CN114858411A - Device and method for detecting front and back surfaces of imaging type ultra-small curvature plano-convex lens or plano-concave lens - Google Patents

Device and method for detecting front and back surfaces of imaging type ultra-small curvature plano-convex lens or plano-concave lens Download PDF

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Publication number
CN114858411A
CN114858411A CN202210401091.4A CN202210401091A CN114858411A CN 114858411 A CN114858411 A CN 114858411A CN 202210401091 A CN202210401091 A CN 202210401091A CN 114858411 A CN114858411 A CN 114858411A
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lens
imaging
focusing
light spot
mirror
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王善忠
曲英丽
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Edinburgh Nanjing Opto Electronic Equipment Co ltd
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Edinburgh Nanjing Opto Electronic Equipment Co ltd
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    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract

The invention discloses a device and a method for detecting the front and back surfaces of an imaging type ultra-small curvature planoconvex lens or a planoconcave lens. The method for detecting the front and back surfaces of the imaging type ultra-small curvature plano-convex lens or plano-concave lens is simple and easy to operate, can realize the distinction of a curved surface and a plane through a specific imaging mode, and has high efficiency and accuracy of 100 percent; the device for detecting the front and back surfaces of the imaging type ultra-small curvature plano-convex lens or plano-concave lens is simple in structure and convenient to use, and after passing through the optical system with the specific structure, an area array camera can be used for obtaining imaging light spots, and whether the curved surface faces upwards or the plane faces upwards can be accurately judged according to the size of the light spots on the two surfaces and the like.

Description

Device and method for detecting front and back surfaces of imaging type ultra-small curvature plano-convex lens or plano-concave lens
Technical Field
The invention relates to a device and a method for detecting the front and back surfaces of an imaging type ultra-small curvature plano-convex lens or plano-concave lens, belonging to the technical field of judgment of the front and back surfaces of the plano-convex lens or plano-concave lens.
Background
In production practice, a class of plano-convex lenses or plano-concave lenses with ultra-small curvature (i.e. ultra-large radius of curvature) appears, and because of the very small curvature, the front and back of the lens cannot be distinguished by naked eyes at all. Moreover, even if the lens is to be distinguished by measuring the rise, the upper and lower surfaces of the plano-convex lens or the plano-concave lens cannot be distinguished in engineering practice because the rise is even smaller than the error caused by the height measurement. For example, the difference between the center thickness and the edge thickness of the plano-convex lens product of a customer is only 3.5um, in the production line, the center thickness of the plano-convex lens is required to be measured rapidly, and then the plano-convex lens is moved to the edge to measure the edge thickness, the flatness of the moving platform is required to be < +/-1um (which is a very high requirement and almost a limit of the prior art), and if the measurement precision of the distance measuring tool (or height measuring tool) is considered, plus the error generated by various vibrations in the industrial production field, it is actually difficult to distinguish the front side and the back side of the plano-convex lens by measuring the height difference between the center and the edge. However, it is necessary to distinguish the front and back sides of the plano-convex lens in the production, which becomes a troublesome problem. Through communication with customers and search before research and development, no reliable technical solution is found at present.
Disclosure of Invention
The invention provides a device and a method for detecting the front and back surfaces of an imaging type ultra-small curvature plano-convex lens or plano-concave lens, which utilize the tiny curvature (or convex) difference of the convex surface relative to the plane to amplify the difference through imaging, so that the difference can be detected and distinguished by naked eyes or scientific instruments.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
the method for detecting the front and back surfaces of the imaging type ultra-small curvature planoconvex lens or planoconcave lens distinguishes a plane from a curved surface by an imaging method, wherein the imaging method comprises a transmission imaging method, a right-angle reflection imaging method and an acute-angle reflection imaging method.
For the convenience of detection, the acute angle reflection imaging method is a 45-degree reflection imaging method.
The transmission imaging method comprises the following steps: light rays emitted by the light source sequentially pass through the collimating lens and the focusing lens, pass through the lens to be detected, are amplified and imaged by the focusing lens, and are distinguished into a plane and a curved surface through the size of an imaging light spot, wherein the imaging light spot of the curved surface facing the light source is obviously smaller than the imaging light spot of the curved surface facing away from the light source (the plane faces the light source); the smaller the radius of curvature, the larger the difference in spot diameter and the easier to resolve.
The right-angle reflection imaging method comprises the following steps: light emitted by a light source passes through a collimating mirror, is folded by a spectroscope and vertically passes through a lens to be measured, is vertically reflected by a reflector and then passes through a sample to be measured and the spectroscope again, and finally passes through a focusing mirror to obtain a focused imaging light spot; the smaller the radius of curvature, the larger the difference in spot diameter and the easier to resolve.
For convenience of identification, the right-angle reflection imaging method obtains an imaging light spot through a focusing mirror and a magnifying relay mirror.
The acute angle reflection imaging method comprises the following steps: light rays emitted by the light source sequentially pass through the collimating lens and the focusing lens, are reflected by the lens to be measured, are amplified by the focusing lens to be imaged, and are distinguished from a plane and a curved surface through the shape and/or size of an imaging light spot.
For convenience of identification, in the acute-angle reflection imaging method, a plane and a curved surface are distinguished by the size of an imaging light spot, and the imaging light spot with the curved surface facing downwards is obviously larger than the imaging light spot with the curved surface facing upwards. The smaller the radius of curvature, the larger the difference in spot diameter and the easier to resolve.
In the above methods, the area-array camera is used to collect the imaging light spots.
A detection device for the front and back of an imaging type ultra-small curvature plano-convex lens or plano-concave lens comprises an emergent component, a functional component and a receiving component;
the functional component is a first focusing mirror or a spectroscope; the emergent assembly comprises a point light source and a collimating lens, and the receiving assembly comprises a second focusing lens and an array camera;
the light source, the collimating lens, the functional component, the second focusing lens and the array camera are sequentially arranged along the propagation direction of the light path.
As one implementation scheme, when a transmission imaging method is utilized, the functional component is a first focusing lens, the point light source, the collimating lens, the first focusing lens, the second focusing lens and the area-array camera are sequentially arranged along the same direction, the optical axes of the collimating lens, the first focusing lens and the second focusing lens are overlapped, and the point light source and the area-array camera are arranged on the optical axis.
The first focusing lens is arranged to control the diameter of the light beam, so that the light beam can penetrate through a tested sample with a smaller caliber, at the moment, the light beam can be focused to obtain a focused light spot, but the diameter of the light spot is possibly smaller, and subsequent software judgment is not facilitated; in order to obtain a focusing light spot with a larger size, a second focusing lens is added, and actually, the second focusing lens plays a role of a relay lens, namely, the focusing light spot is magnified and imaged, so that the size of the imaging light spot behind the second focusing lens is magnified, and the image acquisition and processing are facilitated.
As another implementation scheme, when a vertical reflection imaging method is utilized, the functional component is a spectroscope, the point light source, the collimating mirror and the spectroscope are sequentially arranged from left to right, and the area-array camera, the second focusing mirror, the spectroscope and the reflector are sequentially arranged from top to bottom.
The relative positional relationship shown in the drawings is shown in the upper, lower, left and right sides of the present application.
For the convenience of detection, the beam splitter is a cube beam splitter formed by splicing two 45-degree right-angle triangular prisms, the optical axis of the collimating mirror forms an included angle of 45 degrees with the splicing position of the beam splitter, the optical axis of the collimating mirror is perpendicular to the reflecting surface of the reflecting mirror, and the optical axis of the second focusing mirror forms an included angle of 45 degrees with the splicing position of the beam splitter.
A magnifying relay lens may be provided between the second focusing lens and the array camera as required.
As another implementation scheme, when an acute-angle reflection imaging method is utilized, the functional component is a first focusing lens, the optical axes of the collimating lens and the first focusing lens are overlapped and form an included angle alpha with the horizontal plane, and the angle alpha is more than 0 degree and less than 90 degrees; the optical axis of the second focusing mirror is bilaterally symmetrical and intersected with the optical axis of the first focusing mirror; the point light source is arranged on the optical axis of the collimating mirror, and the area array camera is arranged on the optical axis of the second focusing mirror.
The second focusing mirror functions as a magnifying relay mirror.
Preferably, α is 45 °.
A method for detecting the front and back surfaces of an imaging type ultra-small curvature plano-convex lens or plano-concave lens is characterized in that the detection device for the front and back surfaces of the imaging type ultra-small curvature plano-convex lens or plano-concave lens is used for detecting, and when a transmission imaging method is used, the detection method comprises the following steps:
1) placing a lens to be detected between a first focusing lens and a second focusing lens, wherein one surface of the lens to be detected faces a point light source, and the other surface of the lens to be detected faces an area array camera; light rays emitted by the point light source pass through the collimating lens and the first focusing lens, then pass through the lens to be measured, are magnified and imaged by the second focusing lens, and then are collected by the camera to form a first imaging light spot of the second focusing lens;
2) reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) comparing the size and/or shape of the imaging light spot I and the imaging light spot II, and when the imaging light spot I is large, one surface of the lens to be detected facing the point light source in the step 1) is a plane, and the other surface of the lens to be detected is a curved surface; when the imaging light spot is two-large, one surface of the lens to be detected, which faces the point light source, in the step 2) is a plane, and the other surface is a curved surface;
when the vertical reflection imaging method is used, the detection method includes the steps of:
1) placing a lens to be detected between the spectroscope and the reflector, wherein one surface of the lens to be detected faces the spectroscope, and the other surface of the lens to be detected faces the reflector; the light emitted by the point light source is collimated by the collimating lens, is downwards folded by the spectroscope, passes through the lens to be detected, reaches the reflecting mirror, passes through the sample to be detected and the spectroscope again after being reflected by the reflecting mirror, is focused by the focusing lens, and is collected by the camera to form a first imaging light spot of the second focusing lens;
2) reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) comparing the size and/or shape of the imaging light spot I and the imaging light spot II, wherein when the imaging light spot I is large, one surface of the lens to be detected, which faces the reflector, in the step 1) is a curved surface, and the other surface of the lens to be detected is a plane; when the imaging light spot is two-large, one surface of the lens to be detected facing the point reflector in the step 2) is a curved surface, and the other surface is a plane;
in the step 1) and the step 2), the light spots focused by the focusing lens are amplified by the amplifying relay lens, and then the amplified imaging light spots I and the amplified imaging light spots II are collected by the camera. This facilitates the acquisition and processing of the imaging spots.
When using the acute angle reflection imaging method, the detection method comprises the following steps:
1) placing a lens to be detected at a position where optical axes of a first focusing lens and a second focusing lens are intersected, wherein one surface of the lens to be detected faces upwards, and the other surface of the lens to be detected faces downwards; the light emitted by the point light source is reflected by the lens to be measured after passing through the collimating lens and the first focusing lens, is amplified and imaged by the second focusing lens, and then an imaging light spot I of the second focusing lens is collected by the camera;
2) reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) and comparing the shapes and/or sizes of the imaging light spot I and the imaging light spot II to distinguish a plane from a curved surface.
In the step 3), the sizes of the imaging light spot I and the imaging light spot II are compared, and when the imaging light spot I is large, the downward surface of the lens to be detected in the step 1) is a curved surface, and the other surface of the lens to be detected is a plane; when the imaging light spot is two-large, the downward surface of the lens to be detected in the step 2) is a curved surface, and the other surface is a plane.
The prior art is referred to in the art for techniques not mentioned in the present invention.
The method for detecting the front and back surfaces of the imaging type ultra-small curvature plano-convex lens or plano-concave lens is simple and easy to operate, can realize the distinction of a curved surface and a plane through a specific imaging mode, and has high efficiency and accuracy of 100 percent; the device for detecting the front and back surfaces of the imaging type ultra-small curvature plano-convex lens or plano-concave lens is simple in structure and convenient to use, and after passing through the optical system with the specific structure, an area array camera can be used for obtaining imaging light spots, and whether the curved surface faces upwards or the plane faces upwards can be accurately judged according to the size of the light spots on the two surfaces and the like.
Drawings
FIG. 1 is a schematic rise;
FIG. 2 is a diagram of the detection optical path of the detection apparatus for detecting the front and back surfaces of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 1 of the present invention (the curved surface faces the point light source);
FIG. 3 is a diagram of the detection optical path of the detection apparatus for detecting the front and back surfaces of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 1 of the present invention (the plane faces the point light source);
fig. 4 shows the simulation result of the curvature radius R of the measured sample being 900mm in example 1 of the present invention (the left image is the imaging spot of the curved surface facing the point light source, and the right image is the imaging spot of the plane facing the point light source);
fig. 5 shows the simulation result of the curvature radius R of the measured sample being 300mm in example 1 of the present invention (the left image is the imaging spot of the curved surface facing the point light source, and the right image is the imaging spot of the plane facing the point light source);
FIG. 6 is a diagram of the detection optical path (curved surface facing upward) of the detection apparatus for the front and back surfaces of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 2 of the present invention;
FIG. 7 is a diagram of the detection optical path (curved surface facing downward) of the detection apparatus for the front and back surfaces of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 2 of the present invention;
fig. 8 shows the simulation result of the curvature radius R of the measured sample being 900mm in example 2 of the present invention (the left image is an imaging spot with a curved surface facing upward, and the right image is an imaging spot with a plane facing upward);
fig. 9 shows the simulation result of the radius of curvature R of the measured sample being 300mm in example 2 of the present invention (the left image is an imaging spot with a curved surface facing upward, and the right image is an imaging spot with a plane facing upward);
FIG. 10 is a diagram of the detection optical path (curved surface facing upward) of the detection apparatus for detecting the front and back surfaces of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 3 of the present invention;
FIG. 11 is a diagram of the detection optical path (curved surface facing downward) of the detection apparatus for detecting the front and back surfaces of the imaging-type ultra-small curvature plano-convex lens or plano-concave lens in embodiment 3 of the present invention;
fig. 12 shows the simulation result of the curvature radius R of the measured sample being 900mm in example 3 of the present invention (the left image is an imaging spot with a curved surface facing upward, and the right image is an imaging spot with a plane facing upward);
fig. 13 is a simulation result of the radius of curvature R of the measured sample being 300mm in example 3 of the present invention (the left image is an imaging spot with a curved surface facing upward, and the right image is an imaging spot with a plane facing upward);
in the figure, 1 is a point light source, 2 is a collimating mirror, 3 is a spectroscope, 4 is a reflector, 5 is a first focusing mirror, 6 is a second focusing mirror, 7 is an area-array camera, 8 is a sample to be measured, 9 is a symmetry axis, and 10 is a rise.
Detailed Description
In order to better understand the present invention, the following examples are further provided to illustrate the present invention, but the present invention is not limited to the following examples.
Example 1
A detection device for the front and back of an imaging type ultra-small curvature plano-convex lens or plano-concave lens comprises an emergent component, a functional component and a receiving component; the functional component is a first focusing mirror or a spectroscope; the emergent assembly comprises a point light source and a collimating lens, and the receiving assembly comprises a second focusing lens and an array camera; the point light source, the collimating lens, the functional component, the second focusing lens and the area-array camera are sequentially arranged along the propagation direction of the light path.
As shown in fig. 2-3, by using the transmission imaging method, the functional components are a first focusing lens, a point light source, a collimating lens, a first focusing lens, a second focusing lens, and an area-array camera, which are sequentially arranged along the same direction, optical axes of the collimating lens, the first focusing lens, and the second focusing lens are overlapped, and the point light source and the area-array camera are all arranged on the optical axis.
The first focusing lens is arranged to control the diameter of the light beam, so that the light beam can penetrate through a tested sample with a smaller caliber, at the moment, the light beam can be focused to obtain a focused light spot, but the diameter of the light spot is possibly smaller, and subsequent software judgment is not facilitated; in order to obtain a focusing light spot with a larger size, a second focusing lens is added, and actually, the second focusing lens plays a role of a relay lens, namely, the focusing light spot is magnified and imaged, so that the size of the imaging light spot behind the second focusing lens is magnified, and the image acquisition and processing are facilitated.
The device is used for detection by a transmission imaging method, and comprises the following steps:
1) placing a lens to be detected (plano-convex lens) between a first focusing lens and a second focusing lens, wherein one surface of the lens to be detected faces a point light source, and the other surface of the lens to be detected faces an area array camera; light rays emitted by the point light source pass through the collimating lens and the first focusing lens, then pass through the lens to be measured, are magnified and imaged by the second focusing lens, and then are collected by the camera to form a first imaging light spot of the second focusing lens;
2) reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) comparing the sizes of the imaging light spot I and the imaging light spot II, and when the imaging light spot I is large, the surface of the lens to be detected, which faces the point light source, in the step 1) is a plane; when the imaging light spot is two-large, the surface of the lens to be detected facing the point light source in the step 2) is a plane. As shown in fig. 4-5, the imaging spots with curvature radius R being 900mm and 300mm respectively have a significantly smaller imaging spot from the curved surface toward the point light source than from the flat surface toward the point light source, and the smaller the curvature radius, the larger the difference in spot diameter and the easier to distinguish.
Example 2
The difference from example 1 is: as shown in fig. 6-7, by using the vertical reflection imaging method, the functional component is a spectroscope, the point light source, the collimating mirror and the spectroscope are sequentially arranged from left to right, the area array camera, the second focusing mirror, the spectroscope and the reflector are sequentially arranged from top to bottom, the spectroscope is a cube-type beam splitter formed by splicing two 45-degree right-angled triangular prisms, the optical axis of the collimating mirror forms a 45-degree included angle with the splicing part of the spectroscope, the optical axis of the collimating mirror is perpendicular to the reflecting surface of the reflector, and the optical axis of the second focusing mirror forms a 45-degree included angle with the splicing part of the spectroscope.
The device is used for detecting by a vertical reflection imaging method, and comprises the following steps:
1) placing a lens to be detected (plano-convex lens) between the spectroscope and the reflector, wherein one surface of the lens to be detected faces the spectroscope, and the other surface of the lens to be detected faces the reflector; the light emitted by the point light source is collimated by the collimating lens, is downwards folded by the spectroscope, passes through the lens to be detected, reaches the reflecting mirror, passes through the sample to be detected and the spectroscope again after being reflected by the reflecting mirror, is focused by the focusing mirror, and is collected by the camera to form a first imaging light spot of the second focusing mirror;
2) reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) comparing the sizes of the imaging light spot I and the imaging light spot II, and when the imaging light spot I is large, one surface of the lens to be detected facing the reflector in the step 1) is a curved surface, and the other surface of the lens to be detected is a plane; when the imaging light spot is two-large, one surface of the lens to be detected facing the point reflector in the step 2) is a curved surface, and the other surface is a plane; as shown in fig. 8-9, the imaging spots with curvature radius R being 900mm and 300mm respectively have the imaging spot with the curved surface facing upwards being significantly smaller than the imaging spot with the flat surface facing upwards, and the smaller the curvature radius, the larger the difference of the spot diameters and the easier the resolution. An amplifying relay lens can be arranged between the area-array camera and the second focusing lens according to requirements.
Example 3
The difference from example 1 is: as shown in fig. 10-11, by using a 45-degree reflection imaging method, the functional component is a first focusing lens, and the optical axes of the collimating lens and the first focusing lens are overlapped and form an included angle of 45 degrees with the horizontal plane; the optical axis of the second focusing mirror is bilaterally symmetrical and intersected with the optical axis of the first focusing mirror; the point light source is arranged on the optical axis of the collimating mirror, and the area array camera is arranged on the optical axis of the second focusing mirror.
The device is used for detecting by a 45-degree reflection imaging method, and comprises the following steps:
1) placing a lens to be detected (a plano-convex lens) at a position where optical axes of a first focusing lens and a second focusing lens are intersected, wherein one surface of the lens to be detected faces upwards, and the other surface of the lens to be detected faces downwards; the light emitted by the point light source is reflected by the lens to be measured after passing through the collimating lens and the first focusing lens, is amplified and imaged by the second focusing lens, and then an imaging light spot I of the second focusing lens is collected by the camera;
2) reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens by using a camera according to the method in the step 1);
3) comparing the sizes of the imaging light spot I and the imaging light spot II, distinguishing a plane from a curved surface, and when the imaging light spot I is large, taking the downward surface of the lens to be detected in the step 1) as the curved surface and taking the upward surface of the lens to be detected as the plane; when the imaging light spot is two-large, the downward surface of the lens to be detected in the step 2) is a curved surface, and the upward surface of the lens to be detected is a plane; the smaller the radius of curvature, the larger the difference in spot diameter and the easier to resolve.

Claims (10)

1. A method for detecting the front and back surfaces of an imaging type ultra-small curvature plano-convex lens or plano-concave lens is characterized in that: the distinction between planar and curved surfaces is achieved by imaging methods, including transmission imaging, right angle reflection imaging and acute angle reflection imaging.
2. The detection method according to claim 1, characterized in that: the acute angle reflective imaging method is a 45 degree reflective imaging method.
3. The detection method according to claim 1 or 2, characterized in that: the transmission imaging method comprises the following steps: light rays emitted by the light source sequentially pass through the collimating lens and the focusing lens, pass through the lens to be detected, are amplified and imaged by the focusing lens, and are distinguished into a plane and a curved surface through the size of an imaging light spot, wherein the imaging light spot of the curved surface facing the light source is obviously smaller than the imaging light spot of the curved surface facing away from the light source;
the right-angle reflection imaging method comprises the following steps: light emitted by a light source passes through a collimating mirror, is folded by a spectroscope and vertically passes through a lens to be measured, is vertically reflected by a reflector and then passes through a sample to be measured and the spectroscope again, and finally passes through a focusing mirror to obtain a focused imaging light spot;
the acute angle reflection imaging method comprises the following steps: light rays emitted by the light source sequentially pass through the collimating lens and the focusing lens, are reflected by the lens to be measured, are amplified by the focusing lens to be imaged, and are distinguished from a plane and a curved surface through the shape and/or size of an imaging light spot.
4. The detection method according to claim 3, characterized in that: collecting imaging light spots by using an area-array camera; the right-angle reflection imaging method comprises the steps of obtaining imaging light spots through a focusing mirror and a magnifying relay lens; the acute angle reflection imaging method is characterized in that a plane and a curved surface are distinguished through the size of an imaging light spot, and the imaging light spot with the curved surface facing downwards is obviously larger than the imaging light spot with the curved surface facing upwards.
5. The utility model provides a detection apparatus of imaging type super little curvature planoconvex lens or planoconcave lens positive and negative which characterized in that: comprises an emergent component, a functional component and a receiving component;
the functional component is a first focusing mirror (5) or a spectroscope (3); the emergent assembly comprises a point light source (1) and a collimating lens (2), and the receiving assembly comprises a second focusing lens (6) and an array camera (7);
the light source, the collimating lens (2), the functional component, the second focusing lens (6) and the area array camera (7) are arranged in sequence along the propagation direction of the light path.
6. The sensing apparatus of claim 5, wherein: when the transmission imaging method is utilized, the functional components are a first focusing mirror (5), a point light source (1), a collimating mirror (2), the first focusing mirror (5), a second focusing mirror (6) and an area array camera (7) are sequentially arranged along the same direction, the optical axes of the collimating mirror (2), the first focusing mirror (5) and the second focusing mirror (6) are overlapped, and the point light source (1) and the area array camera (7) are arranged on the optical axis.
7. The detection device according to claim 5 or 6, wherein: when a vertical reflection imaging method is utilized, the functional component is a spectroscope (3), the point light source (1), the collimating mirror (2) and the spectroscope (3) are sequentially arranged from left to right, and the area array camera (7), the second focusing mirror (6), the spectroscope (3) and the reflector (4) are sequentially arranged from top to bottom.
8. The detection device of claim 7, wherein: the beam splitter (3) is a cube beam splitter formed by splicing two 45-degree right-angle triangular prisms, the optical axis of the collimating mirror (2) forms a 45-degree included angle with the splicing position of the beam splitter (3), the optical axis of the collimating mirror (2) is perpendicular to the reflecting surface of the reflecting mirror (4), and the optical axis of the second focusing mirror (6) forms a 45-degree included angle with the splicing position of the beam splitter (3); an amplifying relay lens is arranged between the second focusing lens (6) and the area-array camera (7).
9. The detection device according to claim 5 or 6, wherein: when an acute angle reflection imaging method is utilized, the functional component is a first focusing mirror (5), the optical axes of the collimating mirror (2) and the first focusing mirror (5) are overlapped and form an included angle alpha with the horizontal plane, and the angle alpha is more than 0 degree and less than 90 degrees; the optical axis of the second focusing mirror (6) and the optical axis of the first focusing mirror (5) are bilaterally symmetrical and are intersected; the point light source (1) is arranged on the optical axis of the collimating mirror (2), and the area array camera (7) is arranged on the optical axis of the second focusing mirror (6).
10. A method for detecting the front and back surfaces of an imaging-type ultra-small curvature plano-convex lens or plano-concave lens, using claims 5-8, characterized in that: when the transmission imaging method is used, the detection method comprises the following steps:
1) placing a lens to be detected between a first focusing lens (5) and a second focusing lens (6), wherein one surface of the lens to be detected faces a point light source (1), and the other surface of the lens to be detected faces an area-array camera (7); light rays emitted by the point light source (1) pass through the collimating lens (2) and the first focusing lens (5), then pass through the lens to be detected, are amplified by the second focusing lens (6) for imaging, and then are collected by a camera to form a first imaging light spot of the second focusing lens (6);
2) reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens (6) by using a camera according to the method in the step 1);
3) comparing the sizes of the imaging light spot I and the imaging light spot II, and when the imaging light spot I is large, one surface of the lens to be detected, which faces the point light source (1), in the step 1) is a plane, and the other surface of the lens to be detected is a curved surface; when the imaging light spot is two times large, one surface of the lens to be detected, which faces the point light source (1), in the step 2) is a plane, and the other surface of the lens to be detected is a curved surface;
when the vertical reflection imaging method is used, the detection method comprises the following steps:
1) placing a lens to be detected between the spectroscope (3) and the reflector (4), wherein one surface of the lens to be detected faces the spectroscope (3) and the other surface of the lens to be detected faces the reflector (4); after being collimated by a collimating mirror (2), light rays emitted by a point light source (1) are downwards folded by a spectroscope (3), pass through a lens to be measured and reach a reflector (4), are reflected by the reflector (4), pass through a sample to be measured (8) and the spectroscope (3) again, are focused by a focusing mirror, and are collected by a camera to form a first imaging light spot of a second focusing mirror (6);
2) reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens (6) by using a camera according to the method in the step 1);
3) comparing the sizes of the imaging light spot I and the imaging light spot II, and when the imaging light spot I is large, one surface of the lens to be detected, which faces the reflector (4), in the step 1) is a curved surface, and the other surface of the lens to be detected is a plane; when the imaging light spot is two-large, one surface of the lens to be measured, which faces the point reflector (4), in the step 2) is a curved surface, and the other surface is a plane;
by using an acute angle reflection imaging method, the detection method comprises the following steps:
1) placing a lens to be measured at a position where optical axes of a first focusing lens (5) and a second focusing lens (6) are intersected, wherein one surface of the lens to be measured faces upwards, and the other surface of the lens to be measured faces downwards; light rays emitted by the point light source (1) pass through the collimating lens (2) and the first focusing lens (5), are reflected by the lens to be measured, are amplified by the second focusing lens (6) to form an image, and then are used for collecting a first imaging light spot of the second focusing lens (6) by using a camera;
2) reversing two surfaces of the lens to be measured, and collecting a second imaging light spot of the second focusing lens (6) by using a camera according to the method in the step 1);
3) and comparing the shapes and/or sizes of the imaging light spot I and the imaging light spot II to distinguish a plane from a curved surface.
CN202210401091.4A 2022-04-18 2022-04-18 Device and method for detecting front and back surfaces of imaging type ultra-small curvature plano-convex lens or plano-concave lens Pending CN114858411A (en)

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