CN101082742A - Middle basement, xy work bench, sealing agent coating device and manufacturing method for liquid crystal panel - Google Patents
Middle basement, xy work bench, sealing agent coating device and manufacturing method for liquid crystal panel Download PDFInfo
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- CN101082742A CN101082742A CN 200710108173 CN200710108173A CN101082742A CN 101082742 A CN101082742 A CN 101082742A CN 200710108173 CN200710108173 CN 200710108173 CN 200710108173 A CN200710108173 A CN 200710108173A CN 101082742 A CN101082742 A CN 101082742A
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Abstract
The present invention provides a middle base which can restrain the deformation of the prescribed area and increase the reliability, a XY worktable which adopts the middle base, a joint compound coating device which adopts the XY worktable, and the method for making the liquid crystal panel which adopts the jointing compound coating device. The middle base (23) is a traverse rectangular board body, a first ballscrew (27) which is in the orthogonal direction to the length direction is provided in the approximate central part at the lower part, the first ballscrew (27) extends from the end rim of the two sides of the middle base (23), and it is connected with the driving motor (29) at the end. It is provided with a plurality of first LM guide parts (26) which are parallelly arranged along the axle direction at the two side part of the first ballscrew (27). When make the position where two first LM guide parts of the middle part is arranged with the first ballscrew with each other as the area (A), make the two side parts of the area (A) as the area (B), the position which is next to the first ballscrew is added with at least one third LM guide part (30), in the thickness of the area (B), a plurality of round holes (38) are arranged in the length direction, and these round holes (38) are parallel to each other in the direction which is orthogonal to the length direction.
Description
Technical field
The present invention relates to intermediate base, with this intermediate base as the XY worktable of X/Y worktable, utilize this XY worktable that sealant is coated to sealing agent coating device on the substrate, adopts sealing agent applying device to make the LCD panel manufacturing method of liquid crystal panel.
Background technology
In the process of making liquid crystal panel, use sealing agent coating device.Sealing agent applying device comprises base station, be positioned in XY worktable on this base station, be located at the Z worktable on the above-mentioned base station, the sealant supply unit that is installed in the distributing nozzle on this Z worktable and sealant is supplied with this distributing nozzle by pillar.
Mounting glass substrate on the substrate platform that constitutes XY worktable drives the Z worktable, distributing nozzle is descended, and the interval between the ejiction opening of spray nozzle front end and the glass substrate is remained preliminary dimension.Then, XY worktable and distributing nozzle are relatively moved with respect to glass substrate at directions X and Y direction, simultaneously, confess sealant, it is coated on the glass substrate from the ejiction opening of distributing nozzle.
Patent documentation 1 discloses the sealant feedway, the sealing agent feeding device has the space sensor measured between distributing nozzle and the glass substrate at interval and drives nozzle and will remain the linear actuator of certain value at interval in the Z direction according to the measured signal of this space sensor, even glass substrate produces warpage, also can be at a high speed and with the continuous shape sealant.
Patent documentation 1: Japanese kokai publication hei 10-137655 communique
Summary of the invention
This kind sealing agent coating device, requirement is sealant at high speed, and requirement can apply the sealant of trace.But when high speed coating, device itself vibrates, even small vibration has taken place device, the interval between glass substrate and the distributing nozzle also will produce change.Therefore, the appearance coating attenuates and causes quality to reduce easily.In addition, when the trace coating of sealant, the aforesaid coating style of calligraphy characterized by hollow strokes appears easily also.
Even adopt the sealing agent coating device of above-mentioned patent documentation 1 that sealant is coated on the glass substrate,, also must carry out the acceleration and deceleration of XY worktable sharp in that the direction transformation towards the Y direction is the bight partly from directions X.In addition, acceleration and deceleration will be carried out too sharp in the bight from the Y direction towards the directions X conversion, produce big power by this influence, and device may produce vibration.
Specifically, be that the radius of curvature R in 100mm/s, bight is under the situation of 0.5mm during sealant for example in the translational speed of XY worktable, in the bight, the required acceleration of XY worktable is 2G.
Even X worktable high-speed mobile arrives between the 0.5mm behind the bight, must be a significant slowdown, turn round, stop then in the bight.On the other hand, the urgency of Y worktable and X worktable is slowed down and correspondingly to be advanced, and between the 0.5mm after the starting, turns round in the bight, must sharply quicken then, accelerate to 100mm/s and move.
In fact, simulate in XY worktable before the mode of texturing that produces when acceleration with 2G moves intermediate base with finite element method and observe.Its result as Figure 10 (A) (B) shown in.In Figure 10 (C), represent actual displacement numerical value respectively with hacures, icon kind.
The superiors are substrate platforms 1 that the mounting glass substrate is used among the figure, and this substrate platform 1 is being supported by top board 2.Below top board 2,, intermediate base 4 is being set by realizing several LM guide members 3 of line of motion.Substantial middle portion below intermediate base 4 is provided with the nut portions 5 that is threadedly engaged with the ball-screw of scheming not show.
After Figure 10 (A) expression substrate platform 1 turned the bight from the Y direction, intermediate base 4 is towards the deformation state of directions X (side in face of among the figure) when suddenly quickening, (U) represent the maximum displacement of direction up, (D) represent the maximum displacement of direction down, (M) maximum with the minimum middle displacement of expression.Therefore, to maximum displacement (U), its displacement increased through some stages from middle displacement (M), and to minimum displacement (D), its displacement reduced through several stages from middle displacement (M).
Along with quickening towards directions X is anxious, side corner sections a becomes maximum displacement (U) in face of the substrate platform 1, forwards to topmost by the intermediate base 4 of ball-screw displacement.On the other hand, the bight b of directions X opposition side becomes minimum displacement (D), is the most the next distortion.Figure 10 (B) is the figure that sees from the Y direction, so left corner a is maximum displacement (U) among the figure of substrate platform 1, bight, right side b is minimum displacement (D).
Shown in Figure 10 (A), intermediate base 4 is the long rectangles of growing crosswise of Y direction, the maximum distortion position of substrate platform 1 be provided in a side of among several LM guide members (being the LM nut among the figure) 6 below the intermediate base 4,2 LM guide members 6 of central authorities zone line part each other.
Produce inertial force at this zone line, this inertial force and intermediate base 4, top board 2, substrate platform 1, to be positioned in the gross mass of the whole parts (comprising intermediate base 4) on the intermediate base 4 along the drive source of the ball-screw of Y direction, ball-screw, several LM guide members 3 etc. corresponding.
Therefore, the deformation ratio two side areas of zone line big, result, substrate platform 1 itself distortion and tilting, be positioned on the substrate platform 1 above-mentioned glass substrate and and this glass substrate distributing nozzle in opposite directions between the interval produce change, thereby become the bad reason of sealant coating.
The present invention makes in view of the above problems, and the LCD panel manufacturing method that provides intermediate base, XY worktable, sealing agent coating device and use sealing agent applying device to boost productivity is provided.Intermediate base provided by the invention than acting on greatly prerequisite of other regional inertial force, suppresses the deflection of this presumptive area with the inertial force that acts on presumptive area, can improve reliability.XY worktable provided by the invention is used above-mentioned intermediate base as X worktable or Y worktable, can improve the quality.Sealing agent coating device provided by the invention has above-mentioned XY worktable, can carry out high speed coating and trace coating.
To achieve these goals, intermediate base of the present invention is the plate body of rectangle of growing crosswise, and has first ball-screw and several LM guide members; First ball-screw is located at following substantial middle portion, along being provided with the direction of length direction quadrature and from the both sides ora terminalis, is connecting driving mechanism in the end with stretching out; Several LM guide members are being provided with along direction of principal axis concurrently in the both sides of above-mentioned first ball-screw, realize the rectilinearity of motion; Have at least one the 3rd LM guide member and several holes portion; When the position that 2 the one LM guide members of central portion among a LM guide member is being provided with each other first ball-screw as regional A, the position, both sides of this zone A during as area B, the 3rd LM guide member is located at the position of approaching above-mentioned first ball-screw among the above-mentioned zone A; Several holes portion alongst is located at the thickness of slab direction in the area B, parallel mutually with the direction of length quadrature.
To achieve these goals, XY worktable of the present invention as XY worktable, has intermediate base on the base station that supports by first ball-screw and a LM guide member, alongst be positioned on the intermediate base and the end be connected driving mechanism second ball-screw, support and as the top board of Y/X worktable along parallel several the 2nd LM guide members that are being provided with of the direction of principal axis of second ball-screw with by second ball-screw and the 2nd LM guide member.
To achieve these goals, sealing agent coating device of the present invention has XY worktable, distributing nozzle and sealant supply unit; Above-mentioned XY worktable has the top board of mounting glass substrate; Above-mentioned distributing nozzle, its front end ejiction opening is towards the glass substrate that is positioned on the above-mentioned XY worktable; Above-mentioned sealant supply unit supplies to this distributing nozzle with sealant, from the front end ejiction opening sealant is coated on the substrate.
To achieve these goals, the manufacture method of liquid crystal panel of the present invention adopts sealing agent coating device, and distributing nozzle and XY worktable are relatively moved at directions X and Y direction along the face of glass substrate, sealant is coated on the glass substrate, makes liquid crystal panel.
According to the present invention, the deflection that suppresses presumptive area can be provided and the intermediate base that improves reliability, the XY worktable that this intermediate base is improved the quality as the X/Y worktable, have this XY worktable and can realize the sealing agent coating device of high speed coating and trace coating and use sealing agent applying device and the LCD panel manufacturing method of boosting productivity.
Description of drawings
Fig. 1 is the approximate three-dimensional map of the sealing agent coating device of use in one embodiment of the present invention, in the liquid crystal panel manufacturing.
Fig. 2 is in the above-mentioned embodiment, the figure of explanation sealant working procedure of coating.
Fig. 3 is in the above-mentioned embodiment, the stereographic map of XY worktable.
Fig. 4 is the stereographic map that the XY worktable in the above-mentioned embodiment, from Fig. 3 is unloaded the infrabasal plate platform.
Fig. 5 is the stereographic map that the XY worktable in the above-mentioned embodiment, from Fig. 4 is unloaded lower roof plate.
Fig. 6 is the stereographic map that the XY worktable in the above-mentioned embodiment, from Fig. 5 unloads intermediate base.
Fig. 7 is the stereographic map of the intermediate base in the above-mentioned embodiment.
Fig. 8 is the stereographic map of the XY worktable in the modified example.
Fig. 9 is in the embodiment of the present invention, adopt the deformation pattern of XY worktable of finite element method simulation and the key diagram of addendum modification.
Figure 10 is the deformation pattern of XY worktable before, that adopt the finite element method simulation and the key diagram of addendum modification.
Embodiment
Below, with reference to the description of drawings embodiments of the present invention.
Fig. 1 is the approximate three-dimensional map of sealing agent coating device 10.To be explanation be coated to stereographic map on the glass substrate 11, the middle operation of liquid crystal panel in making with sealant to Fig. 2.
As shown in Figure 1, the sealing agent coating device 10 that adopts during liquid crystal panel is made includes base station 12, is positioned in XY worktable 20 on this base station 12, is located at Z worktable 14 on the above-mentioned base station 12, is installed in distributing nozzle 15 on this Z worktable 14, sealant supplied with the sealant supply unit 16 of this distributing nozzle 15 by pillar 13.
On the substrate platform 21 that constitutes above-mentioned XY worktable 20, mounting glass substrate 11.Drive Z worktable 14, distributing nozzle 15 is descended, the interval between its front end supply port 15a and the glass substrate 11 is remained preliminary dimension.
Then, as shown in Figure 2, XY worktable 20 and distributing nozzle 15 are relatively moved, simultaneously at directions X and Y direction along the face of glass substrate 11, supply with sealants from sealant supply unit 16 to distributing nozzle 15, be coated on the glass substrate 11 from the front end ejiction opening 15a of distributing nozzle 15.
Another glass substrate is fitted on the glass substrate 11 that has applied sealant, and then, the uncoated part from sealant supplies to glass substrate 11 to liquid crystal material each other.Pass through other each operation again, manufacture liquid crystal panel.
Fig. 3 is the stereographic map of above-mentioned XY worktable 20.Fig. 4 is the stereographic map that the state from Fig. 3 has unloaded the XY worktable 20 behind the substrate platform 21.Fig. 5 is the stereographic map that the state from Fig. 4 has unloaded the XY worktable 20 behind the top board 22.Fig. 6 is the stereographic map that the state from Fig. 5 has unloaded the XY worktable 20 behind the intermediate base 23.
Among the figure, the 25th, have the rectangle base station of predetermined thickness of slab, the same length of the length of its directions X and Y direction.In the Y of this base station 25 direction both side ends, laying a LM guide member 26 along the directions X total length.In addition, be benchmark with the Y direction central portion of base station 25, in the position of distance Y direction both sides predetermined space, also laying a LM guide member 26.Therefore, on base station 25, be provided with 4 the one LM guide members 26 altogether.
As shown in Figure 6, length direction (directions X) the substantial middle portion at whole LM guide members 26 is provided with LM nut 26a.Among the above-mentioned LM guide member 26, between 2 the one LM guide members 26 of central authorities and at central portion, be provided with first ball-screw 27 along the directions X total length of base station 25.One end of this first ball-screw 27 is being supported by bearing portion 28, is connecting CD-ROM drive motor (driving mechanism) 29 in the other end.
Axial substantial middle portion at above-mentioned first ball-screw 27 is provided with nut portions 27a.The position of this nut portions 27a and constitute the position of the LM nut 26a of a LM guide member 26 is in the substantial middle portion of the directions X of base station 25.
At a sidepiece of above-mentioned first ball-screw 27, be provided with the 3rd LM guide member 30 that walks abreast with first ball-screw 27.Across first ball-screw 27 and sidepieces the 3rd LM guide member 30 opposition sides, be provided with parallel linear scale 32.Constitute the position of the LM nut 30a of the 3rd LM guide member 30, align at same position with the LM nut 26a of a LM guide member 26.
On the nut portions 27a of the LM nut 26a, the 30a that constitute above-mentioned the first, the 3rd LM guide member 26,30 and first ball-screw 27, as shown in Figure 5, mounting intermediate base 23.The Y direction same length of the Y direction length of this intermediate base 23 and base station 25, its directions X length is to go up required minimum length for the LM nut 26a, the 30a that intermediate base 23 are installed in each the first, the 3rd LM guide member and the nut portions 27a of first ball-screw.
In other words, intermediate base 23 is the rectangular slabs of growing crosswise that the Y direction is long, directions X is short, is supported on the base station 25 by a LM guide member 26, the 3rd LM guide member 30 and first ball-screw 27.The first, the 3rd LM guide member 26,30 and first ball-screw 27 all stretch out from the directions X both side edges of middle pedestal 23.
Drive first ball-screw 27 by rotation, the sense of rotation of the intermediate base 23 and first ball-screw 27 correspondingly moves along the directions X advance and retreat.At this moment, a LM guide member 26 and the 3rd LM guide member 30 are realized the line of motion of intermediate base 23.
Above-mentioned linear scale 32 has the function of the directions X addendum modification of instrumentation intermediate base 23.Linear scale 32 is located at as far as possible near the position of first ball-screw 27, can highly keeps the instrumentation precision of pedestals 23 in the middle of 32 pairs of the linear scales thus.
Directions X both sides on above-mentioned intermediate base 23, along Y direction total length, the 2nd LM guide member 33 is installed.Therefore, above-mentioned the 2nd LM guide member 33 has 2.
The substantial middle portion of the directions X on intermediate base 23, along Y direction total length, second ball-screw 35 is installed.End at this second ball-screw 35 is provided with bearing portion 36, is connecting CD-ROM drive motor (driving mechanism) 37 in the other end.In addition, also be provided with the linear scale (figure does not show) that walks abreast with above-mentioned second ball-screw 35.This linear scale also has the function of the Y direction addendum modification of instrumentation top board 22.
In Fig. 5, represented to constitute the nut portions 35a of second ball-screw 35, but the LM nut of not shown the 2nd LM guide member 33.As shown in Figure 4, top board 22 is installed along these nut portions 35a and LM nut.
Therefore, by driven in rotation second ball-screw 35, the sense of rotation of the top board 22 and second ball-screw 35 correspondingly moves along Y direction advance and retreat, and at this moment, the 2nd LM guide member 33 is realized the rectilinear motion of intermediate base 23.
On above-mentioned intermediate base 23, be provided with and alleviate the hole portion 38 that local weight is used, will be explained below about this point.
As shown in Figure 3, mounting substrate platform 21 on above-mentioned top board 22, has constituted XY worktable 20 by them.If driven in rotation first ball-screw 27, then intermediate base 23 is with the 2nd LM guide member 33 and second ball-screw 35, in mounting under the state of top board 22 and substrate platform 21 and moves displacement at directions X.In addition, if driven in rotation second ball-screw 35, then top board 22 and substrate platform 21 move displacement in the Y direction.
For the intermediate base 23 of this XY worktable 20, the position first ball-screw 27 is being set between 2 the one LM guide members 26 of the central portion among the LM guide member 26 is called regional A.The position of A both sides, this zone is called area B.
The position near first ball-screw 27 in above-mentioned zone A is provided with the 3rd LM guide member 30 that walks abreast with first ball-screw 27.Be adjacent to be provided with above-mentioned linear scale 32 with first ball-screw 27 among the regional A.This linear scale 32 is across first ball-screw 27, along the sidepiece setting of the opposition side of the 3rd LM guide member 30.
Owing to first ball-screw 27 is installed at regional A, so, intermediate base 23, the 2nd LM guide member 33, second ball-screw 35, CD-ROM drive motor 37, top board 22, substrate platform 21 etc. are positioned at the gross mass of the whole parts (comprising intermediate base 23) on the intermediate base 23, as the inertial force effect.And in area B, the gross mass of top board 22 and substrate platform 21 is as the inertial force effect.
Because the part gross mass in the part total mass ratio area B among the regional A is much bigger, so the inertial force that acts on the regional A is more much bigger than the inertial force that acts on the area B.
As shown in Figure 7, be provided with above-mentioned hole portion 38 in the part of the area B of intermediate base 23, the hole portion here is circular hole (both sides is Long Circles).These circular holes 38 are located at the thickness of slab direction of the area B of intermediate base 23, are the setting of Y direction along the length direction of intermediate base 23, are that directions X is parallel mutually in the direction with the length direction quadrature.
Thus, the regional A of intermediate base 23 is the solid shapes that do not carry out any processing, and the area B of the both sides of intermediate base 23 is provided with several circular holes 38, so, can alleviate the weight of intermediate base 23.
That is, as Figure 10 (A) (B) as described in (C), in the XY worktable of structure before, the inertial force the when quality of movable part becomes worktable and drives is the power that makes XY worktable local deformation.But merely the weight reduction meeting causes rigidity to reduce, so, must do one's utmost to suppress weight reduction under the prerequisite that rigidity reduces.
The basic imagination of weight reduction is the plate body sectional area to be reduced by half cross sectional moment of inertia more at this moment.
1. with the width dimensions be b, thickness of slab be of a size of h, sectional area S=bh plate body as benchmark, the cross sectional moment of inertia of this plate body is I=bh
3/ 12.
2. width dimensions b cross sectional moment of inertia constant, when thickness of slab is reduced by half (h/2) is Ia=bh
3/ 96=(1/8) I, cross sectional moment of inertia are original 1/8, so, constant, the thickness thinning of width dimensions, very unfavorable for rigidity.
3. thickness of slab is of a size of h, adopts the plate body of cutting apart, and each width dimensions of cutting apart plate body is b
B, total width dimensions is half of plate body width dimensions in the such scheme 1, with very thin plate these plates of cutting apart is combined, its cross sectional moment of inertia is Ib=bh
3/ 24=(1/2) I, cross sectional moment of inertia are original 1/2.
4. width dimensions is that b is constant, adopts 2 thicknesss of slab to be of a size of the plate body as thin as a wafer of h/4, combines them with very thin plate, and its cross sectional moment of inertia is Ic=7bh
3/ 96=(1/1.14) I, cross sectional moment of inertia only is original 0.875 times, reduce by half with sectional area (being equivalent to quality reduces) compared, and can keep rigidity.
But, in scheme 4, must be that the plate body of b interconnects, constitutes XY worktable 20 with width dimensions with very thin plate, this is unpractical.For this reason, proposed scheme 5 on the basis of scheme 4, in this scheme 5, the width dimensions of plate is b, and thickness of slab is of a size of h, the circular hole that to be provided with n diameter on plate body be d.
5. be 3/4 o'clock of thickness of slab size h at Circularhole diameter d, cross sectional moment of inertia ID=(1/12-9/512) bh
3=(1/1.27) I=0.789I, cross sectional moment of inertia are original 1/1.27 (0.789) times, have dwindled sectional area, have guaranteed rigidity.
Dispose circular hole thick and fast, make it to become cellular, be appreciated that the validity of scheme 5.In addition, in the making of part, the use depth drill can deep hole processing.Owing to be circular hole, so can lower the possibility that stress is concentrated, like this, the weight for the area B that alleviates above-mentioned intermediate base 23 is provided with circular hole as hole portion 38.
The hole portion 38 of both sides is Long Circles, this be for make the plate body sectional area that is provided with after the portion of hole for be provided with plate body sectional area before the portion of hole 1/2, be processed into the part of 2 circular holes is overlapped.Therefore, by sectional area or the Circularhole diameter that resets plate body, making sectional area is 1/2, can be provided with and the above-mentioned corresponding circular hole of cross sectional moment of inertia numerical value.
For another example Figure 10 (A) (B) shown in, drive first ball-screw, make comprise intermediate base 4 at interior top board 2 and substrate platform 1 under the state that directions X sharply quickens, cause top board 2 directions X in face of up displacement of side corner sections a, opposition side bight b down the part of the generation moderate finite deformation of displacement be zone between 2 LM guide members 6 of central authorities.
For this reason, in embodiments of the present invention, the sidepiece of first ball-screw 27 in access areas A is as far as possible set up the 3rd LM guide member 30 along this sidepiece.The effect of 30 pairs first ball-screws 27 of the 3rd LM guide member is without any interference, and is located at the central portion of regional A as much as possible.
In the sealing agent coating device 10 of the XY worktable 20 that has such formation, owing to set up the 3rd new LM guide member 30 at regional A with respect to intermediate base 23, so the distortion among the energy inhibition zone A.In addition, owing to be provided with several circular holes 38 in area B, so, can alleviate the weight of area B, reduce to act on the inertial force of area B, what make cross sectional moment of inertia reduces to remain Min., distortion that can inhibition zone A.
In addition, because big to the inertial force of regional A effect, so, at regional A the hole portion that weight reduction is used is not set.To top board 22 also with intermediate base 23 similarly, hole portion is set with weight reduction.
As mentioned above, the inertial force of the weight that alleviates intermediate base 23 and top board 22 when reducing acceleration and deceleration, and set up the 3rd LM guide member 30 at the position of the easy deformation of intermediate base 23, like this, can improve rigidity, the distortion of the XY worktable 20 when reducing the bight coating and the inclination of substrate platform 21.
Fig. 9 (A) (B) represents the deformation pattern of the XY worktable 20 obtained with finite element method simulation.As we know from the figure, the addendum modification of regional A and area B about equally, shown in Fig. 9 (C), the absolute value of addendum modification be before among Figure 10 (C) roughly half, be the design that can realize balance.
Therefore, in the manufacture method of liquid crystal panel, in the operation that sealant is coated on the glass substrate 11, can realize that more high speed, more micro-sealant apply.
In the above-described embodiment, along the sidepiece of first ball-screw 27 linear scale 32 is set, but is not limited thereto, when not needing linear scale 32, the 3rd LM guide member 30 can be set in the position of linear scale 32.
Therefore, when being provided with linear scale 32, intermediate base 23 is being supported by 5 LM guide members 26,30, if replace linear scale 32 with the 3rd LM guide member 30, then intermediate base 23 is supported by 6 LM guide members 26,30.
Perhaps, also can between a LM guide member 26 of linear scale 32 and central portion, the 3rd LM guide member 30 be set as shown in Figure 8.As previously mentioned, when being provided with linear scale 32, be located at as far as possible position, like this, can improve the instrumentation precision of pedestals 23 in the middle of 32 pairs of the linear scales near first ball-screw 27.
The present invention is not limited to above-mentioned embodiment, the implementation phase, in the scope that does not break away from main idea of the present invention, can make distortion, specialize inscape.Also the some inscapes that disclose in the above-mentioned embodiment can be carried out suitable combination and form various inventions.
Claims (8)
1. intermediate base is the plate body of rectangle of growing crosswise, it is characterized in that,
Have first ball-screw and several LM guide members; First ball-screw is substantial middle portion below, along being provided with the direction of length direction quadrature and from the both sides ora terminalis, is connecting driving mechanism in the end with stretching out; Several LM guide members are being provided with along its direction of principal axis concurrently in the both sides of above-mentioned first ball-screw, realize the rectilinearity of motion;
Have at least one the 3rd LM guide member and several holes portion; When the position that two the one LM guide members of central portion in an above-mentioned LM guide member is being provided with each other above-mentioned first ball-screw as regional A, the position, both sides of this zone A during as area B, above-mentioned the 3rd LM guide member is located at the position of approaching above-mentioned first ball-screw among the above-mentioned zone A, realizes line of motion; Above-mentioned several holes portion alongst is located at the thickness of slab direction among the above-mentioned zone B, parallel mutually with the direction of length direction quadrature.
2. intermediate base as claimed in claim 1 is characterized in that, is adjacent to be provided with linear scale with above-mentioned first ball-screw among the above-mentioned zone A.
3. intermediate base as claimed in claim 2 is characterized in that, is adjacent to dispose above-mentioned linear scale with a sidepiece of above-mentioned first ball-screw, is adjacent to dispose above-mentioned the 3rd LM guide member with the other side of first ball-screw.
4. as claim 2 or 3 described intermediate bases, it is characterized in that, across above-mentioned linear scale, at the 3rd other LM guide member of this sidepiece configuration.
5. intermediate base as claimed in claim 1 is characterized in that, above-mentioned hole portion is a circular hole.
6. an XY worktable is characterized in that, has base station, intermediate base, second ball-screw, several the 2nd LM guide member and top boards;
Above-mentioned intermediate base is to be supported on X worktable or Y worktable on the above-mentioned base station by above-mentioned first ball-screw of each record in the claim 1 to 5 and a LM guide member;
Above-mentioned second ball-screw is positioned on this intermediate base along the length direction of intermediate base, and its end is connecting driving mechanism;
Above-mentioned several the 2nd LM guide members are provided with concurrently along the direction of principal axis of above-mentioned second ball-screw, realize line of motion;
Above-mentioned top board is Y worktable or the X worktable that is being supported by above-mentioned second ball-screw and the 2nd LM guide member.
7. a sealing agent coating device is used for sealant is coated in substrate, it is characterized in that, has above-mentioned XY worktable, distributing nozzle and the sealant supply unit of claim 6 record; Above-mentioned XY worktable has the top board of mounting aforesaid substrate; Above-mentioned distributing nozzle, its front end ejiction opening be positioned on the above-mentioned XY worktable substrate in opposite directions; Above-mentioned sealant supply unit supplies to above-mentioned distributing nozzle with sealant, from the front end ejiction opening sealant is coated on the substrate.
8. the manufacture method of a liquid crystal panel, it is characterized in that the above-mentioned sealing agent coating device with claim 7 record makes above-mentioned distributing nozzle and above-mentioned XY worktable relatively move at directions X and Y direction along the face of glass substrate, sealant is coated on the glass substrate, makes liquid crystal panel.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006150529A JP5127162B2 (en) | 2006-05-30 | 2006-05-30 | Intermediate base, XY table, sealing agent coating apparatus, and liquid crystal panel manufacturing method |
| JP2006150529 | 2006-05-30 |
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| Publication Number | Publication Date |
|---|---|
| CN101082742A true CN101082742A (en) | 2007-12-05 |
| CN100523961C CN100523961C (en) | 2009-08-05 |
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| CNB2007101081735A Active CN100523961C (en) | 2006-05-30 | 2007-05-30 | Middle basement, xy work bench, sealing agent coating device and manufacturing method for liquid crystal panel |
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| CN (1) | CN100523961C (en) |
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| CN101887193B (en) * | 2009-05-14 | 2012-05-09 | 株式会社日立工业设备技术 | Paste applying device and applying method |
| TWI414902B (en) * | 2009-02-16 | 2013-11-11 | Hitachi High Tech Corp | Liquid crystal exposure device |
| CN106002329A (en) * | 2016-06-07 | 2016-10-12 | 王启先 | Simple floating type workbench mechanism |
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| CN107717599A (en) * | 2017-11-13 | 2018-02-23 | 佛山市恒爱网络科技有限公司 | Efficient multiposition adjusting apparatus |
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| JPH03131442A (en) * | 1989-10-12 | 1991-06-05 | Nippon Tungsten Co Ltd | X-y stage |
| JPH0527407U (en) * | 1991-09-25 | 1993-04-09 | 日本精工株式会社 | Ball screw integrated linear motion guide unit |
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| JP4334895B2 (en) * | 2003-03-24 | 2009-09-30 | オリンパス株式会社 | Large substrate stage |
| JP2005352069A (en) * | 2004-06-09 | 2005-12-22 | Nsk Ltd | Aligner |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN100523961C (en) | 2009-08-05 |
| JP5127162B2 (en) | 2013-01-23 |
| JP2007319952A (en) | 2007-12-13 |
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