CN103148798B - Method and device for measuring three fields independently and synchronously in real time by using three-dimensional digital speckle pattern interferometry - Google Patents
Method and device for measuring three fields independently and synchronously in real time by using three-dimensional digital speckle pattern interferometry Download PDFInfo
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- CN103148798B CN103148798B CN201310086694.0A CN201310086694A CN103148798B CN 103148798 B CN103148798 B CN 103148798B CN 201310086694 A CN201310086694 A CN 201310086694A CN 103148798 B CN103148798 B CN 103148798B
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Abstract
The invention discloses a method and a device for measuring three fields independently and synchronously in real time by using three-dimensional digital speckle pattern interferometry. The measurement device comprises three independent digital speckle pattern interferometric light paths. The method comprises the following steps of: synchronously acquiring three images of a measured object which is undeformed as reference images and three real-time images of the measured object which is deformed by using the three independent digital speckle pattern interferometric light paths, and subtracting the reference images from the corresponding real-time images to obtain three real-time speckle pattern interferometric fringe patterns; accurately acquiring a plurality of speckle pattern interferometric fringe patterns with equal phase shift, and extracting three phase images of the measured object which is deformed by using a phase shift algorithm; unpacking the three phase images by using a computer to further obtain three continuous phase unwrapping patterns; and calculating three-dimensional displacement components of the measured object by using the phase unwrapping patterns respectively. Three displacement sub-fields can be measured synchronously and independently in real time, and the method and the device are applied to dynamic problems as well as the accurate phase measurement of three-dimensional displacement sub-fields.
Description
Technical field
The present invention relates to and adopt 3-dimensional digital speckle interference technology to be out of shape object dimensional
,
with
carry out method and apparatus that is independent, synchronous and that measure in real time Deng three displacement branches, belong to digital speckle interference 3 D deformation field of measuring technique.
Background technology
The distortion occurred due to object is all 3 D deformation usually, and therefore adopt digital speckle interference technology to carry out method and apparatus research that 3 D deformation measures has important academic significance and using value widely.
Current digital speckle interference 3 D deformation measuring technique mainly contains two classes: the first kind is non-co-planar three light-beam digital speckle interference measuring technique, three displacement branches that this technology obtains intercouple, not independent, therefore need could be separated three displacement branches by subsequent calculations, this technology often produces comparatively big error; Equations of The Second Kind is the combination of a peacekeeping two-dimensional digital speckle interference measuring technique, this technology needs frequent handover measurement light path just can obtain three-D displacement branch, and acoplanarity displacement branch is not independent, also needs later stage separating treatment, just can obtain independently acoplanarity displacement branch.
In sum, prior art all can not accomplish three displacement branches independent, synchronously and in real time measure, thus seriously hinder digital speckle interference technology 3 D deformation measure in application.
Summary of the invention
The technical problem to be solved in the present invention be prior art all can not accomplish three displacement branches independent, synchronously and in real time measure.
For solving the problems of the technologies described above, the technical solution used in the present invention is: 3-dimensional digital speckle interference three independences, synchronous and real-time measurement apparatus, and described device comprises three digital speckle interference light paths; Digital speckle interference light path I: comprise a CCD imaging system, laser instrument and beam splitter, point-blank, the back side of the reference surface of beam splitter is provided with piezoelectric ceramics phase-shifter for described beam splitter and a CCD imaging system coaxial arrangement; Digital speckle interference light path II: comprise the 2nd CCD imaging system, two sides plane mirror, a right angle are all-trans triangular prism, two sides plane mirror is the symmetrical both sides being placed on the 2nd CCD imaging system horizontal direction respectively, one side in the plane mirror of two sides, its back side is provided with piezoelectric ceramics phase-shifter; Digital speckle interference light path III: comprise the 3rd CCD imaging system, two sides plane mirror, a right angle are all-trans triangular prism, two sides plane mirror is the symmetrical both sides being placed on the 3rd CCD imaging system vertical direction respectively, one side in the plane mirror of two sides, its back side is provided with piezoelectric ceramics phase-shifter; Point-blank, and three CCD imaging systems are all connected with image pick-up card aforementioned three equal coaxial arrangement of CCD imaging system; Described piezoelectric ceramics phase-shifter is connected with computing machine by D.C. regulated power supply.
If the measured object picture received in two pieces of plane mirrors in digital speckle interference light path II and digital speckle interference light path III overlaps, the measurement of in-plane displacement level, vertical direction component can be realized; If the measured object picture received staggers slightly, the disposable measurement of acoplanarity displacement component level, vertical direction derivative can be realized; The present invention, by arranging three digital speckle interference light paths, can carry out testee respectively
,
with
deng three displacement branches independent, synchronously and in real time measure; And controlling by computing machine the reference surface translation slight distance generation phase shift that electroceramics phase-shifter drives plane mirror and beam splitter, the accuracy of experimental result improves greatly.
In the same size for guaranteeing the visual field of three CCD imaging systems, aforementioned CCD imaging system includes a CCD and variable focus imaging lens, and variable focus imaging lens is attached thereto by the interface of CCD front portion.
A kind ofly adopt described 3-dimensional digital speckle interference three independences, 3-dimensional digital speckle interference measuring method that synchronous and real-time measurement apparatus realizes, comprising following process: A) before measured object load deflection, three CCD imaging system synchronous acquisition three width digital speckle interference images are as with reference to image; B) after measured object load deflection, then synchronous acquisition three width digital speckle interference image the reference picture corresponding with it subtract each other in real time, obtain three width real time speckle interference fringe pictures; C) several such as to have at speckle interference fringe pattern of phase-shift phase to utilize computer controlled superzapping electroceramics phase-shifter precise acquisition, extract three amplitude phase diagrams after measured object distortion by phase shift algorithm; D) by computing machine, above-mentioned three amplitude phase diagrams are done the process of solution parcel respectively, the phase unwrapping figure of three width continuous distribution can be obtained further; E) the phase unwrapping figure of three width continuous distribution is utilized to calculate the three-D displacement component of measured object respectively.
Advantage of the present invention is: the synchro measure that can carry out three displacement branches, does not need revision test; The independence can carrying out three displacement branches is measured, and does not need later separation; The real-time measurement of three displacement branches can be carried out, be applicable to dynamic problem.In addition, the precise phase measurement of this technology by adopting phase shift interference technology can also carry out three-D displacement branch.
Accompanying drawing explanation
Fig. 1 is a kind of 3-dimensional digital speckle interference of the present invention measurement mechanism structural representation.
In figure: 1 is laser instrument, 2 to 4 is CCD imaging system, and 5 is plane mirror, and 6 for being all-trans triangular prism at right angle, and 7 is the beam splitter of band phase changer, and 8 is measured object.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Figure 1, device of the present invention comprises three digital speckle interference light paths:
Digital speckle interference light path I: comprise a CCD imaging system 2, laser instrument 1 and beam splitter 7, point-blank, the back side of the reference surface of beam splitter 7 is provided with piezoelectric ceramics phase-shifter for described beam splitter 7 and CCD imaging system 2 coaxial arrangement.
Digital speckle interference light path II: comprise the 2nd CCD imaging system 3, plane mirror 5, right angle in two sides is all-trans triangular prism 6, two sides plane mirror 5 is the symmetrical both sides being placed on the 2nd CCD imaging system 3 horizontal direction respectively; One side in two sides plane mirror 5, its back side is provided with piezoelectric ceramics phase-shifter.
Digital speckle interference light path III: comprise the 3rd CCD imaging system 4, plane mirror 5, right angle in two sides is all-trans triangular prism 6, two sides plane mirror 5 is the symmetrical both sides being placed on the 3rd CCD imaging system 4 vertical direction respectively; One side in two sides plane mirror 5, its back side is provided with piezoelectric ceramics phase-shifter.
Point-blank, and three CCD imaging systems are all connected with image pick-up card aforementioned three equal coaxial arrangement of CCD imaging system;
Described piezoelectric ceramics phase-shifter is connected with computing machine by D.C. regulated power supply.
The course of work of digital speckle interference light path I is: incide beam splitter from the light of laser instrument output and be divided into two bundle coherent lights, wherein light beam is irradiated to tested object plane, and another Shu Guangzhao is mapped to beam splitter reference surface.The object light reflected from tested object plane and jointly enter into a CCD imaging system through beam splitter from the reference light that reference surface reflects.Digital speckle interference light path I is positioned at plane
in, acoplanarity displacement can be obtained separately
component.
The course of work of digital speckle interference light path II is: from tested object plane diffuse reflection return two bundle object lights through plane mirror, reflect to right-angle surface total reflection triangular prism, then through right-angle surface total reflection triangular prism jointly enter into the 2nd CCD imaging system.Digital speckle interference light path II is positioned at plane
in, in-plane displacement can be obtained separately
component.
The course of work of digital speckle interference light path III is: from tested object plane diffuse reflection return two bundle object lights through plane mirror, reflect to right-angle surface total reflection triangular prism, then through right-angle surface total reflection triangular prism jointly enter into the 3rd CCD imaging system.Digital speckle interference light path III is positioned at plane
in, in-plane displacement can be obtained separately
component.
Article three, separate between digital speckle interference light path, do not interfere with each other.
The method step using said apparatus to carry out testing is as follows:
Step one: before measured object 8 load deflection, regulates aperture and the focal length of a CCD imaging system 2, the 2nd CCD imaging system 3, the 3rd CCD imaging system 4, makes measured object imaging clearly on the computer screen, be of moderate size;
Step 2: the symmetrical plane mirror 5 placed in fine setting digital speckle interference light path II, digital speckle interference light path III, two of measured object 8 in 2nd CCD imaging system 3 and the 3rd CCD imaging system 4 pictures are overlapped, the laser beam that digital speckle interference light path II, digital speckle interference light path III midplane catoptron receive with
formed by axle, angle is respectively
with
; Now, three CCD imaging system synchronous acquisition three width digital speckle interference images are as reference image;
Step 3: make measured object 8 load deflection, now, synchronous acquisition three width digital speckle interference image the reference picture corresponding with it subtract each other in real time, obtain three width real time speckle interference fringe pictures; Described measured object 8 load deflection, namely by the phase shift of piezoelectric ceramics phase-shifter application time, and inputs in computing machine by result, finally with Digital output by image pick-up card; Described time-phase displacement refers to and drives the beam splitter 7 bonding with it or plane mirror 5 to realize the change of phase place along its respective normal direction translation slight distance by piezoelectric ceramics phase-shifter; Due to beam splitter 7 reference surface, plane mirror 5 being all pasted with piezoelectric ceramics phase-shifter, drive this piezoelectric ceramics phase-shifter by D.C. regulated power supply, beam splitter 7 bonding with it and the phase shift of plane mirror 5 can be driven.
Article three, in digital speckle interference light path, the phase place change that measured object 8 surface deformation causes can be expressed as:
（1）
（2）
（3）
In formula,
represent the acoplanarity displacement component of measured object 8,
with
represent measured object 8 in-plane displacement level and vertical component,
the wavelength of laser used,
,
represent
,
the angle of light and measured object 8 surface normal is received in.
Three obtained like this width digital speckle interference bar graphs are respectively measured object 8
,
with
field interference fringe picture.
Step 4: several such as to have at speckle interference fringe pattern of phase-shift phase to utilize computer controlled superzapping electroceramics phase-shifter precise acquisition, select suitable phase shift algorithm accurately extract measured object 8 be out of shape after three amplitude phase diagrams.
Step 5: above-mentioned three amplitude phase diagrams are done respectively and separates parcel process, the phase unwrapping figure of three width continuous distribution can be obtained further.
Step 6: according to formula (1)-(3), utilizes the phase unwrapping figure of three width continuous distribution to calculate the three-D displacement component of measured object 8 respectively
,
with
.
In fine setting light path II, III, the symmetrical plane mirror 5 placed, makes two pictures of measured object 8 in the 2nd CCD imaging system 3 and the 3rd CCD imaging system 4 stagger a little; Now, pure acoplanarity displacement component can be obtained by 3-dimensional digital speckle interference provided by the invention three independences, synchronous and method for real-time measurement and device
and level, derivative on vertical direction
,
real time speckle interference fringe picture.
Advantage of the present invention is: (1) can realize three-D displacement component independent, synchronously and in real time measure; (2) without the need to the light-dividing device of complexity; (3) controlled the precise displacement of piezoelectric ceramics phase-shifter by computer program, thus reach accurate phase shift adjustment; (4) except can realizing the independent, synchronous of 3-D displacement field and measuring in real time, can also realize the derivative on acoplanarity displacement and level thereof, vertical direction independent, synchronously and in real time measure; (5) measuring method of the present invention and device have multi-usage, whole audience noncontact, and measurement mechanism is simple, and automaticity is high, measuring accuracy advantages of higher.
Claims (3)
1. 3-dimensional digital speckle interference three independences, synchronous and real-time measurement apparatus, it is characterized in that, described device comprises three digital speckle interference light paths;
Digital speckle interference light path I: comprise a CCD imaging system, laser instrument and beam splitter, point-blank, the back side of the reference surface of beam splitter is provided with piezoelectric ceramics phase-shifter for described beam splitter and a CCD imaging system coaxial arrangement;
Digital speckle interference light path II: comprise the 2nd CCD imaging system, two sides plane mirror, a right angle are all-trans triangular prism, two sides plane mirror is the symmetrical both sides being placed on the 2nd CCD imaging system horizontal direction respectively, one side in the plane mirror of two sides, its back side is provided with piezoelectric ceramics phase-shifter;
Digital speckle interference light path III: comprise the 3rd CCD imaging system, two sides plane mirror, a right angle are all-trans triangular prism, two sides plane mirror is the symmetrical both sides being placed on the 3rd CCD imaging system vertical direction respectively, one side in the plane mirror of two sides, its back side is provided with piezoelectric ceramics phase-shifter;
Point-blank, and three CCD imaging systems are all connected with image pick-up card aforementioned three equal coaxial arrangement of CCD imaging system;
Described piezoelectric ceramics phase-shifter is all connected with computing machine by D.C. regulated power supply.
2. 3-dimensional digital speckle interference according to claim 1 three independences, synchronous and real-time measurement apparatus, it is characterized in that, aforementioned CCD imaging system includes a CCD and variable focus imaging lens, and variable focus imaging lens is attached thereto by the interface of CCD front portion.
3. adopt three independences of 3-dimensional digital speckle interference described in any one in claim 1-2, a 3-dimensional digital speckle interference measuring method that synchronous and real-time measurement apparatus realizes, it is characterized in that, comprise following process:
A), before measured object load deflection, three CCD imaging system synchronous acquisition three width digital speckle interference images are as reference image;
B) after measured object load deflection, then synchronous acquisition three width digital speckle interference image the reference picture corresponding with it subtract each other in real time, obtain three width real time speckle interference fringe pictures;
C) several such as to have at speckle interference fringe pattern of phase-shift phase to utilize computer controlled superzapping electroceramics phase-shifter precise acquisition, extract three amplitude phase diagrams after measured object distortion by phase shift algorithm;
D) by computing machine, above-mentioned three amplitude phase diagrams are done the process of solution parcel respectively, the phase unwrapping figure of three width continuous distribution can be obtained further;
E) the phase unwrapping figure of three width continuous distribution is utilized to calculate the three-D displacement component of measured object respectively.
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| CN103727891B (en) * | 2014-01-10 | 2016-08-31 | 合肥工业大学 | Synchronize three-dimensional speckle interferometer measuration system and measuring method |
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| CN114322808B (en) * | 2021-12-02 | 2024-03-19 | 上海大学 | Multidimensional speckle interference system and real-time measurement method |
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