CN102137821B - Devices for vertical treatment of glass - Google Patents

Devices for vertical treatment of glass Download PDF

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Publication number
CN102137821B
CN102137821B CN200980134641.3A CN200980134641A CN102137821B CN 102137821 B CN102137821 B CN 102137821B CN 200980134641 A CN200980134641 A CN 200980134641A CN 102137821 B CN102137821 B CN 102137821B
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China
Prior art keywords
sheet glass
transfer path
glass
flooding nozzle
bearing
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Expired - Fee Related
Application number
CN200980134641.3A
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Chinese (zh)
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CN102137821A (en
Inventor
J·W·布朗
P·O·约翰逊
G·N·高藤
L·尤克雷辛克
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Corning Inc
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Corning Inc
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Publication of CN102137821A publication Critical patent/CN102137821A/en
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Expired - Fee Related legal-status Critical Current
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/20Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • B08B3/022Cleaning travelling work
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Nonlinear Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Surface Treatment Of Glass (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Drying Of Solid Materials (AREA)
  • Liquid Crystal (AREA)

Abstract

An apparatus (10) for treating a substantially planar glass sheet (30) that is positioned in a substantially vertical plane. In one aspect, the glass sheet is for an LCD display. The glass treatment apparatus includes a washing section (200), a rinsing section (300), a drying section (400), and bottom rollers (510) to move the glass sheet therethrough along a conveyance path (100). The washing section includes drive rollers (530, 540) configured to support and drive the glass sheet without causing damage thereto. The rinsing section includes an arrangement of nozzles (310, 320) and liquid bearings (330, 340) for rinsing the glass sheet without causing excessive vibration. And the drying section includes an arrangement of air knives (410, 420) and fluid bearings (440, 450) for drying the glass sheet without causing excessive vibration.

Description

For the vertical device of processing of glass
related application
The application requires the right of priority of No. 61/085103rd, the U.S. Provisional Application sequence that is entitled as " for the vertical device (Devices for Vertical Treatment of Glass) of processing of glass " submitted on July 31st, 2008, it is foundation that the application be take the content of this provisional application, by reference to it is incorporated into this in full.
technical field
The field of the invention relates generally to glass treatment, more specifically relates to vertical washing, flushing and dry device for LCD glass.
Technical background
Glass cutting, grinding and polishing are the main operations during display glass is refined.In all these processing steps, produce the cullet of particle or form of chips.Must remove this cullet and be applied to the various coatings with protective glass surface on glass, to carry out required subsequent step, thereby manufacture vendible liquid-crystal display (" LCD ").Conventionally use the device for cleaning glass designing for LCD glass specially.The overwhelming majority in these clearers is divided into two classes, intermittent type or inline process type (inline).
Inline process type clearer generally can be divided into two classes, horizontal, glass is wherein smooth to be placed in the drive system of belt or some other kinds, or rectilinear, wherein along with sheet glass moves through washer step, sheet glass is with an edge bearing, or sacrifices side support with an edge and one.Because rectilinear, having reduced required floor space amount, can also produce more clean glass, is preferred so rectilinear, and processing step before making and afterwards can be taked vertical orientated advantage.In addition this vertical orientated actual amount of debris that adheres to sheet glass that reduced.Particulate can fall conventionally, and by changing the orientation of sheet glass, effective surface area reduces, and causes from the chip that adheres to sheet glass of air still less.
The most traditional vertical online clearer is manufactured for window glass industry, does not generally consider and sheet glass (as for the manufacture of LCD device) is relevant as thin as a wafer low lateral rigidity.For example, generally use brush to stir to remove chip from sheet glass.But, when sheet glass is transmitted by brushing stage, can produce two problems.First, must apply sufficient motivating force to sheet glass, thereby overcome the reactive force of brush.Secondly, need to fully support glass, break avoiding, and avoid the large contact surface on sheet glass long-pending, the long-pending defect that can produce cut and so on of described large contact surface, this is that LCD user is unacceptable.
Equally, in purge zone and dryer section, must fully support sheet glass, make sheet glass can not live through many vibrations, described too much vibration can cause sheet glass, with a part for purge zone or dryer section, disadvantageous contact occurs.This disadvantageous contact meeting is with substantially vertical orientation scratching sheet glass or it is broken.
summary of the invention
The present invention relates to a kind of equipment of the sheet glass for the orientation process with substantially vertical (comprise washing, rinse and be dried) substantially flat.
In one embodiment, provide washing section.In washing section, use brush to stir, from glass pane surface, remove chip.In washing section, use driving roll to transmit sheet glass and pass through brush.The size of driving roll and material are stipulated, so that sufficient reactive force to be provided to sheet glass, sheet glass is transmitted by washing section, provide sufficient supporting to avoid glass sheet breakage, while reduces the contact area with sheet glass as far as possible, thereby avoids the defect of cut and so on.
In the second embodiment, provide purge zone.In purge zone, the position of flooding nozzle and bearing is designed, with abundant supporting glass plate, can not produce too much vibration.Specifically, flooding nozzle is arranged on to a side of sheet glass, bearing is arranged on to the opposite side of sheet glass, relative with flooding nozzle.
In the 3rd embodiment, dryer section is provided, this dryer section has air knife with dry glass plate.When sheet glass is transmitted by dryer section, fluid bearing support sheet glass.First group of bearing is positioned at the upstream of air knife, is the delivery direction of sheet glass, and second group of bearing is positioned at the downstream of air knife.Air knife is arranged on to the opposite side of sheet glass, with the pressure of regulation, supplies airflow separately.In addition, the distance between clutch shaft bearing and the second bearing forms the not bearing length of sheet glass.Distance between and the first and second bearings poor by air knife applied pressure is designed, to avoid producing too much vibration in sheet glass.
Although three kinds of embodiments described separately, can be used its arbitrary combination together.That is, washing section, purge zone and dryer section can be used as independently unit separately and use together with various other techniques therebetween and/or equipment.Or washing section, purge zone and dryer section can be used as shown in the figure one by one.In addition, any two sections wherein can be used one by one, and these two sections can be separated with the 3rd section by other techniques and/or equipment.
accompanying drawing is briefly described
With reference to accompanying drawing and by describing these and other features that can be illustrated more clearly in the preferred embodiment for the present invention in detail, wherein:
Fig. 1 is the front perspective view of a kind of embodiment of glass treatment equipment.
Fig. 2 is the rear perspective of the glass treatment equipment of Fig. 1.
Fig. 3 is the planar rear view of the glass treatment equipment of Fig. 1, shows washing section, purge zone and dryer section.
Fig. 4 is the top view view elevation view of the glass treatment equipment of Fig. 1.
Fig. 5 is the orthographic plan from the glass treatment equipment of the left observation of Fig. 1.
Fig. 6 is the front plan view of the glass treatment equipment of Fig. 1.
Fig. 7 is the sectional view along the glass treatment equipment of the line 7-7 intercepting of Fig. 6.
Fig. 8 is the sectional view of the glass treatment equipment of Fig. 6 of cutting of 8-8 along the line.
Fig. 9 is the sectional view of two driving rolls in the washing section of glass treatment equipment of Fig. 1.
Figure 10 is the side plan view of driving roll shown in Fig. 9.
detailed Description Of The Invention
With reference to following detailed description, embodiment and claim, and explanation before and afterwards, can more easily understand the present invention.But, before disclosing and describing device of the present invention, system and/or method, should be appreciated that, except as otherwise noted, otherwise the present invention is not limited to disclosed specific device, system and/or method, and therefore yes can change.Be also to be understood that term used herein, just in order to describe concrete aspect, is not intended to limit.
The description of following explanation as the at present known preferred forms of the present invention is provided.Therefore, it will be recognized by those of ordinary skills, can carry out many variations to each side of the present invention as herein described, still obtain useful result of the present invention simultaneously.Some benefits required for the present invention obviously can, by some features of selecting to disclose, not adopt other features to obtain herein simultaneously yet.Therefore, it will be recognized by those of ordinary skills, can carry out many modifications and variations to the present invention, in some cases or even expectation, be a part of the present invention.Therefore, provide the illustration of following explanation as the principle of the invention, be not limited.
As used in full in specification sheets, " " of singulative, " a kind of " and " being somebody's turn to do " comprise that plural number refers to the situation of thing, unless context has other clear indication.Therefore, for example to the citation of " sheet glass ", can comprise the situation of two or more these type of sheet glass, unless context has other indication.
Scope herein can be expressed as from " approximately " occurrence, and/or to " approximately " another occurrence.While explaining such scope, comprise on the other hand from an occurrence and/or to another occurrence.Similarly, when representing to be worth with approximate number by use antecedent " approximately ", should be appreciated that, occurrence forms on the other hand.No matter be also to be understood that the end points of each scope is relevant to another end points, still not relevant to another end points, be all significant.
As used herein, term " optional " or " optionally " represent that event or the situation described subsequently may occur maybe can not occur, and this statement comprises the situation that situation that described event or situation occur and described event or situation do not occur.
A kind of glass treatment equipment 10 of the sheet glass 30 for the treatment of substantially flat is described herein.This glass treatment equipment 10 comprises washing section 200, purge zone 300 and dryer section 400.Sheet glass 30 generally have first surface 32 with relative second 34, as shown in Figure 4.Sheet glass 30 can be used for for example LCD display.
In an illustrative aspects, by sheet glass 30 along transfer path 100, press delivery direction 102 and transmit by washing section 200, purge zone 300 and dryer section 400.Referring to Fig. 4.Sheet glass 30 is transmitted along transfer path 100 in substantially vertical mode.Use a plurality of bottom rollers 510 to transmit sheet glass, these bottom rollers are positioned at the bottom of transfer path 100.Bottom roller 510 can be communicated with bottom roller driving mechanism 520, and bottom roller driving mechanism is used for applying revolving force to one or more bottom rollers 510, thereby along transfer path 100, sheet glass 30 is transmitted by washing section 200, purge zone 300 and dryer section 400.Each section (being washing section 200, purge zone 300 and dryer section 400) has the roller driving mechanism 520 of the bottom roller 510 for this section of himself.When each section is separately used as separate unit, this set is useful.Or, for more than one section, use a roller driving mechanism 520.As shown in the figure, for washing section 200 and purge zone 300, use a roller driving mechanism 520, and use roller driving mechanism 520 separately for dryer section 400.Roller driving mechanism 520 can be connected with bottom roller 510 by the transmission chain of any Known Species, and this is that those of ordinary skills can understand.
washing section
In one aspect, glass treatment equipment 10 comprises washing section 200, and this washing section 200 comprises washing shell 20 and the transfer path 100 therefrom passing through.When sheet glass 30 is advanced with delivery direction 102 along transfer path 100, sheet glass 30 is with substantially vertical direction orientation.
Washing section 200 comprises at least one first brush 210, and the setting adjacent with transfer path 100 of this brush is designed to contact with at least a portion of the first surface 32 of sheet glass 30, thereby wash, removes the chip on first surface 32.In addition, washing section 200 also comprises at least one second brush 220, and the setting adjacent with transfer path 100 of this brush, is designed to contact with at least a portion of second 34 of sheet glass 30.Washing section 200 is designed, described at least one first brush 210 and described at least one second brush 220 are oppositely arranged.More clearly say, the axle 222 of the axle 212 of the first brush 210 and the second brush 220 is positioned at the opposite side of transfer path 100.But, when there is no sheet glass between brush 210 and 220, the diameter of these brushes extends each brush on transfer path 100, makes when there is sheet glass, each brush forms enough contacts area on sheet glass 30, thereby can remove unwanted particle from sheet glass 30.Washing section 200 can comprise multipair brush 210 and 220, and these brushes are along transfer path setting, and each is in brush, and the axle 212 of brush 210 and the axle 222 of brush 220 are positioned at the opposite side of transfer path 100.In this way, can make to be applied to any normal force on the first surface 32 of sheet glass 30 by one first brush 210 and substantially equal to be applied to any normal force on second 34 of sheet glass 30 by one second brush 220, and opposite direction.
In order to help washing, brush 210 and 220 can rotate.For example, but also unrestricted, the axle 212 of the first brush is basically parallel to sheet glass 30.Similarly, the axle 222 of the second brush is basically parallel to sheet glass 30.Motor 250 is connected with the axle 222 of the second brush with the axle 212 of the first brush by suitable transmission chain (do not show for the simple reasons, but those of ordinary skills easily understanding), thereby they are rotated together.Brush 210 and 220 sense of rotation can make sheet glass 30 along transfer path 100 by delivery direction 102 negative line feeds.As shown in Figure 4, for example, the first brush 210 turns clockwise, and the second brush 220 is rotated counterclockwise.In order to provide suitable stirring to remove chip, and allow driving roll 530 and 540 (as described below) to control sheet glass 30 along the transfer rate of transfer path 100, the speed of rotation of brush is about 200-1000 surface feet/minute (sfpm) (60-305 surface m/min), and for example 250,300,350,400,450,500,550,600,650,700,750,800,850,900 or 950sfpm (75,90,105,120,135,150,165,180,195,210,225,240,260,275,290 surface m/min).Although shown two pairs first brushes the 210 and second brush 220, can use the brush of any suitable number right.
Except end transfer roller 510, in order to promote the transmission of sheet glass 30, glass treatment equipment 10 also comprises a plurality of the first driving rolls 530, the setting adjacent with transfer path 100 of these rollers is also positioned at a side of transfer path, glass treatment equipment 10 also comprises a plurality of the second driving rolls 540, and the setting adjacent with transfer path 100 of these rollers is also positioned at the second side of transfer path.In one aspect, each roller in described a plurality of the first driving rolls 530 is basic relative with corresponding the second driving roll 540, and each roller in described a plurality of the second driving rolls 540 is basic relative with corresponding the first driving roll 530.In order to transmit sheet glass, each roller in a plurality of the first driving rolls 530 is designed, with a part for the first surface 32 of contact glass plate 30, and each roller in a plurality of the second driving rolls 540 is designed, with the part of second 34 of contact glass plate 30.
A plurality of the first driving rolls 530 are arranged on axostylus axostyle 534, thus supporting glass plate 30 in the vertical direction.On each axostylus axostyle 534, the quantity of the first driving roll 530 depends on the size of sheet glass, can correspondingly change.Similarly, a plurality of the second driving rolls 540 are arranged on each axostylus axostyle 544.A plurality of the first axostylus axostyles 534 and a plurality of the second axostylus axostyle 544 are pressed arranging along transfer path, and wherein, the first axostylus axostyle 534 is positioned at a side of transfer path 100, and the second axostylus axostyle 544 is positioned at the opposite side of transfer path 100.Motor 550 is connected with the second axostylus axostyle 544 with the first axostylus axostyle 534 by suitable transmission chain (do not show for the simple reasons, but those of ordinary skills easily understanding).As shown in Figure 4, motor 550 and transmission chain will make the first driving roll 530 by counterclockwise rotation, and the second driving roll 540 is rotated in the direction of the clock, cause sheet glass 30 to move by delivery direction 102 along transfer path 100.Although shown three pairs of the first axostylus axostyles 534 and the second axostylus axostyle 544, can use the axostylus axostyle pair of any suitable number.
In addition, the size of driving roll and material are designed, so that sufficient motivating force to be provided, react on the reactive force that brush 210 and 220 applies, sheet glass 30 is transmitted by washing section 200, sufficient supporting is provided, avoid sheet glass 30 to break, while reduces the contact area with sheet glass 30 as far as possible, avoids the defect of cut and so on.
Driving roll 530 comprises the thickness 536 of the part contacting with sheet glass on driving roll 530, and diameter 538.Referring to Figure 10, show diameter and the thickness of a driving roll 530.Each roller in other driving rolls 530 and 540 has similar thickness and diameter.Thickness 536 is about 0.5-2 inch (about 1.27-5.08 centimetre).Along with thickness 536 increases, produces larger and contact area sheet glass 30, the risk increase that sheet glass is damaged.Equally, along with thickness 536 increases, be more difficult to the excentricity that produces in balance axostylus axostyle 534 and 544, described excentricity is that the reactive force from driving roll 530 and 540 promotes the result that sheet glass 30 makes it move along transfer path 100 with delivery direction 102.Along with axostylus axostyle excentricity increases, be more difficult between driving roll 530 and 540 for sheet glass 30 keeps acceptable travel space.On the other hand, if thickness 536 is too little, make sheet glass 30 move through the size of motivating force of washing section 200 inadequate.Diameter 538 maximums of driving roll 530 are about 4 inches.Position to the diameter of the first driving roll 530 and the second driving roll 540 and axostylus axostyle 534 and 544 is selected, and roller 530 and 540 is separated mutually by gap 560, and described gap is less than the thickness 36 of the sheet glass 30 of transmission.Referring to Fig. 9 and 10.In other words, each is separated mutually by certain distance to the axostylus axostyle 534 and 544 in axostylus axostyle, half of diameter that described distance is less than the first driving roll 530 adds half of diameter of the second driving roll 540, adds the summation of thickness 36 of the sheet glass 30 of transmission.Material to the first driving roll 530 and the second driving roll 540 is selected, and makes driving roll 530 and 540 have compliance.In general, the compliance of a few tenths of a mm is acceptable.Therefore, when sheet glass 30 is transmitted by between driving roll 530 and 540 gap 560 time, driving roll 530 and 540 is compressed (due to their reason of compliance), to hold the thickness 36 of sheet glass 30.For example, the thickness 36 of sheet glass 30 can be equal to or less than approximately 1 millimeter, and for example approximately 0.8 millimeter, approximately 0.7 millimeter, approximately 0.6 millimeter, approximately 0.5 millimeter, or approximately 0.4 millimeter.
The material of driving roll also can affect the transmission of sheet glass.Described material can not pollute or scratching sheet glass, and described material and sheet glass 30 have acceptable frictional coefficient, thus avoid driving roll 530 and 540 and sheet glass 30 between in sheet glass 30 transport process, skid.Consider above content, driving roll 530 and 540 is 532 and 542 rubber that comprise polymerization at least externally, for example ethylene propylene diene monomer (EPDM) or Sheng Tepurui (Santoprene) rubber.Referring to Fig. 9.The hardness of the rubber of polymerization is about 30-60 Shore A, for example 35,40,45,50 or 55 Shore A.
As mentioned above, the first driving roll 530 and the second driving roll 540 arrange substantially relative to each other.A reason of this design is, balance normal force.In one aspect, each roller in a plurality of the first rollers 530 applies the first normal force to the first surface 32 of sheet glass 30, and each second roller 540 applies the second normal force to second 34 of sheet glass 30 accordingly.In one aspect of the method, the first normal force equals the second normal force substantially.Keep relative normal force substantially to equate significantly to have reduced to put on any vibration of sheet glass 30.
Washing section 200 also comprises a plurality of nozzles 230, nozzle 230 is arranged on to the both sides of transfer path 100.By nozzle 230 along delivery direction 102 be arranged on continuous every pair of driving roll 530 and 540 and brush between 210 and 220.Nozzle 230 can to driving roll 530 and 540, brush 210 and 220 and sheet glass 30 spray any kind fluid to help washing process.Described fluid can be the cleaning fluid of any kind, for example liquid normally.
purge zone
Purge zone 300 comprises the first flooding nozzle 310 and the second flooding nozzle 320, these nozzles are separately arranged on the opposite side of transfer path 100, also comprise first liquid bearing 340 and second liquid bearing 330, these bearings are separately arranged on the opposite side of transfer path 100.Referring to Fig. 4.The first flooding nozzle 310 and the second flooding nozzle 320 arrange relative to each other, and arrange with respect to first liquid bearing 340 and second liquid bearing 330, can not produce the too much vibration that may cause sheet glass 30 to damage with supporting glass plate 30.
The first flooding nozzle 310 is arranged on pipeline 312 to basic setting adjacent with glass transfer path 100.The first flooding nozzle 310 is communicated with liquid source by pipeline 312.The flooding nozzle 310 of any suitable number can be set on pipeline 312, depend on the size of the sheet glass 30 of transmission.In addition, although show on two pipelines 312 to there is the first flooding nozzle 310 in purge zone 300, for the first flooding nozzle 310, can use the pipeline 312 of any suitable number.In one aspect, described liquid comprises water, but it is contemplated that other are applicable to the liquid rinsing, and washing composition.The first flooding nozzle 310 is designed, with by the first surface of guiding fluid sheet glass 30 32.
By the setting adjacent with transfer path 100 of the second flooding nozzle 320, be positioned at the side that transfer path 100 is relative with the first flooding nozzle 310.In addition, as shown in Figure 4, the level attitude of the first flooding nozzle 310 and the second flooding nozzle 320 staggers along transfer path 100.Thisly be arranged with the vibration that helps reduce sheet glass 30.The second flooding nozzle 320 is also originated and is communicated with by pipeline 312 and liquid, this nozzle is designed, with by second 34 of guiding fluid sheet glass.Similar with the first flooding nozzle 310, can on each pipeline 312, use the second flooding nozzle 320 of any amount, can in purge zone, use the pipeline with the second flooding nozzle 320 312 of any suitable number.
First liquid bearing 340 has top 342 and bottom 344 separately, it is arranged, with second 34 towards sheet glass 30.Referring to Fig. 4 and 6.First liquid bearing (with second liquid bearing 330) keeps a kind of thin moisture film in its surface, prevents that glass from contacting with liquid-bearing.When sheet glass is thinner, this liquid-bearing provides very high rigidity, guarantees not contact with sheet glass 30.By first liquid bearing 340 be arranged on transfer path 100 with the first flooding nozzle 310 by the substantially relative side of horizontal and vertical mode.In the horizontal direction, but the first flooding nozzle 310 and first liquid bearing 340 are arranged on to the position of identical opposite side along transfer path 100.Referring to Fig. 4.In addition, in the vertical direction, at least some nozzles in nozzle 310 are arranged between the top 342 and bottom 344 of first liquid bearing 340.Preferred most of flooding nozzle 310 all so arranges.By this way, make first liquid bearing 340 towards second 34 of sheet glass 30, for sheet glass 30 provides the relative noncontact of normal force that liquid direct and from the first flooding nozzle 310 applies, support.First liquid bearing 340, by horizontal line setting, has wherein been shown to four lines.Referring to Fig. 6.Can use the row of any suitable number, depend on the size of the sheet glass 30 of transmission.The row of first liquid bearing 340 extends through the scope of purge zone 300 along the direction that is parallel to delivery direction 102.But, in each row of first liquid bearing 340, exist gap 348 to hold second nozzle 320 to the injection of second 34 of sheet glass 30.These gaps 348 allow the part to second 34 to arrange, thereby still by the position of second liquid bearing 330 supportings, directly accept the fluid from the second flooding nozzle 320 at the first surface 32 of sheet glass 30.
By second liquid bearing 330 setting adjacent with transfer path 100, be positioned at the opposite side of transfer path 100, basic relative with the second flooding nozzle 320.The quantity of second liquid bearing 330 and arrange can with above about similar described in first liquid bearing 340.In addition, the relation of second liquid bearing 330 and the first flooding nozzle 310 and the second flooding nozzle 320 and first liquid bearing 340 can be similar to the relation of above-mentioned first liquid bearing 340 and the second flooding nozzle 320 and the first flooding nozzle 310 and second liquid bearing 330.
The first flooding nozzle 310 and the second flooding nozzle 320 with the acceptable volumetric rate of wide region and pressure by the first surface of guiding fluid sheet glass 30 32 and second 34.Therefore, in one aspect in, by liquid with the first surface 32 of the speed guiding sheet glass 30 of about 0.2-2GPM and second 34.In one aspect of the method, by liquid with the first surface 32 of the pressure guiding sheet glass 30 of about 10-50psi (about 68950-344738 ox/square metre) and second 34.When volumetric flow rate and pressure drop within these scopes, adopt above-mentioned position relationship, described liquid makes sheet glass 30 vibrations be equal to or less than approximately 50 microns, and this is not too much for the sheet glass 30 for typical LCD device.
dryer section
Dryer section 400 is designed, with the face 32 and 34 from sheet glass 30, remove liquid.In one aspect, dryer section 400 comprises at least one first air knife 410, the second air knife 420, the nozzle 430 on pipeline, fluid bearing 440 and 450, and guide reel 470.Distance between the air pressure that air knife 410 and 420 is applied and fluid bearing 440 and 450 designs, to avoid disadvantageous vibration in sheet glass.
By the setting adjacent with transfer path 100 of the first air knife 410, be communicated with source of the gas.The first air knife 410 is designed, with first surface 32 guiding gas to sheet glass 30, along with sheet glass 30 passes through by delivery direction 102 along transfer path 100, form gas curtain, this gas curtain is removed liquid from the first surface 32 of sheet glass 30.
Similarly, in aspect this, by the setting adjacent with transfer path 100 of at least one the second air knife 420, be communicated with source of the gas, this air knife is designed, with second 34 guiding gas to sheet glass 30, along with sheet glass 30 moves by delivery direction 102 along transfer path 100.The second air knife 420 is oppositely arranged with the first air knife 410 substantially.Airflow to sheet glass 30 either sides is accurately controlled, to reduce the vibration of sheet glass 30, from the mode control of pressure imbalance to acceptable level.When the air knife applied pressure of sheet glass 30 1 sides and another air knife applied pressure that is arranged on sheet glass 30 opposite sides are unequal, there is to press force unbalance.Too much vibration not only produces cut, also can suppress efficient drying.Hundreds of pascal's pressure imbalance can cause disadvantageous vibration impact to be dried.Each air knife 410 and 420 with the speed of about 1500-2800 liter/min to sheet glass 30 guiding gas, but it is contemplated that other scopes, for example 1600,1700,1800,1900,2000,2100,2200,2300,2400,2500,2600 and 2700 liters/min.Described gas can be pressurized air.It is also contemplated that other gas, include, but are not limited to gas blower air and nitrogen.
Dryer section 400 comprises first fluid bearing 440 and second fluid bearing 450, thereby sheet glass 30 is being transmitted by supporting glass plate 30 in air knife 410 and 420.According to the delivery direction of sheet glass 30 102, clutch shaft bearing 440 is positioned at the upstream of air knife 410 and 420.First fluid bearing 440 is positioned, thus the opposing face 32 and 34 of supporting glass plate 30.First fluid bearing 440 can comprise that water or liquid-bearing are with supporting glass plate 30.According to delivery direction 102, second fluid bearing 450 is positioned at the downstream of air knife 410 and 420.Second fluid bearing 540 is positioned, and the opposing face 32 and 34 with supporting glass plate 30, can comprise air bearing.Between first fluid bearing 440 and second fluid bearing 450, the distance 460 parallel with sheet glass delivery direction 102 forms the not bearing length of sheet glass 30.Referring to Fig. 6.In general, if distance is 460 too large, the distance of sheet glass 30 and transfer path 100 centre portions between air knife 410 and 420 may change too greatly, thereby produce less desirable differentiation, is dried, that is, on the opposition side of sheet glass 30, produce different drying regimes.In addition, can 460 control with adjusting the distance together with pressure reduction between air knife 410 and 420, thereby avoid the too much vibration of sheet glass 30.If too much, sheet glass 30 can adversely adhere to air knife 410 and 420, with surrounding structure, less desirable contact occurs, and/or breaks in vibration.For example, the distance 460 between clutch shaft bearing 440 and the second bearing 450 can be less than or equal to approximately 75 millimeters, is preferably less than or equal to approximately 40 millimeters, is more preferably less than or equals approximately 25 millimeters.In general, can adopt shorter distance 460, and higher pressure reduction between air knife 410 and 420, thereby avoid sheet glass 30 that too much vibration occurs.Similarly, can adopt longer distance 460, and lower pressure reduction between air knife 410 and 420, thereby avoid sheet glass 30 that too much vibration occurs.More particularly, at an end points place of this scope, distance 460 is about 75 millimeters, and pressure reduction can maximum be about 300 handkerchiefs.At another end points place of this scope, distance 460 is about 25 millimeters or be about 40 millimeters, and pressure reduction can maximum be about 1500 handkerchiefs, for example 400,500,600,700,800,900,1000,1100,1200,1300 or 1400 handkerchiefs.In one embodiment, distance 460 is about 40 millimeters, and the pressure reduction between air knife 410 and 420 is about 300 handkerchiefs.In another embodiment, distance 460 is about 25 millimeters, and the pressure reduction between air knife 410 and 420 is about 300 handkerchiefs.
In addition, in dryer section 400, provide the pipeline 430 on it with nozzle.Pipeline 430 can be connected with fluid origin, thus just in time sheet glass 30 is transmitted by before air knife 410 and 420 by direct fluid sheet glass 30.
In addition, in dryer section, provide guide reel 470, with the top of supporting glass plate.Guide reel 470 is idle rolls, for the top of sheet glass 30 provides extra supporting, that is, and the part sheet glass 30 on clutch shaft bearing 440 and the second bearing 460.The position of guide reel 470 occurs in quality region that for avoiding effective transmission of any damage and maintenance sheet glass 30 is very important.Therefore, guide reel 470 is positioned, make the non-quality region of its contact glass plate 30, described non-quality region is the part around sheet glass 30 peripheries, and about 5-10 millimeter conventionally extends internally from each edge.
Although shown dryer section 400 is connected with the outlet of purge zone 300, dryer section 400 can be used as independently unit and uses.In addition, other equipment and/or technique can be set between purge zone 300 and dryer section 400.Similarly, washing section 200 and purge zone 300 can be separated from each other, as independently unit use, other equipment and/or technique are set therebetween.
Although more than disclosed some embodiments of the present invention in explanation, one of ordinary skill in the art will appreciate that, can expect relating to many modifications of the present invention and other embodiments, obtain the benefit proposing in above explanation and relevant drawings.Therefore, the present invention is not limited to the embodiment of above announcement, within many modifications and other embodiments are also included within the scope of claims.And although adopted concrete term herein and in following claim, they only use with general and illustrative implication, its object unrestricted the present invention, also unrestricted claims.

Claims (6)

1. the glass treatment equipment for the treatment of the sheet glass of substantially flat, described sheet glass has first surface and contrary second, described glass treatment equipment comprises: transfer path, sheet glass can be advanced along this transfer path in substantially vertical plane, and washing section, purge zone and dryer section
Described purge zone comprises:
The first flooding nozzle, its setting adjacent with transfer path, and be communicated with liquid source, described the first flooding nozzle is positioned, thus can be by the first surface of guiding fluid sheet glass; With
First liquid bearing, its setting adjacent with transfer path, makes it towards second of sheet glass, and directly relative with the first flooding nozzle by horizontal and vertical mode; Wherein, in the horizontal direction, but the first flooding nozzle and first liquid bearing are arranged on to the position of identical opposite side along transfer path; In the vertical direction, at least some nozzles in nozzle are arranged between the top and bottom of first liquid bearing;
The second flooding nozzle, its basic setting adjacent with transfer path, and be communicated with liquid source, described the second flooding nozzle is positioned, thus can be by second of guiding fluid sheet glass; With
Second liquid bearing, its setting adjacent with transfer path, makes it towards the first surface of sheet glass, and directly relative with the second flooding nozzle by horizontal and vertical mode; Wherein, in the horizontal direction, but the second flooding nozzle and second liquid bearing are arranged on to the position of identical opposite side along transfer path; In the vertical direction, at least some nozzles in nozzle are arranged between the top and bottom of second liquid bearing;
Wherein, the level attitude of described the first flooding nozzle and the second flooding nozzle staggers along transfer path.
2. equipment as claimed in claim 1, it is characterized in that, described the first flooding nozzle is connected with liquid source of supply with the second flooding nozzle, with the speed of 757-7571ccm/ nozzle by the first surface of guiding fluid sheet glass and second, with 68950-344738 ox/square metre pressure by the first surface of guiding fluid sheet glass and second.
3. equipment as claimed in claim 1, is characterized in that, described dryer section also comprises:
The first air knife, its basic setting adjacent with transfer path, is communicated with source of the gas, it is designed, with the first pressure by the first surface of gas channeling sheet glass;
The second air knife, its basic setting adjacent with transfer path, is communicated with source of the gas, and it is designed, and with the second pressure, by second of gas channeling sheet glass, wherein said the second air knife is basic to be oppositely arranged with described the first air knife;
Clutch shaft bearing, according to delivery direction, it is positioned at the upstream of the first air knife and the second air knife, it is designed and is arranged, to support the first surface of the sheet glass of substantially flat; With
The second bearing, according to delivery direction, it is positioned at the downstream of the first air knife and the second air knife, and it is designed and is arranged, to support the first surface of the sheet glass of substantially flat,
Wherein said clutch shaft bearing and the second bearing are separated mutually by a segment distance in delivery direction, and described distance is equal to or less than 75 millimeters,
Pressure reduction absolute value between wherein said the first pressure and the second pressure is equal to or less than 1500 handkerchiefs.
4. equipment as claimed in claim 3, is characterized in that, described distance is equal to or less than 40 millimeters.
5. equipment as claimed in claim 3, is characterized in that, described distance is equal to or less than 25 millimeters.
6. the equipment as described in claim 3 or 4 or 5, is characterized in that, the pressure reduction absolute value between described the first pressure and the second pressure is equal to or less than 300 handkerchiefs.
CN200980134641.3A 2008-07-31 2009-07-21 Devices for vertical treatment of glass Expired - Fee Related CN102137821B (en)

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