CN105136806A - Bi-directional shearing speckle interference system based on spatial carrier and measurement method - Google Patents
Bi-directional shearing speckle interference system based on spatial carrier and measurement method Download PDFInfo
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Abstract
The invention discloses a bi-directional shearing speckle interference system based on spatial carrier and a measurement method. The system is characterized in that different-wavelength emergent light of a first light source and a second light source irradiates a measuring surface at the same time after beam expanding; diffuse reflection light of the measuring surface passes through an imaging lens, a diaphragm, a 4f system and a beam splitter prism and is divided into two beams of light; the two beams of light pass through filters and become two light beams with single wavelength, and the two light beams respectively pass through two Michelson shearing apparatuses so as to realize introduction of shearing displacement at different directions; and light with two different shearing directions passes through the beam splitter prism and irradiates on a CCD target surface. The measurement method can carry out bi-directional synchronous detection on defect of a measured object and is a nondestructive, whole-field and high-efficiency measurement method.
Description
Technical field
The present invention relates to a kind of twocouese speckle-shearing interferometry system based on spatial carrier and measuring method, the defect of measured object can be detected from two direction of measurement simultaneously, be particularly useful for the Non-Destructive Testing of compound substance near surface flaw in Aero-Space.
Background technology
Speckle-shearing interferometry technology is a kind of whole audience, noncontact, highly sensitive optical measuring technique, because it directly can measure the derivative of object deformation, eliminate the rigid displacement of testee in measuring process, therefore, the form that the uneven sudden change of fault location distorts with phase diagram striped can be highlighted.In addition, speckle-shearing interferometry technology also has that light path device is simple, anti-seismic performance is good and require the advantages such as lower to measurement environment, makes it be widely used in industrial nondestructive testing field.
But speckle-shearing interferometry technology is only responsive to the deformation on its shear direction.Loading deformation due to measured object defect is likely multidirectional, such as there is the strip defect of multiple different directions, if utilize traditional one direction speckle-shearing interferometry systems axiol-ogy defect, can only detect the defect having on shear direction and load deformation; If the defect in measured object only produces the loading deformation vertical with shear direction, then cannot detect these defects.In order to different defect multiple in complete detection measured object, can only repeated detection by traditional one direction speckle-shearing interferometry technology.But consistent before and after the deformation quantity that the mode of repeated detection can not ensure measured object, for the follow-up unified quantization process of multiple different defect brings difficulty.Although multiple one direction speckle-shearing interferometry system also can be adopted to measure measured object simultaneously, the complexity of increase measuring process can be made like this, and the metrical information between each system is difficult to exact matching.
Summary of the invention
The object of the invention is to overcome above-mentioned the deficiencies in the prior art, a kind of twocouese speckle-shearing interferometry system based on spatial carrier and measuring method are provided, to realizing, the twocouese of the defect of measured object synchronously being detected, making simple in measurement system structure, measuring method convenient.
Of the present inventionly adopt following technical scheme for technical solution problem:
The design feature that the present invention is based on the twocouese speckle-shearing interferometry system of spatial carrier is:
First light source and secondary light source are set respectively as lighting source; Described first light source and secondary light source irradiate tested surface through expanding respectively simultaneously, formed diffuse on the surface of described tested surface;
Describedly to diffuse successively after imaging len, diaphragm and 4f system supplementary lens, in Amici prism, press 5:5 beam splitting, form the first light beam and the second light beam that optical axis is mutually 90 degree;
What described first light beam was formed by secondary light source through the first optical filter filtering on tested surface diffuses, and obtain the first light source of being formed on tested surface by the first light source and diffuse, described first light source diffuses and obtains through the first Michelson shear diffusing of having that X-direction shears;
What described second light beam was formed by the first light source through the second optical filter filtering on tested surface diffuses, and obtains the secondary light source formed on tested surface by secondary light source and diffuse, and described secondary light source diffuses and shears dress through the second Michelson
Put to obtain and there is diffusing of Y-direction shearing;
Described have that X-direction shears diffuse and diffusing through common successively through Amici prism and the rearmounted lens of 4f system of having that Y-direction shears, and be jointly projected on CCD target surface, obtain twocouese speckle-shearing interferometry image;
Described first light source and secondary light source are the LASER Light Source with different wavelength.
The feature that the present invention utilizes the twocouese speckle-shearing interferometry system based on spatial carrier to realize the method that measured object defect twocouese detects is: carry out loading to described tested surface and make described tested surface, before and after loading, deformation occur; By gathering the twocouese speckle-shearing interferometry image obtained respectively on described CCD target surface before and after tested surface deformation; Fourier transform is carried out to described twocouese speckle-shearing interferometry image, obtains the frequency spectrum of described twocouese speckle-shearing interferometry image; Filtering process is carried out to described frequency spectrum, extracts the portions of the spectrum of the complex amplitude that diffuses obtained containing X-direction shearing respectively and contain the portions of the spectrum of the complex amplitude that diffuses that Y-direction is sheared;
The portions of the spectrum of the described complex amplitude that diffuses containing X-direction shearing is carried out inverse-Fourier transform, obtain the complex amplitude diffused sheared containing X-direction, the phase information diffused of X-direction shearing is obtained by complex amplitude phase extraction, the tested surface phase information diffused that rear X-direction is sheared with distortion is before being deformed subtracted each other, obtain the phase differential of the surface deformation X-direction derivative characterizing tested surface, thus obtain the testing result of tested surface X-direction;
The portions of the spectrum of the described complex amplitude that diffuses containing Y-direction shearing is carried out inverse-Fourier transform, obtain the complex amplitude diffused sheared containing Y-direction, the phase information diffused of Y-direction shearing is obtained by complex amplitude phase extraction, the tested surface phase information diffused that rear Y-direction is sheared with distortion is before being deformed subtracted each other, obtain the phase differential of the surface deformation Y-direction derivative characterizing tested surface, thus obtain the testing result of tested surface Y-direction.
The feature that the present invention realizes the method that measured object defect twocouese detects is carried out as follows:
Step 1: gather the intensity I (x, y) that tested surface is out of shape front twocouese speckle-shearing interferometry image by described CCD target surface
Step 2: calculate the spatial frequency spectrum obtaining twocouese speckle-shearing interferometry image
Intensity I (x, y) for described twocouese speckle-shearing interferometry image carries out the spatial frequency spectrum FT [I (x, y)] of the twocouese speckle-shearing interferometry image that Fourier transform obtains being characterized by formula (1):
FT[I(x,y)]＝A(f
x,f
y)+B(f
x-f
cx,f
y)+B
*(f
x+f
cx,f
y)+C(f
x,f
y-f
cy)+C
*(f
x,f
y+f
cy)(1)
In formula (1):
A (f
x, f
y) be the low frequency term containing bias light information in spatial frequency spectrum, it is positioned on the peripheral region of centre coordinate (0,0) of frequency spectrum, and bandwidth is MAX [2f
u1, 2f
u2], MAX [] is for getting maximum value calculation;
B (f
x-f
cx, f
y) and B
*(f
x+ f
cx, f
y) conjugation each other, bandwidth is 2f
u1, it contains the phase information diffused that X-direction is sheared;
C (f
x, f
y-f
cy) and C
*(f
x, f
cy+ f
y) conjugation each other, bandwidth is 2f
u2, it contains the phase information diffused that Y-direction is sheared;
F
u1for the cutoff frequency of the low frequency part diffused that X-direction is sheared;
F
u2for the cutoff frequency of the low frequency part diffused that Y-direction is sheared;
F
cxfor having the spatial carrier frequency diffused that X-direction is sheared;
F
cyfor having the spatial carrier frequency diffused that Y-direction is sheared;
F
xand f
ybe respectively horizontal ordinate and the ordinate of spectrum space; And have:
B (f
x-f
cx, f
y) be with coordinate (f
cx, 0) centered by region on;
B
*(f
x+ f
cx, f
y) be with coordinate (-f
cx, 0) centered by region on;
C (f
x, f
y-f
cy) be with coordinate (0, f
cy) centered by region on;
C
*(f
x, f
cy+ f
y) be with coordinate (0 ,-f
cy) centered by region on;
Step 3: filter window is set and extracts the frequency-portions containing phase information
Extract B (f
x-f
cx, f
y) frequency spectrum as the frequency spectrum of the phase information diffused sheared containing X-direction, according to B (f
x-f
cx, f
y) frequency spectrum shape arrange circular filter window be with (f
cx, 0) centered by, with f
u1for radius;
Extract C (f
x, f
y-f
cy) frequency spectrum as the frequency spectrum of the phase information diffused sheared containing Y-direction, according to C (f
x, f
y-f
cy) frequency spectrum shape arrange circular filter window be with (0, f
cy) centered by, with f
u2for radius;
Step 4: calculate the phase information diffused sheared with Y-direction that diffuses that X-direction is sheared respectively
Order: the phase information diffused that X-direction is sheared is
The phase information diffused that Y-direction is sheared is
then have:
In formula (2): b (x, y) exp (j2 π f
cx)=FT
-1[B (f
x-f
cx, f
y)], c (x, y) exp (j2 π f
cy)=FT
-1[C (f
x, f
y-f
cy)], wherein FT
-1[] is inverse Fourier transform computing, and Im [] is for getting imaginary-part operation, and Re [] is for getting real part computing;
Step 5: what calculate that X-direction shears respectively diffuses and phase differential before and after the distortion diffused that Y-direction is sheared, obtains twocouese testing result
A width twocouese speckle-shearing interferometry image is gathered after tested surface distortion, carry out phase information extraction according to the twocouese speckle-shearing interferometry image after pair tested surface deformation of step 2, step 3 and step 4, and before and after being out of shape by formula (3) calculating acquisition tested surface, the phase differential of twocouese speckle-shearing interferometry image is respectively Δ
x(x, y) and Δ
y(x, y),
In formula (3),
for the phase information diffused that X-direction after tested surface distortion is sheared;
for the phase information diffused that Y-direction after tested surface distortion is sheared;
With described phase difference
x(x, y) and Δ
y(x, y) characterizes the defect of tested surface on X shear direction and Y shear direction after tested surface deformation respectively, as testing result.
Compared with the prior art, beneficial effect of the present invention is embodied in:
1, the present invention adopts spatial carrier technology, introduces carrier wave in the two directions, achieves spectrum reuse, can obtain the phase information of two shear directions, realize synchronously detecting measured object twocouese from single width cutting speckle figure.
2, the present invention uses the laser instrument of two different wave lengths and corresponding filter plate, and the light on two shear directions is not interfere with each other.
3, the present invention adopts Michelson interference system as shear and carrier equipment, makes system compact, simply, easily regulates.
4, the present invention embedded in 4f system, improves the area of single measurement, and adjustable height measures efficiency.
Accompanying drawing explanation
Fig. 1 is that present system forms schematic diagram;
Fig. 2 is the graph of spatial frequency spectrum calculating acquisition in the inventive method;
The measurement result of experiment 1 of Fig. 3 a and Fig. 3 b for carrying out for the inventive method;
The measurement result of experiment 2 of Fig. 4 a and Fig. 4 b for carrying out for the inventive method;
The measurement result of experiment 3 of Fig. 5 a and Fig. 5 b for carrying out for the inventive method;
Number in the figure: 1 first light source, 2 secondary light sources, 3 first beam expanding lenss, 4 second beam expanding lenss, 5 tested surfaces, 6 imaging lens, 7 diaphragms, 8 is 4f system supplementary lens, 9 Amici prisms, 10 second optical filters, 11 first optical filters, 12 first Michelson shears, 13 second Michelson shears, 14 Amici prisms, 15 is the rearmounted lens of 4f system, and 16 is CCD target surface.
Embodiment
The version of the twocouese speckle-shearing interferometry system based on spatial carrier in the present embodiment is:
First light source 1 and secondary light source 2 are set respectively as lighting source; First light source 1 is through the first beam expanding lens 3, and secondary light source 2 irradiates tested surface 5 after the second beam expanding lens 4 simultaneously, is formed diffuse on the surface of tested surface 5.
Diffuse successively after imaging len 6, diaphragm 7 and 4f system supplementary lens 8, in Amici prism 9, carry out beam splitting according to the ratio of 5:5, form the first light beam and the second light beam that optical axis is mutually 90 degree.
What the first light beam was formed by secondary light source through the first optical filter 11 filtering on tested surface 5 diffuses, and obtain the first light source of being formed on tested surface 5 by the first light source and diffuse, the first light source diffuses to obtain through the first Michelson shear 12 and has diffusing of X-direction shearing.
What the second light beam was formed by the first light source through the second optical filter 10 filtering on tested surface 5 diffuses, and obtain the secondary light source formed on tested surface 5 by secondary light source and diffuse, secondary light source diffuses and obtains through the second Michelson shear 13 diffusing of having that Y-direction shears.
What have that X-direction shears diffuses and diffusing through common successively through Amici prism 14 and the rearmounted lens 15 of 4f system of having that Y-direction shears, and is jointly projected on CCD target surface 16, obtains twocouese speckle-shearing interferometry image.
First light source 1 and secondary light source 2 are the LASER Light Source with different wavelength.
Utilize in the present embodiment based on the twocouese speckle-shearing interferometry system of spatial carrier realize measured object defect twocouese detect method be: to tested surface 5 carry out loading make tested surface 5 loading before and after occur deformation; By gathering the twocouese speckle-shearing interferometry image obtained respectively on described CCD target surface 16 before and after tested surface 5 deformation; Fourier transform is carried out to twocouese speckle-shearing interferometry image, obtains the frequency spectrum of twocouese speckle-shearing interferometry image; Filtering process is carried out to frequency spectrum, extracts the portions of the spectrum of the complex amplitude that diffuses obtained containing X-direction shearing respectively and contain the portions of the spectrum of the complex amplitude that diffuses that Y-direction is sheared.
The portions of the spectrum of the complex amplitude that diffuses sheared containing X-direction is carried out inverse-Fourier transform, obtain the complex amplitude diffused sheared containing X-direction, the phase information diffused of X-direction shearing is obtained by complex amplitude phase extraction, tested surface 5 phase information diffused that rear X-direction is sheared with distortion is before being deformed subtracted each other, obtain the phase differential of the surface deformation X-direction derivative characterizing tested surface 5, thus obtain the testing result of the X-direction of tested surface 5.
The portions of the spectrum of the complex amplitude that diffuses sheared containing Y-direction is carried out inverse-Fourier transform, obtain the complex amplitude diffused sheared containing Y-direction, the phase information diffused of Y-direction shearing is obtained by complex amplitude phase extraction, tested surface 5 phase information diffused that rear Y-direction is sheared with distortion is before being deformed subtracted each other, obtain the phase differential of the surface deformation Y-direction derivative characterizing tested surface 5, thus obtain the testing result of the Y-direction of tested surface 5.
About the method realizing the detection of measured object defect twocouese, specifically carry out as follows:
Step 1: gather the intensity I (x, y) that tested surface 5 is out of shape front twocouese speckle-shearing interferometry image by described CCD target surface 16
The light beam u of the first flat mirror reflects in first Michelson shear
x1the light beam u of (x, y) and the second flat mirror reflects
x2(x+ Δ x, y) is represented by formula (1a) and (1b) respectively:
u
x1(x,y)＝|u
x1(x,y)|exp[jφ
x1(x,y)](1a)
u
x2(x+Δx,y)＝|u
x2(x+Δx,y)|exp[jφ
x2(x+Δx,y)+2πjf
cxx](1b)
In formula (1a), | u
x1(x, y) | and φ
x1(x, y) is respectively light beam u
x1the amplitude of (x, y) and phase place;
In formula (1b), | u
x2(x, y) | and φ
x2(x+ Δ x, y) is respectively light beam u
x2the amplitude of (x, y) and phase place;
Wherein x, y represent horizontal ordinate on CCD target surface array and ordinate respectively, f
cxfor having the spatial carrier frequency diffused that X-direction is sheared, Δ x is the shearing displacement that the first Michelson shear is introduced in the X direction, and carrier frequency f
cxwith the pass of shearing displacement Δ x be
l
1be the light path of the first Michelson shear midplane mirror to CCD target surface, λ
1for the wavelength of described first light source.
The light beam u of the first flat mirror reflects in second Michelson shear
y1the light beam u of (x, y) and the second flat mirror reflects
y2(x, y+ Δ y) is represented by formula (2a) and (2b) respectively:
u
y1(x,y)＝|u
y1(x,y)|exp[jφ
y1(x,y)](2a)
u
y2(x,y+Δy)＝|u
y2(x,y+Δy)|exp[jφ
y2(x,y+Δy)+2πjf
cyy](2b)
In formula (2a), | u
y1(x, y) | and φ
y1(x, y) is respectively light beam u
y1the amplitude of (x, y) and phase place;
In formula (2b), | u
y2(x, y+ Δ y) | and φ
y2(x, y+ Δ y) is respectively light beam u
y2the amplitude of (x, y+ Δ y) and phase place;
F
cyfor having the spatial carrier frequency diffused that Y-direction is sheared, Δ y is the shearing displacement that the second Michelson shear is introduced in the Y direction, and carrier frequency f
cywith the pass of shearing displacement Δ y be
l
2be the light path of the second Michelson shear midplane mirror to CCD target surface, λ
2for the wavelength of secondary light source.
The intensity I (x, y) obtaining the twocouese speckle-shearing interferometry image collected by CCD target surface is calculated by formula (3a):
I (x, y)=a (x, y)+b (x, y) exp (2 π jf
cxx)+b
*(x, y) exp (-2 π jf
cxx) (3a), in formula (3a):
+c(x,y)exp(2πjf
cyy)+c
*(x,y)exp(-2πjf
cyy)
a(x,y)＝|u
x1(x,y)
2+|u
x2(x+Δx,y)
2+|u
y1(x,y)
2+|u
y2(x,y+Δy)
2；
for X-direction shears the phase information diffused,
for Y-direction shears the phase information diffused,
Step 2: calculate the spatial frequency spectrum obtaining twocouese speckle-shearing interferometry image
For the intensity I (x of twocouese speckle-shearing interferometry image, y) the spatial frequency spectrum FT [I (x, y)] of twocouese speckle-shearing interferometry image that Fourier transform obtains graph of spatial frequency spectrum as shown in Figure 2, characterized by formula (1) is carried out:
FT[I(x,y)]＝A(f
x,f
y)+B(f
x-f
cx,f
y)+B
*(f
x+f
cx,f
y)+C(f
x,f
y-f
cy)+C
*(f
x,f
y+f
cy)(1)
In formula (1):
A (f
x, f
y) be the low frequency term containing bias light information in spatial frequency spectrum, it is positioned on the peripheral region of centre coordinate (0,0) of frequency spectrum, and bandwidth is MAX [2f
u1, 2f
u2], MAX [] is for getting maximum value calculation; If there is 2f
u1>2f
u2, then MAX [2f
u1, 2f
u2]=2f
u1;
B (f
x-f
cx, f
y) and B
*(f
x+ f
cx, f
y) conjugation each other, bandwidth is 2f
u1, it contains the phase information diffused that X-direction is sheared;
C (f
x, f
y-f
cy) and C
*(f
x, f
cy+ f
y) conjugation each other, bandwidth is 2f
u2, it contains the phase information diffused that Y-direction is sheared;
F
u1for the cutoff frequency of the low frequency part diffused that X-direction is sheared, f
u2for the cutoff frequency of the low frequency part diffused that Y-direction is sheared,
d is diaphragm clear aperture, and f is imaging len focal length;
F
cxfor having the spatial carrier frequency diffused that X-direction is sheared;
F
cyfor having the spatial carrier frequency diffused that Y-direction is sheared;
F
xand f
ybe respectively horizontal ordinate and the ordinate of spectrum space;
Due to spatial carrier frequency f
cxand f
cyintroducing, then have:
B (f
x-f
cx, f
y) be with coordinate (f
cx, 0) centered by region on;
B
*(f
x+ f
cx, f
y) be with coordinate (-f
cx, 0) centered by region on;
C (f
x, f
y-f
cy) be with coordinate (0, f
cy) centered by region on;
C
*(f
x, f
cy+ f
y) be with coordinate (0 ,-f
cy) centered by region on;
Step 3: filter window is set and extracts the frequency-portions containing phase information
Extract B (f
x-f
cx, f
y) frequency spectrum as the frequency spectrum of the phase information diffused sheared containing X-direction, according to B (f
x-f
cx, f
y) frequency spectrum shape arrange circular filter window be with (f
cx, 0) centered by, with f
u1for radius;
Extract C (f
x, f
y-f
cy) frequency spectrum as the frequency spectrum of the phase information diffused sheared containing Y-direction, according to C (f
x, f
y-f
cy) frequency spectrum shape arrange circular filter window be with (0, f
cy) centered by, with f
u2for radius;
Step 4: calculate the phase information the diffused order of shearing with Y-direction that diffuses that X-direction is sheared respectively: the phase information diffused that X-direction is sheared is
The phase information diffused that Y-direction is sheared is
then have:
In formula (2): b (x, y) exp (j2 π f
cx)=FT
-1[B (f
x-f
cx, f
y)], c (x, y) exp (j2 π f
cy)=FT
-1[C (f
x, f
y-f
cy)], wherein FT
-1[] is inverse Fourier transform computing, and Im [] is for getting imaginary-part operation, and Re [] is for getting real part computing; Such as: FT
-1[B (f
x-f
cx, f
y)] be to B (f
x-f
cx, f
y) carry out inverse Fourier transform computing, Im [b (x, y) exp (j2 π f
cx)] be get plural b (x, y) exp (j2 π f
cx) imaginary part, Re [b (x, y) exp (j2 π f
cx)] be get plural b (x, y) exp (j2 π f
cx) real part.
Step 5: what calculate that X-direction shears respectively diffuses and phase differential before and after the distortion diffused that Y-direction is sheared, obtains twocouese testing result
A width twocouese speckle-shearing interferometry image is gathered after tested surface 5 is out of shape, carry out phase information extraction according to the twocouese speckle-shearing interferometry image after pair tested surface deformation of step 2, step 3 and step 4, and before and after being out of shape by formula (3) calculating acquisition tested surface, the phase differential of twocouese speckle-shearing interferometry image is respectively Δ
x(x, y) and Δ
y(x, y),
In formula (3)
for the phase information diffused that X-direction after tested surface distortion is sheared;
for the phase information diffused that Y-direction after tested surface distortion is sheared;
With phase difference
x(x, y) and Δ
y(x, y) characterizes the defect of tested surface on X shear direction and Y shear direction after tested surface deformation respectively, as testing result.
Experiment 1: with center thimble body surface for tested surface, by the inventive method, the laser that use wavelength is 532nm is as the first light source 1, the laser that use wavelength is 457nm is as secondary light source 2, and the focal length of imaging len is 25mm, and diaphragm clear aperture is 1mm, measure tested surface deformation data before and after loading, Fig. 3 a is depicted as the measurement result of X shear direction, and Fig. 3 b is depicted as the measurement result of Y shear direction, and result shows that the inventive method can realize twocouese synchro measure to same deformation.
Experiment 2: open the surface of aluminum plate of X-direction groove with the back side for tested surface, by the inventive method, the laser that use wavelength is 532nm is as the first light source 1, the laser that use wavelength is 457nm is as secondary light source 2, the focal length of imaging len is 25mm, diaphragm clear aperture is 1mm, measure tested surface deformation data before and after loading, Fig. 4 a is depicted as the measurement result of X shear direction, Fig. 4 b is depicted as the measurement result of Y shear direction, Fig. 4 a can not show defect information, and Fig. 4 b clearly can show defect information, and composition graphs 4a and Fig. 4 b can avoid the undetected of defect.
Experiment 3: open the surface of aluminum plate of Y-direction groove with the back side for tested surface, by the inventive method, the laser that use wavelength is 532nm is as the first light source 1, the laser that use wavelength is 457nm is as secondary light source 2, the focal length of imaging len is 25mm, diaphragm clear aperture is 1mm, measure tested surface deformation data before and after loading, Fig. 5 a is depicted as the measurement result of X shear direction, Fig. 5 b is depicted as the measurement result of Y shear direction, in the present embodiment, Fig. 5 a clearly can show defect information, and Fig. 5 b can not show defect information, therefore, composition graphs 5a and Fig. 5 b can avoid the undetected of defect.
Claims (3)
1., based on a twocouese speckle-shearing interferometry system for spatial carrier, it is characterized in that:
First light source (1) and secondary light source (2) are set respectively as lighting source; Described first light source (1) and secondary light source (2) irradiate tested surface (5) through expanding respectively simultaneously, formed diffuse on the surface of described tested surface (5);
Describedly diffuse successively after imaging len (6), diaphragm (7) and 4f system supplementary lens (8), in Amici prism (9), press 5:5 beam splitting, form the first light beam and the second light beam that optical axis is mutually 90 degree;
What described first light beam was above formed at tested surface (5) by secondary light source through the first optical filter (11) filtering diffuses, and obtain and diffused at upper the first light source formed of tested surface (5) by the first light source, described first light source diffuses to obtain through the first Michelson shear (12) and has diffusing of X-direction shearing;
What described second light beam was above formed at tested surface (5) by the first light source through the second optical filter (10) filtering diffuses, and obtain and diffused at the upper secondary light source formed of tested surface (5) by secondary light source, described secondary light source diffuses to obtain through the second Michelson shear (13) and has diffusing of Y-direction shearing;
Described have that X-direction shears diffuse and diffusing through common successively through Amici prism (14) and the rearmounted lens of 4f system (15) of having that Y-direction shears, and be jointly projected on CCD target surface (16), obtain twocouese speckle-shearing interferometry image;
Described first light source (1) and secondary light source (2) are the LASER Light Source with different wavelength.
2. utilize the method realizing the detection of measured object defect twocouese described in claim 1 based on the twocouese speckle-shearing interferometry system of spatial carrier, it is characterized in that: loading is carried out to described tested surface (5) and makes described tested surface (5), before and after loading, deformation occur; By gathering the twocouese speckle-shearing interferometry image obtained respectively on described CCD target surface (16) before and after tested surface (5) deformation; Fourier transform is carried out to described twocouese speckle-shearing interferometry image, obtains the frequency spectrum of described twocouese speckle-shearing interferometry image; Filtering process is carried out to described frequency spectrum, extracts the portions of the spectrum of the complex amplitude that diffuses obtained containing X-direction shearing respectively and contain the portions of the spectrum of the complex amplitude that diffuses that Y-direction is sheared;
The portions of the spectrum of the described complex amplitude that diffuses containing X-direction shearing is carried out inverse-Fourier transform, obtain the complex amplitude diffused sheared containing X-direction, the phase information diffused of X-direction shearing is obtained by complex amplitude phase extraction, tested surface (5) phase information diffused that rear X-direction is sheared with distortion is before being deformed subtracted each other, obtain the phase differential of the surface deformation X-direction derivative characterizing tested surface (5), thus obtain the testing result of tested surface (5) X-direction;
The portions of the spectrum of the described complex amplitude that diffuses containing Y-direction shearing is carried out inverse-Fourier transform, obtain the complex amplitude diffused sheared containing Y-direction, the phase information diffused of Y-direction shearing is obtained by complex amplitude phase extraction, tested surface (5) phase information diffused that rear Y-direction is sheared with distortion is before being deformed subtracted each other, obtain the phase differential of the surface deformation Y-direction derivative characterizing tested surface (5), thus obtain the testing result of tested surface (5) Y-direction.
3. the method realizing measured object defect twocouese and detect according to claim 2, is characterized in that carrying out as follows:
Step 1: gather the intensity I (x, y) that tested surface (5) is out of shape front twocouese speckle-shearing interferometry image by described CCD target surface (16)
Step 2: calculate the spatial frequency spectrum obtaining twocouese speckle-shearing interferometry image
Intensity I (x, y) for described twocouese speckle-shearing interferometry image carries out the spatial frequency spectrum FT [I (x, y)] of the twocouese speckle-shearing interferometry image that Fourier transform obtains being characterized by formula (1):
FT[I(x,y)]＝A(f
x,f
y)+B(f
x-f
cx,f
y)+B
*(f
x+f
cx,f
y)+C(f
x,f
y-f
cy)+C
*(f
x,f
y+f
cy)(1)
In formula (1):
A (f
x, f
y) be the low frequency term containing bias light information in spatial frequency spectrum, it is positioned on the peripheral region of centre coordinate (0,0) of frequency spectrum, and bandwidth is MAX [2f
u1, 2f
u2], MAX [] is for getting maximum value calculation;
B (f
x-f
cx, f
y) and B
*(f
x+ f
cx, f
y) conjugation each other, bandwidth is 2f
u1, it contains the phase information diffused that X-direction is sheared;
C (f
x, f
y-f
cy) and C
*(f
x, f
cy+ f
y) conjugation each other, bandwidth is 2f
u2, it contains the phase information diffused that Y-direction is sheared;
F
u1for the cutoff frequency of the low frequency part diffused that X-direction is sheared;
F
u2for the cutoff frequency of the low frequency part diffused that Y-direction is sheared;
F
cxfor having the spatial carrier frequency diffused that X-direction is sheared;
F
cyfor having the spatial carrier frequency diffused that Y-direction is sheared;
F
xand f
ybe respectively horizontal ordinate and the ordinate of spectrum space; And have:
B (f
x-f
cx, f
y) be with coordinate (f
cx, 0) centered by region on;
B
*(f
x+ f
cx, f
y) be with coordinate (-f
cx, 0) centered by region on;
C (f
x, f
y-f
cy) be with coordinate (0, f
cy) centered by region on;
C
*(f
x, f
cy+ f
y) be with coordinate (0 ,-f
cy) centered by region on;
Step 3: filter window is set and extracts the frequency-portions containing phase information
Extract B (f
x-f
cx, f
y) frequency spectrum as the frequency spectrum of the phase information diffused sheared containing X-direction, according to B (f
x-f
cx, f
y) frequency spectrum shape arrange circular filter window be with (f
cx, 0) centered by, with f
u1for radius;
Extract C (f
x, f
y-f
cy) frequency spectrum as the frequency spectrum of the phase information diffused sheared containing Y-direction, according to C (f
x, f
y-f
cy) frequency spectrum shape arrange circular filter window be with (0, f
cy) centered by, with f
u2for radius;
Step 4: calculate the phase information diffused sheared with Y-direction that diffuses that X-direction is sheared respectively
Order: the phase information diffused that X-direction is sheared is
The phase information diffused that Y-direction is sheared is
then have:
In formula (2): b (x, y) exp (j2 π f
cx)=FT
-1[B (f
x-f
cx, f
y)], c (x, y) exp (j2 π f
cy)=FT
-1[C (f
x, f
y-f
cy)], wherein FT
-1[] is inverse Fourier transform computing, and Im [] is for getting imaginary-part operation, and Re [] is for getting real part computing;
Step 5: what calculate that X-direction shears respectively diffuses and phase differential before and after the distortion diffused that Y-direction is sheared, obtains twocouese testing result
A width twocouese speckle-shearing interferometry image is gathered after tested surface (5) distortion, carry out phase information extraction according to the twocouese speckle-shearing interferometry image after pair tested surface deformation of step 2, step 3 and step 4, and before and after being out of shape by formula (3) calculating acquisition tested surface, the phase differential of twocouese speckle-shearing interferometry image is respectively Δ
x(x, y) and Δ
y(x, y),
In formula (3),
for the phase information diffused that X-direction after tested surface distortion is sheared;
for the phase information diffused that Y-direction after tested surface distortion is sheared;
With described phase difference
x(x, y) and Δ
y(x, y) characterizes the defect of tested surface on X shear direction and Y shear direction after tested surface deformation respectively, as testing result.
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