CN212685026U

CN212685026U - Substrate operation platform

Info

Publication number: CN212685026U
Application number: CN202021196785.1U
Authority: CN
Inventors: 刘正勇; 张作军; 刘晏; 王广炎; 盛俭; 吕海波; 沈洪星; 何烽光; 黄振东; 李然; 熊海军; 刘同心
Original assignee: Hefei Sineva Intelligent Machine Co Ltd
Current assignee: Hefei Sineva Intelligent Machine Co Ltd
Priority date: 2020-06-24
Filing date: 2020-06-24
Publication date: 2021-03-12
Anticipated expiration: 2030-06-24

Abstract

The utility model relates to a semiconductor equipment technical field discloses a base plate work platform, and this base plate work platform includes: the stand assembly comprises a stand and a supporting plate; the substrate bearing assembly comprises a substrate bearing platform, and the substrate bearing platform is arranged on the supporting disc; one side of the substrate bearing platform, which is far away from the supporting disk, forms a bearing surface; the gantry assembly is movably arranged on the support plate along a first direction parallel to the bearing surface; each gantry assembly is provided with at least one working assembly, and the at least one working assembly is movably arranged on the gantry assembly along a second direction parallel to the bearing surface; each working assembly is detachably connected with the gantry assembly; each gantry assembly is also provided with a driving part, and the driving part is used for driving the working assembly to move; the driving mechanism is arranged on the supporting plate and used for driving the gantry assembly to act. The substrate operation platform can realize multifunctional operation of the platform by assembling different working components.

Description

Substrate operation platform

Technical Field

The utility model relates to a semiconductor equipment technical field, in particular to base plate operation platform.

Background

In the production and manufacturing process of the substrate, operations such as detection, repair, assembly or printing need to be performed on the operation platform. Based on the characteristics of the substrate, the working platform for the substrate in the technical field of the existing semiconductor equipment can only realize single functions such as printing or detection and the like because of high precision requirement.

Therefore, a substrate work platform capable of realizing multiple functions is urgently needed.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a base plate work platform, above-mentioned base plate work platform can realize the different operation functions of platform through assembling different work subassemblies to realize the multi-functional of platform.

In order to achieve the above purpose, the utility model provides the following technical scheme:

a substrate work platform comprising:

the stand assembly comprises a stand and a supporting plate arranged on the top of the stand;

the substrate bearing assembly comprises a substrate bearing platform, and the substrate bearing platform is arranged on the supporting disk; one side of the substrate bearing platform, which is far away from the supporting disk, forms a bearing surface for bearing a substrate;

each gantry assembly comprises a gantry, and is movably mounted on the support plate along a first direction, wherein the first direction is perpendicular to the extending direction of the gantry and is parallel to the bearing surface; each gantry assembly is provided with at least one working assembly, the at least one working assembly is movably arranged on each gantry assembly along a second direction parallel to the bearing surface, and the second direction is vertical to the first direction; each working assembly in the at least one working assembly is detachably connected with the gantry assembly; each gantry assembly is also provided with a driving part, and the driving part is used for driving the working assembly to act;

the driving assembly is arranged on the supporting disc and used for driving the at least one gantry assembly to move in the first direction.

Among the above-mentioned base plate work platform, base plate work platform includes the stand subassembly, and this stand subassembly includes the frame and installs in the supporting disk of frame, installs base plate bearing component and at least one longmen subassembly on the supporting disk. Specifically, the substrate bearing assembly comprises a substrate bearing platform, wherein a bearing surface for bearing the substrate is formed on one side of the substrate bearing platform, which is far away from the supporting disc; each gantry assembly in the at least one gantry assembly can move on the support plate along a first direction, wherein the first direction is perpendicular to the extending direction of the gantry and is parallel to the bearing surface. And each of the at least one gantry assembly is provided with a working assembly which can move along the second direction. It is noted that the second direction is also parallel to the carrying surface, and the second direction is perpendicular to the first direction. When the number of the working assemblies on each gantry assembly is specifically set, the number of the working assemblies can be set to be at least one. When the substrate operation platform is used for operating the substrate, the type of the working assembly can be set according to requirements due to the fact that each working assembly is detachably connected with the gantry assembly, and the substrate on the bearing surface can be operated. It will be appreciated that in using the above-described substrate work platform, the drive assembly may be controlled to drive the gantry assembly to move in a first direction, and the drive section may be controlled to drive the work assembly to move in a second direction. In the process of actually using the substrate working platform, when the working assembly moves along the second direction, the working assembly can operate all areas of the substrate on the bearing surface in a plane formed by the first direction and the second direction by matching with the movement of the gantry assembly along the first direction.

The utility model provides a base plate work platform can set up different work assembly on every gantry assembly, realizes the different operations to the base plate. The utility model provides a base plate work platform no longer restricts single operation content, can integrate multiple functions in same base plate work platform, has realized base plate work platform's multi-functional to but reduction in production cost.

Therefore, the substrate operation platform can realize different operation functions of the platform by assembling different working components, thereby realizing the multifunction of the platform.

Preferably, the device further comprises a pre-positioning assembly for pre-positioning the substrate placed on the substrate bearing platform, wherein the pre-positioning assembly is mounted on the supporting plate and is positioned between the supporting plate and the substrate bearing platform; a through groove for the pre-positioning assembly to pass through is formed on the substrate bearing platform; the pre-positioning assembly is provided with an initial station, a material waiting station and a clamping station; when the pre-positioning assembly is at an initial station, the pre-positioning assembly is arranged between the support plate and the substrate bearing platform; when the pre-positioning assembly is positioned at a material waiting station, the pre-positioning assembly extends out of the through groove part to one side of the substrate bearing platform, which is far away from the supporting plate; when the pre-positioning assembly is located at the clamping station, the pre-positioning assembly clamps the substrate to be aligned so as to align the substrate.

Preferably, the pre-positioning assembly comprises two first pre-positioning groups which are oppositely arranged along a first direction and are used for aligning the substrate to be aligned in the first direction; the two second pre-positioning groups are oppositely arranged along the second direction and used for aligning the substrate to be aligned in the second direction.

Preferably, the substrate supporting device further comprises a support adjusting assembly for supporting the substrate supporting platform, wherein the support adjusting assembly is mounted on the supporting plate and located between the supporting plate and the substrate supporting platform; and a supporting point for supporting the support adjusting assembly is formed on one side surface of the substrate bearing platform facing the supporting disc.

Preferably, the substrate carrying platform further comprises an air floating assembly for carrying the substrate, and the air floating assembly has an air blowing state and an air suction state; when the air floatation assembly is in an air blowing state, the air floatation assembly blows air for bearing the substrate; when the air floatation assembly is in an air suction state, the bearing surface of the substrate bearing platform is used for bearing a substrate.

Preferably, the substrate support device further comprises a mandril assembly used for pre-supporting the substrate before the substrate support platform supports the substrate, and the mandril assembly comprises a mandril group which can be movably arranged on the mounting disc along the direction vertical to the substrate support platform; a plurality of through holes for the ejector rod group to enter and exit are formed on the substrate bearing platform; the ejector rod group is provided with a retracting station and an ejecting station; when the ejector rod group is at a retraction station, the ejector rod group is received between the support plate and the substrate bearing platform; when the ejector rod group is positioned at an ejection station, the ejector rod group extends out of the through hole to one side of the substrate bearing platform, which is far away from the supporting disk.

Preferably, the ejector rod group comprises a plurality of ejector rods, and part of the ejector rods in the plurality of ejector rods are provided with functional components.

Preferably, the substrate supporting device further comprises a rotating device for rotating the substrate supporting platform around an axis perpendicular to the supporting surface, the rotating device is mounted on the supporting disk, and an output end of the rotating device is connected with the substrate supporting platform to drive the substrate supporting platform to rotate around the axis.

Preferably, the substrate carrying platform further comprises an origin camera for defining a coordinate system of the substrate carrying platform, the origin camera is mounted on the supporting plate, and a calibration part for enabling the origin camera to perform origin marking is arranged on the substrate carrying platform; when the focus center of the origin camera focuses on the calibration part, the origin camera is matched to form a coordinate system, and the coordinate system takes the calibration part as an origin, the first direction as an X axis, the second direction as a Y axis and the direction perpendicular to the bearing platform as a Z axis.

Preferably, the stand subassembly still includes and is used for isolated vibration, keeps the stable buffering subassembly of supporting disk, the buffering subassembly is located the supporting disk with between the frame, just the buffering subassembly with the supporting disk with the frame is connected respectively.

Preferably, two working assemblies are arranged on each gantry assembly; along a first direction, the two working groups are oppositely arranged on two sides of each gantry assembly.

Preferably, two gantry assemblies are arranged on the supporting plate, and the two gantry assemblies include a first gantry assembly and a second gantry assembly arranged along a first direction, wherein:

the first gantry assembly is provided with a first working assembly and a second working assembly; a third working assembly and a fourth working assembly are arranged on the second gantry assembly; and the second working assembly, the first working assembly, the third working assembly and the fourth working assembly are arranged along a first direction.

Preferably, the first working assembly is a substrate alignment vision assembly, and is used for performing alignment detection on a substrate placed on the substrate carrying platform;

the second working assembly and the third working assembly are both detection assemblies and are used for detecting the circuit in the substrate after the alignment detection of the first working assembly;

and the fourth working assembly is a line abnormity positioning visual assembly and is used for positioning the line abnormity positions detected by the second working assembly and the third working assembly.

Preferably, the detection assembly includes a horizontal moving part group, a vertical moving part group and a detection head for performing a detection operation, wherein:

the horizontal moving part group is movably arranged on the gantry assembly along a second direction;

the vertical motion part group can be movably arranged on the horizontal motion part group along the direction vertical to the substrate bearing platform;

the detection head is arranged on the vertical motion part group; the detection head is provided with an electricity applying unit for applying voltage, a power receiving unit for receiving the voltage applied by the electricity applying unit and a control unit for detecting the voltage change of the power receiving unit, the power receiving unit is electrically connected with the electricity applying unit, and the control unit is in signal connection with the power receiving unit.

the third working component is a part disc bearing mechanism and is used for bearing a part disc for placing parts to be assembled;

the second working assembly is an assembly and is used for assembling parts to be assembled on the part disc after the first working assembly is aligned;

the fourth working assembly is a rechecking visual assembly and is used for confirming whether the assembly position of the part assembled by the second working assembly on the substrate is correct or not.

Preferably, the parts tray loading mechanism further comprises a loading device for conveying the parts trays to the parts tray loading mechanism, the loading device comprises:

the material box is arranged on the supporting disk and is used for containing a part disk for placing parts to be assembled;

the material box conveying part group is arranged on the supporting disc and is used for conveying the material boxes to a vertical carrying station;

a parts tray carrying part group arranged on the supporting tray, wherein the parts tray carrying part group is used for moving the parts trays in the material box at the vertical carrying station out of the material box;

and the vertical conveying part group is arranged on the supporting disc and can move along the direction vertical to the substrate bearing platform, and the vertical conveying part group is used for conveying the part disc moved out of the magazine to the part disc bearing mechanism and carrying out the feeding operation of the part disc bearing parts to be assembled.

Preferably, the parts tray carrying mechanism comprises:

a base plate mounted to the gantry assembly;

the vertical lifting mechanism can move along the direction vertical to the substrate bearing platform and is arranged on the bottom plate;

the part disc clamping mechanism is arranged on the vertical lifting mechanism and used for clamping the part disc conveyed by the vertical conveying part group, the part disc clamping mechanism is provided with an opening station and a clamping station, and when the part disc clamping mechanism is positioned at the clamping station, the part disc clamping mechanism clamps the part disc;

and the rotating mechanism is arranged on the part disc clamping mechanism and is used for correcting the angle position of the part on the part disc.

Preferably, the assembly includes an assembly unit for realizing an assembly function and a part detection visual unit for detecting positions of parts to be assembled on the part tray and determining an assembly route, the assembly unit includes a fixing plate, a first vertical moving part group, a second vertical moving part group and a transplanting head for assembling the parts to be assembled, the part detection visual unit is mounted on the fixing plate, and in the assembly unit:

the fixing plate is movably arranged on the gantry assembly along a second direction;

the first vertical moving part group can be movably arranged on the fixed plate along the direction vertical to the substrate bearing platform;

the second vertical motion part group can be movably arranged on the first vertical motion part group along the direction vertical to the substrate bearing platform;

the transplanting head is installed on the second vertical movement part group and used for moving the parts to be assembled in the part disc to the preset position of the base plate.

the second working assembly is a short-circuit repairing assembly and is used for repairing the short-circuit position of the circuit in the substrate after the alignment detection of the first working assembly;

the third working assembly is an open circuit repairing assembly and is used for repairing the open circuit position of the circuit in the substrate after the alignment detection of the first working assembly;

the fourth working assembly is a rechecking visual assembly and is used for confirming that the second working assembly and the repaired substrate of the third working assembly are rechecked.

Preferably, the short circuit repairing assembly comprises a positioning vision system for positioning the short circuit point in the substrate and a short circuit repairing unit for repairing the short circuit point of the substrate; the short circuit repairing unit comprises a connecting plate, a vertical moving part group and a laser generator for repairing a short circuit point of the substrate, the positioning vision system is installed on the connecting plate, and in the short circuit repairing unit:

the connecting plate is movably arranged on the gantry assembly along a second direction;

the vertical moving part group can be arranged on the connecting plate in a way of moving along the direction vertical to the substrate bearing platform;

the laser generator is mounted to the vertical moving part group.

Preferably, the open circuit repair assembly includes a positioning vision system and an open circuit repair unit; the broken circuit repairing unit comprises a connecting plate, a vertical moving part group and a broken circuit repairing pen for repairing a broken circuit point of the substrate, the positioning vision system is installed on the connecting plate, and in the broken circuit repairing unit:

the open circuit repair pen is mounted to the vertical moving part group.

the second working assembly and the third working assembly are both printing assemblies and are used for printing on the substrate after the alignment detection of the first working assembly;

the fourth working assembly is a rechecking visual assembly and is used for rechecking the printed substrates of the second working assembly and the third working assembly.

Preferably, the printing assembly comprises the detection assembly including a horizontal moving part group, a vertical moving part group and a print head for performing a printing operation, wherein:

the vertical moving part group can be movably arranged on the horizontal moving part group along the direction vertical to the substrate bearing platform;

the print head is mounted to the vertical moving part group.

Drawings

Fig. 1 is a schematic structural diagram of a substrate operation platform according to an embodiment of the present invention;

FIG. 2 is a schematic view of the frame of FIG. 1;

FIG. 3 is a schematic view of the substrate stage of FIG. 1;

FIG. 4 is a schematic view of another embodiment of the substrate support platform of FIG. 1;

FIG. 5 is a schematic structural diagram of the supporting unit in FIG. 1;

FIG. 6 is a schematic diagram of the pre-positioning assembly of FIG. 1;

FIG. 7 is a schematic perspective view of the pre-positioning assembly of FIG. 6;

FIG. 8 is a schematic diagram of the predetermined bit cell of FIG. 6;

FIG. 9 is a schematic structural view of the ejector pin assembly of FIG. 1;

FIG. 10 is a schematic perspective view of the ejector pin assembly shown in FIG. 9;

fig. 11 is a block diagram of an electric control system of the substrate operation platform provided in the embodiment of the present invention;

fig. 12 is a schematic structural view of a detection assembly in a first mode in a substrate processing platform according to an embodiment of the present invention;

fig. 13 is a schematic structural view of a feeding device in a second mode in a substrate operation platform according to an embodiment of the present invention;

fig. 14 is another schematic structural view of a feeding device in a second mode in a substrate processing platform according to an embodiment of the present invention;

FIG. 15 is a schematic view of the substrate work platform of FIG. 1 after being installed with a loading device;

fig. 16 is a schematic structural view of a part tray carrying mechanism in a second mode in a substrate processing platform according to an embodiment of the present invention;

FIG. 17 is a further structural schematic view of the parts tray carrier of FIG. 16;

fig. 18 is a schematic structural view of an assembly component in a second mode in a substrate work platform according to an embodiment of the present invention;

fig. 19 is a schematic structural diagram of a substrate working platform according to an embodiment of the present invention.

Icon: 10-a frame; 20-a support disk; 30-a substrate carrying platform; 301-a rotary motion mechanism; 302-gas path interface; 303-gas port; 304-a calibration section; 305-a through slot; 40-a first gantry assembly; 50-a second gantry assembly; 60-a gas circuit module; 70-a support unit; 701-fixing plate; 702-an adjusting bolt; 703-a connecting rod; 704-a support bearing; 80-a pre-positioning assembly; 801-a first predetermined bit location; 802-a second predetermined bit cell; 803-horizontal motion mechanism; 804-a vertical movement mechanism; 805-an alignment wheel; 90-a ram assembly; 901-set of ejector pins; 902-a mounting frame; 903-a guide mechanism; 904 — a drive mechanism; 100-origin camera; 110 — a first working assembly; 120-a second working assembly; 1201 a-group of horizontal moving parts; 1202 a-vertical motion group; 1203 a-detection head; 1201 b-part inspection vision unit; 1202 b-fixed plate; 1203 b-first vertical movement group; 1204 b-a second group of vertical moving parts; 1205 b-transplanting head; 130-a third working assembly; 1301 a-a base plate; 1302 a-vertical lift mechanism; 1303 a-part disk clamping mechanism; 1304 a-a rotation mechanism; 140-a fourth working assembly; 150-a substrate; 160-a feeding device; 1601-a cartridge; 1602-cartridge transport group; 1603-parts tray handling group; 1604-vertical handling section group; 170-part disc; 01-an actuator; 011-non-electric machines; 012-motors; 02-a drive unit; 03-a motion control unit; 04-a feedback unit; 05-a vision unit; 06-PC.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

An embodiment of the present invention provides a substrate operation platform, please refer to fig. 1 and fig. 2, including:

a stand assembly including a frame 10 and a support plate 20 mounted on the top of the frame 10, wherein a buffer assembly may be disposed between the support plate 20 and the stand assembly to maintain stability and vibration isolation of the support plate 20, for example, a gas spring or a shock absorbing rubber pad may be used to connect the support plate 20 and the stand assembly; it should be noted that the supporting disc 20, as a mounting base for all high-precision components, must have high stability and low thermal sensitivity, preferably natural marble;

the substrate bearing assembly comprises a substrate bearing platform 30, and the substrate bearing platform 30 is arranged on the support plate 20; the side of the substrate support platform 30 facing away from the support plate 20 forms a support surface for supporting the substrate 150 shown in fig. 1;

at least one gantry assembly, it being understood that the number of gantry assemblies can be provided as one or more, each gantry assembly comprising a gantry. Taking two gantry assemblies as an example, as shown in fig. 1, one of the two gantry assemblies is a first gantry assembly 40, the other one is a second gantry assembly 50, and each of the two oppositely arranged gantry assemblies is movably mounted on the supporting plate 20 along a first direction, wherein the first direction is perpendicular to the extending direction of the gantry and parallel to the bearing surface; each gantry assembly is provided with at least one working assembly, the at least one working assembly is movably arranged on the gantry assembly along a second direction parallel to the bearing surface, and the second direction is vertical to the first direction; each working assembly in the at least one working assembly is detachably connected with the gantry assembly; each gantry assembly is also provided with a driving part, and the driving part is used for driving the working assembly to move;

and the driving assembly is arranged on the supporting disc 20 and is used for driving the two gantry assemblies to move in the first direction.

Among the above-mentioned base plate work platform, base plate work platform includes the stand subassembly, and this stand subassembly includes frame 10 and installs in the supporting disk 20 of frame 10, installs base plate carrier assembly and two longmen subassemblies on the supporting disk 20. Specifically, the substrate supporting assembly includes a substrate supporting platform 30, wherein a supporting surface for supporting the substrate 150 is formed on a side of the substrate supporting platform 30 away from the supporting plate 20; the first gantry assembly 40 and the second gantry assembly 50 of the two gantry assemblies are oppositely disposed on the support tray 20, and each gantry assembly is movable in a first direction parallel to the load-bearing surface. Each gantry assembly is provided with a working assembly capable of moving along a second direction. It is noted that the second direction is also parallel to the carrying surface, and the second direction is perpendicular to the first direction. When the substrate working platform is used for working the substrate 150, because each working assembly is detachably connected with the gantry assembly, the type of the working assembly can be set according to requirements, and the substrate 150 on the bearing surface can be operated. It will be appreciated that in using the above-described substrate work platform, the drive assembly may be controlled to drive the gantry assembly to move in a first direction, and the drive section may be controlled to drive the work assembly to move in a second direction. In the actual operation process of the substrate operation platform, when the working assembly moves along the second direction, the working assembly can operate all areas of the substrate 150 on the bearing surface in the plane formed by the first direction and the second direction in cooperation with the movement of the gantry assembly along the first direction.

The utility model provides a base plate work platform can set up different work assembly on every gantry assembly, realizes the different operations to base plate 150. The utility model provides a base plate work platform no longer restricts single operation content, can integrate multiple functions in same base plate work platform, has realized base plate work platform's multi-functional to but reduction in production cost.

It should be noted that, in order to ensure the stability of the apparatus, the rack 10 with eight supporting points is preferred by analyzing the deformation of the supporting plate 20. Of course, in order to make the overall structure of the substrate working platform compact, other devices may be mounted on the stand assembly, for example, an air path module 60 for controlling the air path of the entire platform may be mounted on the side of the frame 10.

In addition, a support adjusting assembly may be installed on a side of the substrate supporting platform 30 facing the supporting plate 20 for adjusting the parallelism of the substrate supporting platform 30 with the first gantry assembly 40 and the second gantry assembly 50. Specifically, the support adjusting assembly is composed of a plurality of support units 70, and referring to fig. 3, 4 and 5 in conjunction with fig. 1, each support unit 70 is composed of a fixing plate 701, an adjusting bolt 702, a connecting rod 703 and a support bearing 704, the fixing plate 701 is fixed on the support plate 20, the connecting rod 703 is installed on the fixing plate 701, the support bearing 704 is fixed on the top of the connecting rod 703, the height of the support bearing 704 can be controlled by adjusting the adjusting bolt 702, so as to adjust the overall parallelism of the substrate bearing platform 30, and the support bearing 704 is preferably an air bearing.

It should be noted that, referring to fig. 3 and fig. 5, when the supporting bearing 704 is an air bearing, the supporting bearing 704 uses an air column to support the substrate supporting platform 30, so as to prevent hard contact between the supporting bearing 704 and the substrate supporting platform 30, and to prolong the service life of the substrate supporting platform 30.

Of course, a variety of air paths may be disposed within the substrate support platform 30, and an air path interface 302 as shown in fig. 4 may be disposed on the substrate support platform 30. Referring to fig. 3 and 4, a plurality of air ports 303 are formed on the substrate supporting platform 30, and an air floating assembly corresponding to the air ports 303 is disposed in the substrate supporting platform 30. The air floating assembly has a blowing state and a suction state, and when the air floating assembly is in the blowing state, the air floating assembly supports the substrate 150 by using air, and when the air floating assembly is in the suction state, the air floating assembly fixes the substrate on the surface of the substrate bearing platform 30 by using vacuum adsorption. Here, in order to increase the adsorption area, the orifice of the gas port 303 is preferably formed as a cross-shaped groove.

On the basis of the above technical solution, please continue to refer to fig. 1, the substrate operation platform provided in the embodiment of the present invention further includes a pre-positioning assembly 80 for pre-positioning the substrate 150 placed on the substrate supporting platform 30, wherein the pre-positioning assembly 80 is installed on the supporting plate 20 and is located between the supporting plate 20 and the substrate supporting platform 30; a through groove 305 for the pre-positioning assembly 80 to pass through is formed on the substrate carrying platform 30; the pre-positioning assembly 80 is provided with an initial station, a material waiting station and a clamping station; when the pre-positioning assembly 80 is at the initial station, the pre-positioning assembly 80 is placed between the support plate 20 and the substrate supporting platform 30; when the pre-positioning assembly 80 is positioned at the material waiting station, the pre-positioning assembly 80 extends out of the through groove part to the side, away from the support plate 20, of the substrate bearing platform 30; when the pre-positioning assembly 80 is at the clamping station, the pre-positioning assembly 80 clamps the substrate 150 to be aligned, so as to align the substrate 150.

Specifically, the pre-positioning assembly 80 includes two first pre-positioning sets oppositely disposed along a first direction for aligning the substrate 150 to be aligned in the first direction; and two second pre-positioning sets oppositely arranged along the second direction for aligning the substrate 150 to be aligned in the second direction.

It is noted that, as shown in fig. 6 and 7, the first predetermined bit group includes one first predetermined bit unit 801 and the second predetermined bit group includes one second predetermined bit unit 802, or the first predetermined bit group includes two first predetermined bit units 801 and the second predetermined bit group includes two second predetermined bit units 802. In other words, the pre-positioning assembly 80 may include 4 or 8 pre-positioning units altogether, and the specific arrangement may be changed according to the requirement.

With continuing reference to fig. 6, 7 and 8, as for the structure of each pre-positioning unit, each pre-positioning unit may include a horizontal moving mechanism 803 forming a plane in the first direction and the second direction, a vertical moving mechanism 804 forming a plane in the direction perpendicular to the first direction and the second direction, and an alignment wheel 805 for positioning the substrate 150. Through the cooperation of the horizontal movement mechanism 803 and the vertical movement mechanism 804, the pre-positioning assembly 80 can pre-position substrates 150 with different sizes.

In a specific configuration of the substrate working platform provided in the embodiment of the present application, the substrate supporting platform 30 may be mounted on the supporting plate 20 by a rotating device located at the center of the platform. For example, the substrate supporting platform 30 is mounted on the supporting tray 20 through the rotating mechanism 301, and referring to fig. 3, the substrate supporting platform can be driven by the rotating mechanism 301 to rotate around the axis of the vertical supporting surface to correct the angle error of the substrate 150. It should be noted that, in cooperation with the pre-positioning assembly 80 to pre-position the substrate 150, the rotary motion mechanism 301 re-positions the substrate 150, that is, the substrate 150 is precisely positioned.

On the basis of the above technical solution, please continue to refer to fig. 1, fig. 9 and fig. 10, the substrate operation platform according to the embodiment of the present invention further includes a lift rod assembly 90 for pre-supporting the substrate 150 before the substrate bearing platform 30 bears the substrate 150, wherein the lift rod assembly 90 includes a lift rod group 901 movably installed on the mounting plate along a direction perpendicular to the substrate bearing platform 30; a plurality of through holes for the ejector rod group 901 to enter and exit are formed on the substrate bearing platform 30; the ejector rod group 901 has a stowing station and an ejection station; when the ejector pin group 901 is at the retraction station, the ejector pin group 901 is received between the support plate 20 and the substrate supporting platform 30; when the ejector rod group 901 is in the ejection station, the ejector rod group 901 extends out of the through hole to the side of the substrate carrying platform 30 away from the supporting plate 20.

As an alternative embodiment, as shown in fig. 9 and 10 in particular, the ram assembly 90 is composed of a ram group 901, a mounting bracket 902, a guide mechanism 903, and a drive mechanism 904. Two driving mechanisms 904 are oppositely arranged on the supporting plate 20, and the mounting frame 902 is mounted on the movable plates of the two driving mechanisms 904 and can move along with the free ends of the driving mechanisms 904. The side of the mounting frame 902, which is away from the supporting plate 20, is provided with a mandril set 901, and in order to switch the mandril set 901 between the retracting station and the ejecting station, the mandril set 901 can accurately align the through holes on the substrate bearing platform 30, and the plurality of guide mechanisms 903 are uniformly distributed inside the mounting frame 902.

It should be noted that the lift pin group 901 includes a plurality of lift pins, and some of the lift pins in the plurality of lift pins can perform other functions while supporting the substrate 150. For example, when the lift pins are ion-blown, static electricity on the substrate 150 can be removed; when the lift pins are load sensors, the presence or absence of the substrate 150 can be detected.

As for the electric control system in the substrate working platform provided by the embodiment of the present invention, as shown in fig. 11, the electric control system may be composed of an actuator 01, a driving unit 02, a motion control unit 03, a feedback unit 04, a vision unit 05, and a PC06(personal computer).

The actuating mechanism 01 is divided into a non-motor type 011 and a motor type 012: the non-electric machines 011 are mainly cylinders, vacuum elements and the like; the motors 012 are mainly linear motors, ac rotary servomotors, dc servomotors, stepping motors, and the like. The feedback unit 04 is mainly composed of various digital sensors, various analog sensors, a grating ruler and the like. The vision unit 05 is mainly an image sensor for feeding back the coordinate position information of the product; the driving unit 02 controls the current to drive the motor, and accurately controls the position of the motor through feedback; the motion control unit 03 is a device motion control core, receives an instruction of an upper computer, converts the instruction of the upper computer into a position instruction, and controls the motor to move according to a planned track; the information of the equipment is mastered in real time by analyzing the information of various sensors; feeding back to an upper computer, and a vision unit 05: the PC06 issues commands to drive the vision work, and the product position offset fed back by the vision unit 05 is sent to the PC 06.

As to the utility model discloses software control system in the base plate work platform that the embodiment provided comprises computer system and process input output system etc.. The computer system automatically processes the information according to various information of the real-time production process working condition sent by the process input equipment and a preset control algorithm, timely selects a corresponding control strategy, and sends a control command to the production process through the process output equipment in real time.

Referring to fig. 1, the substrate processing platform according to the embodiment of the present disclosure further includes an origin camera 100 for defining a coordinate system of the substrate supporting platform 30, the origin camera 100 is mounted on the supporting plate 20, and the substrate supporting platform 30 is provided with a calibration portion 304 for marking an origin of the origin camera 100, specifically, as shown in fig. 4, the calibration portion 304 may be an identifier; when the focus center of the origin camera 100 focuses on the calibration portion 304, the origin camera 100 cooperatively forms a coordinate system, as shown in fig. 19, the coordinate system uses the calibration portion 304 as an origin, the first direction as an X-axis, the second direction as a Y-axis, and the direction perpendicular to the supporting platform as a Z-axis. In other words, a coordinate system is established for the substrate stage 30 with the focus center of the origin camera 100 as a coordinate zero point.

It should be noted that when the number of the working assemblies on each gantry assembly is specifically set, one working assembly can be arranged on each gantry assembly, or two working assemblies can be arranged on each gantry assembly, and the specific number can be set according to requirements.

As shown in fig. 1 and 19, the two gantry assemblies are distributed into a first gantry assembly 40 and a second gantry assembly 50, the first gantry assembly 40 is provided with a first working assembly 110 and a second working assembly 120, the second gantry assembly 50 is provided with a third working assembly 130 and a fourth working assembly 140, and the second working assembly 120, the first working assembly 110, the third working assembly 130 and the fourth working assembly 140 are arranged along a first direction.

Specifically, the first gantry assembly 40 and the second gantry assembly 50 are mounted on the upper surface of the support plate 20 through guide rails; the first working assembly 110 and the second working assembly 120 are respectively installed at both sides of the first gantry assembly 40 through guide rails, the third working assembly 130 and the fourth working assembly 140 are respectively installed at both sides of the second gantry assembly 50 through guide rails, and the four working assemblies can move in the second direction through a driving part. That is, the four working modules can be moved to any position of the substrate supporting platform 30 at high speed by the driving unit.

The embodiment of the utility model provides an among the base plate work platform practical application:

the first method is as follows: when the working component is a detection component, the circuit detection function of the substrate 150 can be realized.

Specifically, the first working assembly 110 is a substrate alignment vision assembly, and is configured to perform alignment detection on the substrate 150 placed on the substrate supporting platform 30; the second working assembly 120 and the third working assembly 130 are both detection assemblies, and are used for detecting the circuits in the substrate 150 after the alignment detection of the first working assembly 110; the fourth working module 140 is a line anomaly positioning vision module for positioning the locations of the line anomalies detected by the second working module 120 and the third working module 130.

In the first mode, both the second working assembly 120 and the third working assembly 130 are detection assemblies, as shown in fig. 12, taking the second working assembly 120 as a detection assembly as an example, the detection assembly specifically includes a horizontal moving part group 1201a, a vertical moving part group 1202a, and a detection head 1203a for performing a detection operation, where: the horizontal moving part group 1201a is movably arranged on the gantry assembly along a second direction; the vertical moving part group 1202a is movably mounted on the horizontal moving part group 1201a along the direction of the vertical substrate supporting platform 30; the detection head 1203a is mounted on the vertical moving part group 1202 a; the detection head 1203a is mounted with a power-on unit for applying voltage, a power-receiving unit for receiving the voltage applied by the power-on unit, and a control unit for detecting the voltage variation of the power-receiving unit, the power-receiving unit is electrically connected with the power-on unit, and the control unit is in signal connection with the power-receiving unit.

It should be understood that when the second working assembly 120 is a detection assembly, the horizontal moving part group 1201a is mounted to the first gantry assembly 40; similarly, when the third working module 130 is a detecting module, the horizontal moving part group 1201a is installed on the second gantry module 50.

When the substrate operation platform of each working assembly works in the first mode, after the substrate alignment visual assembly is matched with the rotary motion mechanism 301 for fine positioning, the two groups of detection assemblies walk to preset positions and descend to be close to the substrate 150, the power-on unit applies voltage, the power-on unit receives the voltage, and the special control unit is used for analyzing the waveform of the voltage change of the power-on unit to judge whether the on-off condition of the internal circuit of the substrate 150 meets the design requirement. The abnormal positions of the lines detected by the second working assembly 120 and the third working assembly 130 are located by the fourth working assembly 140, or the specific positions of the defects can be confirmed by the visual assemblies on the first working assembly 110 and the fourth working assembly 140.

The second method comprises the following steps: when the working assembly is an assembly, a part assembly function on the substrate 150 can be realized.

Specifically, the first working assembly 110 is a substrate alignment vision assembly, and is configured to perform alignment detection on the substrate 150 placed on the substrate supporting platform 30; the third working component 130 is a part tray carrying mechanism for carrying a part tray 170 on which parts to be assembled are placed; the second working assembly 120 is an assembly for assembling parts to be assembled placed on the parts tray 170 after the first working assembly 110 is aligned; the fourth working assembly 140 is a review vision assembly for confirming whether the assembly position of the parts on the base plate 150 is correct after the second working assembly 120 is assembled.

In order to facilitate the assembly operation of parts on the substrate in the assembly process and the assembly, the utility model provides a substrate operation platform further comprises a feeding device for conveying the part disc 170 to the part disc bearing mechanism.

Specifically, as shown in fig. 13, 14 and 15, the loading device 160 is installed on the supporting plate 20, and the loading device 160 includes: a magazine 1601 mounted to the support tray 20, the magazine 1601 being for holding a parts tray 170 (shown in particular in fig. 16) in which parts to be assembled are placed; a magazine transfer portion group 1602 mounted to the support tray 20, the magazine transfer portion group 1602 for transferring the magazine 1601 to the vertical conveyance station; a parts tray conveying unit group 1603 attached to the support tray 20, the parts tray conveying unit group 1603 being used for removing the parts tray 170 in the magazine 1601 at the vertical conveying station from the magazine 1601; and a vertical conveying part group 1604 which is mounted on the support tray 20 and can move along the direction vertical to the substrate bearing platform 30, wherein the vertical conveying part group 1604 is used for conveying the part tray 170 removed from the magazine 1601 to a part tray bearing mechanism to perform a loading operation of the part tray 170 bearing parts to be assembled.

As shown in fig. 16 and 17, the parts tray carrying mechanism includes: a base plate 1301a mounted to the gantry assembly; a vertical lift mechanism 1302a mounted on the base plate 1301a to be movable in a direction perpendicular to the substrate support platform 30; a part disk clamping mechanism 1303a mounted on the vertical lifting mechanism 1302a and used for clamping the part disk 170 conveyed by the vertical conveying unit, wherein the part disk clamping mechanism 1303a is provided with an opening station and a clamping station, and when the part disk clamping mechanism 1303a is positioned at the clamping station, the part disk clamping mechanism 1303a clamps the part disk 170; and the rotating mechanism 1304a is installed on the part disc clamping mechanism 1303a and used for correcting the angular position of the parts to be assembled on the part disc 170.

As shown in fig. 18, the assembly includes an assembly unit for realizing an assembly function and a part inspection visual unit 1201b for detecting a position of a part to be assembled on the part tray 170 and determining an assembly route, the assembly unit includes a fixed plate 1202b, a first vertically moving part group 1203b, a second vertically moving part group 1204b, and a transplanting head 1205b for assembling the part to be assembled, the part inspection visual unit 1201b is installed on the fixed plate 1202b, and in the assembly unit:

the fixed plate 1202b is movably mounted on the gantry assembly along the second direction;

the first vertical moving part group 1203b is movably mounted on the fixed plate 1202b along the direction of the vertical substrate supporting platform 30;

the second vertical moving part group 1204b is movably installed on the first vertical moving part group 1203b in the direction perpendicular to the substrate supporting platform 30;

the transplanting head 1205b is installed at the second vertical moving part group 1204b to move the parts to be assembled in the parts tray 170 to a preset position of the substrate.

When the substrate operation platform of each working assembly works in the second mode, after the substrate alignment visual assembly is matched with the rotary motion mechanism 301 for fine positioning, the first gantry assembly 40 is moved to enable the assembly to move to the designated position, and meanwhile, the second gantry assembly 50 is moved to enable the part disc bearing mechanism to move to the designated position; the first vertical moving part group 1203b in the assembling unit is lowered to make the transplanting head 1205b approach the parts tray 170, and the second vertical moving part group 1204b moves along the direction vertical to the substrate bearing platform 30 through the matching movement of the two gantry assemblies to assemble the parts to be assembled on the parts tray 170 at the designated position of the substrate. After the assembly is completed, the rechecking visual assembly is used for checking and confirming whether the assembly positions of all parts are correct or not.

Specifically, when the second working assembly 120 is engaged with the third working assembly 130, the magazine transfer portion group 1602 transfers the magazine 1601 to the vertical transfer station, and the parts tray transfer portion group 1603 removes the parts tray 170 from the magazine 1601; the part tray carrying mechanism moves above the loading device 160, the vertical lifting mechanism 1302a in the part tray carrying mechanism descends, and the part tray clamping mechanism 1303a opens. The vertical conveying group 1604 of the feeding device conveys the parts tray 170 removed from the magazine 1601 to the feeding position, and feeds the parts tray onto the parts tray carrying mechanism, and the parts tray clamp mechanism 1303a is closed. The moving part detection visual unit 1201b in the assembly detects the position of each part to be assembled on the part tray 170, the rotating mechanism 1304a corrects the deviation, and the analysis planning assembly route is confirmed according to the distribution condition of the parts to be assembled.

The third method comprises the following steps: when the working component is a repair component, the circuit repair function of the substrate 150 can be realized.

Specifically, referring to fig. 1, the first working assembly 110 is a substrate alignment vision assembly for performing alignment detection on the substrate 150 disposed on the substrate supporting platform 30; the second working assembly 120 is a short-circuit repairing assembly, and is used for repairing the short-circuit position of the circuit in the substrate 150 after the alignment detection of the first working assembly 110; the third working assembly 130 is an open-circuit repairing assembly, and is used for repairing an open circuit of the circuit in the substrate 150 after the alignment detection of the first working assembly 110; the fourth working assembly 140 is a review vision assembly for confirming that the repaired substrates of the second working assembly 120 and the third working assembly 130 are reviewed.

Specifically, the short-circuit repairing assembly comprises a positioning vision system for positioning a short-circuit point in the substrate and a short-circuit repairing unit for repairing the short-circuit point of the substrate; the short circuit repair unit comprises a connecting plate, a vertical movement part group and a laser generator for repairing a short circuit point of a substrate, the positioning vision system is installed on the connecting plate, and the short circuit repair unit comprises: the connecting plate is movably arranged on the gantry assembly along the second direction; the vertical moving part group can be arranged on the connecting plate in a way of moving along the direction vertical to the substrate bearing platform 30; the laser generator is mounted to the vertical motion section group.

The broken circuit repairing assembly comprises a positioning vision system and a broken circuit repairing unit; the repair unit that opens circuit includes connecting plate, vertical motion portion group and the repair pen that opens circuit that is used for restoreing the broken circuit point of base plate 150, and the location vision system is installed in the connecting plate, and in the repair unit that opens circuit: the connecting plate is movably arranged on the gantry assembly along the second direction; the vertical moving part group can be arranged on the connecting plate in a way of moving along the direction vertical to the substrate bearing platform 30; the open circuit repair pen is arranged on the vertical moving part group.

When the substrate operation platform of each working assembly works in the third mode, after the substrate alignment visual assembly is matched with the rotary motion mechanism 301 for fine positioning, the first gantry assembly 40 is controlled to move to the specified position according to the short-circuit position information given by the upper computer, the positioning visual system in the short-circuit repairing assembly confirms whether the position is correct or not, after the completion of the confirmation, the short-circuit repairing assembly moves to the short-circuit position, the vertical motion part group of the short-circuit repairing assembly descends, and the short-circuit line is repaired by the laser generator in a working mode. Similarly, according to the information of the open circuit position given by the upper computer, the second gantry assembly 50 is driven to move to the designated position, the positioning vision system in the open circuit repairing assembly confirms whether the position is correct, after the confirmation is completed, the open circuit repairing assembly moves to the open circuit position, the vertical moving part group in the open circuit repairing assembly descends, and the open circuit repairing pen works to repair the open circuit. And after the repair is finished, the rechecking visual assembly is used for checking and confirming whether all the lines are repaired or not.

In the third embodiment, the substrate work table of each work module may be configured to place the repair auxiliary material and automatically replace the repair module auxiliary material.

The method is as follows: when the working component is a printing component, a high-precision printing function can be realized on the substrate 150.

Specifically, referring to fig. 1, the first working assembly 110 is a substrate alignment vision assembly, and is used for performing alignment detection on a substrate placed on the substrate supporting platform 30; the second working assembly 120 and the third working assembly 130 are both printing assemblies, and are used for printing on the substrate 150 after the alignment detection of the first working assembly 110; the fourth working assembly 140 is a review vision assembly for reviewing the printed substrates of the second working assembly 120 and the third working assembly 130.

In the fourth mode, the second working assembly 120 and the third working assembly 130 are both printing assemblies, and the printing assemblies comprise a horizontal moving part group, a vertical moving part group and a printing head for printing operation, wherein the horizontal moving part group is movably mounted on the gantry assembly along the second direction; the vertical moving part group is movably arranged on the horizontal moving part group along the direction of the vertical substrate bearing platform 30; the print head is mounted to the vertical moving part group.

It should be understood that when the second working assembly 120 is a printing assembly, the set of horizontal motion segments is mounted to the first gantry assembly 40; similarly, when the third working module 130 is a printing module, the horizontal moving part set is installed on the second gantry module 50.

When the substrate operation platform of each working assembly in the fourth mode works, after the substrate alignment vision assembly is matched with the rotary motion mechanism 301 for fine positioning, the two groups of printing assemblies walk to preset positions and descend to be close to the substrate 150, the printing pens in the second working assembly 120 and the third working assembly 130 are used for printing various structures on the substrate 150, and the printing accuracy is confirmed through the fourth working assembly 140.

It should be noted that the arrangement form of the first working assembly 110, the second working assembly 120, the third working assembly 130 and the fourth working assembly 140 in each mode is not fixed, and the first mode is taken as an example: the first working assembly 110 and the fourth working assembly 140 may be repair assemblies, the second working assembly 120 may be a substrate alignment vision assembly, and the third working assembly 130 may be a circuit abnormality positioning vision assembly, although other combinations exist, which are not described herein again. Of course, it should be understood that the first working assembly 110, the second working assembly 120, the third working assembly 130 and the fourth working assembly 140 are not limited to the structures of the above embodiments, and the above manner is only exemplary.

On the basis of the technical scheme, provide one now the utility model provides a base plate work platform's work flow specifically as follows:

the mandril in the mandril assembly 90 rises, the pre-positioning assembly 80 rises, and the aligning wheel 805 in the pre-positioning assembly 80 moves to a material waiting station; the substrate 150 is moved above the substrate carrying platform 30 by the robot, the robot is lowered, and the substrate 150 is placed on the raised top bar; the robot retracts, the substrate bearing platform 30 is opened by air floatation, the mandril descends, and the substrate 150 is air-floated and is positioned on the upper surface of the substrate bearing platform 30; the aligning wheel 805 of the pre-positioning assembly 80 moves to the clamping station to realize the pre-positioning of the substrate 150; after pre-positioning is completed, air floatation is closed, vacuum adsorption is carried out to open the adsorption base plate 150, the pre-positioning assembly 80 returns to the material waiting station and then descends, and the pre-positioning assembly moves to the initial station after descending is completed; the alignment camera mounted on the working assembly moves to the position above the substrate 150 to search for the reference mark of the substrate 150, compares the reference mark with the input standard substrate 150, adjusts and corrects the angular deviation through the rotary motion mechanism 301, corrects the position deviation of the substrate 150 through changing the positions of the X coordinate and the Y coordinate, and completes the fine positioning. The working assembly starts to act to complete the preset function, and returns to the initial station after the action is completed; the vacuum state between the substrate platform 30 and the substrate 150 is broken, the lift pins lift the substrate 150 to the discharging position, and the robot enters to take the substrate 150 away.

It should be noted that, in the above-mentioned work flow, the position of the origin camera 100 is used as a coordinate zero point, a coordinate system is established for the substrate supporting platform 30, the perpendicularity deviation of each working assembly in the Y direction relative to the coordinate system is measured and compensated by control, so as to ensure the accuracy of the point coordinates of each working assembly in the whole substrate supporting platform 30. After the substrate 150 is placed on the substrate supporting platform 30, the pre-positioning and the fine positioning are performed to adjust the substrate 150 to be perpendicular to the coordinate system, and the deviation in the XY direction is compensated by the control, as shown in fig. 19, so as to finally ensure that the coordinate systems of the respective working modules (Y1 of the first working module 110, Y2 of the second working module 120, Y3 of the third working module 130, and Y4 of the fourth working module 140) completely coincide with the coordinate system of the substrate 150.

To sum up, the embodiment of the utility model provides a substrate operation platform can realize high-speed high accuracy high stability operation to base plate 150.

It will be apparent to those skilled in the art that various changes and modifications may be made to the embodiments of the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. A substrate work platform, comprising:

each gantry assembly comprises a gantry, and is movably mounted on the support plate along a first direction, wherein the first direction is perpendicular to the extending direction of the gantry and is parallel to the bearing surface; each gantry assembly is provided with at least one working assembly, the at least one working assembly is movably arranged on each gantry assembly along a second direction parallel to the bearing surface, and the second direction is vertical to the first direction; each working assembly in the at least one working assembly is detachably connected with each gantry assembly; each gantry assembly is also provided with a driving part, and the driving part is used for driving the working assembly to act;

2. The substrate work platform of claim 1, further comprising a pre-positioning assembly for pre-positioning a substrate placed on the substrate support platform, the pre-positioning assembly being mounted to the support tray and located between the support tray and the substrate support platform; a through groove for the pre-positioning assembly to pass through is formed on the substrate bearing platform; the pre-positioning assembly is provided with an initial station, a material waiting station and a clamping station; when the pre-positioning assembly is at an initial station, the pre-positioning assembly is arranged between the support plate and the substrate bearing platform; when the pre-positioning assembly is positioned at a material waiting station, the pre-positioning assembly extends out of the through groove part to one side of the substrate bearing platform, which is far away from the supporting plate; when the pre-positioning assembly is located at the clamping station, the pre-positioning assembly clamps the substrate to be aligned so as to align the substrate.

3. The substrate work platform of claim 2, wherein the pre-positioning assembly comprises two first pre-positioning sets oppositely arranged along a first direction for aligning the substrate to be aligned in the first direction; the two second pre-positioning groups are oppositely arranged along the second direction and used for aligning the substrate to be aligned in the second direction.

4. The substrate handling platform of claim 1, further comprising a support adjustment assembly for supporting the substrate support platform, the support adjustment assembly mounted to the support tray and positioned between the support tray and the substrate support platform; and a supporting point for supporting the support adjusting assembly is formed on one side surface of the substrate bearing platform facing the supporting disc.

5. The substrate handling platform of claim 1, wherein the substrate support platform further comprises an air bearing assembly for supporting a substrate, the air bearing assembly having an air-blowing state and an air-suction state; when the air floatation assembly is in an air blowing state, the air floatation assembly blows air for bearing the substrate; when the air floatation assembly is in an air suction state, the bearing surface of the substrate bearing platform is used for bearing a substrate.

6. The substrate handling platform of claim 1, further comprising a lift pin assembly for pre-supporting the substrate prior to the substrate being carried by the substrate carrying platform, the lift pin assembly comprising a set of lift pins movably mounted to the support plate in a direction perpendicular to the substrate carrying platform; a plurality of through holes for the ejector rod group to enter and exit are formed on the substrate bearing platform; the ejector rod group is provided with a retracting station and an ejecting station; when the ejector rod group is at a retraction station, the ejector rod group is received between the support plate and the substrate bearing platform; when the ejector rod group is positioned at an ejection station, the ejector rod group extends out of the through hole to one side of the substrate bearing platform, which is far away from the supporting disk.

7. The substrate work platform of claim 6, wherein the set of lift pins comprises a plurality of lift pins, some of the plurality of lift pins having functional components.

8. The substrate handling platform of claim 1, further comprising a rotation device configured to rotate the substrate support platform about an axis perpendicular to the support surface, wherein the rotation device is mounted to the support tray and an output of the rotation device is coupled to the substrate support platform to rotate the substrate support platform about the axis.

9. The substrate processing platform of claim 8, further comprising an origin camera for defining a coordinate system of the substrate support platform, wherein the origin camera is mounted on the support plate, and a calibration portion for performing origin marking on the origin camera is disposed on the substrate support platform; when the focus center of the origin camera focuses on the calibration part, the origin camera is matched to form a coordinate system, and the coordinate system takes the calibration part as an origin, the first direction as an X axis, the second direction as a Y axis and the direction perpendicular to the bearing platform as a Z axis.

10. The substrate work platform of claim 1, wherein the staging assembly further comprises a buffer assembly for isolating vibration and maintaining the support plate stable, the buffer assembly is disposed between the support plate and the frame, and the buffer assembly is connected to the support plate and the frame respectively.

11. A substrate handling platform according to any of claims 1 to 10, wherein there are two work modules on each gantry module; along a first direction, the two working groups are oppositely arranged on two sides of each gantry assembly.

12. The substrate handling platform of claim 11, wherein two gantry assemblies are disposed on the support tray and comprise a first gantry assembly and a second gantry assembly arranged in a first direction, wherein:

13. The substrate work platform of claim 12,

the first working assembly is a substrate alignment visual assembly and is used for performing alignment detection on a substrate placed on the substrate bearing platform;

14. The substrate handling platform of claim 13, wherein the inspection assembly comprises a set of horizontal motion segments, a set of vertical motion segments, and an inspection head for performing an inspection operation, wherein:

15. The substrate work platform of claim 12,

16. The substrate handling platform of claim 15, further comprising a loading device for transferring the parts tray to the parts tray carrier, the loading device comprising:

the vertical conveying part group is arranged on the supporting disc and can move along the direction vertical to the substrate bearing platform, and the vertical conveying part group is used for conveying the part disc moved out of the magazine to the part disc bearing mechanism and carrying out part disc feeding operation for bearing parts to be assembled.

17. A substrate handling platform according to claim 16, wherein the parts tray carrier mechanism comprises:

a base plate mounted to the gantry assembly;

18. The substrate work platform of claim 17, wherein the assembly comprises an assembly unit for implementing an assembly function and a part inspection vision unit for detecting a position of a part to be assembled on the part tray and determining an assembly route, the assembly unit comprises a fixed plate, a first vertical moving part group, a second vertical moving part group and a transplanting head for assembling the part to be assembled, the part inspection vision unit is installed on the fixed plate, and in the assembly unit:

19. The substrate work platform of claim 12,

20. The substrate handling platform of claim 19, wherein the short repair assembly comprises a positioning vision system for positioning a short in the substrate and a short repair unit for repairing the short in the substrate; the short circuit repairing unit comprises a connecting plate, a vertical moving part group and a laser generator for repairing a short circuit point of the substrate, the positioning vision system is installed on the connecting plate, and in the short circuit repairing unit:

the laser generator is mounted to the vertical moving part group.

21. The substrate handling platform of claim 19, wherein the break repair assembly comprises a positioning vision system and a break repair unit; the broken circuit repairing unit comprises a connecting plate, a vertical moving part group and a broken circuit repairing pen for repairing a broken circuit point of the substrate, the positioning vision system is installed on the connecting plate, and in the broken circuit repairing unit:

the open circuit repair pen is mounted to the vertical moving part group.

22. The substrate work platform of claim 12,

23. The substrate handling platform of claim 22, wherein the printing assembly comprises the detection assembly comprising a set of horizontal motion portions, a set of vertical motion portions, and a printhead for performing a printing operation, wherein:

the print head is mounted to the vertical moving part group.