CN101439926A - Marking-out device and method and substrate cutting device by the same - Google Patents
Marking-out device and method and substrate cutting device by the same Download PDFInfo
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- CN101439926A CN101439926A CNA2008101723040A CN200810172304A CN101439926A CN 101439926 A CN101439926 A CN 101439926A CN A2008101723040 A CNA2008101723040 A CN A2008101723040A CN 200810172304 A CN200810172304 A CN 200810172304A CN 101439926 A CN101439926 A CN 101439926A
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- 238000000034 method Methods 0.000 title claims abstract description 62
- 239000000758 substrate Substances 0.000 title claims description 254
- 230000007246 mechanism Effects 0.000 claims description 44
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 208000037656 Respiratory Sounds Diseases 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 12
- 239000010409 thin film Substances 0.000 description 4
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention provides a marking device and a method, and a base plate cutting device using the device and method, characterized in that the marking device has marking units which are arranged in parallel, several parallel marks may be synchronously formed on a master base plate. Furthermore, space adjusting units used for adjusting spaces among the marking units are provided, and synchronously formed spaces among several parallel marks may be changed.
Description
Technical field
The present invention relates to the apparatus and method in making flat-panel display panel, used, particularly chalker and the method that the mother substrate that is formed with a plurality of unit substrate is rule and utilize this chalker and method to cut off the device of mother substrate.
Background technology
Recently, information processing device is to functional diversities and the fast development of information processing rate high speed.This signal conditioning package has the indicating meter that shows operation information.The display surface device mainly used CRT monitor in the past, but used the flat-panel monitor of light and take up room little Thin Film Transistor-LCD or organic light emitting diode display sharply to increase recently.
Generally the panel of use utilizes brittle base to make usually in flat-panel monitor etc., and panel can divide for substantially by a single board substrate that constitutes and adhesive base plate that two substrate bondings are got up.
Because adhesive base plate will be processed into the small panel of using from the liquid crystal display of mobile phone and use to the multiple sizes such as large-scale panel of usefulness such as televisor and indicating meter, so will cut into the unit substrate of specified dimension from large-scale mother substrate, to use as various panels.
The method that the tracing wheel (ScribeWheel) that the method for cut-out mother substrate mainly adopts utilization to be inserted with fine diamond cuts off.The method of using tracing wheel to cut off mother substrate comprises following operation: crossed process, behind the predetermined cut-out line that makes on the tracing wheel contact mother substrate, along being scheduled to cut off the line (Scribe Line) that line forms prescribed depth; And the cut-out operation, mother substrate is applied the impact of physics, propagate along line by making crackle, mother substrate is cut into unit substrate.
Summary of the invention
The purpose of this invention is to provide and a kind ofly can form the chalker and the method for many line and the substrate cut that utilizes this chalker and method simultaneously by carrying out a crossed process.
Purpose of the present invention is not limited thereto, and those skilled in the art should fully understand other purposes that the present invention does not mention from the following description.
The invention provides a kind of chalker, carry out the mother substrate that is formed with a plurality of unit substrate is separated into the crossed process of each unit substrate.Described chalker comprises: bracing member, be used to place described mother substrate, and can move by straight line; Scribing unit, mutual and row arrangement can form many line that are parallel to each other simultaneously on described mother substrate; And spacing adjustment unit, regulate the interval between the described scribing unit, can change the interval between described many line that are parallel to each other that form simultaneously.
As an example, described scribing unit on the path that described bracing member moves, the first direction and the row arrangement that move along described bracing member straight line.
Described chalker also comprises mobile unit, and described scribing unit is being moved up with the vertical second party of described first direction, and each described mobile unit comprises: drive member makes described scribing unit move along described second direction straight line; Ways is configured in along on the straight line of described second direction, guides described scribing unit straight line to move; And brace table, be configured in the two ends of described ways respectively, support described ways.
Described spacing adjustment unit can comprise: the guiding thruster, dispose along described first direction, and be connected with the brace table of described mobile unit; Brace table supports described guiding thruster; And driving mechanism, described guiding thruster is rotated.
Described scribing unit has two, make one of them described scribing unit promptly the brace table of the described mobile unit that moves of first scribing unit be fixed on the base, make another described scribing unit wherein promptly the brace table of the described mobile unit that moves of second scribing unit can be arranged on the described base movably along described first direction, described spacing adjustment unit has driving mechanism, brace table with described mobile unit that described second scribing unit is moved moves along described first direction.
Described scribing unit has three, the brace table of the described mobile unit that moves of first scribing unit that is configured in central authorities in the described scribing unit is fixed on the base, make in the described scribing unit the i.e. brace table of the described mobile unit that moves of second scribing unit and the 3rd scribing unit of two remaining scribing units, can be arranged on the described base movably along described first direction respectively, described spacing adjustment unit has driving mechanism, brace table with described mobile unit that described second scribing unit and described the 3rd scribing unit are moved moves along described first direction.
As other example, described scribing unit is on the path that described bracing member moves, along the vertical second direction of first direction and the row arrangement that move with described bracing member straight line.
Described spacing adjustment unit can comprise: drive member moves each described scribing unit straight line on described second direction; And ways, be configured in along on the straight line of described second direction, guide described scribing unit straight line to move.
Described drive member comprises: carriage is connected with described scribing unit respectively; The guiding thruster inserts in the whole described carriage, with described ways configured in parallel; And driving mechanism, described guiding thruster is rotated; Wherein, on described carriage, can be provided with negative thread portion, with in the described guiding thruster any one the guiding thruster be threaded.
Described bracing member has the worktable that supports described mother substrate, and described worktable comprises: lower panel, can move by straight line on described first direction; And upper board, be used to place described mother substrate, and be connected with the top of described lower panel.
Described bracing member also comprises the rotating drive member, and described upper board is rotated on described lower panel.
Described a plurality of scribing unit has respectively mutually and two scribers of row arrangement, and described scriber can form line in the opposite direction.
In addition, the present invention also provides a kind of substrate cut, and mother substrate is cut into a plurality of unit substrate.Described substrate cut comprises: loading portion loads the mother substrate that is formed with a plurality of unit substrate; Line portion on the described mother substrate that sends from described loading portion, forms line along the orientation of described unit substrate; Cut-out portion, the line along forming on described mother substrate is separated into unit substrate to described mother substrate; And unloading portion, unload separated described unit substrate; Described line portion comprises: bracing member, be used to place described mother substrate, and can move by straight line; Scribing unit, mutual and row arrangement can form many line that are parallel to each other simultaneously on described mother substrate; And spacing adjustment unit, regulate the interval between the described scribing unit, can change the interval between described many line that are parallel to each other that form simultaneously.
In addition, the present invention also provides a kind of scribble method, is used for mother substrate is separated into the crossed process of a plurality of unit substrate.According to the present invention, utilize mutually and a plurality of scribing units of row arrangement, on mother substrate, form many line that are parallel to each other simultaneously, when wanting to change the direction of the line that on described mother substrate, will form, can regulate the interval between described a plurality of scribing unit.
By making the bracing member that supports described mother substrate rotate 90 degree, change the direction of the line that on described mother substrate, will form.
As an example, described scribing unit is on the path that described bracing member moves, the first direction and the row arrangement that move along described bracing member straight line, fixing described mother substrate, make described a plurality of scribing unit along moving, form described line simultaneously with the vertical second direction straight line of described first direction.
As other example, described scribing unit is on the path that described bracing member moves, along the vertical second direction of first direction and the row arrangement that move with described bracing member straight line, fixing described a plurality of scribing units, described mother substrate is moved along described first direction straight line, form described line simultaneously.
According to the present invention, owing to use a plurality of scribing units on mother substrate, to form line simultaneously, so can shorten the needed time of crossed process.
In addition, according to the present invention, can adjust the interval between the scribing unit, so even according to unit substrate under the different situation in the interval between the line that the orientation on the mother substrate will form, also can form many line simultaneously to whole orientations.
Description of drawings
Fig. 1 is the figure of an example of expression mother substrate.
Fig. 2 is the figure of schematic representation substrate cut structure of the present invention.
Fig. 3 is the stereographic map of an example of chalker of the line portion in the presentation graphs 2.
Fig. 4 is the vertical view of the chalker among Fig. 3.
Fig. 5 is the side-view of the chalker among Fig. 3.
Fig. 6 is the enlarged view at " A " position among Fig. 3.
Fig. 7 is the stereographic map of the scriber among Fig. 6.
Fig. 8 is the part sectioned view of the scriber bottom among Fig. 7.
Fig. 9 is the vertical view of the tracing wheel among Fig. 8.
Figure 10 is that the order expression utilizes substrate cut of the present invention to make the schema of flat-panel monitor process.
Figure 11 A is that expression utilizes the chalker among Fig. 3 and Fig. 4, forms the figure of the process of line on mother substrate.
Figure 11 B is that expression utilizes the chalker among Fig. 3 and Fig. 4, forms the figure of the process of line on mother substrate.
Figure 11 C is that expression utilizes the chalker among Fig. 3 and Fig. 4, forms the figure of the process of line on mother substrate.
Figure 11 D is that expression utilizes the chalker among Fig. 3 and Fig. 4, forms the figure of the process of line on mother substrate.
Figure 11 E is that expression utilizes the chalker among Fig. 3 and Fig. 4, forms the figure of the process of line on mother substrate.
Figure 11 F is that expression utilizes the chalker among Fig. 3 and Fig. 4, forms the figure of the process of line on mother substrate.
Figure 11 G is that expression utilizes the chalker among Fig. 3 and Fig. 4, forms the figure of the process of line on mother substrate.
Figure 11 H is that expression utilizes the chalker among Fig. 3 and Fig. 4, forms the figure of the process of line on mother substrate.
Figure 11 I is that expression utilizes the chalker among Fig. 3 and Fig. 4, forms the figure of the process of line on mother substrate.
Figure 12 is the figure of other embodiments of the chalker in the presentation graphs 3.
Figure 13 is the figure of other embodiments of the chalker in the presentation graphs 3.
Figure 14 is the stereographic map of other embodiments of the chalker of the line portion in the presentation graphs 2.
Figure 15 is the vertical view of the chalker among Figure 14.
Figure 16 is the enlarged view at " B " position among Figure 14.
Figure 17 is the carriage of expression Figure 16 and the sectional view that guides annexation between the thruster.
Figure 18 A is the chalker that utilizes Figure 14 and Figure 15, forms the figure of the process of line on mother substrate.
Figure 18 B is the chalker that utilizes Figure 14 and Figure 15, forms the figure of the process of line on mother substrate.
Figure 18 C is the chalker that utilizes Figure 14 and Figure 15, forms the figure of the process of line on mother substrate.
Figure 18 D is the chalker that utilizes Figure 14 and Figure 15, forms the figure of the process of line on mother substrate.
Figure 18 E is the chalker that utilizes Figure 14 and Figure 15, forms the figure of the process of line on mother substrate.
Description of reference numerals
100 bracing members
200a, 200b scribing unit
300 mobile units
400 spacing adjustment unit
200 ' a, 200 ' b scribing unit
300 ' spacing adjustment unit
500,500 ' control part
Embodiment
Below with reference to Fig. 1～Figure 18 E embodiments of the present invention are elaborated.Embodiments of the present invention can be carried out various deformation, and scope of the present invention can not be interpreted as being defined in embodiment described later.Present embodiment is in order to illustrate in greater detail the present invention to those skilled in the art, and therefore, in order more clearly to emphasize, the key element shape among the figure etc. are exaggerated to some extent.
Embodiment
Fig. 1 is the figure of an example of expression mother substrate.
As shown in Figure 1, mother substrate 1 can be the Thin Film Transistor-LCD (panel of TFT-LCD).Mother substrate 1 constitutes by being roughly the first tabular mother substrate 2 of tetragon and second mother substrate 3.First mother substrate 2 and second mother substrate, 3 stacked on top of one another.First mother substrate 2 is the substrates that form thin film transistor base plate, and second mother substrate 3 is the substrates that form color filter.
Form a plurality of unit substrate 2a, 3a on first mother substrate 2 and second mother substrate 3, unit substrate 2a, 3a are arranged in latticed on the plane of first mother substrate 2 and second mother substrate 3.The horizontal edge of general unit substrate 2a, 3a is long long different with longitudinal edge, and according to the orientation of unit substrate 2a, 3a, the distance between the line that form also has nothing in common with each other.
On the other hand, mother substrate 1 is except being Thin Film Transistor-LCD (TFT-LCD) with the panel, also can be Organic Light Emitting Diode (OLED) the indicating meter panel of flat-panel monitor with one of panel.
Fig. 2 is the figure of schematic representation substrate cut 10 structures of the present invention.
As shown in Figure 2, substrate cut 10 is used for mother substrate (Reference numeral 1 of Fig. 1) is cut into a plurality of unit substrate, and has loading portion 11, line portion 12, cut-out portion 13 and unloading portion 14.Loading portion 11, line portion 12, cut-out portion 13 and unloading portion 14 arranged in order become row.Mother substrate 1 is sent into substrate cut 10 by loading portion 11, and order is separated into a plurality of unit substrate through line portion 12 and cut-out portion 13, after this delivers to the outside of substrate cut 10 by unloading portion 14.
In 12 1 sides configuration upset portion of line portion 15.Upset portion 15 makes the position of the one side that forms line and does not form the location swap of the another side of line.That is, in first mother substrate 2 and second mother substrate 3,, forming under the situation of line on second mother substrate 3 then, making mother substrate 1 upset, the upper-lower position of first mother substrate 2 and second mother substrate 3 is being exchanged when at first on first mother substrate 2, forming line.
Fig. 3 is the stereographic map of an example of chalker 12a of the line portion 12 of presentation graphs 2, and Fig. 4 and Fig. 5 are respectively vertical view and the side-views of the chalker 12a of Fig. 3.
For convenience of explanation, the straight line travel direction of the bracing member of narrating later 100 is called first direction 22, on horizontal plane, calling second direction 24, calling third direction 26 with first direction 22 and second direction 24 vertical above-below directions with first direction 22 vertical directions.First direction 22 and second direction 24 correspond respectively to the some limits that are arranged in latticed unit substrate 2 on mother substrate 1.
As Fig. 3～shown in Figure 5, chalker 12a comprises bracing member 100, scribing unit 200, mobile unit 300 and spacing adjustment unit 400.Bracing member 100 supports mother substrate 1 in crossed process.Bracing member 100 moves mother substrate 1 straight line on first direction 22, is benchmark with the central shaft towards the bracing member 100 of third direction 26, and mother substrate 1 is rotated.Scribing unit 200 contacts with mother substrate 1 on being placed on bracing member 100, forms line on mother substrate 1.Mobile unit 300 makes scribing unit 200 move along second direction 24 straight lines.Spacing adjustment unit 400 is regulated the interval on first direction 22 between the scribing unit 200.
Bracing member 100 comprises worktable 120, linear drives member 140 and rotating drive member 160.Worktable 120 has upper board 122 and lower panel 124.Upper board 122 and lower panel 124 are seen from top and are roughly rectangle.The configuration that is parallel to each other of upper board 122 and lower panel 124, upper board 122 is positioned at the upside of lower panel 124.On upper board 122, place mother substrate 1.The area of upper board 122 is similar or big slightly to mother substrate 1.Can form a plurality of holes (not expression among the figure) that are connected with vacuum pipe (not expression among the figure) on upper board 122, mother substrate 1 utilizes vacuum pressure to be fixed on the upper board 122.Clamping element (not expression among the figure) can be set on upper board 122 or lower panel 124 selectively, mother substrate 1 further is fixed on the upper board 122.
Linear drives member 140 moves worktable 120 straight line on first direction 22.Linear drives member 140 comprises ways 142, carriage 144 and driving mechanism (not expression among the figure).Ways 142 is long along first direction 22, is configured in the central authorities of base 30.Ways 142 has identical width along its length direction.Be flat above the ways 142, on two sides of ways 142, be respectively formed at groove 141 long on the first direction 22.
Driving mechanism provides motivating force, makes worktable 120 by ways 142 guiding, and straight line moves on first direction 22.Driving mechanism uses and comprises electric motor and angle of rake assembly.The assembly that uses as driving mechanism can be the assembly that comprises the assembly that electric motor, band and belt wheel constitute selectively or comprise linear motor (Linear Motor).Therefore the structure that above-mentioned multiple driven unit is concrete has omitted detailed explanation owing to be known for a person skilled in the art.
Rotating drive member 160 rotates worktable 120.The rotation of worktable 120 changes the direction of the line that forms on mother substrate 1.In the orientation of unit substrate 2a, the 3a that on mother substrate 1, forms, if forming line along any one direction finishes, then rotating drive member 160 makes mother substrate 1 rotate 90 degree, in the orientation of unit substrate 2a, 3a, forms line along some directions again.
As shown in Figure 5, rotating drive member 160 has electric motor 162 and rotation axis 164.Electric motor 162 is arranged on base plate 145 central parts of carriage 144.Be connected the rotation axis 164 on electric motor 162 output terminals, connect the lower panel 124 of worktable 120, be connected on the upper board 122.Bearing components (not expression among the figure) can be set on lower panel 124, can support rotation axis 164 and rotate.According to this formation, the upper board 122 of the worktable 120 of placing mother substrate 1 is rotated, the rotational angle of upper board 122 is 90 degree.
As shown in Figure 3 and Figure 4, according to the present invention a plurality of scribing units 200 can be arranged.In the present embodiment, be that example describes with the situation that disposes two scribing unit 200a, 200b.But scribing unit also can have more than three.The first scribing unit 200a and the second scribing unit 200b are configured to be spaced from each other at upper edge, the path first direction 22 that bracing member 100 moves.
As shown in Figure 6, the first scribing unit 200a has on second direction 24 and two scriber 220a, 240a of row arrangement, and the second scribing unit 200b has on second direction 24 and two scriber 220b, 240b of row arrangement.Scriber 220a, 240a, 220b, 240b have identical structure, are that example describes with wherein scriber 220a below.
Fig. 7 is the stereographic map of the scriber 220a among Fig. 6, and Fig. 8 is the part sectioned view of the bottom of the scriber 220a among Fig. 7, and Fig. 9 is the vertical view of the tracing wheel among Fig. 8.
As Fig. 7～shown in Figure 9, scriber 220a has tracing wheel 222, strut member 224, pressing member 226 and oscillator 228.Tracing wheel 222 contacts with mother substrate 1 in crossed process, rolls along the surface of mother substrate 1, forms line at mother substrate 1 simultaneously.Can use the wheel of diamond material as tracing wheel 222.Central authorities at tracing wheel 222 form circular through hole 222b, and the edge 222a of tracing wheel 222 is sharp-pointed.Tracing wheel 222 is supported on the strut member 224.Strut member 224 has main body 224a and pivot pin 224b.Formation connects the groove 225 of main body 224a in one direction below main body 224a.Pivot pin 224b is the stock shape with circular cross section.With the vertical direction of the length direction of groove 225 on, pivot pin 224b is positioned at groove 225.The two ends of pivot pin 224b are fixed on the main body 224a.Pivot pin 224b connects the through hole 222b that forms on tracing wheel 222.When tracing wheel 222 was supported with pivot pin 224b, tracing wheel 222 parts were positioned at groove 225, and a part is outstanding to strut member 224 times.226 pairs of tracing wheels 222 of pressing member are exerted pressure, and when tracing wheel 222 contacted with mother substrate 1, tracing wheel 222 can be with certain power by being pressed on the mother substrate 1.As an example, pressing member 226 is positioned at the top of strut member 224, utilizes air pressure that strut member 224 is pushed downwards, to tracing wheel 222 pressurizations.Oscillator 228 makes tracing wheel 222 vibrations when carrying out crossed process.Oscillator 228 is installed in main body 224a inside, can use ultrasonic oscillator as oscillator 228.
Two scriber 220a, 240a are configured to have nothing in common with each other.If be configured to a scriber 220a when a direction moves, can on mother substrate 1, form line, then another scriber 240a is configured to can form line on mother substrate 1 when moving along the direction opposite with it.Therefore, scriber 220a is when a side direction of mother substrate 1 opposite side opposite with it moves, form line on mother substrate 1, another scriber 240a when opposite with it the described side shifting, forms line from the opposite side of mother substrate 1 on mother substrate 1. Scriber 220a, 240a can move up at upper and lower respectively independently, and the scriber that forms line is positioned at the downside of another scriber.
In addition, as Fig. 3～shown in Figure 5, mobile unit 300 has first mobile unit 320 that the first scribing unit 200a is moved, second mobile unit 340 that the second scribing unit 200b is moved.The structure of first mobile unit 320 and second mobile unit 340 is similar substantially.First mobile unit 320 has two vertical support platforms 321, ways 323, carriage 325 and drive member (Fig. 4 329).Vertical support platform 321 is spaced from each other configuration along second direction 24.Interval between the vertical support platform 321 makes mother substrate 1 when first direction 22 straight lines move, and mother substrate 1 can be by between the vertical support platform 321.
The first scribing unit 200a is connected on the ways 323 by carriage 325.As shown in Figure 6, carriage 325 has back up pad 336 and web plate 335.Back up pad 336 is rectangular flat board, is positioned on the side of ways 323.Web plate 335 has from the side plate 331 of the vertical outstanding back up pad 336 with downside of back up pad 336 upsides, be inserted in the insertion plate 333 the groove 323a that ways 323 forms.
Drive member 329 provides motivating force, and carriage 325 is moved along ways 323 straight lines.Drive member 329 has guiding thruster 327, the driving mechanism 328 of turning force is provided to the guiding thruster.Guiding thruster 327 is parallel with ways 323, and in a side of ways 323, the two ends of guiding thruster 327 are supported by vertical support platform 321.Driving mechanism 328 is arranged on some in the vertical support platform 321, and is connected on the end of guiding thruster 327.Use electric motor as driving mechanism 328.And carriage 325 has the negative thread portion (not expression among the figure) with the outer screw section engagement that guides thruster 327.As drive member 329 can use selectively have electric motor, the assembly of band and belt wheel or utilize assembly of linear motor etc.
The first scribing unit 200a is installed on the back up pad 336 of carriage 325, can move up and down.As an example, on back up pad 336, along the guide path 336a of third direction 26 formation notch geometrys, scriber 220a, the 240a of the first scribing unit 200a is connected on the back shaft (not expression among the figure) that inserts among the guide path 336a.
The interval of spacing adjustment unit 400 between first direction 22 adjusted, the first scribing unit 200a and the second scribing unit 200b.As an example, the vertical support platform 321 of first mobile unit 320 is fixed on the base 30, and the first scribing unit 200a is not moved on first direction 22.The vertical support platform 341 of second mobile unit 340 is arranged to and can be moved to first direction 22 from base 30, and the second scribing unit 200b can move to first direction 22.Spacing adjustment unit 400 moves on first direction 22 by the vertical support platform 341 that makes second mobile unit 340, regulates the interval between the first scribing unit 200a and the second scribing unit 200b.
Spacing adjustment unit 400 has brace table 420, ways 440 and drive member (Fig. 4 460).Brace table 420 is configured in vertical support platform 341 both sides of second mobile unit 340 respectively.First back-up block 422 is configured between the vertical support platform 341 of the vertical support platform 321 of first mobile unit 320 and second mobile unit 340.Second back-up block 424 is a benchmark with the vertical support platform 341 of second mobile unit 340, is configured in a side opposite with first back-up block 422.Drive member 460 moves vertical support platform 341 straight line on first direction 22 of second mobile unit 340.Drive member 460 has guiding thruster 462 and the driving mechanism 464 of turning force is provided to this guiding thruster.Guiding thruster 462 is between first back-up block 422 and second back-up block 424, and its length direction is a first direction 22, and two ends are connected with second back-up block 424 with first back-up block 422 respectively.Guiding thruster 462 meshes with the negative thread portion that forms on the vertical support platform 341 of second mobile unit 340 (not expression among the figure) respectively.Driving mechanism 464 is arranged on first back-up block 422 or second back-up block 424, and is connected on the end of guiding thruster 462.Driving mechanism 464 can use electric motor.Though drive member 460 is that example is illustrated with the assembly with electric motor 464 and guiding thruster 462, in addition, also can use as various driving mechanisms linear motor, that linear drives power offered the vertical support platform of mobile unit.
Action by control part 500 controls first mobile unit 320, second mobile unit 340, spacing adjustment unit 400 and worktable 120.That is, control part 500 is controlled first mobile unit 320 and second mobile unit 340 when forming line, the first scribing unit 200a and second scribing unit 200b straight line on second direction are moved.If form two line, then control part 500 control driving mechanisms move worktable 12 straight lines.In addition, if all form with mother substrate 1 on the parallel line of any one orientation of unit substrate 2a, 3a of formation, then control part 500 is controlled rotating drive members 160, worktable 120 is rotated, and control interval regulon 400, regulate the interval between the first scribing unit 200a and the second scribing unit 200b.
The substrate cut of the present invention 10 that use is had the said structure process of making flat-panel display panels describes below.
Figure 10 is that the order expression utilizes substrate cut of the present invention to make the schema of the process of flat-panel monitor.
As Fig. 2 and shown in Figure 10, mother substrate 1 is loaded in loading portion 11.Mother substrate 1 first mother substrate 2 or second mother substrate 3 towards above state under be loaded.At this for convenience, be that example describes with the situation of first mother substrate 2 towards the top.Loading portion 11 is sent to line portion 12 (S10) to mother substrate 1.
12 pairs of first mother substrates 2 towards the top of line portion carry out crossed process.After forming line on first mother substrate 2, line portion 12 is sent to upset portion 15 (S20) to mother substrate 1.
12 pairs of second mother substrates 3 towards the top of line portion carry out crossed process.After forming line on second mother substrate 3, line portion 12 is sent to cut-out portion 13 (S40) to mother substrate 1.
13 pairs in cut-out portion has carried out the mother substrate 1 of first mother substrate 2 and second mother substrate, 3 crossed process, cuts off operation, and mother substrate 1 is separated into a plurality of unit substrate (S50).
Utilize the cut-out operation that mother substrate 1 is separated into a plurality of unit substrate, after this unit substrate carries out matting to unit substrate in unloading portion 14 unloaded (S60).
Then, in line portion 12, the process that mother substrate 1 carries out crossed process is described utilizing chalker 12a of the present invention.
Figure 11 A～Figure 11 I is the chalker that expression utilizes Fig. 3 and Fig. 4, forms the figure of the process of line on mother substrate 1.
If worktable 120 moves to the position of having set (that is, the first predetermined line a and the first scribing unit 200a aligned position of cutting off of mother substrate 1), with regard to moving of stop table 120.The driving mechanism 464 of this rear drive spacing adjustment unit 400 is regulated the interval between the first scribing unit 200a and the second scribing unit 200b.Spacing adjustment unit 400 moves vertical support platform 341 straight line on first direction 22 of second mobile unit 340.If by moving second mobile unit 340, the second scribing unit 200b moves to the position set (promptly, the second predetermined line b aligned position that cuts off of the second scribing unit 200b and mother substrate 1), just stop mobile (Figure 11 B) of the vertical support platform 341 of second mobile unit 340.
Be scheduled to cut off under the line b aligned state along first predetermined the cut off line a and second of first direction 22 at the first scribing unit 200a and the second scribing unit 200b with mother substrate 1, drive the driving mechanism 328,348 of first mobile unit 320 and second mobile unit 340, make the first scribing unit 200a and the second scribing unit 200b move to a side of mother substrate 1.
After this, each scriber 220a, 220b of the first scribing unit 200a and the second scribing unit 200b moves downwards, contacts with mother substrate 1 (Figure 11 C).
The order of Figure 11 A, Figure 11 B and Figure 11 C can change mutually.For example behind the interval of at first regulating between the first scribing unit 200a and the second scribing unit 200b, the first predetermined line a of cut-out of mother substrate 1 and the second predetermined line b that cuts off aim at the first scribing unit 200a and the second scribing unit 200b.
Drive the driving mechanism 328,348 of mobile unit 320,340 then, make the first scribing unit 200a and the second scribing unit 200b cross mother substrate 1 and move along second direction 24.Scriber 220a, the 220b of the first scribing unit 200a and the second scribing unit 200b make on the mother substrate 1 and form crackle at this moment.By forming crackle continuously, on mother substrate 1, form line (Figure 11 D) along predetermined line a, the b of cutting off.
After the predetermined cut-out in mother substrate 1 upper edge line a, b formed line, scriber 220a, the 220b of the first scribing unit 200a and the second scribing unit 200b were moved upward.
Along being scheduled to cut-out line a, when b forms and rules, using scriber 220a, 220b, when being scheduled to cut off line c, d formation line on the edge, can use scriber 240a, 240b.This is scriber 220a, the 220b that forms crackle in order to make, and the tracing wheel of 240a, 240b keeps certain directivity.
In said process,, on mother substrate 1, form line along another direction when after all forming line in any one orientation of the unit substrate 2a, the 3b that form on the mother substrate 1.Be placed with the upper board 122 of the worktable 120 of mother substrate 1 for this reason, rotate 90 degree (Figure 11 G) with respect to lower panel 124.
This aftertable 120 straight line on first direction 22 moves, and the predetermined line f that cuts off is aimed at the first scribing unit 200a.If worktable 120 moves to the position of having set (that is, the predetermined cut-out line f of mother substrate 1 and the first scribing unit 200a aligned position), with regard to move (Figure 11 H) of stop table 120.
Drive the driving mechanism 464 of spacing adjustment unit 400, regulate the interval between the first scribing unit 200a and the second scribing unit 200b.Spacing adjustment unit 400 moves vertical support platform 341 straight line on first direction 22 of second mobile unit 340.Utilize moving of second mobile unit 340, if the second scribing unit 200b moves to the position set (promptly, the predetermined cut-out line e aligned position of the second scribing unit 200b and mother substrate 1), just stop mobile (Figure 11 I) of the vertical support platform 341 of second mobile unit 340.
After this scriber 220a, the 220b of the first scribing unit 200a and the second scribing unit 200b move down, contact with mother substrate 1, by the process of having carried out in Figure 11 D～Figure 11 F, having illustrated, mother substrate 1 form with in the past in the line of the line vertical direction of mother substrate 1 formation.
Following simple declaration changes a plurality of examples of coming from present embodiment.
In the example of above-mentioned embodiment, illustrated by moving second mobile unit 340, be adjusted in the interval between the first scribing unit 200a and the second scribing unit 200b on the first direction 22.But also can be as shown in figure 12, the vertical support platform 341 of the vertical support platform 321 of first mobile unit 320 and second mobile unit 340 all moves.
In addition, in the example of above-mentioned embodiment, the situation that two scribing units are arranged is illustrated.But the scribing unit more than three or three can be arranged also.Under the situation that three scribing units are arranged, the scribing unit 200a that is positioned at central authorities does not move on first direction, and the scribing unit 200b, the 200c that are positioned at both sides can move up in first party.
In the example of above-mentioned embodiment, there is the situation of two scribers to be illustrated to a scribing unit.But also can a scriber be arranged at a scribing unit.
In the example of above-mentioned embodiment, to mother substrate is fixed, scribing unit forms line on mother substrate while moving chalker is illustrated.But also can fix scribing unit, make mother substrate form line while moving.In this case, scribing unit is on second direction 24 and row arrangement, and mother substrate straight line on first direction 22 moves, and can regulate along the interval between the scribing unit of second direction 24.Below this is elaborated.
Figure 14 is the stereographic map of other embodiments of chalker in the line portion of presentation graphs 2, and Figure 15 is the vertical view of the chalker of Figure 14.Figure 16 is the enlarged view at Figure 14 " B " position, and Figure 17 is the carriage of expression Figure 16 and the sectional view of the annexation between the guiding thruster.
As Figure 14 and shown in Figure 15, chalker 12b has bracing member 100, scribing unit 200 ', spacing adjustment unit 300 '.Bracing member 100 supports mother substrate 1.Bracing member 100 makes mother substrate 1 move along first direction 22 straight lines, and on the plane of mother substrate 1, is that benchmark can make mother substrate 1 rotate with vertical central shaft.Scribing unit 200 ' contacts with mother substrate 1 on being placed on bracing member 100, forms crackle on mother substrate 1.Spacing adjustment unit 300 ' moves scribing unit 200 ' on second direction 24, regulate the interval between the scribing unit 200 '.When carrying out crossed process, fixing scribing unit 200 ', mother substrate 1 moves along first direction 22 straight lines.
With reference to Fig. 3～Fig. 5, because bracing member 100 has identical structure with the bracing member that illustrates previously, so omitted detailed description to it.
As Figure 14 and shown in Figure 15, scribing unit 200 ' has first scribing unit, 200 ' a and second scribing unit, 200 ' b, and they are configured on the vertical direction of straight line travel direction with bracing member 100, promptly on the second direction 24.In the present embodiment, be that example describes with the situation that disposes two scribing unit 200 ' a, 200 ' b, but can certainly dispose plural a plurality of scribing unit 200 '.First scribing unit, 200 ' a and second scribing unit, 200 ' b be the spacing adjustment unit 300 ' by narrating later respectively, moves interval on second direction 24.
As shown in figure 16, first scribing unit, 200 ' a has two scriber 220 ' a, 240 ' a that are configured in side by side on the second direction 24, and second scribing unit, 200 ' b has two scriber 220 ' b, 240 ' b that are configured in side by side on the second direction 24.Scriber 220 ' a, 240 ' a, 220 ' b, 240 ' b have with Fig. 7～Fig. 9 in the identical structure of scriber that illustrated in front, so omitted detailed description to it.
Spacing adjustment unit 300 ' moves each scribing unit 200 ' a, 200 ' b on second direction 24, regulate the interval between scribing unit 200 ' a, the 200 ' b.Spacing adjustment unit 300 ' has vertical support platform 310 ', ways 320 ', carriage 330 ' a, 330 ' b and drive member 340 '.Vertical support platform 310 ' separates certain distance configuration on second direction 24.Vertical support platform 310 ' is configured at mother substrate 1 when first direction 22 straight lines move, and mother substrate 1 can be by between the vertical support platform 310 '.Ways 320 ' is fixed on the upper end of vertical support platform 310 '.On ways 320 ' and below, have along its length long groove 322 '.
First scribing unit, 200 ' a is connected on the ways 320 ' by carriage 330 ' a, and second scribing unit, 200 ' b is connected on the ways 320 ' by carriage 330 ' b.Carriage 330 ' a has identical structure with carriage 330 ' b, so followingly only carriage 330 ' a is described.As shown in figure 16, carriage 330 ' a has back up pad 332 ' and web plate 334 '.Back up pad 332 ' is rectangular flat board, is positioned on the side of ways 320 '.Web plate 334 ' has the side plate 334 ' a of the vertical outstanding back up pad 332 ' with downside of upside from back up pad 332 ' and is inserted in insertion plate 334 ' b the groove 322 ' of ways 320 ' formation.
Drive member 340 ' provides motivating force, and carriage 330 ' a, 330 ' b are moved along ways 320 ' straight line.Drive member 340 ' has the first guiding thruster 342 ' and second and guides thruster 344 ', they and ways 320 ' configured in parallel.As shown in figure 17, the carriage 330 ' a that can straight line moves is installed on the thruster 342 ', the carriage 330 ' b that can straight line moves is installed on the second guiding thruster 344 ' in first guiding.Promptly, the first guiding thruster 342 ' and the second guiding thruster 344 ' insert among the carriage 330 ' a, the first guiding thruster 342 ' and the 335 ' a of the negative thread portion engagement that upward forms at carriage 330 ' a, and the second guiding thruster 344 ' is not to connect with hole 336 ' a state of contact that goes up formation at carriage 330 ' a.Identical therewith, the first guiding thruster 342 ' and the second guiding thruster 344 ' insert among the carriage 330 ' b, the first guiding thruster 342 ' to be connecting with hole 336 ' the b state of contact that go up to form at carriage 330 ' b, and the second guiding thruster 344 ' with go up the 335 ' b of the negative thread portion engagement that forms at carriage 330 ' b.According to this configuration, when the first guiding thruster 342 ' drove, carriage 330 ' a straight line moved, and carriage 330 ' b does not move, and when the second guiding thruster 344 ' drove, carriage 330 ' a did not move, and carriage 330 ' b straight line moves.According to this type of drive, just can regulate being connected first scribing unit, the 200 ' a on the carriage 330 ' a and being connected interval between second scribing unit, the 200 ' b on the carriage 330 ' b.On an end of the first guiding thruster 342 ', connect first driving mechanism 343 ' that turning force is provided, on an end of the second guiding thruster 344 ', connect second driving mechanism 345 ' that turning force is provided.Can use driving mechanisms such as electric motor as first driving mechanism 343 ' and second driving mechanism 345 '.But in addition to have electric motor and the angle of rake assembly of guiding is that example is illustrated,, also can use the various driving mechanisms that linear drives power can be provided to carriage 330 ' a, 330 ' b as cylinder etc. as drive member 340 '.
As shown in figure 16, first scribing unit, 200 ' a is installed on the back up pad 332 ' of carriage 330 ' a, can move up and down.As an example, on back up pad 332 ', scriber 220 ' a, the 240 ' a that form guide path 331 ', the first scribing unit 200 ' a of notch geometry along third direction 26 are connected on the back shaft (not expression among the figure) that inserts in the guide path 331 '.Second scribing unit, 200 ' b also is connected on the carriage 330 ' b, can move up and down, and syndeton is identical with the syndeton of first scribing unit, 200 ' a, so omitted the explanation to it.
Action by the described spacing adjustment unit 300 ' of control part 500 ' control.First driving mechanism 343 ' of 500 ' control interval of control part regulon 300 ' and the action of second driving mechanism 345 ', first scribing unit, 200 ' a and second scribing unit, 200 ' b are moved, to be adjusted in the interval between first scribing unit, the 200 ' a and second scribing unit, 200 ' b on the second direction 24 on second direction 24.
Utilize chalker 12b of the present invention below, the process of carrying out crossed process on mother substrate 1 is described with said structure.
Figure 18 A～Figure 18 E represents to utilize the chalker of Figure 14 and Figure 15, forms the figure of the process of line on mother substrate 1.
Scriber 220 ' a, the 220 ' b of first scribing unit, 200 ' a and second scribing unit, 200 ' b move down, and worktable 120 utilizes driving mechanism (not expression among the figure), and straight line moves (Figure 18 A) on first direction 22.
When first direction 22 moved, scriber 220 ' a, the 220 ' b of first scribing unit, 200 ' a and second scribing unit, 200 ' b formed crackle on mother substrate 1 at worktable 120.By forming crackle continuously, on mother substrate 1, form line (Figure 18 B) along predetermined line a ', the b ' of cutting off.
After forming line on the mother substrate 1, scriber 220 ' a, the 220 ' b of first scribing unit, 200 ' a and second scribing unit, 200 ' b are moved upward along predetermined line a ', the b ' of cutting off.
The driving mechanism 345 ' of spacing adjustment unit 300 ' drives the second guiding thruster 344 ', and second scribing unit, 200 ' b is aimed at the predetermined line d ' that cuts off.The driving mechanism 343 ' of spacing adjustment unit 300 ' drives the first guiding thruster 342 ', first scribing unit, 200 ' a is moved, utilize moving of first scribing unit, 200 ' a, regulate the interval between first scribing unit, 200 ' a and second scribing unit, the 200 ' b.First scribing unit, 200 ' a aims at (Figure 18 C) with the predetermined line c ' that cuts off.
Scriber 240 ' a, the 240 ' b of first scribing unit, 200 ' a and second scribing unit, 200 ' b moves downwards, and worktable 120 utilizes driving mechanism (not expression among the figure), and straight line moves on first direction 22.When first direction 22 moved, first scribing unit, 200 ' a and second scribing unit, 200 ' b scriber 240 ' a, 240 ' b separately formed crackle on mother substrate 1 at worktable 120.By forming crackle continuously, on mother substrate 1, form line along predetermined line c ', the d ' of cutting off.After forming line on the mother substrate 1, scriber 240 ' a, the 240 ' b of scribing unit 200 ' a, 200 ' b are moved upward (Figure 18 D) along predetermined line c ', the d ' of cutting off.
Along predetermined cut-out line a ', b ' formation line the time, can use scriber 220 ' a, 220 ' b, along predetermined cut-out line c ', d ' formation line the time, can use scriber 240 ' a, 240 ' b.This is scriber 220 ' a, the 220 ' b that forms crackle in order to make, and the tracing wheel of 240 ' a, 240 ' b keeps certain directivity.
By aforesaid process, after all forming line, on mother substrate 1, form line along another direction in the direction in mother substrate 1 upper edge.Therefore to rotate 90 degree (Figure 18 E) to the upper board 122 of the worktable 120 that is placed with mother substrate 1 with respect to lower panel 124.
After this process by carrying out once more having illustrated in Figure 18 A～Figure 18 D is forming on the mother substrate 1 and the line of the vertical direction of line of formation in the past.
As mentioned above, the present invention has a plurality of scribing units, by form many line simultaneously in a crossed process, can shorten the needed time of crossed process, therefore can improve the productivity of making the substrate operation.
In addition, because the present invention can regulate the interval between the scribing unit, so can form many line respectively forming in the orientation of unit substrate on the mother substrate.
Claims (26)
1. a chalker carries out the crossed process that a mother substrate that is formed with a plurality of unit substrate is separated into each unit substrate, it is characterized in that comprising:
Bracing member is used to place described mother substrate, can move by straight line;
Scribing unit, mutual and row arrangement can form many line that are parallel to each other simultaneously on described mother substrate; And
Spacing adjustment unit is regulated the interval between the described scribing unit, can change the interval between described many line that are parallel to each other that form simultaneously.
2. chalker according to claim 1 is characterized in that, described scribing unit on the path that described bracing member moves, the first direction and the row arrangement that move along described bracing member straight line.
3. chalker according to claim 2 is characterized in that,
Also comprise mobile unit, described scribing unit moved up with the vertical second party of described first direction,
Each described mobile unit comprises:
Drive member makes described scribing unit move along described second direction straight line;
Ways is configured in along on the straight line of described second direction, guides described scribing unit straight line to move; And
Brace table is configured in the two ends of described ways respectively, supports described ways.
4. chalker according to claim 3 is characterized in that,
Described spacing adjustment unit comprises:
The guiding thruster disposes along described first direction, and is connected with the brace table of described mobile unit;
Brace table supports described guiding thruster; And
Driving mechanism rotates described guiding thruster.
5. chalker according to claim 3 is characterized in that,
Described scribing unit has two,
Make one of them described scribing unit promptly the brace table of the described mobile unit that moves of first scribing unit be fixed on the base,
Make another described scribing unit wherein promptly the brace table of the described mobile unit that moves of second scribing unit can be arranged on movably on the described base along described first direction,
Described spacing adjustment unit has driving mechanism, and the brace table with described mobile unit that described second scribing unit is moved moves along described first direction.
6. chalker according to claim 3 is characterized in that,
Described scribing unit has three,
The brace table of the described mobile unit that moves of first scribing unit that is configured in central authorities in the described scribing unit is fixed on the base,
Make in the described scribing unit the i.e. brace table of the described mobile unit that moves of second scribing unit and the 3rd scribing unit of two remaining scribing units, can be arranged on movably on the described base along described first direction respectively,
Described spacing adjustment unit has driving mechanism, and the brace table with described mobile unit that described second scribing unit and described the 3rd scribing unit are moved moves along described first direction.
7. chalker according to claim 1 is characterized in that, described scribing unit is on the path that described bracing member moves, along the vertical second direction of first direction and the row arrangement that move with described bracing member straight line.
8. chalker according to claim 7 is characterized in that,
Described spacing adjustment unit comprises:
Drive member moves each described scribing unit straight line on described second direction; And
Ways is configured in along on the straight line of described second direction, guides described scribing unit straight line to move.
9. chalker according to claim 8 is characterized in that,
Described drive member comprises:
Carriage is connected with described scribing unit respectively;
The guiding thruster inserts in the whole described carriage, with described ways configured in parallel; And
Driving mechanism makes described guiding thruster rotate respectively; Wherein,
On described carriage, be provided with negative thread portion, with in the described guiding thruster any one the guiding thruster be threaded.
10. chalker according to claim 1 is characterized in that,
Described bracing member has the worktable that supports described mother substrate,
Described worktable comprises:
Lower panel can move by straight line on described first direction; And
Upper board is used to place described mother substrate, and is connected with the top of described lower panel.
11. chalker according to claim 10 is characterized in that, described bracing member also comprises the rotating drive member, and described upper board is rotated on described lower panel.
12. chalker according to claim 1 is characterized in that,
Described a plurality of scribing unit has respectively mutually and two scribers of row arrangement,
Described scriber forms line in the opposite direction.
13. a substrate cut is characterized in that comprising:
Loading portion loads the mother substrate that is formed with a plurality of unit substrate;
Line portion on the described mother substrate that sends from described loading portion, forms line along the orientation of described unit substrate;
Cut-out portion, the line along forming on described mother substrate is separated into unit substrate to described mother substrate; And
Unloading portion unloads separated described unit substrate;
Described line portion comprises:
Bracing member is used to place described mother substrate, can move by straight line;
Scribing unit, mutual and row arrangement can form many line that are parallel to each other simultaneously on described mother substrate; And
Spacing adjustment unit is regulated the interval between the described scribing unit, can change the interval between described many line that are parallel to each other that form simultaneously.
14. substrate cut according to claim 13 is characterized in that, described scribing unit on the path that described bracing member moves, the first direction and the row arrangement that move along described bracing member straight line.
15. substrate cut according to claim 14 is characterized in that,
Also comprise mobile unit, described scribing unit moved up with the vertical second party of described first direction,
Each described mobile unit comprises:
Drive member makes described scribing unit move along described second direction straight line;
Ways is configured in along on the straight line of described second direction, guides described scribing unit straight line to move; And
Brace table is configured in the two ends of described ways respectively, supports described ways.
16. substrate cut according to claim 15 is characterized in that,
Described spacing adjustment unit comprises:
The guiding thruster disposes along described first direction, and is connected with the brace table of described mobile unit;
Brace table supports described guiding thruster; And
Driving mechanism rotates described guiding thruster.
17. substrate cut according to claim 15 is characterized in that,
Described scribing unit has two,
Make one of them described scribing unit promptly the brace table of the described mobile unit that moves of first scribing unit be fixed on the base,
Make another described scribing unit wherein promptly the brace table of the described mobile unit that moves of second scribing unit can be arranged on movably on the described base along described first direction,
Described spacing adjustment unit has driving mechanism, and the brace table with described mobile unit that described second scribing unit is moved moves along described first direction.
18. substrate cut according to claim 13 is characterized in that, described scribing unit is on the path that described bracing member moves, along the vertical second direction of first direction and the row arrangement that move with described bracing member straight line.
19. substrate cut according to claim 18 is characterized in that,
Described spacing adjustment unit comprises:
Drive member moves each described scribing unit straight line on described second direction; And
Ways is configured in along on the straight line of described second direction, guides described scribing unit straight line to move.
20. substrate cut according to claim 19 is characterized in that,
Described drive member comprises:
Carriage is connected with described scribing unit respectively;
The guiding thruster inserts in the whole described carriage, with described ways configured in parallel; And
Driving mechanism makes described guiding thruster rotate respectively; Wherein,
On described carriage, be provided with negative thread portion, with in the described guiding thruster any one the guiding thruster be threaded.
21. substrate cut according to claim 13 is characterized in that,
Described bracing member comprises:
Lower panel can move by straight line on described first direction;
Upper board is used to place described mother substrate, and is connected with the top of described lower panel; And
The rotating drive member rotates described upper board on described lower panel.
22. a scribble method is characterized in that,
Utilize a plurality of scribing units of mutual and row arrangement, on mother substrate, form many line that are parallel to each other simultaneously,
When wanting to change the direction of the line that on described mother substrate, will form, regulate the interval between described a plurality of scribing unit.
23. scribble method according to claim 22 is characterized in that, rotates 90 degree by making the bracing member that supports described mother substrate, changes the direction of the line that will form on described mother substrate.
24. scribble method according to claim 22 is characterized in that,
Described scribing unit on the path that described bracing member moves, the first direction and the row arrangement that move along described bracing member straight line,
Fixing described mother substrate makes described a plurality of scribing unit along moving with the vertical second direction straight line of described first direction, forms described line simultaneously.
25. scribble method according to claim 22 is characterized in that,
Described scribing unit on the path that described bracing member moves, along the vertical second direction of first direction and the row arrangement that move with described bracing member straight line,
Fixing described a plurality of scribing units make described mother substrate move along described first direction straight line, form described line simultaneously.
26. scribble method according to claim 22 is characterized in that,
Each described scribing unit has two scribers respectively,
The scriber of described scribing unit forms line in the opposite direction.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2007-0119002 | 2007-11-21 | ||
| KR1020070119002 | 2007-11-21 | ||
| KR10-2007-0119005 | 2007-11-21 | ||
| KR1020070119005 | 2007-11-21 | ||
| KR1020070119002A KR100889308B1 (en) | 2007-11-21 | 2007-11-21 | Scribing apparatus and method, apparatus for cutting substrate using the scribing apparatus |
| KR1020070119005A KR100905898B1 (en) | 2007-11-21 | 2007-11-21 | Scribing apparatus, apparatus and method for cutting substrate using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101439926A true CN101439926A (en) | 2009-05-27 |
| CN101439926B CN101439926B (en) | 2012-01-04 |
Family
ID=40698409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101723040A Active CN101439926B (en) | 2007-11-21 | 2008-10-31 | Marking-out device and method and substrate cutting device by the same |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR100889308B1 (en) |
| CN (1) | CN101439926B (en) |
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Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4664544B2 (en) | 2001-07-27 | 2011-04-06 | 株式会社ディスコ | Scribing equipment |
| JP4199471B2 (en) | 2002-03-26 | 2008-12-17 | Ｊｕｋｉ株式会社 | Semiconductor wafer processing apparatus and semiconductor wafer processing method |
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| WO2005113212A1 (en) * | 2004-05-20 | 2005-12-01 | Mitsuboshi Diamond Industrial Co., Ltd. | Motherboard cutting method, motherboard scribing apparatus, program and recording medium |
| KR100628276B1 (en) * | 2004-11-05 | 2006-09-27 | 엘지.필립스 엘시디 주식회사 | scribing equipment and cutting equipment of substrate having the same and method for cutting of substrate using the same |
| JP2006196574A (en) | 2005-01-12 | 2006-07-27 | Daitron Technology Co Ltd | Scribing tool |
| KR100863438B1 (en) * | 2006-05-08 | 2008-10-16 | 주식회사 탑 엔지니어링 | Apparatus And Method for Scribing Substrate Using Synchronized Multi-axis |
-
2007
- 2007-11-21 KR KR1020070119002A patent/KR100889308B1/en not_active IP Right Cessation
-
2008
- 2008-10-31 CN CN2008101723040A patent/CN101439926B/en active Active
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| CN105541095A (en) * | 2015-12-23 | 2016-05-04 | 苏州大道激光应用科技有限公司 | Laser cutting process used for glass cutting |
| CN106995274A (en) * | 2016-09-23 | 2017-08-01 | 广州市科卡通信科技有限公司 | A kind of new-type glass line-plotting device |
| CN108585460A (en) * | 2018-04-27 | 2018-09-28 | 羊月生 | A kind of glass automatic cutting equipment |
| CN108585460B (en) * | 2018-04-27 | 2021-02-02 | 中建材（合肥）新能源有限公司 | Automatic glass cutting equipment |
| CN111916368A (en) * | 2019-05-08 | 2020-11-10 | 三星显示有限公司 | Display panel cutting device and cutting method using same |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100889308B1 (en) | 2009-03-18 |
| CN101439926B (en) | 2012-01-04 |
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