CN102074579B - 半导体装置 - Google Patents
半导体装置 Download PDFInfo
- Publication number
- CN102074579B CN102074579B CN201010539006.8A CN201010539006A CN102074579B CN 102074579 B CN102074579 B CN 102074579B CN 201010539006 A CN201010539006 A CN 201010539006A CN 102074579 B CN102074579 B CN 102074579B
- Authority
- CN
- China
- Prior art keywords
- conduction type
- region
- diffusion region
- trap
- impurity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 57
- 239000012535 impurity Substances 0.000 claims abstract description 206
- 238000009792 diffusion process Methods 0.000 claims abstract description 190
- 230000005516 deep trap Effects 0.000 claims abstract description 77
- 239000000758 substrate Substances 0.000 claims description 58
- 238000002347 injection Methods 0.000 claims description 13
- 239000007924 injection Substances 0.000 claims description 13
- 230000004888 barrier function Effects 0.000 claims description 12
- 230000015556 catabolic process Effects 0.000 description 25
- 239000012212 insulator Substances 0.000 description 16
- 238000009826 distribution Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000002146 bilateral effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
- H01L29/0873—Drain regions
- H01L29/0878—Impurity concentration or distribution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66681—Lateral DMOS transistors, i.e. LDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
- H01L29/42368—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity the thickness being non-uniform
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
Claims (19)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2009-0110926 | 2009-11-17 | ||
KR1020090110926A KR101128694B1 (ko) | 2009-11-17 | 2009-11-17 | 반도체 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102074579A CN102074579A (zh) | 2011-05-25 |
CN102074579B true CN102074579B (zh) | 2015-09-30 |
Family
ID=44010656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010539006.8A Active CN102074579B (zh) | 2009-11-17 | 2010-11-05 | 半导体装置 |
Country Status (4)
Country | Link |
---|---|
US (3) | US8546883B2 (zh) |
KR (1) | KR101128694B1 (zh) |
CN (1) | CN102074579B (zh) |
TW (1) | TWI506781B (zh) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201732791U (zh) * | 2010-08-12 | 2011-02-02 | 四川和芯微电子股份有限公司 | 横向扩散金属氧化物半导体结构 |
CN103021852B (zh) * | 2011-09-22 | 2015-06-03 | 上海华虹宏力半导体制造有限公司 | 高压p型ldmos的制造方法 |
CN103035525B (zh) * | 2011-10-10 | 2015-06-03 | 上海华虹宏力半导体制造有限公司 | 高压隔离n型ldmos器件的制造方法 |
CN103050512A (zh) * | 2011-10-13 | 2013-04-17 | 上海华虹Nec电子有限公司 | 非外延的高压绝缘n型ldmos器件结构 |
TWI531068B (zh) * | 2013-09-12 | 2016-04-21 | 新唐科技股份有限公司 | 半導體元件 |
CN103456783B (zh) * | 2012-05-30 | 2016-06-08 | 上海华虹宏力半导体制造有限公司 | 高击穿电压p型ldmos器件及制造方法 |
US9799766B2 (en) | 2013-02-20 | 2017-10-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | High voltage transistor structure and method |
US8878242B1 (en) | 2013-07-08 | 2014-11-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pickup device structure within a device isolation region |
KR101492861B1 (ko) | 2013-08-05 | 2015-02-12 | 서울대학교산학협력단 | 반도체 소자 및 그 제조 방법 |
CN104332501B (zh) * | 2014-09-30 | 2017-10-24 | 上海华虹宏力半导体制造有限公司 | Nldmos器件及其制造方法 |
US10050115B2 (en) * | 2014-12-30 | 2018-08-14 | Globalfoundries Inc. | Tapered gate oxide in LDMOS devices |
KR102313728B1 (ko) * | 2018-04-09 | 2021-10-15 | 주식회사 키 파운드리 | 접합 트랜지스터와 고전압 트랜지스터를 포함한 반도체 소자 |
CN104992977B (zh) | 2015-05-25 | 2018-06-19 | 上海华虹宏力半导体制造有限公司 | Nldmos器件及其制造方法 |
US10217860B2 (en) | 2015-09-11 | 2019-02-26 | Nxp Usa, Inc. | Partially biased isolation in semiconductor devices |
US10297676B2 (en) * | 2015-09-11 | 2019-05-21 | Nxp Usa, Inc. | Partially biased isolation in semiconductor device |
KR102454465B1 (ko) | 2016-09-22 | 2022-10-14 | 주식회사 디비하이텍 | 필드 플레이트 영역 내에 형성된 보조 전극을 갖는 반도체 소자 |
TWI699888B (zh) * | 2018-11-07 | 2020-07-21 | 新唐科技股份有限公司 | 高壓半導體裝置 |
CN111293163B (zh) * | 2018-12-06 | 2023-11-10 | 上海新微技术研发中心有限公司 | 横向扩散金属氧化物半导体场效应晶体管 |
KR20210121851A (ko) * | 2020-03-31 | 2021-10-08 | 에스케이하이닉스 주식회사 | 이미지 센싱 장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5517046A (en) * | 1993-11-19 | 1996-05-14 | Micrel, Incorporated | High voltage lateral DMOS device with enhanced drift region |
CN1606171A (zh) * | 2003-10-06 | 2005-04-13 | 恩益禧电子股份有限公司 | 半导体器件及其制作方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100267395B1 (ko) * | 1997-12-19 | 2000-10-16 | 김덕중 | 이중-확산 모스 트랜지스터 및 그 제조방법 |
TW564557B (en) * | 1999-12-22 | 2003-12-01 | Matsushita Electric Works Ltd | Semiconductor device and process for producing the same |
US6730962B2 (en) | 2001-12-07 | 2004-05-04 | Texas Instruments Incorporated | Method of manufacturing and structure of semiconductor device with field oxide structure |
US6677210B1 (en) | 2002-02-28 | 2004-01-13 | Linear Technology Corporation | High voltage transistors with graded extension |
JP2006202810A (ja) * | 2005-01-18 | 2006-08-03 | Sharp Corp | 横型二重拡散型mosトランジスタおよびその製造方法 |
DE102006040788B4 (de) | 2006-08-31 | 2013-02-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Integrierter Optokoppler mit organischem Lichtemitter und anorganischem Photodetektor |
JP2008091689A (ja) | 2006-10-03 | 2008-04-17 | Sharp Corp | 横型二重拡散型mosトランジスタおよびその製造方法、並びに集積回路 |
-
2009
- 2009-11-17 KR KR1020090110926A patent/KR101128694B1/ko active IP Right Grant
-
2010
- 2010-07-13 US US12/835,523 patent/US8546883B2/en active Active
- 2010-07-23 TW TW099124432A patent/TWI506781B/zh active
- 2010-11-05 CN CN201010539006.8A patent/CN102074579B/zh active Active
-
2013
- 2013-08-01 US US13/957,071 patent/US8716796B2/en active Active
- 2013-08-01 US US13/957,103 patent/US8692328B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5517046A (en) * | 1993-11-19 | 1996-05-14 | Micrel, Incorporated | High voltage lateral DMOS device with enhanced drift region |
CN1606171A (zh) * | 2003-10-06 | 2005-04-13 | 恩益禧电子股份有限公司 | 半导体器件及其制作方法 |
Also Published As
Publication number | Publication date |
---|---|
US20110115020A1 (en) | 2011-05-19 |
CN102074579A (zh) | 2011-05-25 |
KR20110054320A (ko) | 2011-05-25 |
TW201121049A (en) | 2011-06-16 |
US20140021542A1 (en) | 2014-01-23 |
US20140021541A1 (en) | 2014-01-23 |
US8692328B2 (en) | 2014-04-08 |
TWI506781B (zh) | 2015-11-01 |
US8546883B2 (en) | 2013-10-01 |
KR101128694B1 (ko) | 2012-03-23 |
US8716796B2 (en) | 2014-05-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102074579B (zh) | 半导体装置 | |
US9543379B2 (en) | Semiconductor device with peripheral breakdown protection | |
US10529849B2 (en) | High-voltage semiconductor device including a super-junction doped structure | |
US8623732B2 (en) | Methods of making laterally double diffused metal oxide semiconductor transistors having a reduced surface field structure | |
US8004039B2 (en) | Field effect transistor with trench-isolated drain | |
US9905687B1 (en) | Semiconductor device and method of making | |
JP2011512676A (ja) | ブレークダウン電圧を向上するエッジ終端 | |
US7898030B2 (en) | High-voltage NMOS-transistor and associated production method | |
US9029948B2 (en) | LDMOS device with step-like drift region and fabrication method thereof | |
KR102068842B1 (ko) | 반도체 전력소자 | |
US8482066B2 (en) | Semiconductor device | |
JP7358330B2 (ja) | ダイヤモンドmisトランジスタ | |
US8829562B2 (en) | Semiconductor device including a dielectric structure in a trench | |
US9478456B2 (en) | Semiconductor device with composite drift region | |
US9520493B1 (en) | High voltage integrated circuits having improved on-resistance value and improved breakdown voltage | |
US20140097447A1 (en) | Semiconductor device and method of manufacturing the same | |
US9666671B2 (en) | Semiconductor device with composite drift region and related fabrication method | |
CN102694020B (zh) | 一种半导体装置 | |
US20220271154A1 (en) | Superjunction semiconductor device and method of manufacturing same | |
US20220285488A1 (en) | Superjunction semiconductor device having floating region and method of manufacturing same | |
US9502498B2 (en) | Power semiconductor device | |
CN102983162A (zh) | 半导体装置及其制造方法 | |
KR20150065489A (ko) | 고전압 반도체 소자 및 그 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201021 Address after: Han Guozhongqingbeidao Patentee after: Key Foundry Co.,Ltd. Address before: Cheongju Chungbuk Korea Patentee before: MagnaChip Semiconductor, Ltd. |
|
TR01 | Transfer of patent right | ||
CP03 | Change of name, title or address |
Address after: Republic of Korea Patentee after: Aisi Kaifang Semiconductor Co.,Ltd. Country or region after: Republic of Korea Address before: Han Guozhongqingbeidao Patentee before: Key Foundry Co.,Ltd. Country or region before: Republic of Korea |
|
CP03 | Change of name, title or address |