CN102087478A - 掩模版扫描装置 - Google Patents
掩模版扫描装置 Download PDFInfo
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- CN102087478A CN102087478A CN2009102529428A CN200910252942A CN102087478A CN 102087478 A CN102087478 A CN 102087478A CN 2009102529428 A CN2009102529428 A CN 2009102529428A CN 200910252942 A CN200910252942 A CN 200910252942A CN 102087478 A CN102087478 A CN 102087478A
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN200910252942A CN102087478B (zh) | 2009-12-04 | 2009-12-04 | 掩模版扫描装置 |
Applications Claiming Priority (1)
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CN200910252942A CN102087478B (zh) | 2009-12-04 | 2009-12-04 | 掩模版扫描装置 |
Publications (2)
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CN102087478A true CN102087478A (zh) | 2011-06-08 |
CN102087478B CN102087478B (zh) | 2012-10-17 |
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CN200910252942A Active CN102087478B (zh) | 2009-12-04 | 2009-12-04 | 掩模版扫描装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110017804A (zh) * | 2018-01-08 | 2019-07-16 | 深南电路股份有限公司 | 一种pcb的厚度测量系统 |
CN111382586A (zh) * | 2018-12-28 | 2020-07-07 | 上海微电子装备(集团)股份有限公司 | 一种掩模版条码扫描装置及版库及传输系统及扫描方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1770016A (zh) * | 2004-11-03 | 2006-05-10 | 力晶半导体股份有限公司 | 光掩模管理方法及其条形码辨识装置 |
JP2009054630A (ja) * | 2007-08-23 | 2009-03-12 | Tokyo Electron Ltd | シリンダ停止位置可変機構及びそれを備えた基板処理装置 |
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2009
- 2009-12-04 CN CN200910252942A patent/CN102087478B/zh active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110017804A (zh) * | 2018-01-08 | 2019-07-16 | 深南电路股份有限公司 | 一种pcb的厚度测量系统 |
CN111382586A (zh) * | 2018-12-28 | 2020-07-07 | 上海微电子装备(集团)股份有限公司 | 一种掩模版条码扫描装置及版库及传输系统及扫描方法 |
CN111382586B (zh) * | 2018-12-28 | 2022-02-15 | 上海微电子装备(集团)股份有限公司 | 一种掩模版条码扫描装置及版库及传输系统及扫描方法 |
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Publication number | Publication date |
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CN102087478B (zh) | 2012-10-17 |
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Effective date of registration: 20171117 Address after: 214028 Xinzhou Road, Wuxi national hi tech Industrial Development Zone, Jiangsu, China, No. 8 Patentee after: Wuxi Huarun Shanghua Technology Co., Ltd. Address before: 214028 Wuxi provincial high tech Industrial Development Zone, Hanjiang Road, No. 5, Jiangsu, China Co-patentee before: Wuxi Huarun Shanghua Technology Co., Ltd. Patentee before: Wuxi CSMC Semiconductor Co., Ltd. |
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TR01 | Transfer of patent right | ||
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Effective date of registration: 20180625 Address after: 214135 -6, Linghu Avenue, Wuxi Taihu international science and Technology Park, Wuxi, Jiangsu, China, 180 Patentee after: WUXI DISI MICROELECTRONIC CO., LTD. Address before: 214028 No. 8 Xinzhou Road, national hi tech Industrial Development Zone, Wuxi, Jiangsu Patentee before: Wuxi Huarun Shanghua Technology Co., Ltd. |