CN102189609A - Scoring device - Google Patents

Scoring device Download PDF

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Publication number
CN102189609A
CN102189609A CN201110038407XA CN201110038407A CN102189609A CN 102189609 A CN102189609 A CN 102189609A CN 201110038407X A CN201110038407X A CN 201110038407XA CN 201110038407 A CN201110038407 A CN 201110038407A CN 102189609 A CN102189609 A CN 102189609A
Authority
CN
China
Prior art keywords
delineation
bridge portion
adjusting mechanism
leading edge
scoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201110038407XA
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Chinese (zh)
Other versions
CN102189609B (en
Inventor
岡岛康智
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN102189609A publication Critical patent/CN102189609A/en
Application granted granted Critical
Publication of CN102189609B publication Critical patent/CN102189609B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037Controlling or regulating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/10Glass-cutting tools, e.g. scoring tools
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention provides a scoring device, which can simplify maintenance work and form a scoring groove better in lasting precision. The scoring device comprises a supporting table, a pair of bridge parts, an optical reading part, a movable adjusting mechanism and a control part, wherein the supporting table is used for holding fragile materials; the pair of bridge parts is deployed over the supporting table in a parallel manner and provided with scoring heads respectively; the optical reading part reads aiming marks arranged on the supporting table; the movable adjusting mechanism enables the bridge parts to shift so as to adjust the relative position of the supporting table and the scoring heads; and the control part controls the actions of the movable adjusting mechanism according to the shift information of the aiming marks so that the blade front edge of a cutter of the scoring head faces towards a given direction. The direction of the blade front edge of the cutter mounted on the scoring head of the bridge part and the direction of the blade front edge of the cutter of the scoring head mounted on the other bridge part are mutually orthogonal.

Description

The delineation device
Technical field
The present invention is about forming the delineation device of scored groove in the fragile materials such as substrate of glass substrate, semiconductor substrate, thin film solar cell.
Background technology
Delineation device in the past is for example shown in the patent documentation 1, possess at the fragile materials such as substrate that make glass substrate, semiconductor substrate, thin film solar cell and remain the support platform transferred under the horizontal state, stride the bridge portion that supports platform to be set up, the delineation head that is slidably mounted on bridge portion, be provided with the cutter of delineation processing usefulness in front end of this delineation head.The transfer direction that the direction of its sword leading edge of cutter (with respect to the relative travel direction of fragile material) can be adjusted to relative fragile material is set angle.In addition, by making fragile material transfer and make the delineation head in bridge portion, to slide under the state that presses on fragile material with sword leading edge that will wheel in that delineation head is descended, can become the scored groove of set angle in the transfer direction that fragile material forms relative fragile material.
In order to form scored groove well, when the operation of delineation device begins or when maintenance, must first the transfer direction of fragile material and the direction angulation of sword leading edge be adjusted into set angle in the fragile material precision.Therefore, utilize to prepare to be processed into the tool of set angle, support the position of platform to carry out angle adjustment relatively by manual revisal bridge portion.Particularly, in the set position configuration tool of supporting platform, so that the part that is processed into set angle of tool is adjusted the angle that bridge portion supports platform relatively by breaking the bridge portion.
Patent documentation 1: No. 3078668 communique of Japanese patent of invention
Summary of the invention
[problem that the invention desire solves]
As above-mentioned delineation device in the past, even when operation is opened or when maintenance earlier the direction angulation of the transfer direction of fragile material and sword leading edge is adjusted into the occasion of set angle, along with the operation that repeats to form scored groove, vibration in the time of may forming because of scored groove supports the position of platform to have displacement to produce in bridge portion relatively, changes from set angle in the transfer direction of fragile material and the direction angulation of sword leading edge.In addition, also may in bridge portion distortion generation be arranged itself because of the environment (for example temperature or moisture) that is provided with the delineation device, in the relative angle that direction became of the transfer direction of fragile material and sword leading edge from predefined set angles shifts.
If the change that has this kind to decide angle produces, just can't continue precision and form scored groove well.Therefore, the delineation device in the past has if having change to produce in set angle, just has and uses tool necessity manually to carry out the adjustment of angle again once again, and upkeep operation becomes miscellaneous problem.
In addition, in the scored groove that forms big width, for example in the delineation device of the scored groove of 40 μ m degree, in the occasion precision formation fully scored groove of the direction angulation of manually adjusting fragile material and sword leading edge again.Yet, form as the delineation device of the scored groove that width below the 10 μ m is narrower in, just the direction angulation itself of the transfer direction of manually adjusting fragile material again and sword leading edge can't continue precision and form scored groove well for difficult.
In addition, shown in patent documentation 1, the bridge portion that possesses the delineation head is made as strides the support platform at general delineation device, transfers in the direction (being called the Y direction) to bridge portion quadrature by making the support platform that keeps fragile material, forms the scored groove of Y direction in fragile material.In addition, slide in direction (being called directions X), form the scored groove of directions X in fragile material along bridge portion by making the delineation head.Therefore, after the scored groove that forms directions X or Y direction, form the occasion of the scored groove of Y direction or directions X, each all have the direction of the sword leading edge of cutter is reinstalled to along the delineation direction or make fragile material in necessity of supporting that 90 degree rotations are reset on the platform, its operation is very miscellaneous.
At this problem, the 1st purpose of the present invention is to provide and can solves above-mentioned problem in the past, simplifies upkeep operation, and lasting precision forms the delineation device of scored groove well.
In addition, the 2nd purpose of the present invention is to provide and needn't reinstalls cutter or the fragile material that should process of resetting just can be easily and promptly carry out the delineation device of the scored groove of two different directions.
[solving the technological means of problem]
The of the present invention a kind of device of delineating that is done in order to solve above-mentioned problem is by the support platform that keeps fragile material, stride and support platform by configured in parallel and possess a pair of bridge portion of delineation head respectively, read the optically read portion that supports the alignment mark on the platform that is located at, the displacement of bridge portion is moved to adjust the moving adjusting mechanism of the relative position of supporting platform and delineation head, control the action of aforementioned moving adjusting mechanism so that be located at the direction of sword leading edge of the cutter of delineation head and constitute according to the displacement information of alignment mark towards the control part of set direction; Be configured to the direction direction of quadrature toward each other of direction and the sword leading edge of the cutter of the delineation head that is installed on another bridge portion of sword leading edge of cutter of the delineation head of the bridge portion that is installed on.
[effect of invention]
In the present invention owing to be to utilize control part to make aforementioned moving adjusting mechanism action so that the relative transfer direction angulation of the direction of sword leading edge and fragile material is set angle according to the displacement information of the alignment mark that reads with optically read portion, automatically platform and the relative position of delineating head are supported in revisal, so necessity of using tool to adjust again disappears, can simplify upkeep operation and continue precision forming scored groove well.
In addition, in the present invention since the direction of direction and the sword leading edge of the cutter of the delineation head that is installed on another bridge portion of sword leading edge of cutter of delineation head that two bridge portions is set and is configured to be installed on a bridge portion towards the direction of quadrature respectively, so to fragile material in orthogonal X, the Y direction forms the occasion of scored groove, the sword leading edge of the cutter by making the delineation head that is installed on a bridge portion towards directions X and the sword leading edge of cutter that makes the delineation head that is installed on another bridge portion towards the Y direction, as long as the arbitrary bridge of selection portion, needn't reinstall the scored groove that cutter just can form directions X and Y direction, having can be easily and promptly form the excellent results of operation of the scored groove of two different directions.
(solving the means and the effect of other problem)
But aforementioned moving adjusting mechanism can by with an end support of bridge portion for the hinge portion of only turn, with the other end support of bridge portion for being the slip support sector of fulcrum turn, being that fulcrum constitutes the drive division of bridge portion turn with the hinge portion in aforementioned hinge portion.
Thus, by to make the drive division start can make bridge portion be fulcrum displacement turn correctly with the hinge portion and can simply construct the formation moving adjusting mechanism.
In addition, aforementioned control part can be in the process of scored groove forming operation of delineation device have in the position of alignment mark occasion that displacement produces according to the displacement information that obtains by optically read portion control aforementioned moving adjusting mechanism action so that aforementioned displacement become below the set value.
Thus, in the direction of the sword leading edge of cutter in the process of the scored groove forming operation of delineation device, in the direction and the occasion that the relative transfer direction angulation of fragile material has change to produce of sword leading edge, can detect this change and be adjusted into set angle rapidly automatically.
Description of drawings
Fig. 1 is the vertical view of delineation device of the present invention.
Fig. 2 is the side view of above-mentioned delineation device.
Fig. 3 is the front view of observing from the A-A line of Fig. 1.
Fig. 4 is a part of cross-section side view of the slip support sector of the moving adjusting mechanism of the bridge portion in the above-mentioned delineation device of demonstration.
Fig. 5 is a part of cross-section side view of the hinge portion of the moving adjusting mechanism of demonstration bridge portion.
Fig. 6 is the bridge portion that the shows above-mentioned delineation device expansion vertical view of the state after the displacement turn a little.
Fig. 7 is for showing the vertical view of other embodiment that delineates device.
[main element symbol description]
1 delineation device
2 fragile materials
3 support platform
4A, 4B bridge portion
5 delineation heads
6 video cameras (optically read portion)
7 control parts
40 moving adjusting mechanisms
45 hinge portions
46 slip support sectors
The specific embodiment
In following, the embodiment that is pursuant to the figure demonstration describes in detail of the present invention detailed.
Fig. 1 is the vertical view of delineation device of the present invention, and Fig. 2 is the side view of above-mentioned delineation device, and Fig. 3 is the front view of observing from the A-A line of Fig. 1.This delineation device 1 possesses in the support platform 3 of the level of the fragile materials such as substrate 2 of top maintenance glass substrate, semiconductor substrate, thin film solar cell and handover.Support platform 3 can keep fragile material 2 and the past Y direction that shows at Fig. 1 to transfer.Therefore, supporting platform 3 to see through the support platform transfer mechanism 32 that moves along the track 31 that is laid toward the Y direction is mounted.
In addition, delineation device 1 possesses and strides a pair of bridge 4A of portion, the 4B that supports that platform 3 is set up.Each 4A of bridge portion, 4B by support platform 3 above to Y direction forming of quadrature roughly along the horizontally extending beam of directions X portion 41, the vertical foot 42,43 that is linked to the two ends of this beam portion 41.
Being provided with delineation 5 in the beam portion 41 of the 4A of bridge portion, 4B is video camera 6,6 with optically read, makes can read and is located at the alignment mark of supporting the predefined position on the platform 3.Though the special icon of alignment mark is not supported on the platform 3 and is located at mounting and also can on the scale substrate of supporting on the platform 3 even directly be not located at.
Keep delineation head moving mechanism 52 liftings of motor in delineation 5 constitutes and can see through, break bar 51 is installed in the front end of delineation 5.In addition, delineation 5 can be moved in directions X along the chute 44 of being located at beam portion 41 by aforementioned delineation head moving mechanism 52.
Among the 4A of bridge portion, the 4B, the direction (direction of rotation) of sword leading edge of break bar 51 that is installed on the delineation 5 of a 4A of bridge portion is set to towards directions X.Thus, move in directions X, can form the scored groove of directions Xs fragile material 2 by the sword leading edge of supporting fragile material 2 on the platform 3 to push break bar 51 being made simultaneously delineation 5.
The direction (direction of rotation) of sword leading edge of break bar 51 that is installed on the delineation 5 of the 4B of another bridge portion is to be set to the direction towards Y.Thus, support platform 3 is moved in the Y direction, can form the scored groove of Y directions fragile material 2 by the sword leading edge of the fragile material 2 on the support platform 3 being pushed break bar 51.In this occasion, as shown in Figure 7,, can form 4 row scored groove simultaneously as long as plural number, for example 4 delineations 5 are installed in advance side by side.
In addition, aforementioned each 4A of bridge portion, 4B such as Fig. 4~shown in Figure 6, being constituted as and can seeing through moving adjusting mechanism 40 is fulcrum turn displacement with an end of the beam portion 41 of extending in directions X.This moving adjusting mechanism 40 is because the 4A of bridge portion, 4B are identical, so specifically narrate at the moving adjusting mechanism 40 of the 4A of bridge portion.
But moving adjusting mechanism 40 supports the hinge portion 45 for only turn, the slip support sector 46 of carrying the lower end of another foot 42 to constitute by the lower end of the foot 43 of an end that will be linked to the 4A of bridge portion.Slip support sector 46 possesses the bearing carrier 49 that can be moved along the trapped orbit 47 that is layed in the Y direction by drive division 48, be provided with the slotted hole 49a that extends in directions X in aforementioned bearing carrier 49, in the chimeric slidably sliding axle 42a that the lower end that is formed at foot 42 is arranged of this slotted hole 49a.Thus, bearing carrier 49 is slided, making the 4A of bridge portion is fulcrum turn displacement with hinge portion 45, the direction of the sword leading edge of fine-tuning whole break bar 51.
In addition, the action that possesses displacement information according to alignment mark (vector difference between the alignment mark before and after the displacement) control moving adjusting mechanism 40 of delineation device 1 is the control parts such as computer 7 of the angle set earlier of tool with the direction revisal with the sword leading edge of break bar 51.
Utilize as the above-mentioned delineation device 1 that is configured, delineation 5 is moved in directions X, can form the scored groove of directions Xs fragile material 2 by the sword leading edge of the break bar 51 of the delineation of fragile material 2 being pushed a 4A of bridge portion 5.Sword leading edge by the break bar 51 of pushing the 4B of another bridge portion makes support platform 3 transfer in the Y direction simultaneously, can form the scored groove of Y directions to fragile material 2.In this occasion, owing to establish two bridge portions of the 4A of bridge portion, 4B and be equipped with and make the break bar 51 of sword leading edge towards directions X in a 4A of bridge portion, be provided with in the 4B of another bridge portion and make the break bar 51 of sword leading edge towards the Y direction, so as long as the arbitrary bridge of selection portion, needn't reinstall the scored groove that break bar 51 just can form directions X and Y direction, and can be easily and promptly carry out operation.
In addition, when the starting of delineation device 1, break bar 51 is installed so that the direction (direction of rotation) of the transfer direction of fragile material 2 and each sword leading edge correctly becomes the right angle though be to use tool, but may have distortion to produce in bridge portion etc. because of the variation of vibration or environment (temperature or moisture) etc. along with long-term repetition scored groove forms operation, the relative angle that is become with the sword leading edge of break bar 51 in the transfer direction of fragile material 2 has the change generation.If this kind change becomes more than the setting value, then according to the displacement information of alignment mark (vector difference between the alignment mark before and after the displacement), the action of control part 7 control moving adjusting mechanisms 40 is adjusted into predefined angle so that the 4A of bridge portion, 4B are fulcrum displacement turn (for example angle [alpha] of Fig. 6) with hinge portion 45 automatically again with the angle after the aforementioned change.Thus, can simplify the also lasting precision of upkeep operation and form scored groove well.
In addition, control part 7 can become set number of times in the formation operation of scored groove and read alignment mark when above, as long as have change just to adjust automatically in angle.
More than, though at representative embodiment explanation of the present invention, the present invention is not for only constructing specific to the above embodiments.For example, in the 4A of bridge portion, 4B, though be that a end with bridge portion constitutes can be by only turn of hinge portion 45, support sector's 46 same mechanism of also can establishing and slide replace this hinge portion 45.In addition, no matter slip support sector 46 is also so long as can be which kind of all can with the mechanism of bridge portion precision displacement turn well.In addition, the break bar that is installed on delineation 5 also can be the fixed blade that has a directionality in the sword leading edge and replaces break bar.In addition, among the present invention, can suitably revise, change reaching its purpose and do not break away from the scope of claim.
[utilizability on the industry]
The present invention forms the scoring device of scored groove applicable to the fragile materials such as substrate of glass substrate, semiconductor substrate, thin film solar cell.

Claims (3)

1. delineate device for one kind, it is characterized in that, by the support platform that keeps fragile material, stride a pair of bridge portion that supports the platform configured in parallel and possess the delineation head respectively, read the optically read portion that supports the alignment mark on the platform of being located at, the displacement of bridge portion is moved to adjust the moving adjusting mechanism of supporting platform and the relative position of delineation head, to control the action of aforementioned moving adjusting mechanism so that be located at the direction of the cutter sword leading edge of delineation head and constitute towards the control part of set direction according to the displacement information of alignment mark;
Be installed on a bridge portion the delineation head cutter sword leading edge direction, with the direction of cutter sword leading edge of the delineation head that is installed on another bridge portion, be configured to the direction of quadrature toward each other.
2. delineation device as claimed in claim 1, it is characterized in that, but aforementioned moving adjusting mechanism by with an end support of bridge portion for the hinge portion of only turn, with the other end support of bridge portion for being the slip support sector of fulcrum turn, being that fulcrum constitutes the drive division of bridge portion turn with the hinge portion in aforementioned hinge portion.
3. delineation device as claimed in claim 2, it is characterized in that, aforementioned control part is that the position of alignment mark in the process of scored groove forming operation of delineation device produces the occasion of displacement, according to the displacement information that obtains by optically read portion control aforementioned moving adjusting mechanism action so that aforementioned displacement below set value.
CN201110038407.XA 2010-02-15 2011-02-14 Scoring device Expired - Fee Related CN102189609B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010029904A JP5091961B2 (en) 2010-02-15 2010-02-15 Scribing equipment
JP2010-029904 2010-02-15

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Publication Number Publication Date
CN102189609A true CN102189609A (en) 2011-09-21
CN102189609B CN102189609B (en) 2015-04-08

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JP (1) JP5091961B2 (en)
KR (1) KR101167502B1 (en)
CN (1) CN102189609B (en)
TW (1) TWI439433B (en)

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Publication number Priority date Publication date Assignee Title
CN103214178A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Adjustment method of multifunctional glass support platform
CN103420601A (en) * 2012-05-17 2013-12-04 三星钻石工业股份有限公司 Scribe processing system
US20160090430A1 (en) * 2014-07-29 2016-03-31 W. L. Gore & Associates, Inc. Method for Producing Porous Articles from Alternating Poly(ethylene tetrafluoroethylene) and Articles Produced Therefrom
CN103214178B (en) * 2012-01-19 2016-11-30 昆山思拓机器有限公司 The method of adjustment of multifunctional glass plummer

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JP5767595B2 (en) * 2012-02-23 2015-08-19 三星ダイヤモンド工業株式会社 Scribing device for brittle material substrate
CN106082619A (en) * 2016-06-15 2016-11-09 苏州众显电子科技有限公司 A kind of glass with cutting alignment mark
CN107871801A (en) * 2017-08-16 2018-04-03 莫金连 A kind of modified form photovoltaic panel assembly
CN112624594B (en) * 2020-12-30 2022-06-10 中国建材国际工程集团有限公司 Automatic longitudinal breaking device and method for tracking longitudinal cutting tool marks
TW202413298A (en) * 2022-06-09 2024-04-01 美商康寧公司 Glass scoring apparatus and method

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JP2000086262A (en) * 1998-09-09 2000-03-28 Mitsuboshi Diamond Kogyo Kk Glass scriber
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Cited By (7)

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Publication number Priority date Publication date Assignee Title
CN103214178A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Adjustment method of multifunctional glass support platform
CN103214178B (en) * 2012-01-19 2016-11-30 昆山思拓机器有限公司 The method of adjustment of multifunctional glass plummer
CN103420601A (en) * 2012-05-17 2013-12-04 三星钻石工业股份有限公司 Scribe processing system
CN103420601B (en) * 2012-05-17 2016-04-20 三星钻石工业股份有限公司 Delineation treatment system
US20160090430A1 (en) * 2014-07-29 2016-03-31 W. L. Gore & Associates, Inc. Method for Producing Porous Articles from Alternating Poly(ethylene tetrafluoroethylene) and Articles Produced Therefrom
US10519263B2 (en) 2014-07-29 2019-12-31 W. L. Gore & Associates, Inc. Method for producing porous articles from alternating poly(ethylene tetrafluoroethylene) and articles produced therefrom
US10808058B2 (en) * 2014-07-29 2020-10-20 W. L. Gore & Associates, Inc. Method for producing porous articles from alternating poly(ethylene tetrafluoroethylene) and articles produced therefrom

Also Published As

Publication number Publication date
JP2011161886A (en) 2011-08-25
TWI439433B (en) 2014-06-01
TW201206852A (en) 2012-02-16
KR101167502B1 (en) 2012-07-20
KR20110094243A (en) 2011-08-23
CN102189609B (en) 2015-04-08
JP5091961B2 (en) 2012-12-05

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