CN102189061B - 液滴排出装置 - Google Patents
液滴排出装置 Download PDFInfo
- Publication number
- CN102189061B CN102189061B CN201110048699.5A CN201110048699A CN102189061B CN 102189061 B CN102189061 B CN 102189061B CN 201110048699 A CN201110048699 A CN 201110048699A CN 102189061 B CN102189061 B CN 102189061B
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- 239000007788 liquid Substances 0.000 title claims abstract description 80
- 238000007599 discharging Methods 0.000 title claims abstract description 56
- 238000007689 inspection Methods 0.000 claims abstract description 230
- 230000007246 mechanism Effects 0.000 claims abstract description 54
- 230000008520 organization Effects 0.000 claims description 20
- 230000015572 biosynthetic process Effects 0.000 abstract description 15
- 239000000463 material Substances 0.000 description 21
- 238000010586 diagram Methods 0.000 description 16
- 238000011010 flushing procedure Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 13
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- 238000003860 storage Methods 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 206010016825 Flushing Diseases 0.000 description 1
- 238000012550 audit Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
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- 230000004886 head movement Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000008531 maintenance mechanism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000008239 natural water Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Coating Apparatus (AREA)
Abstract
Description
Claims (17)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010043796A JP2011177643A (ja) | 2010-03-01 | 2010-03-01 | 液滴吐出装置 |
JP043796/2010 | 2010-03-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102189061A CN102189061A (zh) | 2011-09-21 |
CN102189061B true CN102189061B (zh) | 2015-02-11 |
Family
ID=44504566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110048699.5A Active CN102189061B (zh) | 2010-03-01 | 2011-03-01 | 液滴排出装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8573075B2 (zh) |
JP (1) | JP2011177643A (zh) |
CN (1) | CN102189061B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011177643A (ja) * | 2010-03-01 | 2011-09-15 | Seiko Epson Corp | 液滴吐出装置 |
JP2011177641A (ja) * | 2010-03-01 | 2011-09-15 | Seiko Epson Corp | 液滴吐出装置 |
KR102013320B1 (ko) * | 2012-12-28 | 2019-08-23 | 삼성디스플레이 주식회사 | 디스플레이 패널 제조장치 |
EP3156241B1 (en) * | 2015-10-12 | 2018-10-10 | Agfa Nv | A moving gantry flatbed table inkjet printer |
JP7257760B2 (ja) * | 2018-09-12 | 2023-04-14 | 東京エレクトロン株式会社 | 描画装置および描画方法 |
JP2021138050A (ja) * | 2020-03-05 | 2021-09-16 | 東京エレクトロン株式会社 | 描画装置および描画方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1411985A (zh) * | 2001-10-19 | 2003-04-23 | 精工爱普生株式会社 | 头单元装配装置及方法和用其制造诸装置的制造方法 |
CN101300084A (zh) * | 2005-10-31 | 2008-11-05 | 武藏工业株式会社 | 液体材料涂布装置 |
CN101583496A (zh) * | 2007-01-22 | 2009-11-18 | 夏普株式会社 | 液滴喷头检查装置及液滴喷射装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005254799A (ja) * | 2004-02-13 | 2005-09-22 | Seiko Epson Corp | 機能液滴吐出ヘッドのワイピング方法、ワイピング装置およびこれを備えた液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器 |
JP4442620B2 (ja) * | 2007-02-26 | 2010-03-31 | セイコーエプソン株式会社 | 着弾ドット測定方法および着弾ドット測定装置、並びに液滴吐出装置および電気光学装置の製造方法 |
JP2008221051A (ja) * | 2007-03-08 | 2008-09-25 | Seiko Epson Corp | 液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器 |
JP2008225348A (ja) | 2007-03-15 | 2008-09-25 | Seiko Epson Corp | 液滴吐出装置の検査測定装置およびこれを備えた液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器 |
JP2009006212A (ja) * | 2007-06-26 | 2009-01-15 | Seiko Epson Corp | 液滴吐出装置、電気光学装置の製造方法および電気光学装置 |
JP4497181B2 (ja) * | 2007-07-23 | 2010-07-07 | セイコーエプソン株式会社 | 液滴吐出方法、及び液滴吐出装置 |
JP5152058B2 (ja) * | 2009-03-19 | 2013-02-27 | セイコーエプソン株式会社 | 液滴吐出ヘッドの検査方法、液滴吐出ヘッドの検査装置及び液滴吐出装置 |
US8376512B2 (en) * | 2009-10-26 | 2013-02-19 | Seiko Epson Corporation | Droplet discharge device and method for controlling droplet discharge device |
JP5621276B2 (ja) * | 2010-03-01 | 2014-11-12 | セイコーエプソン株式会社 | 液滴吐出装置 |
JP2011177643A (ja) * | 2010-03-01 | 2011-09-15 | Seiko Epson Corp | 液滴吐出装置 |
JP2011177641A (ja) * | 2010-03-01 | 2011-09-15 | Seiko Epson Corp | 液滴吐出装置 |
JP5621277B2 (ja) * | 2010-03-03 | 2014-11-12 | セイコーエプソン株式会社 | 液滴吐出装置 |
JP5218584B2 (ja) * | 2011-03-11 | 2013-06-26 | ブラザー工業株式会社 | 液滴吐出装置及び液滴吐出検査装置 |
-
2010
- 2010-03-01 JP JP2010043796A patent/JP2011177643A/ja not_active Withdrawn
-
2011
- 2011-02-25 US US13/035,208 patent/US8573075B2/en not_active Expired - Fee Related
- 2011-03-01 CN CN201110048699.5A patent/CN102189061B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1411985A (zh) * | 2001-10-19 | 2003-04-23 | 精工爱普生株式会社 | 头单元装配装置及方法和用其制造诸装置的制造方法 |
CN101300084A (zh) * | 2005-10-31 | 2008-11-05 | 武藏工业株式会社 | 液体材料涂布装置 |
CN101583496A (zh) * | 2007-01-22 | 2009-11-18 | 夏普株式会社 | 液滴喷头检查装置及液滴喷射装置 |
Non-Patent Citations (3)
Title |
---|
JP特开2005-254799A 2005.09.22 * |
JP特开2008-221051A 2008.09.25 * |
JP特开2008-225348A 2008.09.25 * |
Also Published As
Publication number | Publication date |
---|---|
CN102189061A (zh) | 2011-09-21 |
US20110209566A1 (en) | 2011-09-01 |
US8573075B2 (en) | 2013-11-05 |
JP2011177643A (ja) | 2011-09-15 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180625 Address after: California, USA Patentee after: KATEEVA, Inc. Address before: Tokyo, Japan Patentee before: Seiko Epson Corp. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Droplet discharge device Effective date of registration: 20210112 Granted publication date: 20150211 Pledgee: Shaoxing Binhai New Area integrated circuit industry equity investment fund partnership (L.P.) Pledgor: KATEEVA, Inc. Registration number: Y2021990000035 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20221210 Granted publication date: 20150211 Pledgee: Shaoxing Binhai New Area integrated circuit industry equity investment fund partnership (L.P.) Pledgor: KATEEVA, Inc. Registration number: Y2021990000035 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Droplet discharge device Effective date of registration: 20230625 Granted publication date: 20150211 Pledgee: Xinji Co.,Ltd. Pledgor: KATEEVA, Inc. Registration number: Y2023990000311 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |