CN102037381B - 利用电介质与金属层对的加强型滤光片 - Google Patents
利用电介质与金属层对的加强型滤光片 Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 25
- 239000011701 zinc Substances 0.000 claims abstract description 65
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 56
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 54
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052737 gold Inorganic materials 0.000 claims abstract description 21
- 239000010931 gold Substances 0.000 claims abstract description 21
- 230000007797 corrosion Effects 0.000 claims abstract description 17
- 238000005260 corrosion Methods 0.000 claims abstract description 17
- 229910052709 silver Inorganic materials 0.000 claims abstract description 13
- 239000004332 silver Substances 0.000 claims abstract description 13
- 239000010408 film Substances 0.000 claims description 132
- 229910052751 metal Inorganic materials 0.000 claims description 28
- 239000002184 metal Substances 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 20
- 238000001914 filtration Methods 0.000 claims description 11
- 229910052738 indium Inorganic materials 0.000 claims description 9
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 7
- 238000005516 engineering process Methods 0.000 claims description 5
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- GZCWPZJOEIAXRU-UHFFFAOYSA-N tin zinc Chemical group [Zn].[Sn] GZCWPZJOEIAXRU-UHFFFAOYSA-N 0.000 claims description 3
- HXFVOUUOTHJFPX-UHFFFAOYSA-N alumane;zinc Chemical compound [AlH3].[Zn] HXFVOUUOTHJFPX-UHFFFAOYSA-N 0.000 claims description 2
- 229910000960 colored gold Inorganic materials 0.000 claims 4
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 12
- 239000000463 material Substances 0.000 description 8
- 229910003437 indium oxide Inorganic materials 0.000 description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
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- 229910052718 tin Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- 229910002695 AgAu Inorganic materials 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
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- 229910052735 hafnium Inorganic materials 0.000 description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 150000003751 zinc Chemical class 0.000 description 2
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical compound [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
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Abstract
当较厚的锌基薄膜(30,32和34)作用为在后形成的银基薄膜(18,20和22)的种子层时,滤光片的“腐蚀”生能得以增强。滤光片内包括至少两对电介质与金属迭层对(12,14和16),其中,锌基薄膜为电介质层的第二薄膜,而银基薄膜为金属层。锌基薄膜的锌含量至少为80%且厚度至少为15nm。为了进一步提高抗腐蚀性能,可将金加入银基薄膜中。
Description
技术领域
本发明大体涉及提供光学装置,更具体地说,涉及提供一种具有目标光学性能以及高度抗损坏性的成本效益滤光片。
背景技术
使用薄膜来控制窗户在不同频率范围的光下的反射和透射水平在本领域是众所周知的技术。对于车窗以及很多建筑物和住宅的窗户而言,通过控制在可见光的波长范围(400nm至700nm)内的透射率和反射率可减少眩光。对于相同的窗户应用,通过部分地屏蔽在太阳光谱的可见部分和/或近红外部分(70nm至1200nm)的阳光透射,可以减小热负荷。
在Woodard等人的美国专利US6,034,813中描述了一种提供阳光控制的薄膜序列,该专利已转让给本发明的受让人。该阳光控制装置包括在柔性聚对苯二甲酸乙二醇酯(PET)基板上的Fabry-Perot干涉滤光片和灰色金属层,所述阳光控制装置稍后可用粘合剂附于窗户上。Fabry-Perot干涉滤光片通过优选地让某些波长的光线通过以及使其它波长的光反射而减小太阳能热负荷。
除了与通过窗户提供阳光控制相关的光学考虑之外,还必须顾及结构上的考虑。对于结构稳定性而言,降低光学装置在制造、安装或长期使用过程中的裂化敏感性是一个重要目标。降低其它方式的“腐蚀”至少也同样重要。通常会增加硬化层来提供保护,正如上文参照的Woodard等人的专利的描述。但是,硬化层不能防止制造过程中出现的腐蚀,而且对于抵抗光学装置边缘导致的腐蚀而言,其成效有限。
发明内容
通过以下方法可增强滤光片的“腐蚀性能”,即提供一种较厚的锌基薄膜作为其后形成的银基薄膜的种子薄膜,其中该锌基薄膜为双膜电介质层的第二薄膜,而银基薄膜为金属层。如此得到的滤光片包括至少两对这样的电介质层与金属层层对。较厚的锌基薄膜的锌含量至少为80%,且厚度至少为15nm。在一优选实施方案中,银基薄膜含有金,以便提供进一步的腐蚀抗性。
在一实施方案中,不同对的锌基薄膜的厚度是不均等的。相对于这种不均等性,优选实施方案是为邻接基板的对形成较薄的锌基薄膜,其中滤光片形成在该基板上。例如,在具有三对电介质层与金属层层对的滤光片中,第一锌基薄膜的厚度可以是15nm,而其后形成的每一层锌基薄膜的厚度可以是30nm(最大为40nm)。锌基薄膜的功能是促进银基薄膜的生长。如果锌基薄膜的锌含量足够高,则该薄膜可作为在其后形成的金属层的种子层。然而,经已确定这种功能在对最接近基板的层对很重要的同时,对于较远的电介质层与金属层层对而言,该重要性更大。锌基薄膜的锌含量至少为50%,且优选大于80%。在最优选的实施方案中,锌含量约为90%。同样,在锌基层的最小厚度确定为15nm时,最小值优选为20nm,而在最优选的实施方案中为25nm。
锌基薄膜可以是锌锡(ZnSn)氧化物,但也可选择其它材料。锌铝可代替锌锡。可以溅镀锌基薄膜,但应允许氧化,以使薄膜为电介质。在一些实施方案中,在至少一片锌基薄膜的整个厚度中,该材料是不一致的。例如,溅镀的锌基薄膜开始时为ZnSn,然后转变为ZnAI,再恢复为ZnSn。在转变过程中,锌的含量(例如,90%)可以保持不变。这种或其它材料沿薄膜厚度的变化可以计算,以提供额外的腐蚀性能优点。
正如前述,金属层为优选包含金的银基薄膜,以便提高抗腐蚀性。正如不同层对中的锌基薄膜可具有不同的厚度那样,金的百分比在不同层对中可以是不同的。在滤光片的劣化(腐蚀)最有可能从与基板表面平行的主表面出现的应用中,可将较大百分比的金加入最后的银基薄膜中。另一方面,有可能在某些窗户应用中,其中更重要的考虑是来自边缘的腐蚀,而最易受影响的层对是最靠近基板的层对。在该些应用中,使最靠近基板的银基薄膜中的金含量较高是有益的。
在优选的实施方案中,透明的电介质薄膜是铟基的,例如氧化铟(InOx)。电介质层的该起始薄膜对先形成的层提供保护,尤其是在下面的层为银基薄膜层其中之一层时。通过用高含量氢流形成铟基薄膜,可保护下面的银基薄膜使其免于被氧化且制程会更稳定。该薄膜的折射率在1.1至2.5范围内,但优选的折射率是在1.3至2.1的范围内。优选的材料为In2O3,但透明电介质薄膜可基于可选择的氧化金属,例如:锡,钛,锆,钽,铌或铪。
仍参照优选的实施方案,滤光片可设计成用于窗户应用,例如,车辆、住宅或建筑物的窗。层对是按顺序形成的,以提供具有交替型电介质层与金属层模式的Fabry-Perot滤光片。
附图说明
图1为本发明的优选实施方案中在基板上的迭层的侧视图。
图2为加入本发明的过滤装置的侧视图。
图3为形成图1的滤光片的步骤顺序图。
具体实施方式
参见图1,交替模式的迭层形成在柔性基板10上。该柔性基板可以是厚度介于25和100微米之间的PET。基板背对迭层的那一面(图1中未示)可以包括粘合层和释放条。该释放条易于从粘合剂上除掉,使粘合层能够用于将基板与想要过滤的部件结合。例如,可将过滤装置附于窗户上。在另一实施方案中,该迭层是直接形成在想要过滤的部件上。在这样的应用中,需要使窗板通过溅射室,以便沉积形成迭层的材料。
图1所示为优选实施方案,其中在交替模式的电介质与金属迭层中有三对层对12,14和16。每一金属层18,20和22均为单层的银或银合金薄膜。这些金属层通过以下方法可以形成:首先溅射银基薄膜,然后溅射一层薄钛上覆层,随后对此上覆层进行退火和氧化。可见到,通过将金属退火,该层的片电阻可减小至0.8ohms/square。可接受的银合金包括AgAu和AgPd。但是,优选的材料为AgAu,是因为金含量对不同类型的腐蚀起阻碍作用。层中银的含量应至少占50%,优选为至少85%。回到该优选实施方案的描述,金属层含大约85%的银和大约15%的金。
每一电介质层均为双薄膜层,其包括透明电介质薄膜24,26或28以及锌基薄膜30,32或34。透明电介质薄膜可由氧化铟形成。从图1可见,第四电介质层由第四透明电介质薄膜36和第四锌基薄膜38形成。在此实施方案中,交替模式的三对层对可以考虑以第一金属层(银基薄膜30)而非第一电介质层作为开始。
每一电介质层的第一薄膜24,26和28均优选为InOx,最优选为ln2O3。通过用高氢含量流溅射铟基薄膜,可防止下面的材料被氧化。这对于上面的电介质层特别有用,因为下面的银基薄膜18,20和22受到保护不被氧化。此外,在溅镀过程中形成铟基薄膜是稳定的。然而,经已确定,如果电介质层的该第一薄膜被锡基、钛基、锆基、钽基、铌基或铪基取代的话也可获得该好处。
电介质层的锌基薄膜30,32和34用于促进银基薄膜18,20和22的生长。每一锌基薄膜的厚度至少为15nm。较厚的锌基“种子”薄膜改善最终滤光片的“腐蚀”性能。这些薄膜主要为锌,优选锌含量至少为80%,但必须经氧化,以确保该薄膜为电介质。图1所示的最优选实施方案中,薄膜含有90%锌和10%锡。然而,如前所述,可以溅射一或多片锌基薄膜,以沿其厚度包括不同的材料(例如:先为ZnSn,然后为ZnAI,再回到ZnSn)。当使用溅射技术来提供不同的薄膜(如优选实施方案中的薄膜)时,百分比指的是溅射靶的含量,所以所提及的“百分比”不涉及氧化。
在银和具有高锌含量的氧化锌之间具有理想的晶格匹配(lattice match)。因此,锌基薄膜30,32和34可促进银基薄膜18,20和22的成核及外延生长。由于溅射的氧化锌的厚度增加了,晶粒度也会增加。这可能导致锌基氧化薄膜从非晶形薄膜变化成重要的晶体化薄膜,取决于其厚度。如所述,每一锌基薄膜30,32和34的厚度至少为15nm(较佳为20nm,最佳为25nm),并小于电介质层的总厚度(因为电介质层还包括透明电介质薄膜24,26和28)。该最小厚度15nm导致更晶体化的薄膜并为其后溅射的银基薄膜提供更好的种子层,因为界面更“强壮”,更加能抵抗分离和腐蚀。优选锌基薄膜的厚度小于40nm。在最优实施方案中,锌基薄膜的厚度大于25nm,但小于40nm。
在本发明的一些实施方案中,锌基薄膜30,32和34的厚度是不一致的。经已确定,与基板10相邻的锌基薄膜30的厚度相比离基板较远的薄膜32和34的厚度而言,其所扮演的角色较不重要。第四锌基薄膜38也是这样的。第一锌基薄膜30的厚度可以是25nm,而其它薄膜的厚度则为30nm。
不一致性也适用于银基层18,20和22中金的含量。金含量可基于不同的考虑、主要为成本和抗腐蚀性而定。在多数的应用中,滤光片的完整性是从上面受到攻击,如图1中的定向所示。在这样的应用中,顶部的银基薄膜22的金含量大于下面的薄膜18和20的金含量。这是包括配合金含量的应用的优选实施方案。然而在一些应用中,最受关注的腐蚀源是在制造滤光片过程中所经历的那种。如果是这样的话,所形成的第一银基薄膜18的金含量较高是有益的。对于该些最受关注的腐蚀源是从滤光片的边缘开始“攻击”的应用而言,该备选实方案也会是理想的。
图2所示为利用本发明的更完整的组件图。迭层40表示在图1所示的基板10上溅射层。贴装胶42用于将组件粘贴到想要滤光的窗户上。防黏膜44保持与贴装胶接触,直到组件已准备好要附着到窗户上为止。复合粘合剂46将具有硬化层50的第二PET基板48固定到组件的其它部件上。
图3示出形成图1和2的滤光片的步骤顺序。起初,在步骤52提供基板。该基板可以是由柔性透明材料制成的薄板,例如PET。作为选择,该基板可以是窗户,以致于不同的层都直接形成在该窗户上。
在步骤54,形成电介质层的第一薄膜。在优选实施方案中,使用溅射技术来形成氧化铟层。在沉积了第一薄膜后,在步骤56形成锌基薄膜。该薄膜的厚度至少为15nm,且与第一薄膜组合以限定电介质层。该锌基薄膜中锌的含量至少为80%。在优选实施方案中,用溅射靶来沉积薄膜,该溅射靶含有约90%锌和10%锡。作为选择,可形成锌铝,然后将其氧化。
锌基薄膜为步骤58中形成的银基薄膜提供种子层。该银基薄膜包括在建立Fabry-Perot滤光片中的金属层。该薄膜至少含50%银,优选至少85%银。如果将金加入该金属层将增加抗腐蚀性。
在判定步骤60中,应确定是否需要包括另外的电介质层与金属层对。本发明的滤光片包括至少两对层对,以致于判定结果为肯定。因此,继续进行下一步骤64,在此步骤,应确定是否须为第二层对提供薄膜修整。也就是说,应判定第二层对中的三片薄膜是否应与第一层对中的相同或不同。如前所述,第一层对的锌基薄膜可薄于其后层对的可比较薄膜。前面还描述了可以修整银基薄膜中的金含量。根据步骤60和步骤64的确定,重复步骤54,56和58中三片薄膜的顺序。
当第二次进行形成薄膜的步骤54,56和58完成后,会再次遇到判定步骤60。如果两对电介质层与金属层层对已足够的话,将在步骤62结束工序。然而,优选实施方案是包括三对层对,因此又去到判定步骤64和选择步骤66,并形成三片另外的薄膜。当第三对层对形成后,将在步骤62结束工序。但是,可选择性地包括图1的薄膜36和38,步骤66中的参数选择包括在回到步骤54后删除银基层。
虽然在图3的步骤顺序中没有示出,可在之后将滤光片附于窗户上,尽管通常还包括其它部件,例如图2的硬化层50。
Claims (16)
1.一种提供滤光片的方法,所述方法包括以下步骤:
在基板上形成迭层以包括电介质层与金属层层对,包括通过以下步骤限定每一所述层对:
形成铟基透明电介质薄膜作为所述电介质层的第一薄膜,所述透明电介质薄膜的折射率至少为1.1;
形成锌基薄膜作为所述电介质层的第二薄膜,所述第二薄膜形成在所述第一薄膜上,所述锌基薄膜的锌含量至少为80%且厚度至少为15nm;以及
形成银基薄膜作为所述金属层,所述银基薄膜与所述锌基薄膜接触。
2.如权利要求1所述的方法,其特征在于,形成包括所述层对的迭层的步骤包括将与所述基板邻接的所述层对的所述锌基薄膜形成得薄于离所述基板较远的每一所述层对的所述锌基薄膜。
3.如权利要求1所述的方法,其特征在于,形成所述银基薄膜的步骤包括沉积银和金的合金,其中包含所述金是为了控制所述迭层的腐蚀。
4.如权利要求3所述的方法,其特征在于,沉积所述合金的步骤包括基于与所述基板的距离,在所述银基薄膜之中有意地加入不同百分比的金。
5.如权利要求4所述的方法,其特征在于,使离所述基板最远的所述银基薄膜形成得比离所述基板最近的所述银基薄膜具有更高百分比的金。
6.如权利要求1所述的方法,其特征在于,所述方法还包括基于促进所述银基薄膜的形成,选择所述锌基薄膜的所述厚度以及选择所述锌含量的百分比。
7.如权利要求1所述的方法,其特征在于,形成所述电介质层与金属层层对的所述铟基透明电介质薄膜的步骤包括使用溅射技术来沉积铟基透明电介质薄膜。
8.如权利要求1所述的方法,其特征在于,形成所述锌基薄膜的步骤提供的薄膜厚度在15nm至40nm的范围内。
9.如权利要求1所述的方法,其特征在于,所述方法还包括将所述迭层附于窗户上。
10.一种过滤装置,所述过滤装置包括:
透明基板;以及
在所述基板上的迭层,所述迭层包括电介质层与金属层层对,每一所述层对由以下部件限定:
铟基透明电介质薄膜,所述铟基透明电介质薄膜作为所述电介质层的第一薄膜,所述透明电介质层的折射率至少为1.1;
锌基薄膜,所述锌基薄膜作为所述电介质层的第二薄膜,所述锌基薄膜的锌含量至少为80%且厚度在15nm至40nm的范围内;以及
银金薄膜,所述银金薄膜作为所述金属层,所述银金薄膜与所述锌基薄膜接触。
11.如权利要求10所述的过滤装置,其特征在于,与所述基板邻接的电介质层与金属层层对中的所述锌基薄膜薄于其它每一层对的所述锌基薄膜。
12.如权利要求11所述的过滤装置,其特征在于,所述锌基薄膜为锌锡或锌铝,而所述锌含量约为90%。
13.如权利要求10所述的过滤装置,其特征在于,离所述基板最远的所述电介质层与金属层层对中的所述银金薄膜比其它每一层对的所述银金薄膜具有更高的金含量。
14.如权利要求10所述的过滤装置,其特征在于,所述基板附于窗户上。
15.如权利要求10所述的过滤装置,其特征在于,所述过滤装置包括三对所述电介质层与金属层层对。
16.如权利要求10所述的过滤装置,其特征在于,每一所述透明电介质薄膜为In2O3。
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- 2008-08-20 WO PCT/US2008/009902 patent/WO2009120175A1/en active Application Filing
- 2008-08-20 KR KR1020107023882A patent/KR101510496B1/ko active IP Right Grant
- 2008-08-20 CN CN200880129487.6A patent/CN102037381B/zh active Active
- 2008-08-20 EP EP08795465.7A patent/EP2260337B1/en active Active
- 2008-08-20 JP JP2011501757A patent/JP2011515714A/ja active Pending
- 2008-09-05 TW TW097134065A patent/TWI498219B/zh active
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2011
- 2011-09-15 HK HK11109711.6A patent/HK1156401A1/zh unknown
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US6699585B2 (en) * | 1998-12-18 | 2004-03-02 | Asahi Glass Company, Limited | Glazing panel |
Also Published As
Publication number | Publication date |
---|---|
KR101510496B1 (ko) | 2015-04-08 |
WO2009120175A1 (en) | 2009-10-01 |
EP2260337A4 (en) | 2012-07-25 |
TW200940339A (en) | 2009-10-01 |
HK1156401A1 (zh) | 2012-06-08 |
KR20110011607A (ko) | 2011-02-08 |
EP2260337B1 (en) | 2017-09-13 |
US7824777B2 (en) | 2010-11-02 |
EP2260337A1 (en) | 2010-12-15 |
US20090246552A1 (en) | 2009-10-01 |
CN102037381A (zh) | 2011-04-27 |
TWI498219B (zh) | 2015-09-01 |
JP2011515714A (ja) | 2011-05-19 |
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