CN101887193B

CN101887193B - Paste applying device and applying method

Info

Publication number: CN101887193B
Application number: CN201010126198XA
Authority: CN
Inventors: 前原信二; 神尾正信; 内村满幸
Original assignee: Hitachi Plant Technologies Ltd
Current assignee: Hitachi Ltd
Priority date: 2009-05-14
Filing date: 2010-02-24
Publication date: 2012-05-09
Anticipated expiration: 2030-02-24
Also published as: JP2010266685A; TWI455763B; CN101887193A; JP5525182B2; KR101159947B1; TW201043342A; KR20100123591A

Abstract

The invention provides a paste applying device and applying method, capable of realizing the small-size and light weight of the substrate holding mechanism relative to the large-scale of the substrate and capable of realizing the light weight of the integral device containing a support stand. A plurality of substrate loading members (32a-32e) are configured with equal interval at the X shaft direction on the substrate holding mechanism (8) located on the support stand (1) and loading the substrate, the plurality of substrate loading members are constituted by loading flat adsorption plates (34a-34e) through u shaped members (33a-33e), a plurality of connecting elements (35a-35d) orthogonal and configured with equal interval with these substrate loading members are connected to the undersurface sides of the substrate loading members (32a-32e), a well shaped frame shape station is constituted by these substrate loading members (32a-32e) and the connecting elements (35a-35d). Adsorption holes are arranged on the top faces of the adsorption plates (34a-34e) to constitute a loading surface of the substrate. The substrate holding mechanism (8) rotates in the theta shaft direction by a plurality of intersected roller bearings (36, 36 a), and moves in the X shaft direction and Y shaft direction by the orthogonal bearings (37).

Description

Paste applying device and applying method

Technical field

The present invention relates in the flat panel manufacture process, to be used for the paste applying device and the applying method of on the substrate pasting or the liquid crystal that drips.

Background technology

Substrate holding mechanism as in the past paste applying device; Proposition has the substrate holding mechanism of such formation; This substrate holding mechanism is provided with the X pillow block on the supporting station of this device, on this X pillow block, be provided with the Y pillow block that can move in X-direction, on this Y pillow block, is provided with and can moves and can rotate the θ pillow block of (promptly moving at the θ direction of principal axis) in Y direction; In addition, on this θ pillow block, be provided with the absorptive table (for example with reference to patent documentation 1) of absorption fixing base.

In the technology that is recorded in this patent documentation 1; The substrate that is adsorbed on absorptive table is by X, Y pillow block, θ pillow block adjustment position, posture; Each limit that makes this substrate and X, the Y axle is parallel and become the position relation of regulation with respect to the nozzle of the coating head of discharging slurry; Slurry etc. is discharged to the position of the regulation on the substrate, and these X, Y pillow block, θ pillow block are by servo motor driven, and this servo motor is controlled by control device.

In addition, also propose to have the paste applying device of such structure, this paste applying device is provided with the coating head; Has portal (gantry); With respect to substrate portal is moved, the coating head is moved, thereby make this coating head move (for example with reference to patent documentation 2) with respect to substrate.

The technology of these patent documentation 2 records; More particularly; 2 portals that can move in X-direction are set on the supporting station of device, and at the coating head that these each portal being provided with can be moved in the crossbeam upper edge of these portals Y direction, these portals are driven in X-direction; Apply head and be activated, thereby can make the nozzle that applies head move to the optional position on the substrate in Y direction.Here, X-direction is activated portal self in the supporting station upper edge by linear motor, applies head and is also moved along portal by linear motor.Substrate is adsorbed and remains on the θ pillow block of being located on the supporting station, rotate through this θ pillow block, to substrate towards adjusting.This θ pillow block is made up of the parts that usually derby processing obtained, and is provided with the device that substrate is adsorbed.

[patent documentation 1] japanese kokai publication hei 7-275770 communique

No. 3701882 communique of [patent documentation 2] Jap.P.

Summary of the invention

In the field of LCD flat panels such as (liquid crystal indicators); The maximization of size that is used to form the glass substrate of this panel develops rapidly, and thereupon, the paste applying device that is used to make this flat panel also maximizes; Above-mentioned that kind to derby processing and the structure of making, oversize as the platform of the substrate holding mechanism that carries glass substrate; Quality increases, and needs a lot of times for it is driven, and the supporting station that supports this device also maximizes, weightization.

The objective of the invention is to eliminate this problem, provide a kind of can with respect to the maximization of substrate realize substrate holding mechanism lightweight, can realize comprising the whole light-weighted paste applying device and the applying method of device of supporting station.

When work, can when implementing dustproof countermeasure, not reduce paste applying device and the applying method that applies precision, reduces to be provided with the space even another object of the present invention is to provide a kind of yet.

In order to achieve the above object; Paste applying device of the present invention is provided with portal on supporting station; This portal can be provided with one or more movably and apply head, this coatings head have filling slurry the slurry receiving cartridge and from the nozzle outlet of slurry receiving cartridge discharge slurry, mounted board on the substrate-placing platform that is arranged on the supporting station; Portal moves with respect to this substrate, from nozzle outlet slurry is discharged on substrate; Wherein: substrate-placing platform is to be provided with a plurality of the 1st members and a plurality of the 2nd member quadrature ground combination of a plurality of adsorption holes and the platform that constitutes the structure of well shape frame shape; Has XY θ axle travel mechanism; This XY θ axle travel mechanism is used to make substrate-placing platform to move and rotates, and adjusts carrying position, the posture of putting the substrate on substrate-placing platform.

Paste applying device of the present invention is provided with portal on supporting station; This portal can be provided with one or more movably and apply head; This coating head have filling slurry the slurry receiving cartridge and discharge the nozzle outlet of slurry from the slurry receiving cartridge; Mounted board on the substrate-placing platform that is arranged on the supporting station, portal moves with respect to this substrate, from nozzle outlet slurry is discharged on substrate; Wherein: the θ axle travel mechanism location, that constitute by crossed roller bearing that is provided for the axial sense of rotation of θ at the center of substrate-placing platform; Substrate-placing platform is a plurality of the 1st members and a plurality of the 2nd member quadrature ground combination and constitute the platform of the structure of well shape frame shape; XY θ axle travel mechanism is set in the position of the 1st, the 2nd member quadrature, and this XY θ axle travel mechanism is made up of the quadrature bearing of the location of the X that is used for substrate-placing platform, Y direction and the crossed roller bearing that is used for the sense of rotation location of θ direction.

In paste applying device of the present invention, can be in the outside of substrate-placing platform with portal be arranged at the part supporting station side, that the mechanism that portal is moved is supported and separate.

In paste applying device of the present invention, have to make and carry the substrate-placing platform put substrate and move to the device in the outside that can apply the scope of a coating coating slurry by one or more that be located at portal.

In order to achieve the above object; Applying method of the present invention is provided with portal on supporting station; This portal can be provided with one or more movably and apply head, this coatings head have filling slurry the slurry receiving cartridge and from the nozzle outlet of slurry receiving cartridge discharge slurry, mounted board on the substrate-placing platform that is arranged on the supporting station; Portal moves with respect to this substrate, from nozzle outlet slurry is discharged on substrate; Wherein: substrate-placing platform is a plurality of the 1st members and a plurality of the 2nd member quadrature ground combination and constitute the platform of the structure of well shape frame shape; Be provided for the θ axle travel mechanism location, that constitute by crossed roller bearing of the axial sense of rotation of θ at the central part of substrate-placing platform; Simultaneously; Position beyond the central part of substrate-placing platform has the XY θ axle travel mechanism that is made up of quadrature bearing and crossed roller bearing; By the quadrature bearing of the position of being located at the 1st, the 2nd member quadrature with substrate-placing platform in X, Y direction location, substrate-placing platform is positioned in the axial sense of rotation of θ by the crossed roller bearing of the position of being located at the 1st, the 2nd member quadrature.

In addition, in applying method of the present invention, can with portal be arranged at the part supporting station side, that the mechanism that portal is moved is supported and separate.

In addition, in applying method of the present invention, can make carry that the substrate-placing platform put substrate moves to can be by the outside of the scope of the coating of being located at a portal coating coating slurry.

According to the present invention, even the substrate of handling maximizes, also can make the platform lightweight of mounted board, the supporting station that is provided with this also can lightweight, can the whole lightweight of implement device.

In addition, along with this lightweight, this driving force also reduces, and can improve this translational speed of the contraposition that is used for substrate, shortens the processing time of substrate, can improve treatment effeciency.

In addition, along with above-mentioned 's, supporting station etc. lightweight, can carry out assembling, the adjustment operation of device in the short time, operating efficiency improves.

In addition, the control assembly of above-mentioned drive division, motor body, transmission mechanism etc. can be little capacity, so, can realize their densification, the raising of economy.

In addition, more blank part occurs,, can realize efficiency of operationization so operations such as maintenance, assembling are carried out easily above-mentioned, its drive division etc.

Description of drawings

Fig. 1 is the stereographic map of the 1st embodiment of expression paste applying device of the present invention and method.

Fig. 2 is the stereographic map of a concrete example of the coating head of presentation graphs 1.

Fig. 3 is the block diagram of a concrete example of the master control system of expression the 1st embodiment shown in Figure 1.

Fig. 4 is the block diagram of a concrete example of the secondary control system of expression the 1st embodiment shown in Figure 1.

Fig. 5 is the process flow diagram of a concrete example of the molar behavior of expression the 1st embodiment shown in Figure 1.

Fig. 6 (a) has pulled down the stereographic map of a concrete example of state of the portal of paste applying device shown in Figure 1 from supporting station for expression.

Fig. 6 (b) has pulled down the stereographic map of another concrete example of state of the portal of paste applying device shown in Figure 1 from supporting station for expression.

Fig. 7 is the stereographic map of the part of a concrete example of the substrate holding mechanism of amplification ground presentation graphs 1.

Fig. 8 is the figure of a concrete example of the adsorption plate of presentation graphs 7.

Fig. 9 is the sectional elevation along cutting line A-A of adsorption plate shown in Figure 8.

Embodiment

The present invention is the formation with crossbeam of gantry (portal), and this gantry has the Y direction travel mechanism that applies head, and the Y direction travel mechanism of this coating head carries out straight action-oriented to one or more coating heads with nozzle.

Glass substrate increases year by year, thereupon, carries X, the Y of this glass substrate, each of θ axle also maximizes, and their weight also increases day by day.This maximization also with as the such bearing of maximization, ball-screw, the guide of the motor of its drive source, the maximization of Poewr transmission mechanism is associated, thus the maximization of a plurality of mechanism part that cause being correlated with.In addition, do not terminate in extensiveization of the such train of mechanism of the increaseization of high capacity, distribution scale of motor driver, also cause comprising extensiveization of the substrate drive division of control system.

In addition, change on a large scale, then also have the such problem of weight increaseization like the substrate drive division.Installing from the manufactured place to the occasion that ground etc. carries out land transport is installed, utilize lorry, exist its Weight Loaded can not be limited in the problem in the limit, in addition, and even in limit, the problem of the lorry that yet existence need be more large-scale.In addition, along with the weight increase of device, need the state of ground that the place is set of stiffening device, particularly there is the problem that causes cost to increase in the occasion of the ground rigidity in strengthening the toilet.

Therefore, in the present invention, a plurality of hollow units that have the space in inside that are arranged in parallel are by being connected with a plurality of connecting elements of its quadrature, thereby will carry the platform that the platform of putting substrate forms well shape shelf structure on the whole.Thus, can realize the lightweight of substrate drive division.

Below, according to description of drawings embodiment of the present invention.

Fig. 1 is for watching the stereographic map of an embodiment of paste applying device of the present invention and method in the cardinal principle X-direction, symbol 1 is a supporting station, and

symbol

1a, 1b are the supporting station side;

Symbol

2a, 2b are portal (gantry), and

symbol

3a, 3b are crossbeam, and

symbol

4a, 4b are crossbeam side bearing member;

Symbol

5a, 5b are supporting station side bearing member, and

symbol

6a, 6b are X-direction travel mechanism, and symbol 7 is a magnet plate; Symbol 8 is a substrate holding mechanism, and symbol 9 is provided with face for applying head, and symbol 10 is for applying head; Symbol 11 is for comprising the Y direction travel mechanism of linear rails, and symbol 12 is a Z axle servo motor, and symbol 13 is a Z axle transfer table frame support bracket; Symbol 14 is a Z axle transfer table, and symbol 15 is a glass substrate.

In Fig. 1, become miscellaneous for fear of this accompanying drawing, the part label symbol that only on figure, occurs, part ellipsis in addition.In addition, the 1st embodiment relates to paste applying device and the method for on real estate, describing paste patterns (encapsulant pattern), certainly also can be applicable to the dripping device that makes under the liquid crystal drop on the substrate.

In Fig. 1, on supporting station 1, be provided with substrate holding mechanism 8, the glass substrate 15 that transports (being designated hereinafter simply as substrate 15) is equipped on this substrate holding mechanism 8.This substrate holding mechanism 8 can make the substrate 15 of lift-launch move or rotate (θ is axial to be moved) in X, Y direction, and like this, position, the posture of substrate 15 are finely tuned.

The downside of the both sides of this substrate holding mechanism 8 on supporting station 1 is provided with the 6a of X-direction travel mechanism, 6b along the limit portion of the both sides of supporting station 1, and the limit portion of these both sides of supporting station 1 is along X-direction.The 6a of these X-direction travel mechanisms, 6b for example form linear motor respectively here, and its magnet plate 7 is arranged on X-direction.Upload at the 6a of these X-direction travel mechanisms, 6b and to have put 2

portal

2a, 2b, they can be moved in X-direction by the 6a of these X-direction travel mechanisms, 6b.Substrate 15 with respect to the breadth extreme that uses; For the width (to call transverse width in the following text) of the Y direction that reduces supporting station 1 as much as possible with miniaturization as much as possible, the magnet plate 7 on the limit in opposite directions that is separately positioned on this transverse width direction is provided with near side (being the left and right side) 1a, the 1b ground of the X-direction of supporting station 1.

Here, the portal 2b of the front face side on the key diagram.This portal 2b by at the long crossbeam 3b of the Y direction vertical and the both ends of being located at this crossbeam 3b with X-direction, 2 crossbeam

side bearing member

4a, 4b supporting the leg shape of this crossbeam 2b constitute, these crossbeam

side bearing members

4a, 4b are installed in supporting station side bearing member (sliding part) 5a, the 5b that can be located at the 6a of X-direction travel mechanism, 6b movably respectively.

The crossbeam 3b of portal 2b is longer than the width of the Y direction of supporting station 1; Therefore; The both ends of crossbeam 3b are that supporting

station side

1a, 1b are outstanding from the side of the both sides that are parallel to the X axle of supporting station 1; Therefore, the following crossbeam

side bearing member

4a, 4b that is located at the both ends of this crossbeam 3b is also outstanding from supporting station side 1a, the 1b of this both sides of supporting station 1 respectively.Like this, portal 2b forms the shape that crossbeam 3b is gone into 8 armfuls of substrate holding mechanisms by crossbeam

side bearing member

4a, 4b and supporting station

side bearing member

5a, 5b that kind.

The opposing party's portal 2a also enough becomes the formation same with the above formation of portal 2b.

At the opposed facing coating head of the crossbeam 3a of

portal

2a, 2b, 3b face 9 being set is provided with one or more respectively and applies head 10.In Fig. 1, the coating head of the portal 2a of opposite sides is provided with face 9 towards face side ground expression, so below it applies head face 9 is set about portal 2a explanation.

At the coating head of portal 2a face 9 is set and the linear rails of Y direction travel mechanism 11 is set abreast, in this linear rails one or more are installed and apply heads 10 (only applying head 10 label symbols here) 1 along the length direction (being Y direction) of its face.Apply the linear motor that heads 10 are respectively equipped with the Y direction travel mechanism 11 that constitutes with linear rails at these, this linear motor makes these apply head 10 and moves in Y direction along linear rails.

At each the supporting station of coating head 10; The linear motor of Y direction travel mechanism 11 is set as above-mentioned in its rear side (apply head face 9 sides are set); Have the Z axle transfer table frame support bracket 13 of Z axle servo motor 12 its face side being provided with, be provided with to make and apply the Z axle transfer table 14 that head 10 moves up and down by this Z axle servo motor 12.At this Z axle transfer table 14, as after state, nozzle support, the stadimeter that is provided with slurry receiving cartridge (syringe), nozzle, the lens barrel with lighting source and image recognition video camera etc. are installed.

Above formation is provided with face too to the coating head of the portal 2b of front face side.In addition; Constitute according to this, respectively apply head 10 along Y direction carrying to drive on the substrate 15 that places substrate holding mechanism 8 by Y direction travel mechanism 11, in addition;

Drive portal

2a, 2b by the 6a of X-direction travel mechanism, 6b along X-direction; Like this, each applies head 10 and is activated in X-direction equally, on this substrate 15, describes the paste patterns of a plurality of same shapes simultaneously.

Fig. 2 is the stereographic map of wanting portion of a concrete example that is coated with Jiao head 10 of amplification ground presentation graphs 1, and symbol 16 is a nozzle support, and symbol 17 is the slurry receiving cartridge, and symbol 18 is a nozzle, and symbol 19 is a stadimeter.

In the figure, nozzle support 16 that is provided with slurry receiving cartridge 17, nozzle 18 and stadimeter 19 are located at Z axle transfer table 14 (Fig. 1).

Stadimeter 19 by contactless triangle telemetry measure surface from the leading section of nozzle 18 to the substrate 15 that is equipped on substrate holding mechanism 8 (Fig. 1) (above) distance.That is, in the casing of stadimeter 19, light-emitting component is set, the measurement point S reflection of laser on substrate 15 from this light-emitting component radiation receives light by the photo detector that is arranged on equally in the casing, measures corresponding to this light receiving position.In addition, owing under the leading section of nozzle 18, there is coating, therefore,, need correctly hold the fluctuating of substrate in the distance of the position measurement of avoiding this coating of just having discharged up to substrate surface from escape hole.Therefore; The measurement point S of the laser on substrate 15 and the positive upper/lower positions of nozzle 18; Small distance, delta X and the Δ Y of skew on substrate 15; But the scope of the concave-convex surface difference that the skew of this slight distance degree is in substrate 15 for ignoring, so, the measurement result of stadimeter 19 and surface from the leading section of nozzle 18 to substrate 15 (above) distance do not exist basically poor.Therefore, according to the measurement result of this stadimeter 19 control Z axle transfer table 14, thereby can corresponding to the concave-convex surface (fluctuating) of substrate 15 will be from the leading section of nozzle 18 to substrate 15 the surface (above) distance (at interval) keep necessarily.

Like this; Surface that will be from the leading section of nozzle 18 to substrate 15 (above) distance (at interval) keep necessarily; And, will keep necessarily from the amount of slurry of the unit interval that nozzle 18 is discharged, the same thereby the width, the thickness that make coating be depicted in the paste patterns on the substrate 15 become.

Though not expression in the drawings; But the lens barrel that in fact has a light source that can throw light on and image recognition video camera are except the parallel adjustment that is used for each nozzle 18, at interval the adjustment; Also, be provided with in opposite directions with substrate for the contraposition of substrate 15, the shape recognition of paste patterns etc.

Turn back to Fig. 1, in this embodiment, have the control part of each above one of control.That is,, the master control part that linear motor that drives each mechanism and the motor that platform is moved are controlled is set in the inside of supporting station 1.In this master control part, through cable auxiliary connection control part.Sub-control portion controls the Z axle servo motor 12 that drives Z axle transfer table 14.

Fig. 3 is the block diagram of a concrete example of formation and its control of this master control part of expression, and symbol 20a is a master control part, and symbol 20aa is a microcomputer; Symbol 20ab is a motor controller, and symbol 20ac is a pattern recognition device, and symbol 20ad is an external interface; Symbol 20ae is a data communication bus, and symbol 20b is a sub-control portion, and symbol 21 is USB (USB) storer; Symbol 22 is a hard disk, and symbol 23 is a monitor, and symbol 24 is a keyboard; Symbol 25 is a regulator, and symbol 26 is a valve cell, and symbol 27a is that portal moves with Y axis linear motor and uses driver; Symbol 27b uses driver for the coating head moves with X axis linear motor, and symbol 27c is that the platform rotation is used driver with θ axle motor, and symbol 28 is a telecommunication cable.

In the figure; Adorn microcomputer 20aa, motor controller 20ab, image processing apparatus 20ac in the master control part 20a, reach external interface 20ad; The coating head that this motor controller 20ab control drives Y direction travel mechanism 11 (Fig. 1) moves the portal that drives with driver (being designated hereinafter simply as Y axle driver) 27a, to the 6a of X-direction travel mechanism, 6b (Fig. 1) with Y axis linear motor and moves with X axis linear motor and rotate with θ axle motor with driver (being designated hereinafter simply as θ axle driver) 27c with driver (being designated hereinafter simply as X axle driver) 27b, the platform that the substrate holding mechanism 8 (Fig. 1) that has carried substrate 15 driven at the θ direction of principal axis; This image processing apparatus 20ac handles the picture signal that is obtained by the image recognition video camera of not representing among the figure; Regulator 25, valve cell 26 that this external interface 20ad and the 20b of sub-control portion, control apply the slurry coating action of head 10 (Fig. 1) communicate, and these microcomputers 20aa, motor controller 20ab, image processing apparatus 20ac, external interface 20ad interconnect through data communication bus 20ae.Here, the 20b of sub-control portion is connected this external interface 20ad through telecommunication cable 28.

In addition, connect USB storage 21, hard disk 22, monitor 23, keyboard 24 etc. at master control part 20a as external memory.Show by monitor 23 that from the data of keyboard 24 input etc. simultaneously, the storage keeping is at storage mediums such as hard disk 22, USB storages 21.

In microcomputer 20aa; Though not expression in the drawings; But in fact has main operational part; The ROM of the handling procedure that the coating that storage is stated after being used to carry out is described is stored in the result of main operational part, from the RAM of the input data of external interface 20ad, motor controller 20ab, carries out the input and output portion etc. of exchanges data with external interface 20ad, motor controller 20ab.

These conducts that driven by Y axle driver 27a respectively apply the linear motor of the Y direction travel mechanism 11 of head 10, the 6a of X-direction travel mechanism as

portal

2a, 2b (Fig. 1) that is driven by X axle driver 27b, the linear motor of 6b are provided with the ruler that is used to detect the position that respectively applies head 10,

portal

2a, 2b; Its testing result is supplied to Y axle driver 27a, X axle driver 27b respectively, apply the Y direction of head 10, the position control of X-direction.In addition, same, dress detects the scrambler of the rotation amount of this substrate 15 in the rotation drive motor of the substrate holding mechanism 8 (Fig. 1) that is driven by θ axle driver 27c, and its result is supplied to θ axle driver 27c, carry out substrate 15 towards control.

Fig. 4 is the block diagram of a concrete example of the 20b of sub-control portion of presentation graphs 3; Symbol 20ba is a microcomputer, and symbol 20bb is a motor controller, and symbol 20bc is an external interface; Symbol 20bd is a data communication bus; Symbol 29 is that Z axle motor is used driver, in the part mark same-sign corresponding with above-mentioned accompanying drawing, omits the explanation of repetition.

In the figure; The input of dress microcomputer 20ba, motor controller 20bb in the 20b of sub-control portion, the altitude information that carries out obtaining by stadimeter 19 (Fig. 2), with the external interface 20bc that the signal of master control part 20a transmits, they interconnect through data communication bus 20bd.In addition; At microcomputer 20ba; Though in fact expression does not in the drawings have main operational part, storage is used to apply the ROM of handling procedure that nozzle 18 (Fig. 2) when describing leaves the surface height control of substrate 15; Store the result of main operational part, from the RAM of the input data of external interface 20bc and motor controller 20bb, carry out input and output portion of exchanges data etc. with external interface 20bc, motor controller 20bb.Z axle motor by motor controller 20bb control respectively applies head 10 (Fig. 1) setting with 29 pairs of drivers; Its Z axle servo motor 12 (Fig. 1) is driven; The scrambler that detects its rotation amount is installed in these Z axle servo motors 12; Its testing result turns back to Z axle motor with driver 29, carries out the height and position control of nozzle 18.

Control according to the associating of master control part 20a and the 20b of sub-control portion; Each motor (linear motor, Z axle servo motor, θ axle servo motor) moves, rotates according to the data of importing, be stored in the RAM of microcomputer 20aa from keyboard 24 (Fig. 3); The 6a of X-direction travel mechanism, 6b make portal 2a, 2b move distance arbitrarily in X-direction; And, through the Z axle transfer table 14 (Fig. 1) that moves up and down, make nozzle 18 (Fig. 2) move distance arbitrarily in Y direction by the Y direction travel mechanism 11 of the coating head 10 of being located at

crossbeam

2a, 2b; In its moving process; Pressure by setting pressurize at slurry receiving cartridge 17 (Fig. 2) unceasingly, from the escape hole discharge slurry of the leading section of nozzle 18, describes desired paste patterns at substrate 15.

In the process that nozzle 18 moves horizontally towards Y direction, the interval between the surface of stadimeter 19 gaging nozzles 18 and substrate 15 is maintained certain intervals ground often with it and controls nozzle 18 through moving up and down of Z axle transfer table 14.

Fig. 5 is the process flow diagram of the molar behavior of presentation graphs 1 illustrated embodiment.

In the figure, as in paste applying device energized shown in Figure 1 (step S100), the initial setting of device for carrying out said (step S101) at first then.In this initial setting operation; In Fig. 1, drive Y direction travel mechanism 11, the 6a of X-direction travel mechanism, the linear motor of 6b, Z axle transfer table 14, thereby portal 2a, 2b are moved in X-direction; Applying head 10 moves in Y direction; Be positioned at the reference position of regulation, in addition, the origin position that is stipulating the set positions of nozzle 18 (Fig. 2) (being the slurry coating starting point) position that makes its slurry escape hole be in the beginning slurry coating; Simultaneously, further set paste patterns data, substrate position data, slurry discharge end position data.

The input of these data is carried out from keyboard 24 (Fig. 3), is loaded on the RAM of microcomputer 20aa (Fig. 3) in the data of input are stored in as above-mentioned.

Finish like this initial setting operation (step S101), then next substrate 15 is equipped on substrate holding mechanism 8 (Fig. 2) and makes it receive maintenance (step S102).

Then, carry out substrate preparation localization process (step S103).In this is handled; By the image recognition video camera photographed with mark in the location of the substrate 15 that is equipped on substrate holding mechanism 8, obtain the centre of gravity place of location with mark through Flame Image Process from this picture signal, detection is in the axial inclination of the θ of substrate 15; Correspondingly drive Y axle driver 27a, X axle driver 27b, θ axle driver 27c (Fig. 3) with it; Coating head 10 is moved in X, Y direction, in addition, revise the axial inclination of θ.By above step, finish substrate preparation localization process (step S103).

Then, carry out paste patterns and describe to handle (step S104).In this is handled, at first, make the slurry escape hole of nozzle 18 move to the coating starting position of substrate 15, critically nozzle location is positioned.Then, making Z axle driver 29 (Fig. 4) action, is that paste patterns is described height with the height setting of each nozzle 18.Initial movable range data according to nozzle descends and the suitable amount of initial movable distance each nozzle 18.Then; Measure the surface elevation of substrate 15 by stadimeter 19; Whether the front end of confirming nozzle 18 is set to the height of describing paste patterns, failing to be set at the occasion of describing height, makes nozzle 18 decline slight distance; Carry out the surface measurement of aforesaid substrate 15 and the action of nozzle 18 decline slight distance repeatedly, height is described in the coating that the front end of nozzle 18 is set at paste patterns.

Finish like above processing; Then, drive the linear motor of the X-direction 6a of travel mechanism, 6b, Y direction travel mechanism 11, so next according to the paste patterns data of the RAM that is stored in microcomputer 20aa (Fig. 3) and the correction of the axial inclination of θ; Face under the state of substrate 15 at the slurry escape hole of nozzle 18; Corresponding to these paste patterns data, respectively in X, Y direction with respect to substrate 15 moving nozzles 18, simultaneously;, begin to discharge slurry by the exert pressure gas of having set at each slurry receiving cartridge 17 (Fig. 2) from the slurry escape hole of nozzle 18.Like this, the beginning paste patterns is in the coating of substrate 15.

Then; Meanwhile; As front explanation, the measured data at the interval between the microcomputer 20ba of the 20b of sub-control portion obtains nozzle 18 from stadimeter 19 slurry escape hole and the surface of substrate 15, the fluctuating on the surface of mensuration substrate 15; Drive Z axle servo motor 12 corresponding to this measured value, thereby the setting height of the nozzle 18 that will leave from the surface of substrate 15 is maintained necessarily.Like this, can be by desired coating amount coating coating slurry pattern.

As above; Carry out describing of paste patterns, the terminal of describing pattern by above-mentioned paste patterns data decision whether the slurry escape hole of nozzle 18 is on the substrate 15 is judged, as not being in this terminal; The mensuration that then turns back to the surface undulation of substrate is once more handled; Below, carry out above-mentioned coating repeatedly and describe,, the paste patterns that forms proceeds before arriving this terminal of describing pattern.

Then, as arrive this and describe the pattern terminal, then drive Z axle servo motor 12, nozzle 18 is risen, this paste patterns is described operation (step S104) and is finished.

Then, advance to substrate and discharge disposal (step S105), remove substrates 15, be discharged to outside the device from substrate holding mechanism shown in Figure 18.

Then; Judge that whether above whole operation with respect to all substrates 15 that become object finish (step S106); In the occasion that the same slurry pattern is formed on multi-piece substrate; Carry to handle (step S102) from substrate and carry out repeatedly, like this a succession of processing that whole substrates are through with (step S106 " being "), then operation be all over (step S107).

Turn back to Fig. 1, the Y direction travel mechanism 11 that the coating head of being located at portal 2a, 2b is provided with face 9 surpasses a plurality of coating heads 10 and on substrate, describes the required scope of paste patterns and extend in Y direction.Like this, apply head 10 and can move to the position that breaks away from from substrate 15.In such place that has broken away from from substrate 15, respectively apply the operation such as installation, dismounting of maintenance, the slurry receiving cartridge 17 of head 10.

For this reason, each portal 2a, the crossbeam 3a of 2b, 3b become longer than the transverse width of supporting station 1, and their both ends are outstanding from supporting station side 1a, the 1b of supporting station 1.In addition, in order more stably to support crossbeam 2a, the 2b of this length, crossbeam

side bearing member

4a, 4b are located at the leading section of

crossbeam

2a, 2b, are installed in supporting station

side bearing member

5a, 5b respectively.Like this, particularly crossbeam

side bearing member

4a, 4b are also outstanding from supporting station side 1a, the 1b of supporting station 1.

, for example, along with the maximization of liquid crystal panel, the substrate of describing that is used for paste patterns is large tracts of landization also; In order to improve the manufacturing efficient of such panel, describe a plurality of paste patterns at substrate 15 simultaneously, for this reason; Use the paste applying device of this substrate 15 to maximize, its supporting station 1 also maximizes, but too maximizes like supporting station 1; Its transverse width becomes excessive, then when for example transporting paste applying device, causes being equipped on problems such as haulage vehicle.For this reason, the transverse width to supporting station 1 has applied restriction.

Yet; Even the transverse width at supporting station 1 applies restriction, can supporting station 1 be carried on haulage vehicle thus like this; Even the transverse width that makes supporting station 1 in order to use large-area substrate is for using the at utmost transverse width of restriction of this substrate 15; That kind also as shown in Figure 1; The leading section of the crossbeam 3a of portal 2a, 2b, the both sides of 3b, crossbeam

side bearing member

4a, 4b give prominence to from supporting station side 1a, the 1b of supporting station 1, surpass the limits value of the transverse width of supporting station 1, produce same problem.

In this embodiment; In order to eliminate this problem; Forming supporting station

side bearing member

5a, 5b and crossbeam

side bearing member

4a, 4b is made up of what coupling bolt combined; Through dismantling this coupling bolt, supporting station

side bearing member

5a, 5b and crossbeam

side bearing member

4a, 4b can separate, and can pull down portal 2b from supporting station 1.The opposing party's portal 2a also is same formation.

Fig. 6 (a) has pulled down the stereographic map of a concrete example of state of portal 2a, the 2b of paste applying device shown in Figure 1 from supporting station 1 for expression;

Symbol

7a, 7b are straight action-oriented spare;

Symbol

30a, 30b are for be provided with the sliding part of coil below;

Symbol

31a, 31b are L shaped accessory, the part mark same-sign corresponding with Fig. 1, the explanation of omission repetition.

In the figure; The 6a of X-direction travel mechanism comprises the magnet plate 7 and straight action-oriented spare 7a that is provided with in parallel to each other; And be configured in the sliding part 30a that these magnet plates 7 are gone up with straight action-oriented spare 7a, can be moved along these magnet plates 7 and straight action-oriented spare 7a, by among magnet plate 7 and the figure that is located at sliding part 30a not the parts of expression form linear motor.In addition; Equally; The 6b of X-direction travel mechanism also comprises the magnet plate 7 and straight action-oriented spare 7b that is provided with in parallel to each other; And be configured in the sliding part 30b that these magnet plates 7 are gone up with straight action-oriented spare 7b, can be moved along these magnet plates 7 and straight action-oriented spare 7b, by among magnet plate 7 and the figure that is located at sliding part 30b not the parts of expression form linear motor.These sliding

parts

30a, 30b are equivalent to supporting station side bearing member 5a, the 5b among Fig. 1, constitute tabular surface above it.

On the other hand,, at its leading section L shaped

accessory

31a, 31b are set integratedly respectively, constitute tabular surface below these L shaped accessory 31a, the 31b being located at crossbeam side bearing member 4a, the 4b of portal 2b.Through below these L shaped

accessory

31a, 31b, be fixed on corresponding sliding

part

30a, 30b above; Thereby that kind as shown in Figure 1; Become the state that portal 2b is installed in supporting station

side bearing member

5a, 5b; Therefore become the state that portal 2b is installed in supporting station 1, becoming can be at the state of coating of substrates paste patterns.In addition, as shown in Figure 6, remove the following and sliding part 30a of L shaped

accessory

31a, 31b, top the fixing of 30b, thereby can portal 2b be lifted, pull down from supporting station 1.

As above-mentioned; The both ends of the crossbeam 3b of portal 2b, crossbeam side bearing member 4a, 4b give prominence to from supporting station side 1a, the 1b of supporting station 1; The both ends of the surface of crossbeam side bearing member 4a, 4b constitute opposed facing vertical plane, and the vertical installed surface of L shaped accessory 31a, 31b is installed at this vertical end face.For this reason; These L shaped accessory 31a, 31b dispose in the face of ground from the leading section of crossbeam side bearing member 4a, 4b in the horizontal direction each other; Like this; Even crossbeam side bearing member 4a, 4b give prominence to from supporting station side 1a, the 1b of supporting station 1; What also can side by side make L shaped accessory 31a respectively is smooth following in the face of being located at above sliding part 30a on magnet plate 7 and the straight action-oriented spare 7a, on the supporting station 1 smooth, and what make L shaped accessory 31b is smooth following in the face of being located at above sliding part 30b on the supporting station 1 on magnet plate 7 and the straight action-oriented spare 7b smooth.Like this, can as above-mentioned, portal 2b be installed in sliding part 30a, 30b, or it is pulled down.

Like this, the top surface portion of sliding

part

30a, 30b constitutes the connecting portion of portal 2b.

The opposing party's portal 2a also becomes same formation.

Fig. 6 (b) has pulled down the stereographic map of another concrete example of state of portal 2a, the 2b of paste applying device shown in Figure 1 from supporting station 1 for expression, in the part mark same-sign corresponding with Fig. 6 (a), the explanation of omission repetition.

In the figure, for this concrete example, at sliding

part

30a, 30b L shaped

accessory

31a, 31b are set integratedly respectively, these L shaped

accessory

31a, 31b can separate with the crossbeam side bearing member 4a, the 4b that are located at portal 2b.

As above, in this concrete example, make it possible to separate portal 2a, 2b from supporting station 1; But under the state before this decomposes, in the occasion of watching this paste applying device from above, as the minor face of establishing as the device of the length of portal 2a, 2b is of a size of A; The size that then now also is called as the mother glass substrate in the 10th generation is about 2.85m * 3.05m; At the portal that it is surrounded is the occasion of one, and the width A of device surpasses 3.5m, expands to about 4m.For this reason, when utilizing the ordinary highway transport, generation can not be accommodated the problem of this device in transport vehicles inside.As this correspondence, the structure of ground segmenting device in common discussion is also contained in substrate holding mechanism 8 from supporting station 1, in this occasion, like dismounting or installation base plate maintaining body 8, the then assembly precision of device decline at this moment in addition, applies also deterioration of positional precision.

Yet the occasion in the formation of this concrete example only limits to portal 2a, 2b forms the structure that can decompose, like this, as device, can miniaturization to the size B of the transverse width of supporting station 1.In addition,, can be the width C of littler minor face,, promptly be used in the many large-scale mother glass substrates of 2m, also can suppress for surpassing some the width of degree of 3m so the full-size of the device after the decomposition can be B as portal 2a, 2b.As a result, utilize the device conveying of ordinary highway also can be resolved no problemly.

Fig. 7 is the stereographic map of the part of a concrete example of the substrate holding mechanism 8 of amplification ground presentation graphs 1; Symbol 32a～32e is the substrate-placing member; Symbol 33a～33e is the U-shaped member, and symbol 34a～34e is an adsorption plate, and symbol 35a～35d is a connecting elements;

Symbol

36,36a are crossed roller bearing, and symbol 37 is the quadrature bearing.

In the figure; Substrate holding mechanism 8 disposes a plurality of substrate-placing member 32a～32e along Y direction in X-direction by equal intervals; Be connected the following side of substrate-placing member 32a～32e with a plurality of connecting elements 35a～35d of these substrate-placing members 32a～32e quadrature and equally spaced configuration, constitute the platform of well shape frame shape by these mutually orthogonal substrate-placing member 32a～32e and connecting elements 35a～35d.

U-shaped member 33a～33e that substrate-placing member 32a～32e forms respectively in elongated side uploads the formation of having put flat elongated adsorption plate 34a～34e; The shape of cross section of this U-shaped member 33a～33e is the U font that upside has been opened; Inboard is the cavity; Constitute the tubular that inside is the cavity by these U-shaped member 33a～33e and adsorption plate 34a～34e, constitute smooth face by adsorption plate 34a～34e above it.Become the face of putting that carries of substrate above these adsorption plates 34a～34e.In addition, the bottom of these U-shaped members 33a～33e is fixed by the connecting elements 35a～35d of coupling bolt (not shown) and elongated side respectively.

Be arranged in the central part (center of the U-shaped member that is positioned at the center of U-shaped member 33a～33e of the platform of this well shape frame shape; Or the connecting elements that is positioned at the center among connecting elements 35a～35d, or the U-shaped member of the central part of well shape frame shape platform and the point of crossing of connecting elements.Here; This central portion is the center of U-shaped member 33c) utilize the platform rotating member supporting that constitutes by crossed roller bearing 36, U-shaped member 33a～33e beyond this central part and the point of crossing of connecting elements 35a～35d utilize the platform rotation/mobile member supporting that is made up of a plurality of crossed roller bearing 36a and quadrature bearing 37 respectively.The crossed roller bearing 36 of this mobile member, 36a make U-shaped member 33a～33e rotate at the θ direction of principal axis; Quadrature bearing 37 makes U-shaped member 33a～33e move in X, Y direction; Here; Crossed roller bearing 36a is set on quadrature bearing 37, uploads the point of crossing of putting U-shaped member 33a～33e and connecting elements 35a～35d at this crossed roller bearing 36a.

The table transferring mechanism that is made up of crossed

roller bearing

36,36a and quadrature bearing 37 is that the center makes the substrate holding mechanism 8 as well shape frame shape platform rotate at the θ direction of principal axis with crossed roller bearing 36; Along with this rotation; By crossed roller bearing 36a and quadrature bearing 37; Make as the part that is provided with them of the substrate holding mechanism 8 of this well shape frame shape platform and rotate, simultaneously, it is moved in X, Y direction at the θ direction of principal axis.The table transferring mechanism that is made up of this crossed roller bearing 36a and quadrature bearing 37 is by the equal intervals setting at the central part with the well shape frame shape platform that is provided with crossed roller bearing 36 on a plurality of circumference of central point.The position that is provided with of the table transferring mechanism that is made up of these crossed roller bearings 36a and quadrature bearing 37 is the point of crossing of U-shaped member 33a～33e and connecting elements 35a～35d certainly.All U-shaped member 33a～33e that also can be in this substrate holding mechanism 8 and the point of crossing of connecting elements 35a～35d are provided with the table transferring mechanism that is made up of this crossed roller bearing 36 and quadrature bearing 37.

Table transferring mechanism by these crossed

roller bearings

36,36a and quadrature bearing 37 constitute is finely tuned the axial posture of θ of carrying the substrate that places substrate holding mechanism 8; (promptly in the device) will be transported to outside this device in the zone of paste patterns from being used for being described by coating head 10 shown in Figure 1 but in order to carry the substrate that places substrate holding mechanism 8; In addition; Outside installing, deliver in this device, substrate holding mechanism 8 is moved at the throughput direction (X-direction) of this substrate.Move into direction and also can be Y direction.

In addition, the fine position of the X of substrate holding mechanism 8, Y direction is carried out in the fine position of the Y direction of these

portals

2a, 2b through fine position, the coating head 10 of the X-direction of portal 2a, 2b.

Fig. 8 is the stereographic map of a concrete example of the adsorption plate 34a～34e of presentation graphs 7, and symbol 34 is adsorption plate (general name of adsorption plate 34a～34e), and symbol 38 is an adsorption hole, and symbol 39 is a blank part, and symbol 40 is a bolt hole.

In the figure, at adsorption plate 34, its inside spreads all over its length direction and integrally constitutes blank part 39, and the adsorption hole 38 above this blank part 39 is communicated to is provided with a plurality of by equal intervals.In addition, be provided for this adsorption plate 34 is fixed on the bolt hole 40 of the coupling bolt of U-shaped member 33 (general name of U-shaped member 33a～33e) by equal intervals in the both sides of this blank part 39.

Fig. 9 is the sectional elevation along cutting line A-A of adsorption plate 34a～34e shown in Figure 8, and symbol 41 is the plate main body, and symbol 42 is a web joint; Symbol 43 is a pipe-fitting joint; Symbol 44 is a coupling bolt, to the part mark same-sign corresponding with Fig. 8, omits the explanation of repetition.

In the figure; Adsorption plate 34 is made up of the plate main body 41 of empty shape and the web joint of installing with coupling bolt 44 at the downside of this plate main body 41 42; The shape of cross section of this plate main body is the open U font of downside; The opening portion of plate main body 41 is stopped up by this web joint 42, thus adsorption plate 34 in formation airtight blank part 39.As among Fig. 8 also the expression, adsorption hole 38 equally spaced is provided with at the length direction of plate main body 41 in the upper wall portions of this plate main body 41.

In addition, be provided with the pipe-fitting joint 43 that blank part 39 is opened, the pipe arrangement flexible pipe of not representing in the connection layout above that at web joint 42.That kind as shown in Figure 7 is installed in this adsorption plate 34 on the U-shaped member 33; The coupling bolt of not representing among the figure is inserted in the bolt hole 40 of this adsorption plate 34; Be screwed into U-shaped member 33, thereby adsorption plate 34 is fixed on U-shaped member 33, but under this state; The pipe arrangement flexible pipe of not representing in the drawings that is connected the pipe-fitting joint 43 of adsorption plate 34 passes in the blank part of U-shaped member 33, is directed to the vacuum pump of not representing among the figure.

Like this; On the substrate holding mechanism 8 of the structure that forms well shape frame shape platform by substrate-placing member 32a～32e and connecting elements 35a～35d, be that the surface of substrate-placing member 32a～32e is uploaded and put substrate; Then, carry out exhaust in the blank part 39 through pipe arrangement flexible pipe, 43 pairs of adsorption plates 34 of pipe-fitting joint, like this through above-mentioned vacuum pump work; By the adsorption hole 38 of adsorption plate 34 with substrate be adsorbed on adsorption plate 34 above be substrate-placing member 32a～32e above, receive fixing the maintenance.

As above; In this embodiment,, substrate holding mechanism 8 is formed the platform shape that has the gap of well shape frame shape with the substrate-placing member 32a～32e of the elongated side of elongated connecting elements 35a～35d connection; So; Even, also can realize the significantly lightweight of substrate holding mechanism 8 using the occasion of large-area substrate, the lightweight of the paste applying device in the supporting station that realization will be provided with this substrate holding mechanism 8 is also contained in.

Through the lightweight of this substrate holding mechanism 8, can promptly carry out it and move, can shorten the needed time of positioning work of the glass substrate that is equipped on this substrate holding mechanism 8; In addition; When carrying paste applying device, not need from supporting station 1 with lightweight this substrate holding mechanism 8 separate, therefore; During the installation of this paste applying device after transporting; The installation exercise that does not need substrate holding mechanism 8, in addition, the needed activity duration of the adjustment of substrate holding mechanism 8 also can carry out at short notice.

Claims

1. paste applying device; Portal is set on supporting station; This portal can be provided with one or more movably and apply head, this coatings head have filling slurry the slurry receiving cartridge and from the nozzle outlet of this slurry receiving cartridge discharge slurry, mounted board on the substrate-placing platform that is arranged on this supporting station; This portal moves with respect to this substrate, from this nozzle outlet slurry is discharged on the substrate; It is characterized in that:

This substrate-placing platform is that the inside that is provided with a plurality of adsorption holes is a plurality of the 1st members of blank part and the platform that the combination of a plurality of the 2nd member quadrature ground constitutes the structure of well shape frame shape,

Has a plurality of XY θ axle travel mechanism; Central part at this substrate-placing platform supports with rotating member; The 1st member beyond the central part of this substrate-placing platform supports with a plurality of mobile members that made up rotating member and quadrature bearing with the quadrature position of the 2nd member; Carry out the XY direction of principal axis and move while rotating, thereby this substrate-placing platform is moved and rotate, adjust carrying position, the posture of putting this substrate on this substrate-placing platform.

2. paste applying device; Portal is set on supporting station; This portal can be provided with one or more movably and apply head, this coatings head have filling slurry the slurry receiving cartridge and from the nozzle outlet of this slurry receiving cartridge discharge slurry, mounted board on the substrate-placing platform that is arranged on this supporting station; This portal moves with respect to this substrate, from this nozzle outlet slurry is discharged on the substrate; It is characterized in that:

Be provided for the θ axle travel mechanism location, that constitute by crossed roller bearing of the axial sense of rotation of θ at the center of this substrate-placing platform,

This substrate-placing platform is the inner platform that makes up the structure that constitutes well shape frame shape for a plurality of the 1st members and a plurality of the 2nd member quadrature ground of blank part,

A plurality of XY θ axle travel mechanism is set in the position of the 1st, the 2nd member quadrature, and this XY θ axle travel mechanism is made up of the quadrature bearing of the location of the X that is used for this substrate-placing platform, Y direction and the crossed roller bearing that is used for the sense of rotation location of θ direction.

3. paste applying device according to claim 2 is characterized in that: can aforesaid substrate carry the outside of putting platform with above-mentioned portal be arranged at part above-mentioned supporting station side, that the mechanism that above-mentioned portal is moved is supported and separate.

4. according to claim 2 or 3 described paste applying devices, it is characterized in that: have make carry the aforesaid substrate put substrate carry put that platform moves to can be by the device in the outside of the scope of one or more above-mentioned coating coating coating slurries of being located at above-mentioned portal.

5. applying method; Portal is set on supporting station; This portal can be provided with one or more movably and apply head, this coatings head have filling slurry the slurry receiving cartridge and from the nozzle outlet of this slurry receiving cartridge discharge slurry, mounted board on the substrate-placing platform that is arranged on this supporting station; This portal moves with respect to this substrate, from this nozzle outlet slurry is discharged on the substrate; It is characterized in that:

Be provided for the θ axle travel mechanism location, that constitute by crossed roller bearing of the axial sense of rotation of θ at the central part of this substrate-placing platform; Simultaneously; Position beyond the central part of this substrate-placing platform has a plurality of XY θ axle travel mechanism that is made up of quadrature bearing and crossed roller bearing

Around the central part positioning of rotating of this substrate-placing platform the time; Beyond central part; By this quadrature bearing of the position of being located at the 1st, the 2nd member quadrature with this substrate-placing platform in X, Y direction location, this substrate-placing platform is positioned in the axial sense of rotation of θ by this crossed roller bearing of the position of being located at the 1st, the 2nd member quadrature.

6. applying method according to claim 5 is characterized in that: can with above-mentioned portal be arranged at part above-mentioned supporting station side, that the mechanism that above-mentioned portal is moved is supported and separate.

7. according to claim 5 or 6 described applying methods, it is characterized in that: can make carry the aforesaid substrate put aforesaid substrate carry put that platform moves to can be by the outside of the scope of an above-mentioned coating coating coating slurry of being located at above-mentioned portal.