1254702 玖、發明說明 【發明所屬之技術領域】 本發明，係關於適合例如玻璃、矽、陶瓷等非金屬性 脆性材料或塑膠片等非金屬材料之切斷的刀輪、及使用該 刀輪之劃線裝置、使用該刀輪之劃線方法。 【先前技術】 習知’對上述脆性材料之劃線，廣泛使用具備如圖18 所示具鈍角之刀鋒的刀輪Η。使用此刀輪Η之劃線，通常 ，係邊將適合脆性材料G之材質或厚度等各條件的荷重施 加於刀鋒，邊在脆性材料之表面上轉動刀輪Η來進行，藉 此在脆性材料表面形成連續之垂直裂痕Κ之線（刻痕）。 又，例如在玻璃基板之劃線製程中，如圖19所示，經 常進行玻璃基板G之交叉劃線。此時，發生所謂跳過交點 之現象，該現象係對第1方向作劃線時受劃線L1〜L3各兩 側所積蓄之內部變形之影響，當要在與第1方向交叉之第2 方向作劃線時，在與前述劃線L1〜L3之交點附近發生，以 致時常在該交點附近不能形成第2劃線L4〜L6。內部變形 ，係有關其以水平裂痕之形態出現於加工物表面而引起玻 璃屑（cullet)之產生等切斷後截面品質降低等問題的重要現 象，故有必要盡量減少內部變形之發生。因此，須使劃線 時之劃線動作穩定，具體而言，在劃線動作中使劃線壓力 保持在既定範圍內是重要的。於是，爲防止上述現象之發 生，習知在形成第2劃線L4〜L6時，將其刀鋒荷重增加至 形成第1劃線L1〜L3時之刀鋒荷重的約1.2至3倍。 1254702 又，塑膠片之劃線時，將塑膠片吸引固定於硬工作台 等上來作劃線。又，在塑膠片之情形，圖18所示之刀輪之 刀鋒角度則與脆性材料之情形不相同，形成銳角。 在脆性材料或塑膠片等加工對象物作劃線加工之情形 ，若使用在加工對象物之表面上轉動來加工對象物表面部 的刀輪時，所關心者乃是如何邊將刀輪之刀鋒部對加工對 象物之表面穩定地緊壓於緊壓方向而邊轉動移動。 因加工表面所發生之現象，係依加工對象物之材料是 脆性材料或是塑膠材料而不相同，故依材料別詳述如下。 首先，在脆性材料之情形，若觀察以刀輪Η在脆性材 料G產生垂直裂痕Κ之機構，則得知：首先藉由在刀鋒增 加荷重，在與脆性材料G表面之刀鋒抵接之部位產生彈性 變形，其次，伴隨刀鋒荷重之增大，在上述部位產生塑性 變形。進一步增大刀鋒荷重，就超過塑性變形之界限點， 其結果產生脆性破壞，在脆性材料之厚度方向開始成長垂 直裂痕Κ。該垂直裂痕Κ之成長，係當垂直裂痕Κ之前端 Μ，達到因應刀鋒荷重之大小及脆性材料之材質或厚度等 之到達深度Ρ(從脆性材料表面之距離）的時候終止。若就一 定之材質、一定之厚度來觀察它，則得知：能控制上述垂 直裂痕Κ之前端Μ達到之到達深度Ρ者僅爲刀鋒荷重。即 ，若增大刀鋒荷重，因刀輪Η之刀鋒侵入脆性材料G表面 之深度則變長，用以產生垂直裂痕Κ之能量則變大，故垂 直裂痕Κ之到達深度就變深。然而，若刀鋒荷重超過某一 定大小，雖然能獲得所謂深垂直裂痕Κ，但是與它同時積 1254702 蓄於脆性材料G表面附近之內部變形變成飽和狀態，產生 朝向與垂直裂痕K之成長方向完全不相同方向的裂痕，所 謂水平裂痕。此種水平裂痕，造成產生多量不希望存在之 切粉的原因。 本發明人等，將上述機構更詳細探究之結果，發現： 刀鋒荷重與垂直裂痕K之到達深度P間有如圖14所示之關 係。即，亦從此圖14所示之曲線圖明瞭，垂直裂痕K之到 達深度P，係先存在伴隨刀鋒荷重增大緩慢加深之領域（A 領域），接著，存在伴隨刀鋒荷重增大急劇增加之領域（B領 域），再者，存在刀鋒荷重雖增大但幾乎不增加之領域（C領 域）。並且，在此C領域，在A領域或B領域尙未見過之 水平裂痕就比垂直裂痕大幅增加。 從以上之事實，發現：藉由以相當於B領域，即伴隨 刀鋒荷重增大到達深度P就急劇增加之領域內，的刀鋒荷 重進行劃線，能不伴隨水平裂痕之產生而獲得深垂直裂痕 〇 【發明內容】 (一）發明所欲解決之技術問題 然而，得知：B領域之能設定刀鋒荷重的最適合範圍 係極爲狹窄，僅使用通常劃線時之刀鋒荷重之調整就在B 領域內不能作長時間穩定之劃線。 又，在交叉劃線，由於爲防止如前述跳過交點之產生 ，當形成第2劃線時需要大幅增加刀鋒荷重比第1劃線之 形成時大，刀鋒荷重則往往會進入上述C領域，因此有不 1254702 能避免多量切粉之產生的問題。 再者，與如上述之問題另外，使用上述習知之刀輪Η ，例如對玻璃基板作劃線，由於玻璃之起伏或彎曲，玻璃 表面之凹凸，或，保持刀輪之支持具或保持該支持具之劃 線頭之搖晃等的外來要因，時常會產生不能獲得穩定之劃 線。 又，上述所提之另一材料的塑膠，若是塑膠片之情形 ，由於塑膠片厚度之偏差或保持該板之工作台之平坦度， 或保持相對移動之刀鋒的部分之對該板高度方向之平行度 的偏差等，需要具有相當寬裕之刀鋒深度設定。因此，對 塑膠片之刀鋒侵入深度則變成不一定，在侵入深度淺之部 分就不容易使塑膠片分開，又在侵入深度深之部分就刀鋒 達至硬工作台，有損傷刀鋒前端之問題。 再者，例如液晶顯示用板之貼合透光性塑膠基板，將2 片重疊之基板切斷之情形等，受基板2片分之厚度偏差的 影響，當刀鋒前端深深侵入時，連使非切斷對象之下側基 板亦一起損傷，造成不良品之產生，相反地若是淺時，變 成不能分開，有製品之取出困難之問題。 (二）解決問題之技術手段 本發明人等，依據前述之見解，發現：對脆性材料， 若藉由穩定且不斷地施加相當於上述Β領域之刀鋒荷重的 劃線壓力，則能保持刀鋒對脆性材料之咬入量爲一定，不 僅能穩定且確實獲得不引起水平裂痕之產生而到達極深之 深度的垂直裂痕，同時能解決上述外來要因所造成之劃線 1254702 又，藉由如上述在刀鋒之至少一側具有限制面，因即 使施加大荷重於刀鋒亦不會產生水平裂痕，故能以增大刀 鋒荷重之方式去除如前述之外來要因，其結果能獲得穩定 之刻痕。 又，上述非金屬材料用刀輪，亦可將該限制面與刀輪 側面相接之周緣角部在全周均作成缺口。 此種形狀之刀輪適合於：將有多數個元件矩陣狀形成 於表面之玻璃基板或砂晶圓等脆性材料基板切成各元件單 位時的場合。即，在對露出上述元件間之基板面以刀輪劃 線之情形，若使用如圖18所示形狀的刀輪，刀鋒之傾斜面 就妨礙元件，而藉由將各限制面與各側面分別相接之周緣 角部在全周均作成缺口之形狀，能將刀鋒以不妨礙元件之 方式插入元件間，能對露出元件間之基板面作劃線。 又，上述非金屬材料用刀輪，亦可使刀鋒之刀鋒稜線 之位置比刀輪兩側面間之中心更靠近任一側面。 在此情形，亦適合將玻璃基板或矽晶圓等（於其表面有 矩陣狀形成之多數個元件）之脆性材料基板切成各元件單位 。即，藉由使在有刀鋒稜線靠近之一側之刀輪側面面向元 件側面，能使刀鋒稜線比習知刀輪更接近元件，切斷基板 時，能不損傷元件而在各元件之最靠元件附近作劃線。 本發明之劃線裝置，其特徵在於：具備：載置非金屬 材料之工作台；配置於該工作台上方之劃線頭；及交叉劃 線機構，藉由該劃線頭在工作台上之被加工對象物形成互 相交叉之刻痕；並且在該劃線頭設有上述非金屬材料用刀 10 1254702 輪之任一種。 又，在此劃線裝置，亦可設置刀輪反轉機構，每次1 條刻痕形成完，即將刀輪方向反轉180° 。 藉此，不必翻轉基板即可對基板之既定部位，即接近 各元件之凸部或薄膜之部位，作劃線。 又，在上述劃線裝置，亦可使用具備2個刀輪者。此 情形，將該等刀輪配置成並排，並且使彼此之刀鋒稜線位 於距離相隔最遠之位置◦然後，上述2個刀輪就能以動作 程式選擇性地作同時或個別劃線。藉此，不需要如上述每 次形成完1條劃線就將刀輪反轉180° 。 又，在具備劃線頭相對載置非金屬材料之工作台往X 方向及/或Y方向移動之機構的劃線裝置，亦可在劃線頭設 置上述非金屬材料用刀輪之任一種。 再者，作爲手動刀具之劃線工具，亦可具備由筒狀柄 所構成的握取部、及設置於該握取部前端的刀片支持具， 並在該刀片支持具設置上述非金屬材料用刀輪之任一種。 又，本發明之劃線方法，係使用上述各種非金屬材料 用刀輪之非金屬材料劃線方法；其特徵在於：對該刀輪一 直加壓至其限制面接觸非金屬材料表面爲止，並且邊維持 刀鋒侵入非金屬材料內之狀態，邊使該刀輪朝既定方向轉 動，來對非金屬材料進行劃線。 【實施方式】 (發明之較佳實施例） 以下，參閱圖式說明本發明之實施例。 11 1254702 圖1，係本發明之實施例之刀輪1的立體圖，圖2係該 側視圖，圖3係該前視圖。 此刀輪1，係在其軸孔6插穿支軸（未圖示）後，在圖外 脆性材料表面上轉動；該刀輪係於其刀鋒2兩側具有限制 面3，用以限制刀鋒2自脆性材料表面算起之侵入深度。 上述刀鋒2之刀鋒角度Θ，若以玻璃等之脆性材料作爲 切斷對象時，宜設取1〇〇°〜165° 。刀鋒角度Θ若比100°小 就不能獲得刀鋒2所需要之強度，又若比165°大就刀鋒2 不容易侵入脆性材料內。又，刀鋒2之刀鋒稜線21與限制 面3間之徑向距離D，宜設定爲2μπι〜ΙΟΟμπι。若該距離比 2μπι小則在脆性材料不產生塑性變形，其結果不產生垂直 裂痕。又，若比ΙΟΟμπι大，則刀鋒2對脆性材料之咬入量 就太大，會使脆性材料破裂。又，雖距離D依脆性材料之 材質而異，但在脆性材料之厚度越厚的場合，若在上述範 圍內選定距離D，則較能有效地獲得深的垂直裂痕Κ。 又，至於上述刀鋒角度Θ與距離D之相配，則因應切斷 對象之脆性材料G之材質或厚度、及刀輪1本身之厚度等 ，在上述限制面3能確保達成既定功能之面積的範圍內適 宜選擇即可。 對於上述限制面3最好施以鏡面加工，藉此在劃線時 ，能使該限制面在被加壓於脆性材料G表面之狀態圓滑地 在該表面上轉動。 圖4，係表示本發明之其他實施例，在此例，刀輪1， 係將各限制面3與刀輪各側面4分別相接之周緣角部在全 12 1254702 周均作成缺口者。 在具此種形狀之刀輪1之情形，如圖6所示，適合將 玻璃基板或矽晶圓等（其表面有排成矩陣狀之多數個元件T) 脆性材料基板G切成元件T單位。即，在對露出元件T間 之基板面以此刀輪1作劃線之情形，能使刀輪1不干擾元 件T而插入元件T間，來對露出元件T間之基板面作劃線 〇 圖5，係表示本發明之其他實施例，在此例，刀輪1， 係使刀鋒2之刀鋒稜線21之位置比刀輪1兩側面4、4間 之中心更靠近任一側面4(在圖示例係左側之側面4)者。 在此實施例，一方面能確保兩側面4間之厚度爲有足 夠機械強度之厚度，另方面則藉由將另一側面4與刀鋒之 刀鋒棱線的距離縮小，而能進行有與圖6所示實施例同樣 特徵之劃線。 在此情形，亦與圖4所示之實施例同樣，適合將玻璃 基板或矽晶圓等（在表面有排成矩陣狀之多數個元件T)脆性 材料基板G切成元件T單位。即，如圖7所示，藉由將靠 近刀鋒稜線21側之刀輪側面4面向元件T側面，能使刀鋒 稜線21比習知刀輪Η更接近元件T，基板G之切斷時，對 各元件Τ能在最靠近元件Τ之部位作劃線而不損傷元件Τ 〇 其次，本發明之劃線方法，係使用上述各實施例所示 之刀輪，如圖3所示，將刀輪1加壓至其限制面3抵接於 脆性材料G表面，並邊維持刀鋒2侵入於脆性材料G內之 13 1254702 狀態，邊使刀輪1朝既定方向（在圖3係垂直於紙面之方向） 轉動，來對脆性材料G作劃線。 在此，施加在刀鋒2之荷重大小，較佳者爲調整至使 它存在於圖14所示之B領域的値。即，即使到達雖增大刀 鋒荷重但垂直裂痕K之深度幾乎不增加的c領域，藉由刀 鋒2兩側之限制面3與脆性材料G之表面抵接，來承受其 荷重，因藉此抑制刀鋒2緊壓脆性材料G的劃線壓力之變 動，能保持對脆性材料G之侵入量爲經常一定，故能確實 獲得到達極深之深度之垂直裂痕K而不致產生水平裂痕， 同時因幾乎沒有水平裂痕之產生，能有效防止交叉劃線時 之跳過交點，而幾乎不產生切粉。 又，若要以圖5所示之上述實施例的刀輪1進行脆性 材料G之劃線，就如圖7所示，使刀輪1以靠近刀鋒棱線 21側之側面來面向元件T側面之方式緊貼於脆性材料G。 在此，因元件T於脆性材料G排列成矩陣狀，故順沿一列 的元件對最靠近此等元件側面之部位作劃線，若形成完1 條劃線，接著將刀輪1反轉180° ，順沿鄰接前列之列的元 件T對最靠近此等元件側面之部位作劃線，來形成第2條 劃線。 又，作劃線時，如上述，除每次形成完1條劃線就將 刀輪1反轉180°外，亦可使用如下之刀輪支持具（省略圖 示）：配置2個有如圖8所示關係之刀輪1、1，亦即，將2 個刀輪1、1並排，並且使彼此之刀鋒稜線21位於距離相 隔最遠之位置。如上述使用2個刀輪1、1之情形，只要行 14 1254702 走1次於各元件τ間，就能對脆性基板中，分別接近所鄰 接之各元件τ之相對之各側面的部位能同時劃線，不需要 如上述每次形成完1條劃線就將刀輪1反轉180。，故能提 高作業性。 又，本發明之實施例之其他脆性材料的刀輪之一例， 係包含如圖9刀鋒部32兩側之限制面33與圓錐形狀之軸 部35形成一體的刀輪。該刀輪因軸部係圓錐形狀，故若以 最佳狀態保持刀輪於支持具之軸承而能旋轉，就不僅能減 低刀輪與軸承間所產生之摩擦阻力，而且刀輪本身之壽命 比刀輪長100倍以上。並且，亦可在刀鋒部32、限制面33 與軸部35以軟焊之方式接合與其等不同之其他構件之其他 材質，再作最後之加工即可。 本發明之刀輪，不限於上述脆性材料，亦能有效地使 用於切斷塑膠片。 例如，在液晶顯示板基板用透光性塑膠，使用厚度 0.2mm之丙烯酸樹脂，將此基板吸引固定於鐵料或鋁料之 硬工作台上並加以分開時，須使刀鋒之咬入量爲一定，例 如設定爲〇.15mm來形成割痕。 習知，若要以未具限制刀鋒咬入量的面之刀輪在透光 性塑膠基板形成割痕，就由於基板本身之厚度偏差或吸引 保持基板之工作台的平坦度之偏差，以及由於相對基板表 面平行移動的刀輪之高度偏差，刀輪所形成之割痕深度不 能保持一'定。 因此，在形成於基板的割痕之深度淺的部位，基板不 15 1254702 容易分開，在割痕已到達基板背面之部位，刀鋒會接觸工 作台，使刀鋒損傷。 又，要分開液晶顯示板基板用之貼合透光性塑膠基板 時，若受2片基板之厚度偏差之影響，刀鋒會深深地侵入 ，此時，連非加工對象之下側基板也會損傷，若割痕深度 淺時，不能分開基板而產生不良品。 圖10，係使用本發明刀輪的單板之透光性塑膠基板70 的加工狀態圖，圖11，係使用本發明刀輪的貼合透光性塑 膠基板60的加工狀態圖。 爲解除上述問題點，如圖10、圖11，在形成割痕於透 光性塑膠基板之刀輪41設置限制刀鋒侵入之深度的限制面 43，對刀輪41之刀鋒施加既定之割痕荷重，使刀輪之限制 面43在加工中經常抵接於基板表面71、61，藉此來保持形 成於透光性塑膠基板70、60之割痕深度爲一定。 適合在透光性塑膠基板形成割痕的刀鋒之前端角度α 係以10°〜40°爲最佳，加工對象之基板厚度越大，就越要 使前端角度α爲銳角。此一點與在脆性材料之情形相反， 脆性材料之情形係厚度越增加越要成爲鈍角。 透光性塑膠基板用之刀輪，以如圖12所示，在軸孔46 插上支軸（未圖示）後在基板表面轉動的碟形狀者爲最佳，這 是因藉由限制面43不會損傷基板表面。 又，如圖13所示，亦可僅在碟形刀輪之刀鋒稜線之一 側設置限制面。 刀輪之材質，係使用鐵、陶瓷、超硬合金、鑽石等。 16 1254702 透光性塑膠基板，除上述之丙烯酸系樹脂外’例如還 有··聚碳酸酯、聚醚碾、聚烯丙酯、聚對苯二甲酸乙二醇 醋、聚萘-2，6 -二甲酸乙二醇酯、聚S迷等。 一劃線裝置一 圖1 5，係表示裝設上述刀輪之劃線裝置之一實施例的 槪略前視圖。 圖16，係圖15之劃線裝置的側視圖。 此劃線裝置，例如，係具備：工作台51，將所載置之 脆性材料基板G以真空吸收機構固定而能水平旋轉；平行 之一對導軌52、52，支撐此工作台51，能使它朝Y方向（ 垂直於圖15之紙面之方向）移動；滾珠螺桿53，使工作台 51順沿此導軌52、52移動；導桿54，順沿X方向（在此圖 係左右方向）架設於工作台51上方；劃線頭55，設置於此 導桿54，能朝X方向滑動；馬達56，使此劃線頭55滑動 :刀片支持具57，設置於劃線頭55下部，能升降且擺頭自 如；上述之刀輪1，裝設於此刀片支持具57下端而能旋轉 ;及一對CCD攝影機58，設置於導桿54上方，來辨識顯 示於工作台51上之脆性材料基板G的對準標記。又，在劃 線頭55內，內建使刀片支持具57反轉180°之刀輪反轉機 構，每次1條劃線形成完，如前述就將刀輪1反轉18〇° 。 又，劃線裝置，亦可不設置如上述之刀輪反轉機構， 而在2個刀片支持具57裝設2個刀輪，使該2個刀輪並排 ，且使彼此之刀鋒稜線21、21位於距離相隔最遠之位置。 如上述，若使用2個刀輪1、1之情形，例如圖8所示，僅 17 1254702 將劃線頭在各元件間行走1次，就能對分別接近於所鄰接 之各元件τ、T之凸部或薄膜的部位E、F同時作劃線，不 需要如上述每於形成1條劃線之後就將刀輪1反轉180° ， 故作業性能提高。 再者，2個刀輪1、1，係以動作程式能選擇要同時或 要個別作劃線，在劃線頭55內建能將2個刀片支持具57、 57個別升降之升降機構。 又，對塑膠片作劃線之情形，不使用上述劃線裝置之 刀輪1而使用刀輪41亦可。 _ 再者，圖17，係顯示裝有上述刀輪1的劃線工具之實 施例的局部截面圖。 此圖17所示之構造，係不使用在本申請人之「玻璃切 割器」（日本之實公昭62-23780)所揭示之玻璃切割用刀刃 ，而是裝設本發明之刀輪1者。又，此玻璃切割器，係具 備：握取部81，以筒狀柄（手柄）所構成；及刀片支持具82 ，裝設於此握取部81端部；在此刀片支持具82前端，以 透過軸11a可旋轉自如之方式設置刀輪1。此玻璃切割器，馨 係爲了供應油至刀輪1，進一步於握取部81中空部設置油 室Μ、及此油室83之蓋子84，並具備附在其等上之機構 91〜99。在此，因機構91〜99係非直接與本發明有關，故省 略其等說明。 ~ 產業上之利用可能件 - 如以上所說明，據本發明之非金屬材料用刀輪、劃線 裝置及劃線方法，對脆性材料不僅能獲得不引起水平裂痕 18 1254702 而到達極深之深度的垂直裂痕，同時亦能解決如前述之外 來要因所造成的劃線不穩定化等問題。 又，能有效防止交叉劃線時之跳過交點，而幾乎不產 生切粉。 另方面，對塑膠片，即使塑膠片之厚度或工作台之平 坦度有偏差，能使所形成之割痕深度爲一定。 如上述，使用本發明之裝置及方法，能供應品質佳， 可靠性高之製品，而爲實用之發明。 【圖式簡單說明】 (一）圖式部分 圖1，係表示本發明之刀輪之實施例的立體圖。 圖2，係圖1所示刀輪之側視圖， 圖3，係圖1所示刀輪之前視圖。 圖4 ’係表示本發明之另一實施例之刀輪的前視圖。 圖5 ’係表示本發明之另一實施例之刀輪的前視圖。 圖6 ’係表示以圖4所示之刀輪對有元件排成矩陣狀之 脆性材料作劃線之狀況的前視圖。 圖7 ’係表示以圖5所示之刀輪對有元件排成矩陣狀之 脆性材料作劃線之狀況的前視圖。 ® 8 ’係表示以圖5所示之2個刀輪對有元件排成矩陣 狀之脆性材料作劃線之狀況的前視圖。 圖9 ’係表示本發明之刀輪之另一實施例的立體圖。 ® W，係使用本發明刀輪的單板之透光性塑膠基板的 加工狀態圖。 19 1254702 圖11，係使用本發明刀輪的貼合透光性塑膠基板的加 工狀態圖。 圖12，係表示本發明之其他實施例之刀輪的前視圖。 圖13，係表示本發明之其他實施例之刀輪的前視圖。 圖I4,係將脆性材料之切斷時之刀鋒荷重與垂直裂痕 之到達深度的關係以曲線圖表示的圖。 圖1 5，係表示本發明之劃線裝置之實施例的槪略前視 圖。1254702 发明Invention Description: Field of the Invention The present invention relates to a cutter wheel suitable for cutting a non-metallic material such as a non-metallic brittle material such as glass, enamel or ceramic, or a plastic sheet, and a cutter wheel using the same A scribing device and a scribing method using the cutter wheel. [Prior Art] Conventionally, for the scribing of the brittle material described above, a cutter rim having a blade having an obtuse angle as shown in Fig. 18 is widely used. By using the scribing of the knives, generally, the load applied to each of the conditions such as the material or thickness of the brittle material G is applied to the blade edge, and the rim is rotated on the surface of the brittle material, whereby the brittle material is used. The surface forms a continuous line of vertical fissures (scratches). Further, for example, in the scribing process of the glass substrate, as shown in Fig. 19, the cross-hatching of the glass substrate G is often performed. At this time, a phenomenon of skipping the intersection point occurs, which is the influence of the internal deformation accumulated on both sides of the scribe lines L1 to L3 when the first direction is scribed, and is to be the second in the first direction. When the direction is scribed, it occurs in the vicinity of the intersection with the scribe lines L1 to L3, so that the second scribe lines L4 to L6 cannot be formed in the vicinity of the intersection. The internal deformation is an important phenomenon concerning the problem that the cross-sectional quality of the cullet is reduced after the occurrence of cullet in the form of horizontal cracks, so it is necessary to minimize the occurrence of internal deformation. Therefore, it is necessary to stabilize the scribing action at the time of scribing, and it is important to keep the scribing pressure within a predetermined range in the scribing operation. Therefore, in order to prevent the occurrence of the above phenomenon, it is conventionally known that when the second scribe lines L4 to L6 are formed, the blade load is increased to about 1.2 to 3 times the blade load when the first scribe lines L1 to L3 are formed. 1254702 In addition, when the plastic sheet is scribed, the plastic sheet is attracted and fixed on a hard table or the like for scribing. Further, in the case of a plastic sheet, the blade angle of the cutter wheel shown in Fig. 18 is different from that of the brittle material to form an acute angle. When a workpiece such as a brittle material or a plastic sheet is scribing, if the cutter wheel that rotates on the surface of the object to machine the surface of the object is used, the person concerned is the blade of the cutter wheel. The portion is rotationally moved while the surface of the object is stably pressed against the pressing direction. The phenomenon that occurs on the machined surface is different depending on whether the material of the object to be processed is a brittle material or a plastic material. First, in the case of a brittle material, if the mechanism for producing a vertical crack in the brittle material G by the cutter rim is observed, it is known that: firstly, by adding a load at the blade edge, a portion abutting the blade edge of the surface of the brittle material G is generated. Elastic deformation, and secondly, plastic deformation occurs at the above portion as the blade load increases. Further increasing the blade load exceeds the limit of plastic deformation, resulting in brittle fracture, which begins to grow vertical cracks in the thickness direction of the brittle material. The growth of the vertical fissure is terminated as the front end of the vertical fissure, reaching the depth Ρ (distance from the surface of the brittle material) in response to the magnitude of the blade load and the material or thickness of the brittle material. If you observe it with a certain material and a certain thickness, you know that it is only the blade load that can control the depth of the end of the vertical crack. That is, if the blade load is increased, the depth at which the blade of the blade rim penetrates into the surface of the brittle material G becomes longer, and the energy for generating the vertical crease becomes larger, so that the depth of arrival of the vertical crease becomes deeper. However, if the blade load exceeds a certain size, although the so-called deep vertical crack Κ can be obtained, the internal deformation of the surface of the brittle material G near the surface of the brittle material G becomes saturated at the same time, and the direction of growth perpendicular to the vertical crack K is completely absent. Cracks in the same direction, so-called horizontal cracks. Such horizontal cracks cause a large amount of undesired cut powder. The inventors of the present invention have conducted a detailed investigation of the results of the above-described mechanism and found that there is a relationship between the blade load and the arrival depth P of the vertical crack K as shown in FIG. That is, also from the graph shown in Fig. 14, the arrival depth P of the vertical crack K is first in the field (A field) in which the blade load increases slowly and deepens, and then there is a field in which the blade load increases sharply. (B field), in addition, there is an area where the blade load increases but hardly increases (C area). Moreover, in this C field, horizontal cracks that have not been seen in the A field or the B field are significantly larger than the vertical cracks. From the above facts, it is found that the deep vertical crack can be obtained without the occurrence of horizontal cracks by scribing the blade load in the field corresponding to the B field, that is, in the field where the depth P is increased sharply with the increase of the blade load. 〇[Summary of the Invention] (I) Technical problems to be solved by the invention However, it is known that the most suitable range for setting the blade load in the B field is extremely narrow, and the adjustment of the blade load using only the usual scribing is in the B field. It is not possible to make a long-term stable line. Further, in the cross-hatching, in order to prevent the occurrence of the intersection point as described above, it is necessary to greatly increase the blade load when forming the second scribe line, which is larger than the formation of the first scribe line, and the blade load tends to enter the above-mentioned C field. Therefore, there is no problem that 1254702 can avoid the occurrence of a large amount of powder cutting. Furthermore, in addition to the above problems, the above-mentioned conventional knife rim is used, for example, for dicing a glass substrate, the undulation or bending of the glass, the unevenness of the glass surface, or the support of the cutter wheel or the support is maintained. The external factors such as the shaking of the scribing head often cause a stable scribing. Moreover, in the case of the plastic material of the other material mentioned above, the deviation of the thickness of the plastic sheet or the flatness of the table which holds the board, or the portion of the blade which is relatively moved, is in the height direction of the board. The deviation of the parallelism, etc., requires a fairly wide blade depth setting. Therefore, the penetration depth of the blade of the plastic sheet becomes unnecessary, and it is not easy to separate the plastic sheets in the shallow part of the intrusion depth, and the blade reaches the hard table in the deep penetration portion, which has the problem of damaging the front end of the blade. In addition, for example, in the case of bonding a translucent plastic substrate to a liquid crystal display panel, when two substrates are overlapped, the thickness of the substrate 2 is affected by variations in thickness, and when the front end of the blade is deeply invaded, The substrate on the lower side of the non-cut object is also damaged together, causing the occurrence of defective products. On the contrary, if it is shallow, it becomes impossible to separate, and there is a problem that the removal of the product is difficult. (2) Technical means for solving the problem The inventors of the present invention have found that, for the brittle material, if the scribing pressure corresponding to the blade load of the above-mentioned crucible field is stably and continuously applied, the blade edge can be maintained. The bite amount of the brittle material is constant, and it can not only stabilize and reliably obtain vertical cracks that do not cause horizontal cracks to reach the deep depth, but also solve the above-mentioned external factors caused by the scribing 1254702, and by the above At least one side of the blade has a restriction surface, because even if a large load is applied to the blade, horizontal cracks are not generated, so that the factor of the blade can be removed in a manner that increases the blade load, and as a result, a stable score can be obtained. Further, in the cutter wheel for a non-metallic material, the peripheral corner portion where the regulating surface is in contact with the side surface of the cutter wheel may be notched at all times. The cutter wheel of such a shape is suitable for a case where a brittle material substrate such as a glass substrate or a sand wafer in which a plurality of elements are formed in a matrix form is cut into individual element units. That is, in the case where the surface of the substrate between the above-mentioned elements is scribed by the cutter wheel, if the cutter wheel having the shape shown in Fig. 18 is used, the inclined surface of the blade edge hinders the component, and the respective restriction faces and the respective sides are respectively The peripheral corner portions are formed into a notch shape throughout the entire circumference, and the blade edge can be inserted between the elements without interfering with the elements, and the substrate surface between the exposed elements can be scribed. Further, the cutter wheel for the non-metallic material may have a position where the blade edge of the blade edge is closer to either side than the center between the both side faces of the cutter wheel. In this case, it is also suitable to cut a brittle material substrate such as a glass substrate or a tantalum wafer (a plurality of elements having a matrix formed on the surface thereof) into individual element units. That is, by facing the side surface of the cutter wheel on the side closer to the blade ridge line, the blade edge ridge line can be closer to the component than the conventional cutter wheel, and when the substrate is cut, the component can be at the bottom without damaging the component. Draw a line near the component. A scribing device according to the present invention includes: a table on which a non-metallic material is placed; a scribing head disposed above the table; and a cross-hatching mechanism by which the scribing head is on the table The object to be processed forms a score intersecting each other; and the scribe head is provided with any one of the above-mentioned non-metallic material knives 10 1254702. Further, in the scribing device, a cutter wheel reversing mechanism may be provided, and each time one of the scores is formed, the direction of the cutter wheel is reversed by 180°. Thereby, it is possible to scribe a predetermined portion of the substrate, that is, a portion close to the convex portion or the film of each element, without turning the substrate. Further, in the above-described scribing device, a person having two cutter wheels may be used. In this case, the cutter wheels are arranged side by side, and the blade edges of each other are located at the farthest distance from each other. Then, the two cutter wheels can be selectively simultaneously or individually scribed by the action program. Thereby, it is not necessary to invert the cutter wheel by 180° every time the one line is formed as described above. Further, in the scribing device having a mechanism in which the scribing head moves to the X direction and/or the Y direction with respect to the table on which the non-metallic material is placed, the non-metallic material cutter wheel may be provided on the scribing head. Further, the scribing tool as a manual cutter may further include a grip portion formed of a cylindrical handle and a blade holder provided at a tip end of the grip portion, and the non-metallic material is provided in the blade holder Any of the cutter wheels. Further, the scribing method of the present invention is a non-metallic material scribing method using the above various non-metallic material cutter wheels; characterized in that the cutter wheel is pressurized until its restricting surface contacts the surface of the non-metallic material, and The non-metallic material is scribed while maintaining the state in which the blade penetrates into the non-metallic material while rotating the cutter wheel in a predetermined direction. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. 11 1254702 Fig. 1 is a perspective view of a cutter wheel 1 according to an embodiment of the present invention, Fig. 2 is a side view, and Fig. 3 is a front view. The cutter wheel 1 rotates on the surface of the brittle material outside the shaft after the shaft hole 6 is inserted through the support shaft (not shown); the cutter wheel has a restriction surface 3 on both sides of the blade 2 for limiting the blade edge 2 Intrusion depth from the surface of the brittle material. When the blade angle of the blade 2 is Θ, when a brittle material such as glass is used as the object to be cut, it is preferable to set 1 to 165 °. If the blade angle is smaller than 100°, the strength required by the blade 2 cannot be obtained, and if it is larger than 165°, the blade 2 does not easily intrude into the brittle material. Further, the radial distance D between the blade edge line 21 of the blade 2 and the restriction surface 3 should be set to 2 μπι to ΙΟΟμπι. If the distance is smaller than 2 μm, plastic deformation does not occur in the brittle material, and as a result, no vertical crack is generated. Further, if it is larger than ΙΟΟμπι, the bite amount of the blade 2 to the brittle material is too large, and the brittle material is broken. Further, although the distance D varies depending on the material of the brittle material, when the thickness of the brittle material is thicker, if the distance D is selected within the above range, deep vertical cracks are more effectively obtained. Further, as for the matching of the blade angle Θ and the distance D, the material of the brittle material G to be cut and the thickness of the cutter wheel 1 itself can be ensured, and the area of the predetermined function can be ensured on the restriction surface 3 It is suitable to choose within. Preferably, the restriction surface 3 is mirror-finished, whereby the restriction surface can be smoothly rotated on the surface in a state of being pressed against the surface of the brittle material G at the time of scribing. Fig. 4 is a view showing another embodiment of the present invention. In this example, the cutter wheel 1 is formed such that the peripheral corner portions of the respective restriction faces 3 and the respective side faces 4 of the cutter wheel are notched at all 12 1254702 weeks. In the case of the cutter wheel 1 having such a shape, as shown in FIG. 6, it is suitable to cut a brittle material substrate G into a component T unit such as a glass substrate or a tantalum wafer (a plurality of elements T having a matrix arranged on its surface). . That is, in the case where the substrate surface between the exposed elements T is scribed by the cutter wheel 1, the cutter wheel 1 can be inserted between the components T without interfering with the component T, thereby dicing the substrate surface between the exposed components T. Figure 5 is a view showing another embodiment of the present invention. In this example, the cutter wheel 1 is such that the blade edge ridge 21 of the blade 2 is positioned closer to either side than the center between the sides 4, 4 of the cutter wheel 1 (in The example of the figure is the side of the left side 4). In this embodiment, on the one hand, it can ensure that the thickness between the two side faces 4 is a thickness having sufficient mechanical strength, and on the other hand, by reducing the distance between the other side face 4 and the blade edge ridge line of the blade, it can be performed with FIG. 6. The illustrated embodiment is lined with the same features. Also in this case, as in the embodiment shown in Fig. 4, it is preferable to cut the brittle material substrate G into a unit T unit by using a glass substrate, a tantalum wafer or the like (a plurality of elements T arranged in a matrix on the surface). That is, as shown in Fig. 7, by facing the side 4 of the cutter wheel near the edge of the blade ridge 21 toward the side of the component T, the blade ridge line 21 can be brought closer to the component T than the conventional blade rim, and when the substrate G is cut, Each component can be scribed at the portion closest to the component 而不 without damaging the component. Secondly, the scribe method of the present invention uses the cutter wheel shown in each of the above embodiments, as shown in FIG. 1 is pressurized until the regulating surface 3 abuts against the surface of the brittle material G, while maintaining the state of 13 1254702 in which the blade 2 intrudes into the brittle material G, while the cutter wheel 1 is oriented in a predetermined direction (in FIG. 3, perpendicular to the paper surface) ) Rotate to scribe the brittle material G. Here, the load applied to the blade 2 is preferably adjusted so that it exists in the B field shown in Fig. 14. That is, even if the c-field which increases the blade load but the depth of the vertical crack K hardly increases, the restriction surface 3 on both sides of the blade 2 abuts against the surface of the brittle material G to withstand the load, thereby suppressing The change of the scribing pressure of the blade 2 against the brittle material G can keep the intrusion amount of the brittle material G constant, so that the vertical crack K reaching the deep depth can be surely obtained without causing horizontal cracks, and since there is almost no The generation of horizontal cracks can effectively prevent the intersection point when crossing the cross-line, and hardly produce cut powder. Further, in order to perform the scribing of the brittle material G by the cutter wheel 1 of the above-described embodiment shown in Fig. 5, as shown in Fig. 7, the cutter wheel 1 is faced to the side of the component T with the side closer to the blade ridge 21 side. The method is closely attached to the brittle material G. Here, since the elements T are arranged in a matrix in the brittle material G, the elements along the one row are scribed to the portion closest to the side faces of the elements, and if one scribe line is formed, the cutter wheel 1 is reversed 180. °, the element T adjacent to the front row is scribed to the portion closest to the side of the element to form a second scribe line. Further, in the case of scribing, as described above, the cutter wheel 1 is reversed by 180° every time one scribing line is formed, and the following cutter support device (not shown) may be used: The cutter wheel 1, 1 of the relationship shown in Fig. 8, that is, the two cutter wheels 1, 1 are arranged side by side, and the blade edge lines 21 of each other are located at the farthest distance from each other. When the two cutter wheels 1 and 1 are used as described above, as long as the row 14 1254702 is moved once between the respective elements τ, it is possible to simultaneously approach the respective side faces of the adjacent elements τ in the brittle substrate. For scribing, it is not necessary to invert the cutter wheel 1 by 180 each time the one line is formed as described above. Therefore, it can improve workability. Further, an example of a cutter wheel of another brittle material according to an embodiment of the present invention includes a cutter wheel integrally formed with a restricting surface 33 on both sides of the blade end portion 32 and a conical shaft portion 35 as shown in Fig. 9 . Since the cutter wheel has a conical shape, if the cutter wheel is rotated in an optimal state to support the bearing of the support, the frictional resistance generated between the cutter wheel and the bearing can be reduced, and the life ratio of the cutter wheel itself is reduced. The cutter wheel is more than 100 times longer. Further, the blade portion 32, the regulating surface 33, and the shaft portion 35 may be joined to other materials of other members different from each other by soldering, and the final processing may be performed. The cutter wheel of the present invention is not limited to the above-mentioned brittle material, and can be effectively used for cutting a plastic sheet. For example, in a translucent plastic for a liquid crystal display panel substrate, an acrylic resin having a thickness of 0.2 mm is used, and when the substrate is attracted and fixed on a hard workbench of iron or aluminum, and the separation is performed, the bite amount of the blade must be made Certainly, for example, it is set to 〇.15 mm to form a cut. It is a matter of course that if a cutter wheel having a face with a limited amount of blade biting is to form a cut on the transparent plastic substrate, the thickness deviation of the substrate itself or the flatness of the table holding the substrate is attracted, and The height deviation of the cutter wheel moving parallel to the surface of the substrate, the depth of the cut formed by the cutter wheel cannot be kept constant. Therefore, in the portion where the depth of the cut formed on the substrate is shallow, the substrate is not easily separated, and when the cut mark reaches the back surface of the substrate, the blade contacts the work table to damage the blade. Further, when the light-transmissive plastic substrate is bonded to the liquid crystal display panel substrate, the blade edge is deeply invaded by the thickness deviation of the two substrates, and at this time, the lower substrate of the non-processing object is also Damage, if the depth of the cut is shallow, the substrate cannot be separated to cause defective products. Fig. 10 is a view showing a state of processing of a light-transmissive plastic substrate 70 using a single plate of the cutter wheel of the present invention, and Fig. 11 is a view showing a state of processing of the light-transmissive plastic substrate 60 to which the cutter wheel of the present invention is applied. In order to solve the above problem, as shown in FIG. 10 and FIG. 11, a restriction surface 43 for limiting the depth of blade intrusion is formed in the cutter wheel 41 which forms a cut mark on the transparent plastic substrate, and a predetermined cutting load is applied to the blade edge of the cutter wheel 41. The restriction surface 43 of the cutter wheel is often brought into contact with the substrate surfaces 71 and 61 during processing, whereby the depth of the cut formed on the transparent plastic substrates 70 and 60 is kept constant. It is preferable that the front end angle α of the blade for forming a cut on the light-transmissive plastic substrate is 10° to 40°, and the larger the thickness of the substrate to be processed, the more the front end angle α is an acute angle. This is in contrast to the case of brittle materials, where the thicker the thickness, the more obtuse. As shown in FIG. 12, the cutter wheel for a translucent plastic substrate is preferably formed by inserting a support shaft (not shown) into the shaft hole 46 and rotating it on the surface of the substrate, which is due to the restriction surface. 43 does not damage the surface of the substrate. Further, as shown in Fig. 13, the restriction surface may be provided only on one side of the blade edge of the disk cutter wheel. The material of the cutter wheel is made of iron, ceramic, superhard alloy, diamond, etc. 16 1254702 Translucent plastic substrate, in addition to the above-mentioned acrylic resin, for example, polycarbonate, polyether mill, polyallyl ester, polyethylene terephthalate, polynaphthalene-2,6 - ethylene glycol dicarboxylate, poly S fans, and the like. A scribing device Fig. 15 is a schematic front view showing an embodiment of a scribing device for mounting the above-described cutter wheel. Figure 16 is a side elevational view of the scribing device of Figure 15. The scribing device includes, for example, a table 51 that horizontally rotates the brittle material substrate G placed thereon by a vacuum absorbing mechanism, and supports the table 51 by a pair of parallel guide rails 52 and 52. It moves in the Y direction (perpendicular to the plane of the paper of Fig. 15); the ball screw 53 moves the table 51 along the guide rails 52, 52; the guide rod 54 is erected along the X direction (in the left and right direction of the figure) Above the table 51; the scribing head 55 is disposed on the guide rod 54 and can slide in the X direction; the motor 56 slides the scribing head 55: the blade holder 57 is disposed at the lower portion of the scribing head 55, and can be lifted and lowered And the cutter wheel 1 is mounted on the lower end of the blade holder 57 to be rotatable; and a pair of CCD cameras 58 are disposed above the guide rod 54 to identify the brittle material substrate displayed on the table 51. The alignment mark of G. Further, in the reticle 55, a cutter reversing mechanism for reversing the blade holder 57 by 180 is built in, and each time one scribe line is formed, the cutter wheel 1 is reversed by 18 〇 as described above. Further, the scribing device may be provided with two cutter wheels instead of the cutter wheel reversing mechanism as described above, and the two cutter wheels may be arranged side by side, and the blade edges ridges 21 and 21 of each other may be arranged. Located at the farthest distance from each other. As described above, when two cutter wheels 1 and 1 are used, for example, as shown in Fig. 8, only 17 1254702 walks the scribing head once between the elements, and can be close to the adjacent elements τ, T, respectively. The portions E and F of the convex portion or the film are simultaneously scribed, and it is not necessary to invert the cutter wheel 1 by 180° every time after forming one scribe line, so that workability is improved. Further, the two cutter wheels 1, 1 can be selected to be simultaneously or individually scribed by the operation program, and a lifting mechanism capable of individually lifting and lowering the two blade support members 57, 57 is built in the scribe head 55. Further, in the case of scribing the plastic sheet, the cutter wheel 41 may be used without using the cutter wheel 1 of the scribing device. Further, Fig. 17 is a partial cross-sectional view showing an embodiment of a scribing tool equipped with the above-described cutter wheel 1. In the structure shown in Fig. 17, the blade for glass cutting disclosed in the "glass cutter" (Japanese Patent Publication No. 62-23780) of the present applicant is not used, but the cutter wheel 1 of the present invention is installed. Further, the glass cutter includes: a grip portion 81 formed of a cylindrical handle (handle); and a blade holder 82 attached to an end portion of the grip portion 81; at the front end of the blade holder 82, The cutter wheel 1 is rotatably provided in such a manner that the transmission shaft 11a is rotatable. In order to supply oil to the cutter wheel 1, the glass cutter is further provided with an oil chamber 中空 and a lid 84 of the oil chamber 83 in a hollow portion of the grip portion 81, and a mechanism 91 to 99 attached thereto. Here, since the mechanisms 91 to 99 are not directly related to the present invention, the description thereof will be omitted. ~ Industrial use possible parts - As explained above, according to the non-metallic material of the present invention, the cutter wheel, the scribing device and the scribing method can not only obtain a deep material depth without causing horizontal cracks 18 1254702 for the brittle material. The vertical cracks can also solve the problem of streaking instability caused by the above-mentioned factors. Moreover, it is possible to effectively prevent the intersection point from being crossed when the cross-hatching is performed, and almost no cutting powder is produced. On the other hand, for the plastic sheet, even if the thickness of the plastic sheet or the flatness of the table is deviated, the depth of the cut formed can be made constant. As described above, the apparatus and method of the present invention can provide a product of high quality and high reliability, and is a practical invention. BRIEF DESCRIPTION OF THE DRAWINGS (1) Schematic Part FIG. 1 is a perspective view showing an embodiment of a cutter wheel of the present invention. Figure 2 is a side view of the cutter wheel shown in Figure 1, and Figure 3 is a front view of the cutter wheel shown in Figure 1. Figure 4' is a front elevational view showing a cutter wheel of another embodiment of the present invention. Fig. 5' is a front view showing a cutter wheel of another embodiment of the present invention. Fig. 6' is a front view showing a state in which the brittle material having the elements arranged in a matrix is scribed by the cutter wheel shown in Fig. 4. Fig. 7' is a front view showing a state in which the brittle material having the elements arranged in a matrix is scribed by the cutter wheel shown in Fig. 5. The ® 8 ' is a front view showing a state in which the brittle materials in which the elements are arranged in a matrix are scribed by the two cutter wheels shown in Fig. 5 . Figure 9 is a perspective view showing another embodiment of the cutter wheel of the present invention. ® W is a processing state diagram of a light-transmissive plastic substrate using a single plate of the cutter wheel of the present invention. 19 1254702 Fig. 11 is a view showing a processing state of a light-transmissive plastic substrate to which a cutter wheel of the present invention is applied. Figure 12 is a front elevational view showing a cutter wheel of another embodiment of the present invention. Figure 13 is a front elevational view showing a cutter wheel of another embodiment of the present invention. Figure I4 is a graph showing the relationship between the blade load at the time of cutting the brittle material and the depth of arrival of the vertical crack. Fig. 15 is a schematic front elevational view showing an embodiment of the scribing apparatus of the present invention.
圖16，係圖15之劃線裝置的側視圖。 圖1 7，係表示裝設本發明之刀輪的劃線工具之實施例 的局部截面圖。 圖U，係表示習知刀輪的前視圖。 圖19，係表示使用習知刀輪作劃線之狀況的槪略立體 ^^元件代表符號 刀輪 刀鋒 限制面 側面 軸孔 刀鋒稜線 軸部 工作台 導軌Figure 16 is a side elevational view of the scribing device of Figure 15. Fig. 17 is a partial cross-sectional view showing an embodiment of a scribing tool to which the cutter wheel of the present invention is mounted. Figure U shows a front view of a conventional cutter wheel. Fig. 19 is a schematic view showing a state in which a conventional cutter wheel is used for scribing. ^^ represents a symbol. A cutter wheel blade limit surface side shaft hole blade edge line shaft portion table guide
1、 41、η 2、 32 3 、 33 、 43 4 6、46 21 35 51 52 20 1254702 53 滾球螺桿 54 導桿 55 劃線頭 56 馬達 57 刀片支持具 58 CCD攝影機 60 、70 透光性塑膠基板 61 、71 基板表面 81 握取部 82 刀片支持具 83 油室 84 蓋子 91- .99 附帶機構 G 脆性材料 K 垂直裂痕 Μ 垂直裂痕前端 Τ 元件1, 41, η 2, 32 3, 33, 43 4 6, 46 21 35 51 52 20 1254702 53 Ball screw 54 Guide rod 55 Scriber head 56 Motor 57 Blade support 58 CCD camera 60, 70 Translucent plastic Substrate 61, 71 Substrate surface 81 Grip portion 82 Blade support 83 Oil chamber 84 Cover 91-.99 Attachment mechanism G Brittle material K Vertical crack Μ Vertical crack front end 元件 Component
21twenty one