CN101982730A - Light tube for measuring flatness of light wave array surface or optical reflecting surface - Google Patents
Light tube for measuring flatness of light wave array surface or optical reflecting surface Download PDFInfo
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- CN101982730A CN101982730A CN 201010520182 CN201010520182A CN101982730A CN 101982730 A CN101982730 A CN 101982730A CN 201010520182 CN201010520182 CN 201010520182 CN 201010520182 A CN201010520182 A CN 201010520182A CN 101982730 A CN101982730 A CN 101982730A
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Abstract
The invention discloses a light tube for measuring flatness of light wave array surface or optical reflecting surface. The light tube comprises a target generator, a detector, an optical splitter, a lens system and a light splitting device; wherein the detector, the optical splitter, the lens system and the light splitting device are sequentially arranged along the same axis; the target generator is arranged beside the optical splitter, and the position of the target generator and the position of the detector can be exchanged. The light tube of the invention has the following advantages: measuring range is wide, measuring is not restricted by testing area, and the light tube is especially applicable to measuring of flatness of light wave array surface with higher aperture or optical reflecting surface with larger area.
Description
Technical field:
The invention belongs to the optical detection field, relate to a kind of optical detection apparatus, especially a kind of light pipe of measuring light wave array surface or optical reflection face surface flatness.
Background technology:
The light wave array surface detects used instrument at present, mainly contains instruments such as interferometer, Hartmann sensor and hartmann shack sensor; Interferometer is used in the detection of optical reflection face surface flatness more.For interferometer, can be subjected to the restriction of region area to be measured during test.And Hartmann sensor and hartmann shack sensor have adopted small-bore diaphragm and lens arra respectively, manufacturing precision prescribed to its aperture diaphragm and lens arra in the application is very high, and the parameter of each unit can not be accomplished in full accord, so can introduce corresponding error.
The present invention will provide a kind of instrument of measuring light wave array surface and optical reflection face surface flatness.The measurement range of this instrument is very big, and the not restriction of tested person area particularly is good at light wave array surface or the bigger optical reflection face surface flatness test of area that bore is bigger.And, can eliminate scanning and move and the generation error for the sweep test mode.
Technical scheme of the present invention is as follows:
A kind of light pipe of measuring light wave array surface or optical reflection face surface flatness, described light pipe comprises target generator, detector, optical splitter, lens combination and light-dividing device; Described detector, optical splitter, lens combination and light-dividing device are along same axis series arrangement successively; Described target generator is arranged on the optical splitter side; And the position of target generator can exchange with position of detector.
Described is the detector array row detector, as CCD, CMOS.
Described light-dividing device is the element or the device that a light beams can be divided into some light beams, as angle of wedge chip arrays
Described lens combination is to make light beam with suitable angle of divergence outgoing, as collimator objective
Described optical splitter element or device that to be an energy separate projecting beam and folded light beam are as Amici prism etc.
Described target generator is can send to have the device of target as information carrying beam, as the graticule that is illuminated
The principle of instrument of the present invention: from target generator, send a light beams, send the light beam that some bundles have minute angle difference through optical splitter, lens combination and light-dividing device, being reflected the zones of different that is detected device by face to be measured receives respectively, if reflecting surface deflects, then corresponding every bundle folded light beam also can deflect thereupon, the angle variable quantity of light beam all is detected device and measures, thereby calculates the deflection angle of reflecting surface.When measuring the light wave array surface, do not need target generator, directly receive light wave, the light wave that receives is divided into several zones by light-dividing device and goes out the angle value of every Shu Guangbo light beam by detector measurement.
With before this instrument test, every light beams that should send light pipe is earlier determined measuring basis separately.Instrument can be aimed at surface flatness level crossing preferably, receive folded light beam then, and read the angle value of these light beams, and with this moment angle value as zero position of testing.Because it is fine that the surface flatness of the less level crossing of diameter can be accomplished, thus with this as benchmark, the angle value precision of measuring is higher, and is easy to realize.
For the test of optical reflection face, instrument is aimed at reflecting surface send light beam, and receive reflected light, by the angle value of each regional reflex light, can calculate each regional relative tilt degree, finally can calculate to be measured surface flatness.For the light wave array surface, then instrument does not need to send light beam, directly receives light wave, can measure each regional deflection of light wave, thereby calculates the flatness of light wave array surface.For area to be measured, can do value to whole face with scan mode, and, can eliminate the scanning translational error that mobile light pipe produced, thereby finish measurement scheme by overlap sampling greater than the bright dipping bore.
Description of drawings
The structural representation of Fig. 1 instrument of the present invention;
During implementing, Fig. 2 determines four light beams measuring basis separately;
Wherein: 1 is target generator, and 2 is detector, and 3 is optical splitter, and 4 is lens combination, and 5 is light-dividing device, and 6 is catoptron.
Embodiment
Describe content of the present invention in detail below in conjunction with accompanying drawing:
Referring to Fig. 1,
For measuring the optics reflecting surface, penetrate on light-dividing device 5 through optical splitter 3 and lens combination 4 by the light beams that target generator 1 sends, light-dividing device has been divided into the light beam that some bundles have minute angle difference with a light beams, these light beams mirror 6 that is reflected reflects, the angular deflection meeting of folded light beam is different because the inclined degree of reflecting surface is different, so these light beams are incident upon the zones of different of detector 2 and are detected device and receive, and the data of these light beams are calculated the inclined degree that just can draw surface, every light beams corresponding region; For receiving the light wave array surface, do not need to use target generator 1, light wave is by light-dividing device 5 zoning territories, and is detected device respectively and receives, and can calculate the tilt quantity of each regional light wave array surface.Wherein, the position of target generator 1 can with the location swap of detector 2.
The hypothesis instrument sends four bundle light below, and as the detailed method of testing of example introduction.
Before the measurement, earlier with instrument aim at a surface flatness preferably level crossing send four light beams, and receive their folded light beam, as Fig. 2, obtain the angle value of four light beams respectively, and with this moment angle value be measuring basis (being zero-bit).
During measurement,, need that then instrument is aimed at reflecting surface and send light beam for measuring the optics reflecting surface, and reception folded light beam, according to the angle of each folded light beam deflection, calculate the inclined degree of corresponding each the regional reflex face of light beam, finally calculate the surface flatness of optical reflection face; For measuring the light wave array surface, instrument does not need to send light beam, directly receives light wave, by measuring the tilt value of each regional light wave, calculates the flatness of light wave array surface.
For test area bigger optical reflection face or light wave array surface, can treat side surface to be measured with this instrument and carry out sweep test, whole face to be measured is carried out data acquisition, and can eliminate the translational error that produces in the scanning process by calculating by the overlapping region sampling, finally calculate the surface flatness of optical reflection face or light wave array surface.
Above content is to further describing that the present invention did in conjunction with concrete preferred implementation; can not assert that the specific embodiment of the present invention only limits to this; for the general technical staff of the technical field of the invention; without departing from the inventive concept of the premise; can also make some simple deduction or replace, all should be considered as belonging to the present invention and determine scope of patent protection by claims of being submitted to.
Claims (7)
1. light pipe of measuring light wave array surface or optical reflection face surface flatness, it is characterized in that: described light pipe comprises target generator, detector, optical splitter, lens combination and light-dividing device; Described detector, optical splitter, lens combination and light-dividing device are along same axis series arrangement successively; Described target generator is arranged on the optical splitter side.
2. measure the light pipe of light wave array surface or optical reflection face surface flatness according to claim 1, it is characterized in that: the position of described target generator and position of detector can be exchanged.
3. measure the light pipe of light wave array surface or optical reflection face surface flatness according to claim 1, it is characterized in that: described detector is detector array CCD or detector array CMOS.
4. measure the light pipe of light wave array surface or optical reflection face surface flatness according to claim 1, it is characterized in that: described light-dividing device is an angle of wedge chip arrays, is used for a light beams is divided into some light beams.
5. measure the light pipe of light wave array surface or optical reflection face surface flatness according to claim 1, it is characterized in that: described lens combination is a collimator objective.
6. measure the light pipe of light wave array surface or optical reflection face surface flatness according to claim 1, it is characterized in that: described optical splitter is Amici prism or semi-transparent semi-reflecting lens.
7. measure the light pipe of light wave array surface or optical reflection face surface flatness according to claim 1, it is characterized in that: the graticule that described target generator is illuminated by light source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010520182 CN101982730A (en) | 2010-10-26 | 2010-10-26 | Light tube for measuring flatness of light wave array surface or optical reflecting surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010520182 CN101982730A (en) | 2010-10-26 | 2010-10-26 | Light tube for measuring flatness of light wave array surface or optical reflecting surface |
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| CN101982730A true CN101982730A (en) | 2011-03-02 |
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| CN 201010520182 Pending CN101982730A (en) | 2010-10-26 | 2010-10-26 | Light tube for measuring flatness of light wave array surface or optical reflecting surface |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105282A (en) * | 2013-01-18 | 2013-05-15 | 上海亨通宏普通信技术有限公司 | Device and method for angular measurement of fiber array or chip |
| CN103148798A (en) * | 2013-03-19 | 2013-06-12 | 南京航空航天大学 | Method and device for measuring three fields independently and synchronously in real time by using three-dimensional digital speckle pattern interferometry |
| CN111208144A (en) * | 2020-03-05 | 2020-05-29 | 上海御微半导体技术有限公司 | Defect detection system and defect detection method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001324315A (en) * | 2000-05-12 | 2001-11-22 | Sankyo Seiki Mfg Co Ltd | Measuring instrument |
| JP2003035529A (en) * | 2001-07-19 | 2003-02-07 | Mitsutoyo Corp | Systematic error measuring method in flatness measuring system on object surface to be inspected, flatness measuring method and apparatus using the same |
| CN101650169A (en) * | 2009-07-17 | 2010-02-17 | 山东富美科技有限公司 | Scraper planeness detection system |
| CN101825430A (en) * | 2009-03-02 | 2010-09-08 | 鸿富锦精密工业（深圳）有限公司 | Image admeasuring apparatus and pattern lighting device thereof |
-
2010
- 2010-10-26 CN CN 201010520182 patent/CN101982730A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001324315A (en) * | 2000-05-12 | 2001-11-22 | Sankyo Seiki Mfg Co Ltd | Measuring instrument |
| JP2003035529A (en) * | 2001-07-19 | 2003-02-07 | Mitsutoyo Corp | Systematic error measuring method in flatness measuring system on object surface to be inspected, flatness measuring method and apparatus using the same |
| CN101825430A (en) * | 2009-03-02 | 2010-09-08 | 鸿富锦精密工业（深圳）有限公司 | Image admeasuring apparatus and pattern lighting device thereof |
| CN101650169A (en) * | 2009-07-17 | 2010-02-17 | 山东富美科技有限公司 | Scraper planeness detection system |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105282A (en) * | 2013-01-18 | 2013-05-15 | 上海亨通宏普通信技术有限公司 | Device and method for angular measurement of fiber array or chip |
| CN103105282B (en) * | 2013-01-18 | 2015-08-12 | 江苏亨通光网科技有限公司 | A kind of device and method fiber array or chip being carried out to measurement of angle |
| CN103148798A (en) * | 2013-03-19 | 2013-06-12 | 南京航空航天大学 | Method and device for measuring three fields independently and synchronously in real time by using three-dimensional digital speckle pattern interferometry |
| CN103148798B (en) * | 2013-03-19 | 2015-05-20 | 南京航空航天大学 | Method and device for measuring three fields independently and synchronously in real time by using three-dimensional digital speckle pattern interferometry |
| CN111208144A (en) * | 2020-03-05 | 2020-05-29 | 上海御微半导体技术有限公司 | Defect detection system and defect detection method |
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Application publication date: 20110302 |