對脆性材料之移送方 向為既疋之角《。此外:，藉由在使刻劃頭下降以將輪之刃 前緣㈣於隸材狀狀態下使雜㈣料域刻劃頭 在橋社π動’可於脆性材料形成相對脆性材料之移送 向成既定之角度之刻劃槽。 、 為了於脆性材料精度良好地形成刻劃槽，於 之作業開始時或维兮麄拉、，π山 4 必須先將脆性材料之移送方向盥 刃則緣之方向所成角度調整為既定之角度。㈣，係藉由 準備已被加工為既定之角产 ^ ' t, , Μ A , 具，错由手動補正橋部相 ，口之立置來進行角度調整。具體而言，係於 之既定之位置配詈、、二1 、，时 又付口 /α八，以將治具之已被加工為既定 度之部分按壓橋部來調整橋部相對支持台之角度。 專利文獻1 .曰本發明專利第3078668號公報 【發明内容】 201206852 [發明欲解决之課題] 在如上述之以往之刻劃裝置， 時先將脆性材料之移送方向 ：：業開時或維護 為既定之角度之場合，隨著重複=向所成角度調整 ^里複形成刻劃槽匕 刻劃槽形成時之振動而於橋部相對支持台之位置： 產生，於脆性材料之移送方 有交位 從設定角度變動4外，亦可能因方向所成之角度 (例如溫度㈣μ 有刻料置之環境 度或濕乳）而於橋部本身有變形產 料之移送方向盥刀前緣之方Λ 4 於脆性材 定之既定之角度2方向所成之相對角度從已預先設 形成度之變動產生，便無法持續精度良好地 有變動產J '匕，在以往之刻劃裝置會有若於設定角度 整之义Γ維便有再度使用治具以手動重新進行角度之調 1之要，維護作業變煩雜之問題。 刻劃二形成較大寬度之刻劃槽，40"m程度之 方向戶Jj裝置中’在手動再調整脆性材料與刃前緣之 β成之角度之場合可以充分之精度形成刻劃槽。然 :’在形成如10…下之寬度較窄之刻劃槽之刻劃裝置 ’手動再調整脆性材料之移送方向與刀前緣之方向所成 之角度本身便為困難’無法持續精度良好地形成刻劃槽。 此外’在一般之刻劃裝置係如專利文獻1所示，具備 M ij Μ橋部係設為跨支持台’藉由使保持脆性材料之支 :台於對橋部正交之方向（稱為γ方向）移送，於脆性材 厂屯成Υ方向之刻劃槽。此外，藉由使刻劃頭於沿橋部之 201206852 =向（稱為x方向）滑動’於脆性材料形成χ a因此在形成X方向或γ方向之刻劃槽成七 向重新安褒為、=’母:人皆有將刀具之刀前緣之方 鲭㈣ 1方向或使脆性材料在支持台上90声旋 轉重置之必要，其作業非常煩雜。 度疑 針對此問題，木於明夕笛 ㈤料明之弟1目的在於提供可解決上述 以在課通，簡化 刻劃裝置。 乍業“精度良好地形成刻劃槽之 另外，本發明之第2目的在於提供不必重新安襄刀呈 s重置應加：c之脆性材料便可容易且迅速地進行相異之^ 方向之刻劃槽之刻劃裝置。 [解決課題之技術手段] 為了解決上述課題而被完成之本發明之一種刻劃裝置 係由保持脆性材料之支持台、跨支持台被平行配置且^別 具備刻劃頭之-對橋部、讀取設於支持台上之對準標記之 光學讀取部、使橋部變位移動以調整支持台與刻劃頭之相 對位置之移動調整機構、根據對準標記之變位資訊控制前 述移動調整機構之動作以使設於㈣頭之刀具之刃前緣之 立向朝向既定之方向之控制部構成；被配置為安裝於—橋 口 P之刻劃頭之刀具之刃前緣之方向與安農於另一橋部之刻 劃頭之刀具之刀前緣之方向朝向彼此正交之方向。 / [發明之效果] 在本發明由於係藉由控制部根據以光學讀取部讀取之 對準標記之變位資訊使前述移動調整機構動作以使刀前緣 201206852 之方向與脆性材料之相對移送 ^ , ^ τ μ方向所成之角度為既定之角 度自動補正支持台與刻劃頭之相對 ^ ^ V ® L 心相對位置，故使用治具再 π整之必要消失，可簡化維 刻劃槽。 隻作業並持續精度良好地形成 二外，在本發明由於係設置二個橋部且被配置為安裝 邱…，】頁之刀具之刀則緣之方向與安裝於另-橋 “虹 八之刀則緣之方向朝向分別正交之方向， 人=脆性材料於彼此正交之χ、γ方向形成刻劃槽之場 由使安裝於-橋部之刻劃頭之刀具之刃前緣朝向X 二並使安裝於另-橋部之刻劃頭之刀具之刀前緣朝向Υ201206852 VI. Description of the Invention: [Technical Field of the Invention] 2 The invention relates to a scribing device for forming a scribed groove on a brittle material such as a glass substrate, a semiconductor substrate, or a thin film solar/earth soil plate. [Prior Art] A conventional scribing device is provided, for example, in a state in which a brittle material such as a glass substrate, a semiconductor substrate, or a thin-film solar cell substrate is held horizontally, and a support table is provided across the support table. The second bridge is installed on the scribe line 35 of the bridge, and the knives for scribing are provided at the front end of the scribing head. The knife can be adjusted in the direction of the blade edge of the Ganyi tool (relative to the direction of the brittle material) to the direction of the transfer of the relatively brittle material. In addition: by lowering the scribe head to make the front edge of the wheel (4) in the spheroidal state, the miscellaneous (four) material scribe head can be used to form a relatively brittle material in the brittle material. Draw a groove at a predetermined angle. In order to form the scribed groove with high precision for the brittle material, at the beginning of the operation or at the beginning of the work, the π mountain 4 must first adjust the angle formed by the direction of the edge of the brittle material to the edge of the cutting edge to a predetermined angle. . (4) By adjusting the angles that have been processed into the established angles ^ 't, , Μ A, 、, 、, and by manually correcting the bridge phase and the mouth to adjust the angle. Specifically, it is equipped with the corresponding position, 二1, and 付口/α8, in order to adjust the bridge to the support table by the part of the fixture that has been processed into a predetermined degree. angle. Patent Document 1 曰 发明 发明 30 78 78 78 78 2012 2012 2012 2012 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 068 In the case of a given angle, with the repetition = adjustment to the angle formed, the vibration of the scribed groove is formed at the position of the bridge relative to the support table: generated, the transfer of the brittle material is paid If the position changes by 4 from the set angle, it may also be due to the angle formed by the direction (for example, the temperature (4) μ has the environment or wet milk), and the bridge itself has the direction of the transfer of the deformed material. 4 When the relative angle formed by the two directions of the brittle material is determined from the change in the degree of formation of the pre-set, it is impossible to maintain the accuracy of the production J '匕, and the conventional scoring device may have a set angle. In the whole sense, there is a need to use the jig again to manually re-adjust the angle, and the maintenance work becomes cumbersome. The scribe groove is formed by engraving two to form a larger width, and the slanting groove can be formed with sufficient precision in the case of manually adjusting the angle between the brittle material and the leading edge of the blade in the direction of 40"m degree. However: 'the scribe device that forms the groove with a narrow width under 10...' manually adjusts the angle between the direction in which the brittle material is transferred and the direction of the leading edge of the blade itself is difficult. A scribed groove is formed. In addition, the general scoring device is as shown in Patent Document 1, and the M ij bridge portion is provided as a support across the support table by holding the brittle material in a direction orthogonal to the bridge portion (referred to as The γ-direction is transferred, and the groove is cut in the direction of the brittle material factory. In addition, by sliding the scribe head to the 201206852 = direction (referred to as the x direction) along the bridge, the 脆 a is formed in the brittle material, so that the slanting in the X direction or the γ direction is formed into a seven-direction re-arrangement. = 'Mother: Everyone has the edge of the knife's leading edge (4) 1 direction or the need to make the brittle material 90 rotation on the support table, the operation is very complicated. Doubtfulness To solve this problem, Mu Yuming et al. (5) Ming Ming's brother 1 aims to provide a solution to the above, to simplify the scoring device. In addition, the second object of the present invention is to provide a brittle material that can be reapplied without re-sizing the squeegee to easily and quickly perform the dissimilarity. [Structural means for solving the problem] [Technical means for solving the problem] A scribing device of the present invention which is completed in order to solve the above problems is arranged in parallel by a support table for holding a brittle material, and across a support table, and is provided with an engraving a moving adjustment mechanism for the bridge portion, the alignment mark for reading the alignment mark provided on the support table, and the movement adjustment mechanism for shifting the bridge portion to adjust the relative position of the support table and the scribing head, according to the alignment The displacement information of the mark controls the movement of the movement adjustment mechanism to form a control unit provided in the direction in which the leading edge of the blade of the (four) head is oriented in a predetermined direction; and is configured to be attached to the tool of the bridgehead P The direction of the leading edge of the blade and the direction of the leading edge of the knife of the knives of the other end of the bridge are oriented orthogonal to each other. / [Effects of the Invention] In the present invention, the optical Reading department The displacement information of the alignment mark causes the movement adjustment mechanism to operate such that the direction of the knife leading edge 201206852 and the relative transfer of the brittle material are ^, the angle formed by the direction of ^ τ μ is a predetermined angle to automatically correct the support table and the scribe head Compared with the relative position of the ^ ^ V ® L core, it is necessary to use the jig to eliminate the π, which simplifies the grooving. Only the operation and the continuous precision are formed. In the present invention, two bridges are provided. And it is configured to install Qiu..., the tool of the page is in the direction of the edge and the direction of the other side of the bridge that is installed in the other side of the bridge. The field in which the scribed groove is formed in the γ direction is such that the leading edge of the blade attached to the scribe head of the bridge portion faces the X 2 and the leading edge of the cutter attached to the other end of the bridge is oriented toward the Υ
二’只要選擇任一橋部，不必重新安裝刀具便可形成X 万向及Υ方向之刻劃样，且古 〜 - 八有了今易且迅速地進行形成相 ,、之二方向之刻劃槽之作業之優良效果。 (解決其他課題之手段及效果） 前述移動調整機構可係由將橋部之一端支持為僅可旋 動,樞軸部、將橋部之另一端支持為可以前述框轴部為支 點紅動之滑動支持部、以樞軸部為支點使橋部旋 部構成。 猎此，藉由使驅動部作動可使橋部以樞軸部為支點正 確地變位旋動且可以簡單之構造形成移動調整機構。 此外，前述控制部可係在刻劃裝置之刻劃槽成形作業 之過程中於對準標記之位置有變位產生之場合根據由光學 2取部取得之變位資訊控制前述移動調整機構之動作以2 前述變位成為既定值以下。 201206852 藉此在刀具之刀前緣之方向在刻劃裝置 :作業之過程中，前緣之方向與脆性材料之 方向所成之角度有變動產生之 對移送 自動調整為既定之角度。 該變動並迅速 【實施方式】 細。於以下’根據於圖顯示之實施例詳細說明本發明之詳 目1為本發明之刻劃袭置之俯視圖，圖2為 •裝置之側面圖’圖3為從圖1之“線觀察之前視圖： 刻劃裝置1具備於上面保持玻璃基板、半導體 ' 太陽電池之基板等脆性材料2並移送之水平之：、薄膜 =3可保持脆性材料2並往在圖1顯示之γ方向口移3送支 因此，支持台3係透過沿往γ方向被鋪設之執道 ： 支持台移送機構32被安装。 多動之 此外’刻劃裝置i具備跨支持 4A、4B。各橋部4A、4"、 -置之-對橋部 •大致正交之沿X方向水平延伸’ σ之上方對γ方向 .., I伸之樑部4卜連結於此樑邻4彳 之兩知之垂直之腳部42、43形成。 一Ρ 於橋部4Α、4Β之樑部41 即攝影機6、6,使可讀取設於^ 5與光學讀取部 置之對準標記H ; 'Q 3上之預先設定之位 於支持台3上而^^ 特別圖示，但即使不直接設 又幵口 3上而设於載置於支 刻劃頭5係構成為可透 遠，又土反上亦可。 構52升降，於刻劃頭5之前端=馬達之刻劃頭移動機 <引h女裝有刀輪5丨。此外，刻劃 201206852 :員5可藉由前述刻劃頭移動機構52沿設於樑部ο之滑槽 於χ方向移動。 橋部4:、4Β之中’安裝於一橋部4Α之刻劃頭$之刀 : 刀前緣之方向（旋轉方向）係被設置為朝向χ方向。 二藉由對支持台3上之脆性材料'2按虔刀輪”之刃前 方三時使刻劃頭5於X方向移動，可對脆性材料2形成χ 万向之刻劃槽。 ，裝於另-橋部4Β之刻劃頭5之刀輪51之刃前緣之 疑轉方向）係被設置為_ γ方向。藉此，藉由對 Μ 口 3上之脆性材料2按壓刀輪”之刃前緣同時使支持 :此：：方向移動，可對脆性材料2形成¥方向之刻劃槽。 ，如® 7所示，只要事先並列安裝複數、例如4 d J頭5，即可同時形成4列刻劃槽。 另外，前述各橋部4A、4B係如圖4〜圖6所示被構 亡：可透過移動調整機構4〇以於χ方向延伸之樑部41之 為支點旋動變位。此移動調整機構4〇由於橋部Μ、仞 ’’’、目同’故針對橋部4八之移動調整機構4〇具體敘述。 移動調整機構4G係由將連結於橋部4α之—端之腳部 之山下知支持為僅可旋動之樞軸部45、承载另—腳部U 之下端之滑動支持部46構成。滑動支持部Μ 4驅動…鋪設於γ方向之固定執道47移動之二 具於則述承載構件49設有於X方向延伸之長孔咖 長孔可滑動地敢合有形成於腳部42之下端： 仏。藉此，使承載構件49滑動，使橋部从 201206852 為支點旋動變位，可微調整刀輪 〜巧，』% <不向 〇 另外’刻劃裝£ !具備根據對準 位前後之對準俨笮門少a θ 文证貝讯（變 作以將刀輪5 置差）控制移動調整機構4〇之動 字刀輪51之刃前緣之方向 腦等控制部7。 疋之角度之電 壓如上述被構成之刻劃裝置卜藉由對贿材料2按 昼-橋部从之刻劃頭5之刀輪51 :广2按 於Υ卡心一 Μ '深丨j時使刻劃頭5 、方向移動，可對脆性材料2形成χ 一 “ 由按壓另一橋部4Β之刀於51之刃义络 」坦丨槽。精 方向銘、、， 輪51之刀剛緣同時使支持台3於γ 可對脆性材料2形成γ方向 場 二=設橋部4Α、，二個橋部並於—橋 = 刃則緣朝向X方向之刀輪51，於另 ^裝有使 、緣朝“方向之刀輪51，故只要選擇任一 使刃前 安褒…便可形成X方向及^向之二：：必重新 且迅速地進行作業。 您幻^槽，而可容易 :在刻劃褒置〖之起動時，雖係使 輪51以使脆性材料2之移送方向 …… 方向）正確地成為直角，但隨著 ^緣之方向（旋轉 可能因振動p f .θ ★ "重複刻劃槽形成作業 變形產生，於脆性材料2之移^而於橋部等有 成之相對角度有變動產生。若此… 則緣所 則根據對準標記之變 ▲ 成為設定值以上， 量差），控制部m胃讯變位前後之對準標記間之向 化以樞Μ 45^㈣㈣_4()U作以使橋部4A、 為支點變位旋動（例如圖6之角度〇,將 201206852 前述變動後之角度自動再調整為預先設定之角纟。藉此， 可簡化維護作業並持續精度良好地形成刻劃槽。 另外’控制部7可於刻劃槽之形成作業成為既定次數 以上時讀取對準標記，只要於角度有變動便自動調整。 以上，雖已針對本發明之代表性實施例說明，但本 明並非為僅㈣於上述之實施例構造者。例如，於橋部I 4B中_係將橋部之一端構成為可藉由拖輛部Μ僅旋動， 但亦可4與滑動支持部46 ^目同機構來取代此樞軸部Μ。此 外’滑動支持部46亦只要是可將橋部精度良好 之機構不論為何種…另外，安裝於刻劃頭5之刀：： 可為於刀前緣具有方向性之固定刃來取代刀輪。此外 正可在達成其目的且不脫離申請專利範圍之範圍内 適當修正、變更。 [產業上之可利用性] 薄膜太陽 本發明可適用於於玻璃基板、半導體基板、 電池之基才反等脆性材料形成刻劃槽之刻劃裝置。 【圖式簡單說明】 圖1為本發明之刻劃裝置之俯視圖。 圖2為上述刻劃裝置之側面圖。 圖3為從圖1之A-A線觀察之前視圖。 #二二為顯示上述刻劃裝置中之橋部之移動調整機構之 ，月動支持邓之一部分剖面側面圖。 圖 5 面側面圖 為顯示橋部之移動調整機構之樞”之—部分剖 201206852 圖6為顯示上述刻劃裝置之橋部稍微變位旋動後之狀 態之擴大俯視圖。 圖7為顯示刻Λ裝，置之其他實施例之俯視圖。 [ 主要元件符號說明】 1 刻劃裝置 2 脆性材料 3 支持台 4Α 、4Β 橋部 5 刻劃頭 6 攝影機（光學讀 7 控制部 40 移動調整機構 45 才區轴部 46 滑動支持部 參 11Secondly, as long as any bridge is selected, it is not necessary to re-install the tool to form the X-direction and the direction of the X-direction, and the ancient ~-eight has the current and rapid formation of the phase, and the second direction of the groove Excellent results of the work. (Means and Effects for Solving Other Problems) The movement adjustment mechanism may be configured such that one end of the bridge portion is supported only to be rotatable, and the pivot portion is supported by the other end of the bridge portion so that the frame shaft portion can be fulcrum The sliding support portion is configured by a pivot portion of the bridge portion with the pivot portion as a fulcrum. By running the driving portion, the bridge portion can be properly displaced and rotated with the pivot portion as a fulcrum, and the movement adjusting mechanism can be formed in a simple configuration. Further, the control unit may control the movement of the movement adjustment mechanism based on the displacement information acquired by the optical pickup unit when the position of the alignment mark is displaced during the grooving forming operation of the scoring device. The displacement of 2 is less than or equal to the predetermined value. 201206852 In this way, in the direction of the leading edge of the tool in the scribe device: during the operation, the angle between the direction of the leading edge and the direction of the brittle material is changed, and the transfer is automatically adjusted to a predetermined angle. This change is quick. [Embodiment] Fine. DETAILED DESCRIPTION OF THE INVENTION The detailed description of the present invention is based on the following detailed description of the present invention. FIG. 2 is a side view of the device. FIG. 2 is a side view of the device. FIG. 3 is a front view from the line of FIG. The scribing device 1 is provided with a level at which the brittle material 2 such as a glass substrate or a semiconductor 'solar cell substrate is held and transported thereon. The film = 3 can hold the brittle material 2 and is transferred to the γ direction shown in FIG. Therefore, the support table 3 is routed in the gamma direction: the support table transfer mechanism 32 is mounted. In addition, the 'scratch device i has cross-support 4A, 4B. The bridges 4A, 4" - set - to the bridge section * roughly orthogonally extending horizontally along the X direction ' σ above the γ direction.., I stretched the beam 4 4 connected to the beam adjacent to the 4 彳 of the vertical feet 42 , 43 The beam portion 41 of the bridge portion 4Α, 4Β is the camera 6, 6 so that the alignment mark H disposed on the optical reading portion and the optical reading portion can be read; the predetermined setting on the 'Q 3 is supported. On the table 3 and ^^ special illustration, but even if it is not directly set, it is placed on the shovel 3 and placed on the shovel 5 The structure is made to be far-reaching, and the soil can be reversed. The structure 52 is raised and lowered, and the front end of the scribe head 5 = the head of the motor is moved by the head & the head of the motor has a knife wheel 5 丨. In addition, the score 201206852 The clerk 5 can be moved in the χ direction along the sliding groove provided in the beam portion ο by the scribe head moving mechanism 52. The bridge 4:, 4 ' 'installed in a bridge portion 4 Α 划 $ $ knife: knife The direction of the leading edge (rotation direction) is set to face the χ direction. 2. The scribe head 5 is moved in the X direction by three times in front of the blade of the brittle material '2 on the support table 3'. The brittle material 2 is formed into a slanting groove. The suspected turning direction of the cutting edge of the cutter wheel 51 of the head 5 of the other end of the bridge portion is set to the _ γ direction. Thereby, by pressing the leading edge of the blade of the cutter wheel 2 on the brittle material 2 on the mouth 3, the support: this:: direction movement can form a slanting groove in the direction of the brittle material 2. For example, 7 It is to be noted that, as long as a plurality of, for example, 4 d J heads 5 are mounted in parallel, four rows of scribed grooves can be simultaneously formed. Further, each of the bridge portions 4A and 4B is constructed as shown in FIG. 4 to FIG. The adjusting mechanism 4 rotates and displaces the beam portion 41 extending in the χ direction as a fulcrum. The movement adjusting mechanism 4 移动 is a movement adjustment mechanism for the bridge portion VIII due to the bridge portion Μ, 仞 ''' 4. The movement adjustment mechanism 4G is supported by a mountain portion that is connected to the foot portion of the bridge portion 4α as a pivot portion 45 that can only be rotated, and a sliding support portion that carries the lower end of the other foot portion U. 46. The sliding support portion Μ 4 drives... the fixed trajectory 47 that is laid in the γ direction moves. The bearing member 49 is provided with a long hole in the X direction, and the slidable hole is slidably formed on the foot. The lower end of the portion 42 is: 仏. Thereby, the bearing member 49 is slid, and the bridge is rotated from 201206852 as a fulcrum. Position, can be slightly adjusted cutter wheel ~ Qiao, 』% < not to 〇 ' ' ' ' 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 根据 根据 根据 根据 根据 根据(5) The control unit 7 for controlling the direction of the leading edge of the blade of the movable cutter wheel 51 of the movement adjustment mechanism 4, etc. The voltage of the angle of the cymbal is as described above by the scribing device -The bridge section is scratched from the head of the 5th cutter wheel 51: Wide 2 is pressed against the heart of the Leica. When the depth is j, the head 5 is moved and the direction is moved, and the brittle material 2 can be formed. The 4th knives of the knives in the 51th blade of the Yiluo. In the direction of the fine direction, the edge of the blade of the wheel 51 simultaneously makes the support table 3 at γ, and the γ-direction field 2 is formed on the brittle material 2 = the bridge portion 4 Α, and the two bridge portions are at the bridge-edge edge The cutter wheel 51 in the direction is equipped with the cutter wheel 51 in the direction of the other direction. Therefore, it is possible to form the X direction and the second direction by selecting any one of the front edges of the blade: it must be re- and quickly Doing the work. You can make it easy: in the start of the scribing, the wheel 51 is correctly oriented at the direction of the direction of the brittle material 2, but with the edge Direction (rotation may occur due to vibration pf.θ ★ " repeated scribed groove forming operation deformation, which occurs when the brittle material 2 is moved and the relative angle of the bridge or the like is changed. If this is the case, then the edge is based on The change of the alignment mark ▲ becomes the set value or more, the amount difference), and the direction between the alignment marks before and after the control unit m is changed by the pivot 45^(4)(4)_4()U so that the bridge portion 4A becomes the fulcrum Position rotation (for example, the angle of Figure 6, automatically adjust the previously changed angle of 201206852 to a preset Therefore, the maintenance operation can be simplified and the scribed groove can be formed with high precision. Further, the control unit 7 can read the alignment mark when the forming operation of the scribed groove becomes a predetermined number or more, as long as the angle is changed automatically. The above description has been made with respect to a representative embodiment of the present invention, but it is not intended to be only a structure of the above-described embodiment. For example, in the bridge portion I 4B, one end of the bridge portion is configured to be borrowable. The towing unit is only rotated, but the pivoting portion 46 can be replaced with the sliding support portion. The sliding support portion 46 is also a mechanism that can accurately bridge the bridge. ...in addition, the knife attached to the scribing head 5: can replace the cutter wheel with a fixed blade having a directionality at the leading edge of the blade. Further, it can be appropriately modified or changed within the scope of achieving the object without departing from the scope of the patent application. [Industrial Applicability] Thin Film Sun The present invention can be applied to a scribing device for forming a scribed groove on a glass substrate, a semiconductor substrate, or a battery such as a brittle material. [Simplified Schematic] FIG. invention Figure 2 is a side view of the above-described scoring device. Figure 3 is a front view of the bridge portion of Figure 1 taken from line AA of Figure 1. #二二 is a movement adjustment mechanism for the bridge portion of the above scribing device. The moon movement supports a side view of one part of Deng. Fig. 5 is a side view showing the pivot of the movement adjustment mechanism of the bridge. Partial section 201206852 Fig. 6 shows the state of the bridge of the above scribing device slightly displaced and rotated. Fig. 7 is a plan view showing another embodiment of the engraved armor. [Main component symbol description] 1 scribing device 2 brittle material 3 support table 4Α, 4Β bridge portion 5 scribing head 6 camera (optical reading) 7 control unit 40 movement adjustment mechanism 45 area shaft portion 46 sliding support portion reference 11