CN114322808B - Multidimensional speckle interference system and real-time measurement method - Google Patents
Multidimensional speckle interference system and real-time measurement method Download PDFInfo
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Abstract
The invention provides a multidimensional speckle interference system and a real-time measurement method. The speckle interference system comprises a laser, an optical fiber coupler, four diaphragms, two beam splitting prisms, two optical fiber holders, a reflecting mirror, a carrying platform, an image processing and receiving system with a CCD camera and a computer with a LabVIEW upper computer. The measuring method comprises an operation setting module, a time-sharing and real-time selecting module, a time-sharing image processing module and a real-time image processing module. The invention has compact structure and simple and convenient operation, can realize time-sharing or real-time deformation measurement of the diffuse reflection object, and the detection target is the deformation quantity in and out of the surface of the measured object.
Description
Technical Field
The invention relates to the field of photoelectric measurement, in particular to a multidimensional speckle interference system and a real-time measurement method.
Background
The digital speckle interferometry method has the characteristics of full field, non-contact, high precision and high sensitivity, and is widely applied to deformation measurement, vibration analysis, morphology detection and the like of the surface of an object. The digital speckle interferometry method can measure out-of-plane and in-plane deformation through the structural design of an optical system, so that the current research on deformation measurement in a single direction is very mature, and many students can also research on synchronous measurement in three directions of X, Y and Z axis. In the research of three-direction deformation measurement, three wavelengths or three colors of lasers are mostly selected for interference, and the system has a complex structure, complex operation and numerous optical elements, and is unfavorable for portable integration.
In general, speckle interference detection is performed by image processing using MATLAB, and an operator needs a certain code basis and understands the principle of speckle interference. These requirements are difficult for the application workers in the non-optical domain. In addition, MATLAB can only process the shot image, and the function of processing the shot image of the CCD in real time cannot be realized.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to overcome the defects in the prior art, and provides a multidimensional speckle interference system and a real-time measurement method, which have the characteristics of compact structure, simple operation and high detection efficiency.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a multi-dimensional speckle interference system, comprising:
the laser emits a laser light source;
the optical fiber coupler receives a laser light source emitted by the laser and generates two light beams with the intensity ratio of 50:50;
the first optical fiber holder is used for fixing an object light source and is provided with a two-dimensional fine adjustment screw, so that two-dimensional fine adjustment can be performed;
the second optical fiber holder is used for fixing a reference light source, is provided with a two-dimensional fine adjustment screw, can carry out symmetry fine adjustment with object light, and can be used for carrying out carrier wave;
the first diaphragm is used for adjusting the light spot area of the object light source irradiated to the measured object;
the second diaphragm is used for adjusting the light spot area of the reference light source irradiated to the measured object to be matched with the object light spot;
the third diaphragm is used for filtering when the object light and the reference light return to the CCD camera;
the fourth diaphragm is used for adjusting the light spot size of the second reference light;
the object carrying platform is used for vertically placing an object to be measured;
a convex lens for reducing an image of the interference beam vertically returned after being irradiated to the object to be measured;
the first spectroscope has a transmission and reflection ratio of 90:10, and after the reference light passes through the first spectroscope, the transmitted light is first reference light, and the reflected light is second reference light; the first reference light and the object light interfere on the surface of the measured object, and enter the CCD camera after passing through the convex lens, the third diaphragm and the second beam splitter;
an attenuation sheet for reducing the light intensity of the second reference light;
the reflecting mirror reflects the second reference light reflected in the first spectroscope into the second spectroscope, and can adjust the reflecting angle of the reflecting mirror to carry out carrier wave on the second reference light;
the transmission and reflection ratio of the second beam splitter is 90:10, and the second reference light is reflected by the reflector, enters the second beam splitter and is reflected into the CCD camera to interfere with the object light;
an image receiving system with a CCD camera is used for receiving the interference image on the surface of the measured object and the interference image on the CCD plane at the same time and transmitting the interference image to a computer;
and the computer is provided with a LabVIEW upper computer and is used for processing data acquired by the image receiving system with the CCD camera.
Further, the optical fiber holder and the reflecting mirror are both fixed on a two-dimensional fine adjustment platform for symmetry adjustment and carrier information loading.
Further, the image receiving system with the CCD camera can record speckle interference patterns in a time-sharing mode and in a real-time mode.
Further, the first optical fiber holder and the second optical fiber holder are on the same horizontal plane and are symmetrical with respect to the vertical line of the measured surface, the included angle 2 theta between the first optical fiber holder and the second optical fiber holder is 40-60 degrees, and the first optical fiber holder and the second optical fiber holder are adjusted according to the shape and the size of the measured object and the requirement of a field of view; the included angle between the reflecting mirror and the vertical line of the measured object is (90 ° -theta/2), and the corresponding included angle adjustment range is 75 ° -80 °.
The real-time measurement method of the multidimensional speckle interferometry specifically comprises an S100 operation setting step, an S200 time sharing and real-time selecting step, an S300 time sharing image processing step and an S400 real-time image processing step.
The step of S100 operation setting specifically includes:
s101: setting the camera parameters, wherein the selection of the exposure time and the resolution of the camera has a larger influence on the system, the selection of the resolution has an influence on the size of a field of view and the calculation precision, and the exposure time has an influence on the intensity and the quality of an image;
s102: the CCD is divided into a time-sharing record and a real-time record by selecting an operation module, so that the operation module is divided into the time-sharing module and the real-time module.
The step of S200 time sharing and real-time selection specifically comprises the following steps:
s201: selecting the time-sharing module, wherein the resolution ratio is higher, selecting time-sharing interval time, and shooting two speckle interference images successively;
s202: and selecting the real-time module, wherein the resolution is lower, the spectrum coordinates are required to be acquired, the speckle interference image before deformation is photographed, and then the speckle interference image after deformation is continuously updated.
The step of S300 time-sharing image processing specifically comprises the following steps:
s301: fourier transform is carried out, speckle interference images before and after deformation are obtained, fourier transform is carried out, a spectrogram of the interference image is displayed, and the spectral separation condition is observed and analyzed;
s302: drawing positive stages of the frequency spectrums, carrying out band-pass filtering, and in the spectrogram of the step S301, respectively carrying out square drawing or ellipse drawing on the two positive stages according to different carrier amounts applied to the first reference light and the second reference light by utilizing an image processing function of LabVIEW to obtain position spectrum coordinates, taking out the positive stages of the two positive stages, and carrying out band-pass filtering so as to respectively extract in-plane and out-of-plane phase information of an object in the X-axis and Z-axis directions;
s303: eliminating carrier waves, carrying out inverse Fourier transform, carrying out subtraction processing, carrying out inverse Fourier transform after eliminating the carrier waves loaded with in-plane and out-of-plane phase information respectively to obtain four phase diagrams, and carrying out subtraction processing respectively to obtain in-plane and out-of-plane phase differences of an object in the directions of an X axis and a Z axis;
s304: filtering clutter, performing filtering treatment, and performing clutter elimination treatment on the in-plane and out-of-plane phase difference obtained in the step S303 by using a short-time windowing Fourier function;
s305: and (3) unwrapping the phase, displaying a 3D result, unwrapping the filtered phase difference, calculating according to the laser wavelength and the incident angle, and displaying the 3D display result respectively.
The step of processing the S400 real-time image specifically comprises the following steps:
s401: performing Fourier transform processing, namely rapidly acquiring two continuous speckle interference images under the low resolution, performing Fourier transform, and displaying a spectrogram of the interference image;
s402: drawing a positive level of spectrum, recording spectrum coordinates, carrying out square drawing or ellipse drawing on the spectrogram in the step S401 by utilizing the image processing function of the LabVIEW, obtaining two positive level of spectrum coordinates, and recording;
s403: increasing the frame rate of the CCD, updating an interferogram in real time, increasing the frame rate of the CCD camera, setting an image shot by the CCD before deformation as a first frame, then rapidly recording and updating a second frame per second by the CCD, namely, a speckle interferogram deformed in real time, and carrying out Fourier transform on the first frame and the second frame to obtain a spectrogram;
s404: taking out the positive stages, carrying out band-pass filtering, applying the two positive stages to the step S403 by utilizing the spectrum coordinates according to the step S402, and carrying out band-pass filtering so as to extract in-plane and out-of-plane phase information of an object in the X-axis and Z-axis directions;
s405: and (3) performing fast operation and processing result display, namely performing inverse Fourier transform, subtraction processing, filtering processing, unwrapping processing and real-time display of a 3D result on the phase information according to the steps S303, S304 and S305.
The connection channel between the image receiving system with the CCD camera and the computer is USB 3.0.
The resolution is 5472×3648, 640×480, 5472×3648 or 3840×2160 when a time-sharing module is selected, and 640×480, 1280×960, 1600×1200, 1920×1080 and 2048×1536 when a real-time module is selected; and adjusting according to the field of view requirement and the size of the measured object.
The computer separates the surface wave information of the measured object contained in the collected speckle interference images before and after deformation, and the separation mode is frequency spectrum separation.
Compared with the prior art, the invention has the following outstanding substantive features and remarkable advantages:
the system device provided by the invention has the advantages of simple structure, simplicity and convenience in operation, convenience in real-time deformation detection of different detected objects and higher precision. The invention adopts the optical fiber coupler to replace the traditional spectroscope to split light, and obtains two symmetrical laser beams with equal light intensity. The object light and the first reference light are subjected to speckle interference on the plane of the measured object, the object light returned from the measured object and the second reference light are subjected to speckle interference on the CCD plane, and the CCD camera records the speckle interference twice at the same time and forms a new speckle interference image. After the strain is transmitted into a computer, different resolutions are selected according to different demands, and time-sharing and real-time deformation measurement are carried out by using a LabVIEW upper computer: the time-sharing measurement has the advantages of high resolution, huge calculation amount, long required time, better image quality and larger view field, and can be used for deformation study of high-precision large view field; the method has the advantages of low resolution, small calculated amount, short time, poor image quality and small field of view, and can be used for deformation research with rapid and sensitive response and high real-time requirements.
Drawings
FIG. 1 is a schematic diagram of a multidimensional speckle interference system of the present invention.
FIG. 2 is a schematic diagram of a system set-up of a multi-dimensional speckle interference system of the present invention.
FIG. 3 is a step diagram of a digital speckle interferometry time-sharing and real-time measurement method based on a LabVIEW host computer.
Fig. 4 is a graph showing the intensity distribution of light before and after deformation of the simulated CCD plane image according to the present invention.
FIG. 5 is a spectral separation diagram of a simulated light intensity profile of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the following describes in detail the embodiments of the present invention with reference to the accompanying drawings and the technical solutions in the embodiments, so as to solve the technical problems by applying the technical means to the present invention, and the implementation process for achieving the technical effects can be fully understood and implemented accordingly. It will be apparent that the described embodiments are some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present invention, the terms "first", "second", and the like are used only to distinguish the description, and are not to be construed as indicating or implying relative importance.
Example 1
A multi-dimensional speckle interference system, comprising:
the laser emits a laser light source;
the optical fiber coupler receives a laser light source emitted by the laser and generates two light beams with the intensity ratio of 50:50;
the first optical fiber holder is used for fixing an object light source and is provided with a two-dimensional fine adjustment screw, so that two-dimensional fine adjustment can be performed;
the second optical fiber holder is used for fixing a reference light source, is provided with a two-dimensional fine adjustment screw, can carry out symmetry fine adjustment with object light, and can be used for carrying out carrier wave;
the first diaphragm is used for adjusting the light spot area of the object light source irradiated to the measured object;
the second diaphragm is used for adjusting the light spot area of the reference light source irradiated to the measured object to be matched with the object light spot;
the third diaphragm is used for filtering when the object light and the reference light return to the CCD camera;
the fourth diaphragm is used for adjusting the light spot size of the second reference light;
the object carrying platform is used for vertically placing an object to be measured;
a convex lens for reducing an image of the interference beam vertically returned after being irradiated to the object to be measured;
the first spectroscope has a transmission and reflection ratio of 90:10, and after the reference light passes through the first spectroscope, the transmitted light is first reference light, and the reflected light is second reference light; the first reference light and the object light interfere on the surface of the measured object, and enter the CCD camera after passing through the convex lens, the third diaphragm and the second beam splitter;
an attenuation sheet for reducing the light intensity of the second reference light;
the reflecting mirror reflects the second reference light reflected in the first spectroscope into the second spectroscope, and can adjust the reflecting angle of the reflecting mirror to carry out carrier wave on the second reference light;
the transmission and reflection ratio of the second beam splitter is 90:10, and the second reference light is reflected by the reflector, enters the second beam splitter and is reflected into the CCD camera to interfere with the object light;
an image receiving system with a CCD camera is used for receiving the interference image on the surface of the measured object and the interference image on the CCD plane at the same time and transmitting the interference image to a computer;
and the computer is provided with a LabVIEW upper computer and is used for processing data acquired by the image receiving system with the CCD camera.
The multidimensional speckle interference system has the characteristics of compact structure, simplicity in operation and high detection efficiency.
Example two
This embodiment is substantially the same as the first embodiment, and is characterized in that:
the optical fiber holder and the reflecting mirror are both fixed on a two-dimensional fine adjustment platform and used for symmetrically adjusting and loading carrier information.
The image receiving system with the CCD camera is used for recording speckle interference patterns in a time-sharing mode and in a real-time mode.
The first optical fiber holder and the second optical fiber holder are on the same horizontal plane and are symmetrical about the vertical line of the measured surface, the included angle 2 theta between the first optical fiber holder and the second optical fiber holder is 40-60 degrees, and the first optical fiber holder and the second optical fiber holder are adjusted according to the shape and the size of the measured object and the requirement of the field of view; the included angle between the reflecting mirror and the vertical line of the measured object is (90 ° -theta/2), and the corresponding included angle adjustment range is 75 ° -80 °.
The system device of the embodiment has simple structure, simple and convenient operation, convenient real-time deformation detection of different detected objects and higher precision. The system of the embodiment adopts an optical fiber coupler to replace the traditional spectroscope to split light, so as to obtain two symmetrical laser beams with equal light intensity. The object light and the first reference light are subjected to speckle interference on the plane of the measured object, the object light returned from the measured object and the second reference light are subjected to speckle interference on the CCD plane, and the CCD camera records the speckle interference twice at the same time and forms a new speckle interference image. After the strain is transmitted into a computer, different resolutions are selected according to different demands, and time-sharing and real-time deformation measurement are carried out by using a LabVIEW upper computer: the time-sharing measurement has the advantages of high resolution, huge calculation amount, long required time, better image quality and larger view field, and can be used for deformation study of high-precision large view field; the method has the advantages of low resolution, small calculated amount, short time, poor image quality and small field of view, and can be used for deformation research with rapid and sensitive response and high real-time requirements.
Example III
This embodiment is substantially the same as the above embodiment, and is characterized in that:
as shown in fig. 1 and 2, the multidimensional speckle interference system of this embodiment mainly includes a laser, an optical fiber coupler, four diaphragms, two beam splitting prisms, two optical fiber holders, a reflecting mirror, a carrying platform, an image processing receiving system with a CCD (Charge-coupled Device) camera, and a computer with a LabVIEW host computer, wherein:
the laser emits a laser light source;
the optical fiber coupler receives a laser light source emitted by the laser and generates two light beams with the intensity ratio of 50:50;
the first optical fiber holder is used for fixing an object light source and is provided with a two-dimensional fine adjustment screw, so that two-dimensional fine adjustment can be performed;
the second optical fiber holder is used for fixing a reference light source, is provided with a two-dimensional fine adjustment screw, can carry out symmetry fine adjustment with object light, and can be used for carrying out carrier wave;
the first diaphragm is used for adjusting the light spot area of the object light source irradiated to the measured object;
the second diaphragm is used for adjusting the light spot area of the reference light source irradiated to the measured object to be matched with the object light spot;
the third diaphragm is used for filtering when the object light and the reference light return to the CCD camera;
the fourth diaphragm is used for adjusting the light spot size of the second reference light;
the object carrying platform is used for vertically placing an object to be measured;
a convex lens for reducing an image of the interference beam vertically returned after being irradiated to the object to be measured;
the first spectroscope has a transmission and reflection ratio of 90:10, and after the reference light passes through the first spectroscope, the transmitted light is first reference light, and the reflected light is second reference light; the first reference light and the object light interfere on the surface of the measured object, and enter the CCD camera after passing through the convex lens, the third diaphragm and the second beam splitter;
an attenuation sheet for reducing the light intensity of the second reference light;
the reflecting mirror reflects the second reference light reflected in the first spectroscope into the second spectroscope, and can adjust the reflecting angle of the reflecting mirror to carry out carrier wave on the second reference light;
the transmission and reflection ratio of the second beam splitter is 90:10, and the second reference light is reflected by the reflector, enters the second beam splitter and is reflected into the CCD camera to interfere with the object light;
an image receiving system with a CCD camera is used for receiving the interference image on the surface of the measured object and the interference image on the CCD plane at the same time and transmitting the interference image to a computer;
and the computer is provided with a LabVIEW upper computer and is used for processing data acquired by the image receiving system with the CCD camera.
The laser source emitted by the laser 1 is divided into two beams with the intensity ratio of 50:50 after passing through the optical Fiber coupler 2, and then the two beams are respectively and fixedly clamped by an optical Fiber clamp (Fiber clamp) to obtain two spherical wave beams. The first light Beam 41 emitted from the optical fiber on the first fiber holder FG1 irradiates the object surface 6 through the first Aperture Stop AS1 (Aperture Stop), and the object surface 6 is rough, so that diffuse reflection occurs, and the first light Beam interferes with the first reference light emitted from the second fiber holder FG2 in an in-plane speckle on the object surface, and then becomes the third light Beam 43, passes through the convex lens 3, the third Aperture Stop AS3, and the second Beam Splitter BS2 (Beam Splitter, with a transmittance and reflectance ratio of 90:10), reaches the CCD plane 4, and the second reference light interferes with the second reference light in an out-of-plane speckle on the CCD plane. The laser beam emitted from the optical fiber on the second fiber holder FG2 is split into two beams, namely, beam 42 and beam 43, when passing through the first beam splitter BS1 (the transmittance and reflectance are 90:10), after the beam 42 is adjusted by the second beam splitter AS2, the beam 42 and the beam 41 undergo in-plane speckle interference, the beam 43 passes through the attenuation sheet A (Attenuation), the light intensity of the second reference beam is properly reduced, and then the second reference beam is reflected by the Mirror M (Mirror) into the second beam splitter BS2 and then reflected into the CCD plane, and the beam 43 undergoes out-of-plane speckle interference on the CCD plane. The image receiving system 4 with the CCD camera receives the in-plane and out-of-plane speckle interference images at the same time and transmits the images into a computer with a LabVIEW upper computer for processing.
The first optical fiber holder and the second optical fiber holder are on the same horizontal plane, are symmetrical about the vertical line of the measured surface, have an included angle 2 theta of 40-60 degrees, and can be adjusted according to the shape and the size of the measured object and the requirement of the field of view. The included angle between the reflecting mirror and the vertical line of the measured object is (90 ° -theta/2), and the corresponding included angle adjustment range is 75 ° -80 °. The optical fiber holder and the reflecting mirror are fixed on a two-dimensional fine adjustment platform and are used for loading carrier information. The in-plane speckle interference and the off-plane speckle interference need to provide different carrier quantities, so that the in-plane and off-plane phase difference can be smoothly and rapidly separated when the subsequent spectrum separation is convenient.
The recording of the speckle interference pattern by the image receiving system with the CCD camera can be divided into two cases of time-sharing recording and real-time recording: 1. the time-sharing recording refers to that when the object light interferes with the first reference light and the second reference light, speckle interference patterns before and after shooting deformation are respectively carried out at certain time intervals; 2. the real-time recording means that the speckle interference pattern of the first frame is recorded at a short time interval, then the second frame is continuously updated, real-time operation is carried out on the LabVIEW upper computer, and the deformation is recorded in real time.
As the invention needs the integration computing capability of the LabVIEW upper computer, as shown in FIG. 3, a basic algorithm, an operation logic and a measurement method of the LabVIEW upper computer are designed, and the LabVIEW upper computer comprises an S100 operation setting module, an S200 time sharing and real-time selecting module, an S300 time sharing image processing module and an S400 real-time image processing module:
s101: and setting the camera parameters.
The exposure time and resolution of the camera have great influence on the system, the selection of the resolution influences the size of a field of view and the calculation precision, and the exposure time influences the intensity and quality of an image.
S102: selecting an operation module.
The CCD can be divided into a time-sharing record and a real-time record, so that the running module is divided into a time-sharing module and a real-time module.
S201: and selecting the time sharing module.
The resolution ratio is higher, time-sharing interval time is selected, and two speckle interference images are shot successively.
S202: and selecting the real-time module.
The resolution is low, the spectrum coordinates need to be acquired, the speckle interference image before deformation is photographed, and then the speckle interference image after deformation is continuously updated.
S301: and (5) Fourier transformation.
And obtaining speckle interference images before and after deformation, carrying out Fourier transform, displaying a spectrogram of the interference image, observing the spectral separation condition, and analyzing.
S302: and drawing the positive level of the frequency spectrum, and carrying out band-pass filtering.
In the spectrogram of the step S301, according to the difference of the carrier amounts of the first reference light and the second reference light, the two positive stages are respectively subjected to square frame drawing or ellipse drawing processing by using an image processing function of LabVIEW, so as to obtain the position spectrum coordinates, the positive stages of the two positive stages are taken out, and bandpass filtering is performed, so that the in-plane and out-of-plane phase information of the object in the X-axis and Z-axis directions is respectively extracted.
S303: and eliminating the carrier wave, carrying out inverse Fourier transform and subtracting.
And eliminating the carriers respectively loaded on the in-plane phase information and the out-of-plane phase information, then performing inverse Fourier transform to obtain four phase diagrams, and respectively performing subtraction processing to obtain in-plane phase differences and out-of-plane phase differences of the object in the X-axis direction and the Z-axis direction.
S304: clutter is filtered.
And (3) performing filtering processing, namely performing clutter elimination processing on the in-plane and out-of-plane phase differences obtained in the step (S303) by utilizing a short-time windowed Fourier function.
S305: and (5) phase unwrapping and displaying a 3D result.
And unwrapping the filtered phase difference, calculating according to the laser wavelength and the incident angle, and respectively displaying the 3D display result.
S401: and (5) Fourier transform processing.
And rapidly acquiring two continuous speckle interference images under the low resolution, and performing Fourier transform to display a spectrogram of the interference image.
S402: and drawing the positive level of the frequency spectrum, and recording the frequency spectrum coordinates.
And (3) carrying out frame drawing or ellipse drawing processing on the spectrogram in the step S401 by utilizing the image processing function of the LabVIEW, obtaining and recording two primary spectrum coordinates.
S403: and increasing the CCD frame rate and updating the interference pattern in real time.
And increasing the frame rate of the CCD camera, setting the image shot by the CCD before deformation as a first frame, and then rapidly recording and updating a second frame by the CCD every second, namely the speckle interference pattern deformed in real time. And carrying out Fourier transform on the first frame and the second frame to obtain a spectrogram.
S404: and taking out the positive stage and carrying out band-pass filtering.
According to the step S402, the spectrum coordinates are used and applied to the step S403, and the two positive stages are taken out and band-pass filtered, so that the in-plane and out-of-plane phase information of the object in the X-axis and Z-axis directions is extracted.
S405: and (5) fast operation and processing result display.
According to the steps S303, S304 and S305, the phase information is subjected to inverse fourier transform, subtraction, filtering, unwrapping and real-time display of the 3D result.
The connection channel between the image receiving system with the CCD camera and the computer is USB 3.0.
The resolution is 5472 x 3648 at the highest and 640 x 480 at the highest. When a time division module is selected, 5472×3648 or 3840×2160 may be selected, and when a real-time module is selected, 640×480, 1280×960, 1600×1200, 1920×1080 and 2048×1536 may be selected. And adjusting according to the field of view requirement and the size of the measured object.
The operation module of the LabVIEW upper computer is used for selecting the time-sharing operation logic, and the operation sequence is S100 to S200 to S300; if the real-time arithmetic logic is selected, the operation logic is S100 to S200 to S400. The S300 time-sharing image processing module and the S400 real-time image processing module are slightly different, and the operation amount is different due to the selection of the resolution, so that the two processing modules are separated.
The invention needs to separate the in-plane and off-plane deformation information contained in the two collected speckle interference patterns. The separation mode is frequency domain separation, namely, frequency domain separation is to obtain the frequency spectrum distribution of two speckle interference patterns, the inclination amount of the first reference light and the second reference light can lead the frequency spectrum carrier wave of in-plane deformation and out-of-plane deformation to be at different frequencies, and the phase difference and deformation amount of the in-plane deformation and out-of-plane deformation can be extracted only by extracting the respective frequency spectrum information.
Assume that the intensity of the collected speckle interference pattern before deformation is I 1 (x, y) fourier transforming it to obtain the spatial frequency FT [ I ] of the coupled speckle interference image 1 (x,y)]：
FT[I 1 (x,y)]＝A(f x ,f y )+B(f x -f 1x ,f y -f 1y )+B * (f x +f 1x ,f y +f 1y )+C(f x -f 2x ,f y -f 2y )+C * (f x +f 2x ,f y +f 2y ) (1)
In the formula (1), the spatial spectrum A (f x ,f y ) With (f) x ＝0,f y =0) as the center, carryBackground information; b (f) x -f 1x ,f y -f 1y ) And B * (f x +f 1x ,f y +f 1y ) Are conjugated terms, respectively with (f) x ＝f 1x ,f y ＝f 1y ) And (f) x ＝-f 1x ,f y ＝-f 1y ) Is the center, which contains the random phase information of the X-axis direction before the deformation of the measured object; c (f) x -f 2x ,f y -f 2y ) And C * (f x +f 2x ,f y +f 2y ) Are conjugated terms, respectively with (f) x ＝f 2x ,f y ＝f 2y ) And (f) x ＝-f 2x ,f y ＝-f 2y ) Is the center, which contains random phase information of the Z-axis direction before the deformation of the measured object. f (f) 1x 、f 1y 、f 2x And f 2y The carrier frequencies of the second fiber holder FG2 and the mirror M are in their two dimensions, respectively.
The LabVIEW is provided with a step of processing the spectrogram, and the positive level in the spectrogram is extracted by drawing an ellipse or a square frame in the spectrogram, namely, a so-called set passband window is used for carrying out bandpass filtering processing. A (f) x ,f y )、B * (f x +f 1x ,f y +f 1y ) And C * (f x +f 2x ,f y +f 2y ) Filtered out. B (f) x -f 1x ,f y -f 1y ) Shift f to spectral origin 1x And f 1y After carrier cancellation, becomes B (f x ,f y ) For B (f) x ,f y ) Performing inverse Fourier transform to obtain random phase information of the x-axis direction of the measured object before deformation; c (f) x -f 2x ,f y -f 2y ) Shift f to spectral origin 2x And f 2y After carrier cancellation, becomes C (f x ,f y ) For C (f) x ,f y ) And performing inverse Fourier transform to obtain random phase information of the Z-axis direction of the measured object before deformation.
From the above can orderAnd->The random phase information representing the x-axis and Z-axis directions before the deformation of the object to be measured is:
in the formula (2):
b(x,y)exp(j2πf 1x +j2πf 1y )＝FT -1 [B(f x -f 1x ,f y -f 1y )]
c(x,y)exp(j2πf 2x +j2πf 2y )＝FT -1 [C(f x -f 2x ,f y -f 2y )]
wherein FT -1 [·]For inverse Fourier transform operations, im [. Cndot.]To take the imaginary part to calculate Re [. Cndot.]To take the real part operation.
Similarly, the intensity of the speckle interference pattern after deformation is I 2 (x, y) according to the above steps, random phase information in the x-axis and Z-axis directions after deformation can be obtained asAnd->Therefore, the phase difference delta between the X-axis and Z-axis directions before and after deformation of the measured object u (x, y) and delta w (x, y) can be expressed as:
the equation (3) represents the phase difference information of the object in the X-axis and Z-axis directions.
In this example, the phase difference has a linear relationship with the deformation amount, the first fiber holder FG1 and the second fiber holder FG2 are symmetrical with respect to the light beam 43, the two included angles are 2θ, and the wavelength of the laser light is λ, so the deformation amounts in the X-axis and z-axis directions can be expressed as:
u＝δ u (x,y)λ/(4πsinθ)
w＝[δ w (x,y)λ/(2π)-usinθ]/(1+cosθ) (4)
the expression (4) indicates deformation amount information of the object to be measured in the X-axis and Z-axis directions.
As shown in FIG. 4, which shows the intensity distribution of light captured by an analog CCD plane, it can be seen that f is carried in the graph 1x And f 1y In-plane speckle interference fringes of carrier wave information and carrier wave f 2x And f 2y The out-of-plane speckle interference fringes of the carrier information. Performing Fourier transform on the light intensity distribution diagram to obtain a spectrum separation diagram of the simulated light intensity distribution diagram shown in FIG. 5, wherein the center of the diagram contains zero frequency; the second and third bright spots respectively replace positive and negative stages of speckle interference in the surface and contain random phase information in the X-axis direction before deformation of the measured object; the first and fourth bright spots respectively represent positive and negative stages of off-plane speckle interference, and contain random phase information of the Z-axis direction of the measured object before deformation.
The purpose of system adjustment is to ensure that the first reference light and the second reference light have different carrier frequencies, so that two positive primary stages can be easily separated in the subsequent spectrum separation, taking the schematic diagram of the system device of the portable digital speckle interferometry real-time measurement system of fig. 2 as an example, the system is adjusted as follows:
1. when the laser light source is not started, CCD imaging test is firstly carried out, the aperture of the third diaphragm AS3 is adjusted to the maximum, the object is irradiated with bright light, and the object shot by the CCD is adjusted to the clearest image state by adjusting the distance between the CCD, the convex lens 3 and the object to be measured. Placing the third diaphragm at the focal length of the convex lens 3 so AS to have the greatest influence on the Fourier frequency domain when adjusting the aperture size of the third diaphragm AS3 in the Fourier frequency domain;
2. the laser light emitted from the second fiber holder FG2, when passing through the first beam splitter BS1, has a loss in light intensity and illumination area size, and therefore, the first diaphragm AS1 is provided AS a symmetrical adjustment. For example, when the aperture of the second diaphragm AS2 is maximized, the aperture of the first diaphragm AS1 needs to be adjusted, so that the laser emitted by the object light at the position of the first optical fiber holder FG1 irradiates on the surface of the object, and the spot sizes are consistent, so that in-plane speckle interference is facilitated;
3. when the surface area of the measured object is smaller, the first diaphragm AS1 and the second diaphragm AS2 can be adjusted, the spot areas of the object light and the first reference light are reduced, and the background noise in the subsequent image analysis can be reduced;
4. the second reference light reflected at the first beam splitter BS1 is attenuated by the neutral attenuator a in the light intensity range of 0.9-10-4, and the attenuated light beam 44 passes through the fourth aperture AS4 via the mirror M, enters the second beam splitter BS2, and finally is reflected to the CCD plane, and performs out-of-plane speckle interference with the object light in the light beam 43 on the CCD plane. Here, when passing through the fourth aperture AS4, the fourth aperture AS4 also functions to adjust the spot area size of the light beam 44 finally incident on the second beam splitter BS2 to be consistent with the object light size in the light beam 43;
5. the second fiber holder FG2 has a two-dimensional fine tuning device, and after the adjustment, the two-dimensional adjustment device is required to be adjusted, and the two-dimensional adjustment device can be adjusted up and down and left and right on the plane, and the loading carrier wave is f 1x And f 1y The carrier wave is loaded for intra-plane speckle interference. The carrier wave loading mode of the off-plane speckle interference is that the carrier wave loading mode can be operated by forward tilting, backward tilting and clockwise and anticlockwise rotation through adjusting a two-dimensional fine tuning device on a reflecting mirror M, and the loading carrier wave is f 2x And f 2y 。
According to the embodiment of the invention, through the four diaphragms, the second optical fiber clamp and the reflecting mirror, object light and first reference light can be scattered in plane on the surface of an object to be measured in the same light spot sizeSpot interference, loaded with f 1x And f 1y The carrier wave of the (2) generates out-of-plane speckle interference on the CCD plane by the object light and the second reference light with the same light spot size, and f is loaded 2x And f 2y Is a carrier wave of (a). The speckle interference pattern records two interference phenomena, and the deformation quantity in the X-axis and Z-axis directions can be measured in real time by using a frequency spectrum separation technology. The invention has reasonable and compact structure, simple and convenient operation, good system stability, easy adjustment and high precision, and is suitable for recording the real-time speckle interference pattern.
The multi-dimensional speckle interference system and the real-time measurement method of the embodiment. The speckle interference system comprises a laser, an optical fiber coupler, four diaphragms, two beam splitting prisms, two optical fiber holders, a reflecting mirror, a carrying platform, an image processing and receiving system with a CCD camera and a computer with a LabVIEW upper computer. The measuring method comprises an operation setting module, a time-sharing and real-time selecting module, a time-sharing image processing module and a real-time image processing module. The embodiment of the invention has compact structure and simple and convenient operation, can realize time-sharing or real-time deformation measurement of the diffuse reflection object, and detects the deformation quantity of the object surface in-plane and out-of-plane.
The technical problems, technical solutions and advantageous effects of the present invention have been further described in detail in the above embodiments, and it should be understood that the above embodiments are merely illustrative of the present invention and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (6)
1. A multi-dimensional speckle interference system, comprising:
the laser emits a laser light source;
the optical fiber coupler receives a laser light source emitted by the laser and generates two light beams with the intensity ratio of 50:50;
the first optical fiber holder is used for fixing an object light source and is provided with a two-dimensional fine adjustment screw, so that two-dimensional fine adjustment can be performed;
the second optical fiber holder is used for fixing a reference light source, is provided with a two-dimensional fine adjustment screw, can carry out symmetry fine adjustment with object light, and can be used for carrying out carrier wave;
the first diaphragm is used for adjusting the light spot area of the object light source irradiated to the measured object;
the second diaphragm is used for adjusting the light spot area of the reference light source irradiated to the measured object to be matched with the object light spot;
the third diaphragm is used for filtering when the object light and the reference light return to the CCD camera;
the fourth diaphragm is used for adjusting the light spot size of the second reference light;
the object carrying platform is used for vertically placing an object to be measured;
a convex lens for reducing an image of the interference beam vertically returned after being irradiated to the object to be measured;
the first spectroscope has a transmission and reflection ratio of 90:10, and after the reference light passes through the first spectroscope, the transmitted light is first reference light, and the reflected light is second reference light; the first reference light and the object light interfere on the surface of the measured object, and enter the CCD camera after passing through the convex lens, the third diaphragm and the second beam splitter;
an attenuation sheet for reducing the light intensity of the second reference light;
the reflecting mirror reflects the second reference light reflected in the first spectroscope into the second spectroscope, and can adjust the reflecting angle of the reflecting mirror to carry out carrier wave on the second reference light;
the transmission and reflection ratio of the second beam splitter is 90:10, and the second reference light is reflected by the reflector, enters the second beam splitter and is reflected into the CCD camera to interfere with the object light;
an image receiving system with a CCD camera is used for receiving the interference image on the surface of the measured object and the interference image on the CCD plane at the same time and transmitting the interference image to a computer;
the computer is provided with a LabVIEW upper computer and is used for processing data acquired by an image receiving system with a CCD camera;
the real-time measurement method for implementing the multidimensional speckle interference by using the multidimensional speckle interference system comprises the following steps: the setting step, the time-sharing and real-time selection step, the time-sharing image processing step, and the real-time image processing step are operated.
2. The multi-dimensional speckle interference system of claim 1, wherein the fiber holder and mirror are both fixed to a two-dimensional fine tuning adjustment stage for symmetry adjustment and loading of carrier information.
3. The multi-dimensional speckle interference system of claim 1, wherein the recording of speckle interference patterns by the CCD camera-equipped image receiving system is divided into time-division recording and real-time recording.
4. The system of claim 1, wherein the first fiber holder and the second fiber holder are in the same horizontal plane and are symmetrical about a perpendicular to the surface to be measured, and the angle 2Θ between the two is 40 ° ～60 ° Adjusting according to the shape and the size of the object to be measured and the requirement of the field of view; the included angle between the reflecting mirror and the vertical line of the measured object is (90) ° - θ/2), correspondingly, an included angle adjustment range of 75 ° ～80 ° 。
5. A real-time measurement method of multi-dimensional speckle interferometry using the multi-dimensional speckle interferometry system of claim 1, comprising in particular an S100 operation setting step, an S200 time-sharing and real-time selection step, an S300 time-sharing image processing step, and an S400 real-time image processing step;
the step of S100 operation setting specifically includes:
s101: setting camera parameters, wherein the selection of the exposure time and the resolution of the camera has a larger influence on the system, the selection of the resolution has an influence on the size and the calculation precision of a field of view, and the exposure time has an influence on the intensity and the quality of an image;
s102: selecting an operation module, wherein the CCD is divided into a time-sharing record and a real-time record, so that the operation module is divided into a time-sharing module and a real-time module;
the step of S200 time sharing and real-time selection specifically comprises the following steps:
s201: selecting a time-sharing module, wherein the resolution ratio is high, selecting time-sharing interval time, and shooting two speckle interference images successively;
s202: selecting a real-time module, wherein the resolution is low, spectrum coordinates are required to be acquired, a speckle interference image before deformation is shot, and the speckle interference image after deformation is continuously updated;
the step of S300 time-sharing image processing specifically comprises the following steps:
s301: fourier transform is carried out, speckle interference images before and after deformation are obtained, fourier transform is carried out, a spectrogram of the interference image is displayed, and the spectral separation condition is observed and analyzed;
s302: drawing positive frequency spectrum stages, carrying out band-pass filtering, and in the spectrogram of the step S301, respectively carrying out square frame drawing or ellipse drawing processing on the two positive frequency spectrum stages according to different carrier amounts applied to first reference light and second reference light by utilizing an image processing function of LabVIEW to obtain position spectrum coordinates, taking out the positive frequency spectrum stages of the two positive frequency spectrum stages, and carrying out band-pass filtering so as to respectively extract in-plane and out-of-plane phase information of an object in the X-axis and Z-axis directions;
s303: eliminating carrier waves, carrying out inverse Fourier transform, carrying out subtraction processing, carrying out inverse Fourier transform after eliminating carrier waves loaded with in-plane and out-of-plane phase information respectively to obtain four phase diagrams, and carrying out subtraction processing respectively to obtain in-plane and out-of-plane phase differences of an object in the directions of an X axis and a Z axis;
s304: filtering clutter, performing filtering treatment, and performing clutter elimination treatment on the in-plane and out-of-plane phase difference obtained in the step S303 by using a short-time windowing Fourier function;
s305: unwrapping the phase, displaying a 3D result, unwrapping the filtered phase difference, calculating according to the laser wavelength and the incident angle, and displaying a 3D display result respectively;
the step of processing the S400 real-time image specifically comprises the following steps:
s401: performing Fourier transform processing, namely rapidly acquiring two continuous speckle interference images under low resolution, performing Fourier transform, and displaying a spectrogram of the interference image;
s402: drawing a positive level of spectrum, recording spectrum coordinates, carrying out square drawing or ellipse drawing on the spectrogram in the step S401 by utilizing the image processing function of LabVIEW, obtaining two positive level of spectrum coordinates, and recording;
s403: increasing the frame rate of a CCD, updating an interferogram in real time, increasing the frame rate of a CCD camera, setting an image shot by the CCD before deformation as a first frame, then rapidly recording and updating a second frame per second by the CCD, namely, a speckle interferogram deformed in real time, and carrying out Fourier transform on the first frame and the second frame to obtain a spectrogram;
s404: taking out positive stages, carrying out band-pass filtering, using the spectrum coordinates according to the step S402, applying the spectrum coordinates to the step S403, taking out two positive stages, and carrying out band-pass filtering, thereby extracting in-plane and out-of-plane phase information of an object in the X-axis and Z-axis directions;
s405: and (3) performing fast operation and processing result display, namely performing inverse Fourier transform, subtraction processing, filtering processing, unwrapping processing and real-time display of a 3D result on the phase information according to the steps S303, S304 and S305.
6. The method for measuring the multidimensional speckle interference in real time according to claim 5, wherein a connecting channel between the image receiving system with the CCD camera and the computer is USB 3.0;
the resolution is 5472×3648, 640×480, 5472×3648 or 3840×2160 when a time-sharing module is selected, and 640×480, 1280×960, 1600×1200, 1920×1080 and 2048×1536 when a real-time module is selected; adjusting according to the field of view requirement and the size of the measured object;
the computer separates the surface wave information of the measured object contained in the collected speckle interference images before and after deformation, and the separation mode is frequency spectrum separation.
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