JP2009186450A - Positioning automatic stage with closely integrated built-in ball screw and linear scale - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve the accuracy by closely integrating a ball screw with a linear scale to be a load resistant structure and to move a moving object in a sub-micron order. <P>SOLUTION: In a positioning automatic stage operated by a motor cable and a scale cable through a controller connected to a personal computer, a stepping motor is arranged at either end of a positioning automatic stage body, the upper surface where a drive part is arranged is slimmed to 25-48 mm, the ball screw is closely integrated not to closely contact the upper part of the linear scale keeping some space to make a load resistant stage structure, assembled type cloth roller guides are provided to both sides of the positioning automatic stage, a feedback control is performed with the linear scale, and the ball screw and the linear scale are closely integrated and built in. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to an automatic positioning stage which has a load-bearing stage structure by integrating a ball screw and a linear scale close to each other to improve accuracy and move a moving object in a submicron order. is there.

  Many automatic stages that use a ball screw and a linear scale have a gap between the ball screw and the linear scale. As a result, the assembly is complicated, large, and enlarged. Has introduced ultra-compact optical components and materials such as heat resistance and load resistance that take into account the coefficient of thermal expansion. Already, aluminum has been replaced by titanium, glass, ceramics, etc. The development of technology for streamlining and slimming is now expected.

  As for accuracy, products with a stroke of 10 to 500 mm from micron to submicron have appeared, but there are many things that are not responsible for maintaining accuracy, such as those that have become inaccurate in a few months. It came to be able to.

  The automatic stage with a built-in ball screw and linear scale is complex, large, and enlarged, but in fields such as positioning devices, ultra-compact optical components, heat-resistant materials that take thermal expansion into account, Materials such as load-bearing capacity have appeared, and technical developments for simplification, downsizing, and slimming of structures have been expected for automatic positioning stages.

  For this purpose, a self-positioning stage that incorporates a ball screw and linear scale close together and integrated makes it easy to assemble, downsizing, and slimming, while also creating a load-bearing stage while maintaining high accuracy over a long period of time. Will be.

  As means for solving the problems of the present invention, it will be described in detail with reference to the drawings. FIG. 1 is a system layout diagram of an automatic stage in which a ball screw and a linear scale according to the present invention are integrated in close proximity. Fig. 4 is a schematic view of a positioning automatic stage in which the ball screw and the linear scale of the present invention are integrated close to each other, and Fig. 3 is a positioning automatic stage with a scale incorporated in a guided mechanism (load block). FIG. 5 is a side view of a positioning automatic stage body with a scale, and FIG. 5 is a schematic view of the positioning automatic stage to which cross roller guides incorporated on both sides of the positioning automatic stage are attached.

  The system of the present invention will be described with reference to FIG. 1. FIG. 1 is a system layout diagram of an automatic positioning stage in which a ball screw and a linear scale are integrated in close proximity, and the ball screw 7 and linear scale 8 are integrated in close proximity. As the system arrangement of the positioning automatic stage 5, the automatic stage 5 is operated by the motor cable 3 and the scale cable 4 via the controller 2 connected to the personal computer 1.

  The contents of the positioning automatic stage 5 according to the present invention will be described with reference to FIG. 2. The stepping motor 6 is disposed at one end of the positioning automatic stage 5 main body, and the upper surface 10 on which the drive unit 9 is disposed is 25 to 48 mm. The ball screw 7 is integrated close to the upper part of the linear scale 8 to form a load-bearing stage structure.

  Further, as clearly shown in FIG. 5, built-in cross roller guides 13 are provided on both sides of the positioning automatic stage 5, feedback control is performed by the linear scale 8, and the ball screw 7 and the linear scale 8 are closely integrated. The positioning automatic stage 5 is built in.

  A stepping motor is disposed at one end of the positioning automatic stage 5 main body. This is because the worker has a right-handed or left-handed one, and therefore one end of either of the positioning automatic stage 5 main body according to the worker. A stepping motor is arranged in the front, which is used as a drive system.

  In addition, as clearly shown in the scaled positioning automatic stage incorporated in the guided mechanism of FIG. 3, the scaled positioning automatic stage 12 is incorporated in the guided mechanism (load block) 11 corresponding to an object having a large load resistance. This is a positioning automatic stage 12 with a scale in which a ball screw 7 and a linear scale 8 characterized by the above are integrated in close proximity.

  Furthermore, before the ball screw 7 is incorporated in the positioning automatic stage 5 in order to prevent the grease having a lubricating action from adhering to the linear scale 8 and solidifying in the close integration of the ball screw 7 and the linear scale 8, The ball screw 7 and the linear scale 8 are characterized in that the ball screw 7 body is preheated within a range of 50 to 100 ° C., and tetrafluoroethylene resin is thermally sprayed onto the surface of the ball screw 7 body, coated and welded. This is an automatic positioning stage 5 that is integrated in close proximity.

  As a material for the automatic positioning stage 5, aluminum is usually used, but stainless steel is used to maintain accuracy.

  By integrating the ball screw 7 and the linear scale 8 close together, the automatic positioning stage 5 can be made compact and compact, and the accuracy can be improved over the long term, and it can be completed as a load-bearing stage and moved. It is now possible to move objects in submicron order.

  Further, since the stepping motor 6 is disposed at one end of the main body of the positioning automatic stage 5, there is an advantage that it can be utilized for both right-handed and left-handed depending on the use mode of the apparatus.

  In addition, by integrating the ball screw 7 and the linear scale 8 in close proximity, not only can the weight be reduced, but it is also possible to cope with a large load resistance in consideration of environmental conditions and load conditions. It was.

  Further, when the ball screw 7 and the linear scale 8 are closely integrated, the surface of the ball screw 7 is coated with a tetrafluoroethylene resin, thereby providing a lubricating action by utilizing the water repellent effect of the tetrafluoroethylene resin. The effect was that the grease that was held would not adhere to the linear scale 8, and the improvement in heat resistance also led to an improvement in accuracy.

  In a positioning automatic stage 5 operated by a motor cable 3 and a scale cable 4 via a controller 2 connected to a personal computer 1 that is used by a user, a stepping motor 6 is disposed at one end of the positioning automatic stage 5 main body. The upper surface 10 on which the drive unit 9 is disposed is slimmed to 25 to 48 mm, and the ball screw 7 is closely integrated with the upper part of the linear scale 8 to form a load-bearing stage structure. The cross roller guide 13 is provided, feedback control is performed by the linear scale 8, and the ball screw 7 and the linear scale 8 are integrated in close proximity to form an automatic stage 5 built-in.

  Further, when the ball screw 7 and the linear scale 8 are closely integrated, the surface of the ball screw 7 is coated with ethylene tetrafluoride resin. Before the ball screw 7 is incorporated in the positioning automatic stage 5, the ball screw 7 body is mounted. By preheating within the range of 50 to 100 ° C., and heat spraying the tetrafluoroethylene resin onto the body of the ball screw 7 and coating it, the grease that had a lubricating action did not adhere to the scale.

  In the close integration of the ball screw 7 and the linear scale 8, the ball screw 7 and the linear scale 8 are integrated without maintaining a slight gap therebetween.

  With respect to the movement amount (stroke) of the automatic stage, a stroke of 20 mm to 150 mm is possible, and the Z axis can be handled by a bracket.

  In addition, the load-bearing stage can be 20 mm to 150 mm.

  The lower mounting is determined in consideration of the pitch and screw dimensions because the adapter must be mounted on the lower base or the like.

  System layout of automatic positioning stage with built-in ball screw and linear scale   Schematic diagram of an automatic positioning stage incorporating the ball screw and linear scale of the present invention in close proximity and integration   Scaled positioning automatic stage to be incorporated into a guided mechanism   Automatic stage body side with scale   Schematic diagram of an automatic positioning stage with a cross roller guide installed on either side of the automatic positioning stage

Explanation of symbols

In the figure 1. Personal computer Controller 3. Motor cable Scale cable 5. Automatic positioning stage Stepping motor Ball screw 8. 8. Linear scale Drive unit 10. Top surface 11. Guided mechanism (load block)
12 Automatic positioning stage with scale 13. Cross roller guide

Claims (3)

  In a positioning automatic stage operated by a motor cable and a scale cable via a controller connected to a personal computer, a stepping motor is disposed at one end of the positioning automatic stage main body, and an upper surface on which a driving unit is disposed Slimmed to 48mm, the ball screw is integrated close to the upper part of the linear scale so that it does not stick with a slight gap, making it a load-bearing stage structure. Built-in cross rollers on both sides of the positioning automatic stage An automatic positioning stage with a guide, feedback control on a linear scale, and a ball screw and linear scale integrated in close proximity.   Automatic positioning stage with built-in ball screw and linear scale, which is built into a guided mechanism (load block) corresponding to a load-bearing object.   When integrating the ball screw and linear scale in the vicinity, before the ball screw is incorporated into the positioning automatic stage, the ball screw body is preheated within a range of 50 to 100 ° C and ethylene tetrafluoride resin is sprayed onto the surface of the ball screw body. A self-positioning automatic stage that incorporates a ball screw and linear scale that are characterized by being coated and integrated in close proximity.

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