CN217586244U - Imaging type detecting device for front and back of ultra-small curvature plano-convex lens or plano-concave lens - Google Patents

Imaging type detecting device for front and back of ultra-small curvature plano-convex lens or plano-concave lens Download PDF

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CN217586244U
CN217586244U CN202220881252.XU CN202220881252U CN217586244U CN 217586244 U CN217586244 U CN 217586244U CN 202220881252 U CN202220881252 U CN 202220881252U CN 217586244 U CN217586244 U CN 217586244U
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lens
focusing
mirror
plano
array camera
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王善忠
曲英丽
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Edinburgh Nanjing Opto Electronic Equipment Co ltd
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Edinburgh Nanjing Opto Electronic Equipment Co ltd
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Abstract

The utility model discloses a device for detecting the front and back surfaces of an imaging type ultra-small curvature plano-convex lens or plano-concave lens, which comprises an emergent component, a functional component and a receiving component; the functional component is a first focusing mirror or a spectroscope; the emergent assembly comprises a point light source and a collimating lens, and the receiving assembly comprises a second focusing lens and an array camera; the light source, the collimating lens, the functional component, the second focusing lens and the array camera are sequentially arranged along the propagation direction of the light path. The utility model discloses the detection device of the super little camber planoconvex lens of formation of image type or planoconcave lens positive and negative, simple structure, convenient to use, behind the optical system of this application particular structure, usable area array camera obtains the formation of image facula, can accurately judge through the size of two sides facula etc. that the curved surface upwards, still the plane upwards, and is simple, easy operation, efficient, the accuracy is 100%.

Description

Imaging type detecting device for front and back of ultra-small curvature plano-convex lens or plano-concave lens
Technical Field
The utility model relates to a detection apparatus for formation of image type super little camber planoconvex lens or planoconcave lens positive and negative belongs to planoconvex lens or planoconcave lens positive and negative and judges technical field.
Background
In production practice, a class of plano-convex lenses or plano-concave lenses with ultra-small curvature (i.e. ultra-large radius of curvature) appears, and because of the very small curvature, the front and back of the lens cannot be distinguished by naked eyes at all. Moreover, even if the lens is to be distinguished by measuring the rise, the upper and lower surfaces of the plano-convex lens or the plano-concave lens cannot be distinguished in engineering practice because the rise is even smaller than the error caused by the height measurement. For example, the difference between the center thickness and the edge thickness of the plano-convex lens product of a customer is only 3.5um, in the production line, the center thickness of the plano-convex lens is measured rapidly and then moved to the edge to measure the edge thickness, the flatness of the moving platform is required to be < +/-1um (which is a very high requirement and is almost the limit of the prior art), and if the measurement precision of the distance measuring tool (or height measuring tool) is considered, plus the measurement error caused by various vibrations in the production field, it is actually difficult to distinguish the front and back surfaces of the plano-convex lens by measuring the height difference between the center and the edge. However, it is necessary to distinguish the front and back sides of the plano-convex lens in the production, which becomes a troublesome problem. Through communication with customers and search before research and development, no reliable technical solution is found at present.
SUMMERY OF THE UTILITY MODEL
The utility model provides a detection apparatus for imaging type super little camber planoconvex lens or planoconcave lens positive and negative utilizes the convex surface for planar small camber (or protruding) difference, through formation of image, enlargies this kind of difference for this kind of difference can be surveyed and distinguish by naked eye or scientific instrument.
For solving the technical problem, the utility model discloses the technical scheme who adopts as follows:
the method for detecting the front and back surfaces of the imaging type super-small curvature plano-convex lens or plano-concave lens distinguishes the plane from the curved surface by an imaging method, wherein the imaging method comprises a transmission imaging method, a right-angle reflection imaging method and an acute-angle reflection imaging method.
For the convenience of detection, the acute angle reflection imaging method is a 45-degree reflection imaging method.
The transmission imaging method comprises the following steps: light rays emitted by the light source sequentially pass through the collimating lens and the focusing lens, pass through the lens to be detected, are amplified and imaged by the focusing lens, and are distinguished into a plane and a curved surface through the size of an imaging light spot, wherein the imaging light spot of the curved surface facing the light source is obviously smaller than that of the curved surface facing away from the light source (the plane faces the light source); the smaller the radius of curvature, the larger the difference in spot diameter and the easier to resolve.
The right-angle reflection imaging method comprises the following steps: light emitted by a light source passes through a collimating mirror, is folded by a spectroscope and vertically passes through a lens to be measured, is vertically reflected by a reflector and then passes through a sample to be measured and the spectroscope again, and finally passes through a focusing mirror to obtain a focused imaging light spot; the smaller the radius of curvature, the larger the difference in spot diameter and the easier to resolve.
For the convenience of identification, the right-angle reflection imaging method obtains an imaging light spot through a focusing mirror and an amplifying relay mirror.
The acute angle reflection imaging method comprises the following steps: light rays emitted by the light source sequentially pass through the collimating lens and the focusing lens, are reflected by the lens to be measured, are amplified by the focusing lens to be imaged, and are distinguished from a plane and a curved surface through the shape and/or size of an imaging light spot.
For convenience of identification, in the acute-angle reflection imaging method, a plane and a curved surface are distinguished by the size of an imaging light spot, and the imaging light spot with the curved surface facing downwards is obviously larger than the imaging light spot with the curved surface facing upwards. The smaller the radius of curvature, the larger the difference in spot diameter and the easier to resolve.
In the above methods, the area-array camera is used to collect the imaging light spots.
A detection device for the front and back of an imaging type ultra-small curvature plano-convex lens or plano-concave lens comprises an emergent component, a functional component and a receiving component;
the functional component is a first focusing mirror or a spectroscope; the emergent component comprises a point light source and a collimating mirror, and the receiving component comprises a second focusing mirror and an array camera;
the light source, the collimating lens, the functional component, the second focusing lens and the array camera are sequentially arranged along the propagation direction of the light path.
As one implementation scheme, when a transmission imaging method is utilized, the functional component is a first focusing lens, the point light source, the collimating lens, the first focusing lens, the second focusing lens and the area-array camera are sequentially arranged along the same direction, the optical axes of the collimating lens, the first focusing lens and the second focusing lens are overlapped, and the point light source and the area-array camera are arranged on the optical axis.
The first focusing lens is arranged to control the diameter of the light beam, so that the light beam can penetrate through a tested sample with a smaller caliber, at the moment, the light beam can be focused to obtain a focused light spot, but the diameter of the light spot is possibly smaller, and subsequent software judgment is not facilitated; in order to obtain a focusing light spot with a larger size, a second focusing lens is added, and actually, the second focusing lens plays a role of a relay lens, namely, the focusing light spot is magnified and imaged, so that the size of the imaging light spot behind the second focusing lens is magnified, and the image acquisition and processing are facilitated.
As another implementation scheme, when a vertical reflection imaging method is utilized, the functional component is a spectroscope, the point light source, the collimating mirror and the spectroscope are sequentially arranged from left to right, and the area array camera, the second focusing mirror, the spectroscope and the reflector are sequentially arranged from top to bottom.
The relative positional relationship shown in the drawings is shown in the upper, lower, left and right sides of the present application.
For the convenience of detection, the beam splitter is a cube beam splitter formed by splicing two 45-degree right-angle triangular prisms, the optical axis of the collimating mirror forms an included angle of 45 degrees with the splicing position of the beam splitter, the optical axis of the collimating mirror is perpendicular to the reflecting surface of the reflecting mirror, and the optical axis of the second focusing mirror forms an included angle of 45 degrees with the splicing position of the beam splitter.
A magnifying relay lens may be provided between the second focusing lens and the array camera as required.
As another implementation scheme, when an acute angle reflection imaging method is utilized, the functional component is a first focusing mirror, the optical axes of the collimating mirror and the first focusing mirror are overlapped, the included angle between the collimating mirror and the horizontal plane is alpha, and alpha is more than 0 degree and less than 90 degrees; the optical axis of the second focusing mirror is bilaterally symmetrical and intersected with the optical axis of the first focusing mirror; the point light source is arranged on the optical axis of the collimating mirror, and the area array camera is arranged on the optical axis of the second focusing mirror.
The second focusing mirror functions as a magnifying relay mirror.
Preferably, α is 45 °.
A method for detecting the front and back surfaces of an imaging type super-small curvature plano-convex lens or plano-concave lens is characterized in that the detection device for the front and back surfaces of the imaging type super-small curvature plano-convex lens or plano-concave lens is used for detecting, and when a transmission imaging method is used, the detection method comprises the following steps:
1) Placing a lens to be detected between a first focusing lens and a second focusing lens, wherein one surface of the lens to be detected faces a point light source, and the other surface of the lens to be detected faces an area array camera; light rays emitted by the point light source pass through the collimating lens and the first focusing lens, then pass through the lens to be measured, are magnified and imaged by the second focusing lens, and then are collected by the camera to form a first imaging light spot of the second focusing lens;
2) Reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) Comparing the size and/or shape of the imaging light spot I and the imaging light spot II, and when the imaging light spot I is large, one surface of the lens to be detected facing the point light source in the step 1) is a plane, and the other surface of the lens to be detected is a curved surface; when the imaging light spot is two-large, one surface of the lens to be detected, which faces the point light source, in the step 2) is a plane, and the other surface is a curved surface;
when the vertical reflection imaging method is used, the detection method comprises the following steps:
1) Placing a lens to be detected between the spectroscope and the reflector, wherein one surface of the lens to be detected faces the spectroscope, and the other surface of the lens to be detected faces the reflector; the light emitted by the point light source is collimated by the collimating lens, is downwards folded by the spectroscope, passes through the lens to be detected, reaches the reflecting mirror, passes through the sample to be detected and the spectroscope again after being reflected by the reflecting mirror, is focused by the focusing lens, and is collected by the camera to form a first imaging light spot of the second focusing lens;
2) Reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) Comparing the size and/or shape of the imaging light spot I and the imaging light spot II, and when the imaging light spot I is large, one surface of the lens to be detected facing the reflector in the step 1) is a curved surface, and the other surface of the lens to be detected is a plane; when the imaging light spot is two times large, one surface of the lens to be measured, which faces the point reflecting mirror, in the step 2) is a curved surface, and the other surface is a plane;
in the step 1) and the step 2), the light spots focused by the focusing lens are amplified by the amplifying relay lens, and then the amplified imaging light spots I and the amplified imaging light spots II are collected by the camera. This facilitates the acquisition and processing of the imaging spots.
When using the acute angle reflection imaging method, the detection method comprises the following steps:
1) Placing a lens to be detected at a position where optical axes of a first focusing lens and a second focusing lens are intersected, wherein one surface of the lens to be detected faces upwards, and the other surface of the lens to be detected faces downwards; light rays emitted by the point light source are reflected by the lens to be measured after passing through the collimating lens and the first focusing lens, are amplified and imaged by the second focusing lens, and then a camera is used for collecting a first imaging light spot of the second focusing lens;
2) Reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) And comparing the shapes and/or sizes of the imaging light spot I and the imaging light spot II to distinguish a plane from a curved surface.
In the step 3), the sizes of the imaging light spot I and the imaging light spot II are compared, and when the imaging light spot I is large, the downward surface of the lens to be detected in the step 1) is a curved surface, and the other surface of the lens to be detected is a plane; when the imaging light spot is two-large, the downward surface of the lens to be detected in the step 2) is a curved surface, and the other surface is a plane.
The technology not mentioned in the present invention refers to the prior art.
The utility model discloses the detection device of the super little camber planoconvex lens of formation of image type or planoconcave lens positive and negative, simple structure, convenient to use, behind the optical system of this application particular structure, usable area array camera obtains the formation of image facula, can accurately judge through the size of two sides facula etc. that the curved surface upwards, still the plane upwards, and is simple, easy operation, efficient, the accuracy is 100%.
Drawings
FIG. 1 is a schematic rise;
fig. 2 is a detection light path diagram (curved surface toward point light source) of the detection device for the front and back sides of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 1 of the present invention;
fig. 3 is a detection light path diagram (plane toward point light source) of the detection device for the front and back sides of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 1 of the present invention;
fig. 4 is a simulation result of the curvature radius R =900mm of the sample to be measured in embodiment 1 of the present invention (the left image is an imaging spot of a curved surface facing a point light source, and the right image is an imaging spot of a plane facing the point light source);
fig. 5 is a simulation result of curvature radius R =300mm of a measured sample in embodiment 1 of the present invention (the left image is an imaging light spot of a curved surface facing a point light source, and the right image is an imaging light spot of a plane facing the point light source);
fig. 6 is a detection light path diagram (curved surface up) of the detection device for the front and back surfaces of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 2 of the present invention;
fig. 7 is a detection light path diagram (curved surface downward) of the detection device for the front and back surfaces of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 2 of the present invention;
fig. 8 is a simulation result of the curvature radius R =900mm of the sample to be measured in embodiment 2 of the present invention (the left image is an imaging light spot with a curved surface facing upward, and the right image is an imaging light spot with a plane facing upward);
fig. 9 is a simulation result of the curvature radius R =300mm of the sample to be measured in embodiment 2 of the present invention (the left image is an imaging light spot with a curved surface facing upward, and the right image is an imaging light spot with a plane facing upward);
fig. 10 is a detection light path diagram (curved surface up) of the detection device for the front and back surfaces of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 3 of the present invention;
fig. 11 is a detection light path diagram (curved surface facing downward) of the detection device for the front and back surfaces of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 3 of the present invention;
fig. 12 is a simulation result of the curvature radius R =900mm of the sample to be measured in embodiment 3 of the present invention (the left image is an imaging light spot with a curved surface facing upward, and the right image is an imaging light spot with a plane facing upward);
fig. 13 is a simulation result of the curvature radius R =300mm of the sample to be measured in embodiment 3 of the present invention (the left image is an imaging light spot with a curved surface facing upward, and the right image is an imaging light spot with a plane facing upward);
in the figure, 1 is a point light source, 2 is a collimating mirror, 3 is a spectroscope, 4 is a reflecting mirror, 5 is a first focusing mirror, 6 is a second focusing mirror, 7 is an area-array camera, 8 is a sample to be measured, 9 is a symmetry axis, and 10 is a rise.
Detailed Description
For a better understanding of the present invention, the following examples are provided to further illustrate the present invention, but the present invention is not limited to the following examples.
Example 1
A detection device for the front and back of an imaging type ultra-small curvature plano-convex lens or plano-concave lens comprises an emergent component, a functional component and a receiving component; the functional component is a first focusing mirror or a spectroscope; the emergent assembly comprises a point light source and a collimating lens, and the receiving assembly comprises a second focusing lens and an array camera; the point light source, the collimating lens, the functional component, the second focusing lens and the area-array camera are sequentially arranged along the propagation direction of the light path.
As shown in fig. 2-3, by using the transmission imaging method, the functional components are a first focusing lens, a point light source, a collimating lens, a first focusing lens, a second focusing lens, and an area-array camera, which are sequentially arranged along the same direction, optical axes of the collimating lens, the first focusing lens, and the second focusing lens are overlapped, and the point light source and the area-array camera are all arranged on the optical axis.
The first focusing lens is arranged for controlling the diameter of the light beam, so that the light beam can penetrate through a tested sample with a smaller caliber, at the moment, the light beam can be focused to obtain a focused light spot, but the diameter of the light spot is possibly smaller, and subsequent software judgment is not facilitated; in order to obtain a focusing light spot with a larger size, a second focusing lens is added, and actually, the second focusing lens plays a role of a relay lens, namely, the focusing light spot is magnified and imaged, so that the size of the imaging light spot behind the second focusing lens is magnified, and the image acquisition and processing are facilitated.
The device is used for detection by a transmission imaging method, and comprises the following steps:
1) Placing a lens (plano-convex lens) to be detected between a first focusing lens and a second focusing lens, wherein one surface of the lens to be detected faces a point light source, and the other surface of the lens to be detected faces an area array camera; light rays emitted by the point light source pass through the collimating lens and the first focusing lens, then pass through the lens to be measured, are magnified and imaged by the second focusing lens, and then are collected by the camera to form a first imaging light spot of the second focusing lens;
2) Reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) Comparing the sizes of the imaging light spot I and the imaging light spot II, and when the imaging light spot I is large, taking the surface of the lens to be detected, which faces the point light source, in the step 1) as a plane; when the imaging light spot is two-large, the surface of the lens to be detected facing the point light source in the step 2) is a plane. As shown in fig. 4-5, the imaging spots with curvature radius R =900mm and 300mm respectively, the imaging spot of the curved surface facing the point light source is obviously smaller than that of the plane facing the point light source, and the smaller the curvature radius, the larger the difference of the spot diameters is, and the easier the resolution is.
Example 2
The difference from example 1 is: as shown in fig. 6-7, by using the vertical reflection imaging method, the functional component is a spectroscope, the point light source, the collimating mirror and the spectroscope are sequentially arranged from left to right, the area array camera, the second focusing mirror, the spectroscope and the reflector are sequentially arranged from top to bottom, the spectroscope is a cube-type beam splitter formed by splicing two 45-degree right-angled triangular prisms, the optical axis of the collimating mirror forms a 45-degree included angle with the splicing part of the spectroscope, the optical axis of the collimating mirror is perpendicular to the reflecting surface of the reflector, and the optical axis of the second focusing mirror forms a 45-degree included angle with the splicing part of the spectroscope.
The device is used for detecting by a vertical reflection imaging method, and comprises the following steps:
1) Placing a lens (plano-convex lens) to be measured between the spectroscope and the reflector, wherein one surface of the lens to be measured faces the spectroscope, and the other surface of the lens to be measured faces the reflector; the light emitted by the point light source is collimated by the collimating lens, is downwards folded by the spectroscope, passes through the lens to be detected, reaches the reflecting mirror, passes through the sample to be detected and the spectroscope again after being reflected by the reflecting mirror, is focused by the focusing mirror, and is collected by the camera to form a first imaging light spot of the second focusing mirror;
2) Reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) Comparing the sizes of the imaging light spot I and the imaging light spot II, and when the imaging light spot I is large, one surface of the lens to be detected facing the reflector in the step 1) is a curved surface, and the other surface of the lens to be detected is a plane; when the imaging light spot is two-large, one surface of the lens to be detected facing the point reflector in the step 2) is a curved surface, and the other surface is a plane; as shown in fig. 8-9, the imaging spots with curvature radius R =900mm and 300mm respectively have a significantly smaller imaging spot with the curved surface facing upwards than the imaging spot with the flat surface facing upwards, and the smaller the curvature radius, the larger the difference in spot diameter and the easier the resolution. An amplifying relay lens can be arranged between the area-array camera and the second focusing lens according to requirements.
Example 3
The difference from example 1 is: as shown in fig. 10-11, by using a 45-degree reflection imaging method, the functional component is a first focusing lens, and the optical axes of the collimating lens and the first focusing lens are overlapped and form an included angle of 45 degrees with the horizontal plane; the optical axis of the second focusing mirror is bilaterally symmetrical and intersected with the optical axis of the first focusing mirror; the point light source is arranged on the optical axis of the collimating mirror, and the area array camera is arranged on the optical axis of the second focusing mirror.
The device is used for detecting by a 45-degree reflection imaging method, and comprises the following steps:
1) Placing a lens to be detected (a plano-convex lens) at a position where optical axes of a first focusing lens and a second focusing lens are intersected, wherein one surface of the lens to be detected faces upwards, and the other surface of the lens to be detected faces downwards; light rays emitted by the point light source are reflected by the lens to be measured after passing through the collimating lens and the first focusing lens, are amplified and imaged by the second focusing lens, and then a camera is used for collecting a first imaging light spot of the second focusing lens;
2) Reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) Comparing the sizes of the imaging light spot I and the imaging light spot II, distinguishing a plane from a curved surface, and when the imaging light spot I is large, taking the downward surface of the lens to be detected in the step 1) as the curved surface and taking the upward surface of the lens to be detected as the plane; when the imaging light spot is two-large, the downward surface of the lens to be detected in the step 2) is a curved surface, and the upward surface is a plane; the smaller the radius of curvature, the larger the difference in spot diameter and the easier to resolve.

Claims (7)

1. The utility model provides a detection apparatus of imaging type super little curvature planoconvex lens or planoconcave lens positive and negative which characterized in that: comprises an emergent component, a functional component and a receiving component;
the functional component is a first focusing mirror (5) or a spectroscope (3); the emergent assembly comprises a point light source (1) and a collimating mirror (2), and the receiving assembly comprises a second focusing mirror (6) and an area-array camera (7);
the light source, the collimating lens (2), the functional component, the second focusing lens (6) and the area array camera (7) are sequentially arranged along the propagation direction of the light path.
2. The detection device of claim 1, wherein: when utilizing the transmission imaging method, the functional block is first focusing mirror (5), and pointolite (1), collimating mirror (2), first focusing mirror (5), second focusing mirror (6) and area array camera (7) set gradually along same direction, and the optical axis of collimating mirror (2), first focusing mirror (5) and second focusing mirror (6) overlaps, and pointolite (1) and area array camera (7) all establish on the optical axis.
3. A testing device according to claim 1 or 2, wherein: when a vertical reflection imaging method is utilized, the functional component is a spectroscope (3), the point light source (1), the collimating mirror (2) and the spectroscope (3) are sequentially arranged from left to right, and the area array camera (7), the second focusing mirror (6), the spectroscope (3) and the reflector (4) are sequentially arranged from top to bottom.
4. A testing device according to claim 3, wherein: the beam splitter (3) is a cube type beam splitter formed by splicing two 45-degree right-angle triangular prisms, the optical axis of the collimating mirror (2) and the splicing position of the beam splitter (3) form a 45-degree included angle, the optical axis of the collimating mirror (2) is perpendicular to the reflecting surface of the reflecting mirror (4), and the optical axis of the second focusing mirror (6) and the splicing position of the beam splitter (3) form a 45-degree included angle.
5. A testing device according to claim 3, wherein: an amplifying relay lens is arranged between the second focusing lens (6) and the area array camera (7).
6. A testing device according to claim 1 or 2, wherein: when an acute angle reflection imaging method is utilized, the functional component is a first focusing mirror (5), the optical axes of the collimating mirror (2) and the first focusing mirror (5) are overlapped and form an included angle alpha with the horizontal plane, and the angle alpha is more than 0 degree and less than 90 degrees; the optical axis of the second focusing mirror (6) and the optical axis of the first focusing mirror (5) are bilaterally symmetrical and are intersected; the point light source (1) is arranged on the optical axis of the collimating mirror (2), and the area array camera (7) is arranged on the optical axis of the second focusing mirror (6).
7. The detection device of claim 6, wherein: alpha is 45 deg..
CN202220881252.XU 2022-04-18 2022-04-18 Imaging type detecting device for front and back of ultra-small curvature plano-convex lens or plano-concave lens Active CN217586244U (en)

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