CN102104015A - 无墨点测试挑片对位确认方法 - Google Patents
无墨点测试挑片对位确认方法 Download PDFInfo
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- CN102104015A CN102104015A CN2009102019533A CN200910201953A CN102104015A CN 102104015 A CN102104015 A CN 102104015A CN 2009102019533 A CN2009102019533 A CN 2009102019533A CN 200910201953 A CN200910201953 A CN 200910201953A CN 102104015 A CN102104015 A CN 102104015A
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CN2009102019533A CN102104015B (zh) | 2009-12-18 | 2009-12-18 | 无墨点测试挑片对位确认方法 |
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CN2009102019533A CN102104015B (zh) | 2009-12-18 | 2009-12-18 | 无墨点测试挑片对位确认方法 |
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CN102104015A true CN102104015A (zh) | 2011-06-22 |
CN102104015B CN102104015B (zh) | 2012-11-07 |
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CN2009102019533A Active CN102104015B (zh) | 2009-12-18 | 2009-12-18 | 无墨点测试挑片对位确认方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102445621A (zh) * | 2011-11-23 | 2012-05-09 | 无锡中微腾芯电子有限公司 | 一种利用测试针痕确认打点第一点的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06232221A (ja) * | 1993-02-05 | 1994-08-19 | Fuji Electric Co Ltd | 模擬不良チップを有するウェーハ |
CN1538512A (zh) * | 2003-04-18 | 2004-10-20 | 旺宏电子股份有限公司 | 晶片无墨点测试方法及系统 |
CN101369516A (zh) * | 2007-08-17 | 2009-02-18 | 京元电子股份有限公司 | 标记晶圆的方法、标记劣品晶粒的方法、晶圆对位的方法、以及晶圆测试机 |
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2009
- 2009-12-18 CN CN2009102019533A patent/CN102104015B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06232221A (ja) * | 1993-02-05 | 1994-08-19 | Fuji Electric Co Ltd | 模擬不良チップを有するウェーハ |
CN1538512A (zh) * | 2003-04-18 | 2004-10-20 | 旺宏电子股份有限公司 | 晶片无墨点测试方法及系统 |
CN101369516A (zh) * | 2007-08-17 | 2009-02-18 | 京元电子股份有限公司 | 标记晶圆的方法、标记劣品晶粒的方法、晶圆对位的方法、以及晶圆测试机 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102445621A (zh) * | 2011-11-23 | 2012-05-09 | 无锡中微腾芯电子有限公司 | 一种利用测试针痕确认打点第一点的方法 |
CN102445621B (zh) * | 2011-11-23 | 2013-10-09 | 无锡中微腾芯电子有限公司 | 一种利用测试针痕确认打点第一点的方法 |
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CN102104015B (zh) | 2012-11-07 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131216 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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Effective date of registration: 20131216 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |