CN102169814A - 晶圆压膜机离形膜保护机构 - Google Patents
晶圆压膜机离形膜保护机构 Download PDFInfo
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Abstract
本发明是有关于一种晶圆压膜机离形膜保护机构,其包含一供晶圆置放的下腔体;一位于下腔体上方并可相对下腔体上下移动以呈现接近或远离的上腔体,且上腔体开设有多个对应下腔体的气孔;一供离形膜得以延展于上腔体与下腔体间,并可持续替换离形膜区段的离形膜输送装备,该离形膜输送装备包括一做为卷捆未经使用离形膜的输送滚轮,及一卷收使用过后离形膜的收料滚轮;以及一与上腔体的气孔导通,并得吹气加压带动离形膜贴附于晶圆及胶膜表面达到压膜及溢胶粘除的吹气装置。藉此,本发明可以对执行压膜作业的晶圆进行溢胶的粘附及排除,避免晶圆上的溢胶粘附于压膜机具,进而影响后续晶圆进行压膜作业的良率。
Description
技术领域
本发明涉及一种晶圆压膜机离形膜保护机构,特别是涉及一种应用于晶圆进行压膜作业的保护装置,利用离形膜对执行压膜作业的晶圆在胶膜产生溢胶的部位做粘附排除,以保持晶圆后续压膜作业的良率。
背景技术
现在惯用的晶圆切膜装置是利用长方形膜料,并将膜料贴附于晶圆上,再以刀模除去多余部分,为了避免刀具与晶圆接触,则所裁切的膜料势必皆大于晶圆面积,但配合晶圆制造工艺,需要在晶圆周边预留一圈不贴附膜料。
请参阅中国台湾专利申请案号第096202954号“晶圆的贴膜裁切机”,是在一呈水平状的座体上设置有:一框架体,设置于座体上;一上贴合裁切机构,悬设于框架体下方,该上贴合裁切机构可对应于框架体利用数只活动杆上下移动;该上贴合裁切机构底部包括有上外环体、内环体与刀片环;一下贴合裁切机构,设置于上贴合裁切机构下方的座体处,包含有底板、下外环体与置料盘;一进料单元,设置于下贴合裁切机构一侧,可供胶膜卷组置及供料;一出料单元,设置于下贴合裁切机构相对于进料单元的另一侧,可卷收胶膜卷。
惯用的切膜设备是利用该上贴合裁切机构向下移动,该上外环体先下压并撑张胶膜,且将内环体下降至放置晶圆的置料盘上,使胶膜粘贴于晶圆与框架顶面,并同时将内环体周边的刀片环下降将胶膜切断,再利用充气单元将胶膜紧密贴合于晶圆上。
请再参阅日本特开昭63-096907号专利“半导体保护膜的自动切膜装置”,其是利用卷筒装置输送薄膜,将欲进行切割的薄膜输送至晶圆表面上,利用下活塞杆承接晶圆,并将下活塞杆由上至下动作,使晶圆外周缘的圆形刀刃凸出,并借由上活塞杆向下推抵将薄膜裁切,再将裁切的薄膜连同晶圆往旁边推移。
此种惯用方式利用晶圆外周缘的圆形刀刃,同时利用位于中央承载晶圆的下活塞杆将晶圆连同薄膜向下位移,并配合上活塞杆向下动作使薄膜裁切。
前述两种发明都是晶圆保护膜的切膜装置,经完成裁切后的胶膜的后续动作通常是先进行预贴后再加压使其紧密贴合于晶圆上,然而经完成裁切及预贴后的晶圆其保护膜表面易产生溢胶,特别是保护膜经裁切过后的外周围,若不进行排除作业,在后续进行保护膜与晶圆压合作业时易影响其良率。
有鉴于此,本发明人即推出一种晶圆压膜机离形膜保护机构,其是一种应用于晶圆完成预贴后执行压膜作业的保护装置,通过离形膜对晶圆的胶膜部位因压膜产生溢胶部位进行粘附排除,以保持晶圆后续压膜作业的良率。
发明内容
本发明的目的在于,提供一种新型结构的晶圆压膜机离形膜保护机构,所要解决的技术问题是其是一种应用于晶圆进行压膜作业的保护装置,利用离形膜对执行压膜作业的晶圆在胶膜产生溢胶的部位做粘附排除,以保持晶圆后续压膜作业的良率,非常适于实用。
本发明的目的及解决其技术问题是采用以下技术方案来实现的。依据本发明提出的一种晶圆压膜机离形膜保护机构,该晶圆压膜机离形膜保护机构包含:一供晶圆置放的下腔体;一位于下腔体上方并相对下腔体上下移动以呈现接近或远离的上腔体,且该上腔体开设有多个对应下腔体的气孔;一供离形膜得以延展于上腔体与下腔体间,并持续替换离形膜区段的离形膜输送装备,该离形膜输送装备包括一做为卷捆未经使用离形膜的输送滚轮,及一卷收使用过后的离形膜的收料滚轮;以及一与上腔体的气孔导通,并吹气加压带动离形膜贴附于晶圆及胶膜表面达到压膜及溢胶粘除的吹气装置。
本发明的目的及解决其技术问题还可采用以下技术措施进一步实现。
较佳地,前述的晶圆压膜机离形膜保护机构,其中所述的离形膜输送装备位于上腔体与下腔体间距两侧各设有一做为延展离形膜,以利离形膜得以呈现平整态样位于上腔体与下腔体间的展膜滚筒,另外该展膜滚筒是与上腔体连动设置,当上腔体升降时该展膜滚筒也同步升降,以利离形膜随上腔体同步升降。
较佳地,前述的晶圆压膜机离形膜保护机构,其中所述的吹气装置是设置于上腔体上方并随上腔体同步移动,该气孔是呈现垂直贯穿上腔体。
较佳地,前述的晶圆压膜机离形膜保护机构,还包括一做为驱动输送滚轮的直流马达,及一做为驱动收料滚轮的转矩马达。
较佳地,前述的晶圆压膜机离形膜保护机构,还包括一位于上腔体与下腔体两侧,并能在上腔体下降时进行横移以呈现套固上腔体及下腔体的稳固装置。
本发明与现有技术相比具有明显的优点和有益效果。由以上可知,为达到上述目的,本发明提供了一种晶圆压膜机离形膜保护机构包含:一下腔体、一上腔体、一吹气装置、一离形膜输送装备及一稳固装置。该下腔体是供晶圆置放用,该上腔体是位于下腔体上方,且该上腔体是可相对下腔体上下移动以接近或远离下腔体,以利晶圆置放或分离于下腔体,且该上腔体垂直开设有多个供吹气装置将气体朝下腔体方向吹送的气孔,该吹气装置是设置于上腔体上方并可与上腔体呈现同步上下位移。
该离形膜输送装备包括一输送滚轮及一收料滚轮,该输送滚轮是卷捆有做为吸附晶圆表面溢胶的离形膜,该离形膜输送装备可使离形膜穿过上腔体及下腔体间,并可借由输送滚轮及收料滚轮的滚动替换离形膜对应于晶圆的位置,该收料滚轮是用作卷收使用过后的离形膜,另外该离形膜输送装备位于上腔体与下腔体间距两侧各设有一做为延展离形膜,以利离形膜得以呈现平整状态位于上腔体与下腔体间的展膜滚筒,另外该展膜滚筒是与上腔体连动设置,当上腔体升降时该展膜滚筒也可同步升降,以利离形膜随上腔体同步升降,另外该输送滚轮可通过一直流马达做为驱动,而该收料滚轮是可通过一转矩马达做为驱动。
一稳固装置是位于上腔体与下腔体两侧,并可于上腔体下降时进行横移以呈现套固上腔体及下腔体。
借此,通过吹气装置由上腔体的气孔朝下腔体所置放的晶圆进行吹气,介于上腔体及下腔体间的离形膜即受加压吹气影响贴附于晶圆表面,当吹气停止后离形膜则恢复为与晶圆及胶膜表面分离的状态并可将晶圆表面的溢胶粘除。
借由上述技术方案,本发明晶圆压膜机离形膜保护机构至少具有下列优点及有益效果:本发明的“晶圆压膜机离形膜保护机构”可以对执行压膜作业的晶圆进行溢胶的粘附及排除,避免晶圆上的溢胶粘附于压膜机具,进而影响后续晶圆进行压膜作业的良率。
综上所述,本发明是有关于一种晶圆压膜机离形膜保护机构,其包含一供晶圆置放的下腔体;一位于下腔体上方并可相对下腔体上下移动以呈现接近或远离的上腔体,且上腔体开设有多个对应下腔体的气孔;一供离形膜得以延展于上腔体与下腔体间,并可持续替换离形膜区段的离形膜输送装备,该离形膜输送装备包括一做为卷捆未经使用离形膜的输送滚轮,及一卷收使用过后离形膜的收料滚轮;以及一与上腔体的气孔导通,并得吹气加压带动离形膜贴附于晶圆及胶膜表面达到压膜及溢胶粘除的吹气装置。本发明在技术上有显著的进步,并具有明显的积极效果,诚为一新颖、进步、实用的新设计。
上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,而可依照说明书的内容予以实施,并且为了让本发明的上述和其他目的、特征和优点能够更明显易懂,以下特举较佳实施例,并配合附图,详细说明如下。
附图说明
图1-图2是本发明上腔体连动展膜滚筒同步升降作动的示意图。
图3-图7是本发明的晶圆表面溢胶粘除作业流程的示意图。
图8-图10是本发明溢胶粘除动作的局部放大示意图。
具体实施方式
为更进一步阐述本发明为达成预定发明目的所采取的技术手段及功效,以下结合附图及较佳实施例,对依据本发明提出的晶圆压膜机离形膜保护机构其具体实施方式、结构、特征及其功效,详细说明如后。
有关本发明的前述及其他技术内容、特点及功效,在以下配合参考图式的较佳实施例的详细说明中将可清楚呈现。通过具体实施方式的说明,当可对本发明为达成预定目的所采取的技术手段及功效获得一更加深入且具体的了解,然而所附图式仅是提供参考与说明之用,并非用来对本发明加以限制。
本发明有关一种晶圆压膜机离形膜保护机构,其为一种应用于晶圆进行压膜作业的保护装置,利用离形膜对执行压膜作业的晶圆在胶膜产生溢胶的部位做粘附排除,以保持晶圆后续压膜作业的良率,请参阅图1至图2所示,图1-图2是本发明上腔体连动展膜滚筒同步升降作动的示意图。本发明的“晶圆压膜机离形膜保护机构”包括一下腔体1、一上腔体2、一吹气装置3及一离形膜输送装备4。
该下腔体1是供晶圆置放用,该上腔体2是位于下腔体1上方,且该上腔体2是可相对下腔体1上下移动以接近或远离下腔体1,以利晶圆置放或分离于下腔体1,且该上腔体2是垂直开设有多个供吹气装置3将气体朝下腔体1方向加压吹送的气孔21(见于图5),该吹气装置3是设置于上腔体2上方并可与上腔体2呈现同步上下位移。
该离形膜输送装备4是包括一输送滚轮41及一收料滚轮42,该输送滚轮41卷捆有做为吸附晶圆表面溢胶的离形膜,该离形膜输送装备4可使离形膜穿过上腔体2及下腔体1间,并可借由输送滚轮41及收料滚轮42的滚动替换离形膜对应于晶圆的位置,该收料滚轮42是用作卷收使用过后的离形膜,另外该离形膜输送装备4位于上腔体2与下腔体1间距两侧各设有一做为延展离形膜,以利离形膜得以呈现平整状态位于上腔体2与下腔体1间的展膜滚筒43(见于图3),另外该展膜滚筒43是与上腔体2连动设置,当上腔体2升降时该展膜滚筒43也可同步升降,以利离形膜随上腔体2同步升降(如图1与图2所示),另外该输送滚轮41可通过一直流马达5(见于图3)做为驱动,而该收料滚轮42可通过一转矩马达6(见于图3)做为驱动。
一稳固装置7是位于上腔体2与下腔体1两侧,并可在上腔体2下降时进行横移以呈现套固上腔体2及下腔体1。
借此,通过吹气装置3由上腔体2的的气孔21朝下腔体1所置放的晶圆进行加压吹气,介于上腔体2及下腔体1间的离形膜即受加压吹气影响贴附于晶圆及胶膜表面,当吹气停止后离形膜则恢复为与晶圆表面分离的状态并可将晶圆表面的溢胶粘除。
请参阅图3至图7所示,其是本发明“晶圆压膜机离形膜保护机构”进行晶圆表面溢胶粘除流程示意图,该完成压膜动作的晶圆是位于下腔体1(如图3所示),该上腔体2即下降至接近下腔体1的位置(如图4所示),然后通过吹气装置3将气体由气孔21吹出以带动离形膜贴附于晶圆表面(如图5所示),完成吹气作业后停止吹气使离形膜恢复与晶圆表面分离的状态,借以通过离形膜将晶圆表面的溢胶粘除(如图6所示),最后再由上腔体2上升以利进行晶圆替换,及通过输送滚轮41及收料滚轮42的滚动替换离形膜未经使用的部位(如图7所示),其溢胶粘除动作的示意可参阅图8至图10所示,图8-图10是本发明溢胶粘除动作的局部放大示意图。图8即对应图4状态为上腔体2即下降至接近下腔体1的位置,图9即对应图5状态为吹气以带动离形膜贴附于晶圆表面,图10即对应图6状态为停止吹气使离形膜粘除晶圆溢胶部位。
由前述发明内容可知,本发明“晶圆压膜机离形膜保护机构”是可对执行压膜作业的晶圆进行溢胶的粘附及排除,避免晶圆上的溢胶粘附于压膜机具,进而影响后续晶圆进行压膜作业的良率。
以上所述,仅是本发明的较佳实施例而已,并非对本发明作任何形式上的限制,虽然本发明已以较佳实施例揭露如上,然而并非用以限定本发明,任何熟悉本专业的技术人员,在不脱离本发明技术方案范围内,当可利用上述揭示的技术内容作出些许更动或修饰为等同变化的等效实施例,但凡是未脱离本发明技术方案的内容,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均仍属于本发明技术方案的范围内。
Claims (6)
1.一种晶圆压膜机离形膜保护机构,其特征在于该晶圆压膜机离形膜保护机构包含:
一供晶圆置放的下腔体;
一位于下腔体上方并相对下腔体上下移动以呈现接近或远离的上腔体,且该上腔体开设有多个对应下腔体的气孔;
一供离形膜得以延展于上腔体与下腔体间,并持续替换离形膜区段的离形膜输送装备,该离形膜输送装备包括一做为卷捆未经使用离形膜的输送滚轮,及一卷收使用过后的离形膜的收料滚轮;以及
一与上腔体的气孔导通,并吹气加压带动离形膜贴附于晶圆及胶膜表面达到压膜及溢胶粘除的吹气装置。
2.如权利要求1所述的晶圆压膜机离形膜保护机构,其特征在于:该离形膜输送装备位于上腔体与下腔体间距两侧各设有一做为延展离形膜,以利离形膜得以呈现平整态样位于上腔体与下腔体间的展膜滚筒,另外该展膜滚筒是与上腔体连动设置,当上腔体升降时该展膜滚筒也同步升降,以利离形膜随上腔体同步升降。
3.如权利要求1所述的晶圆压膜机离形膜保护机构,其特征在于:该吹气装置是设置于上腔体上方并随上腔体同步移动,该气孔是呈现垂直贯穿上腔体。
4.如权利要求2所述的晶圆压膜机离形膜保护机构,其特征在于:该吹气装置是设置于上腔体上方并随上腔体同步移动,该气孔是呈现垂直贯穿上腔体。
5.如权利要求1至权利要求4中任一权利要求所述的晶圆压膜机离形膜保护机构,其特征在于:其还包括一做为驱动输送滚轮的直流马达,及一做为驱动收料滚轮的转矩马达。
6.如权利要求1至权利要求4中任一权利要求所述的晶圆压膜机离形膜保护机构,其特征在于:其还包括一位于上腔体与下腔体两侧,并能在上腔体下降时进行横移以呈现套固上腔体及下腔体的稳固装置。
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