CN111323371A - Optical detection system and optical detection method - Google Patents
Optical detection system and optical detection method Download PDFInfo
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- CN111323371A CN111323371A CN202010278808.1A CN202010278808A CN111323371A CN 111323371 A CN111323371 A CN 111323371A CN 202010278808 A CN202010278808 A CN 202010278808A CN 111323371 A CN111323371 A CN 111323371A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
Abstract
The invention provides an optical detection system and an optical detection method.A light source module is used for emitting probe light to the surface of a sample to be detected, and the probe light forms signal light after passing through the surface of the sample to be detected; the detection channel is used for collecting the signal light and acquiring the information of the surface characteristics of the sample to be detected according to the signal light; the detection light at least comprises first detection light and second detection light, and the first detection light and the second detection light are respectively incident to the surface of the sample to be detected from two sides of the signal light emergent surface. Because the detecting light includes first detecting light and second detecting light at least, and first detecting light and second detecting light are incident to the sample surface that awaits measuring respectively from the both sides of signal light emergent face, consequently, can improve the light luminance of the sample surface detection area that awaits measuring to can improve optical detection's precision.
Description
Technical Field
The present invention relates to the field of optical detection technology, and more particularly, to an optical detection system and an optical detection method.
Background
If the wafer is used as a substrate of a chip, the chip fails due to a defect, so that the yield of the chip is reduced, and the manufacturing cost is increased. A common approach is to perform wafer surface defect detection before or during chip fabrication.
The wafer surface defect detection means detecting whether the wafer surface has defects such as grooves, particles, scratches and the like, and determining the positions of the defects. Optical inspection has the advantages of high inspection speed, no pollution, and the like, and therefore, is the most common wafer surface defect inspection means at present. However, the existing optical detection device has low detection accuracy.
Disclosure of Invention
In view of the above, the present invention provides an optical detection system and an optical detection method to improve the detection accuracy.
In order to achieve the purpose, the invention provides the following technical scheme:
an optical inspection system comprising:
the light source module is used for emitting probe light to the surface of a sample to be detected, and the probe light forms signal light after passing through the surface of the sample to be detected;
the detection channel is used for collecting the signal light and acquiring the information of the surface characteristics of the sample to be detected according to the signal light;
the detection light at least comprises first detection light and second detection light, and the first detection light and the second detection light are respectively incident to the surface of the sample to be detected from two sides of the signal light emergent surface.
Alternatively, the incident directions of the first detection light and the second detection light are symmetrical with respect to the exit surface of the signal light.
Optionally, the number of the detection channels is multiple, the emission directions of the signal lights collected by the multiple detection channels are located on the same plane, and included angles between the emission directions of the signal lights collected by different detection channels and the surface normal of the sample to be detected are different.
Optionally, the plurality of detection channels include five detection channels, and the ranges of angles between the exit direction of the signal light collected by the five detection channels and the surface normal of the sample to be detected are 45 ° to 75 °, 15 ° to 45 °, -15 ° to 15 °, -45 ° to-15 °, -75 ° to-45 °, respectively.
Optionally, an incident surface of the first detection light coincides with an incident surface of the second detection light, and the incident surface of the first detection light is perpendicular to the signal light exit surface.
Optionally, the first probe light forms a first linear light spot on the surface of the sample to be detected, the second probe light forms a second linear light spot on the surface of the sample to be detected, and the first linear light spot and the second linear light spot have the same extending direction and are at least partially overlapped.
Optionally, the number of the detection channels is multiple, the exit surfaces of the signal lights collected by the multiple detection channels coincide, and the exit surface of the signal light collected by the detection channel is perpendicular to the extending direction of the first linear light spot.
Optionally, the detection channel comprises a light collection assembly and a light detection assembly; the light collection component is used for collecting the signal light and transmitting the signal light to the light detection component; the optical detection component is used for receiving the signal light and obtaining the information of the surface characteristics of the sample to be detected according to the signal light;
the optical axis of the detection channel is a straight line and is parallel to the emitting direction of the signal light.
Optionally, the light source module comprises an emission light source and an optical element group positioned on the emission light source optical path;
the emission light source is used for emitting detection light;
the optical element group comprises a first optical element, and the first optical element is used for carrying out first optical processing on detection light incident to the first optical element to form first detection light and second detection light;
the first optical processing includes splitting the probe light incident to the first optical element to form first probe light and second probe light; alternatively, the first optical element is configured to be adjustable in position or reflecting surface azimuth, and the first optical processing includes causing the probe light incident to the first optical element to exit at a predetermined angle by adjusting the position or azimuth of the first optical element, forming the first probe light and the second probe light.
Optionally, the first optical element is a light splitting element, and the system further includes a first shutter for passing or blocking the first detection light; and a second shutter for passing or blocking the second detection light.
Optionally, the detection light further includes a third detection light, and an included angle between the third detection light and a normal of the surface of the sample to be detected is zero degree or an acute angle; the light source module comprises an emitting light source and an optical element group positioned on a light path of the emitting light source, wherein the optical element group comprises a second optical element and a third optical element;
the emission light source is used for emitting original detection light;
the third optical element is configured to perform a third optical processing on the original detection light to form a third detection light and an initial detection light, and the second optical element is configured to perform a second optical processing on the initial detection light to form the first detection light and the second detection light;
the third optical processing includes splitting the original probe light incident to a third optical element to form the third probe light and the initial probe light; or, the third optical element is configured to be adjustable in position or azimuth of the reflecting surface, and the third optical processing includes forming the third detection light and the initial detection light by causing the original detection light incident to the third optical element to exit at a predetermined angle by adjusting the position or azimuth of the third optical element;
the second optical processing includes splitting the initial probe light incident on a second optical element to form the first probe light and the second probe light; or, the second optical element is configured to be adjustable in position or reflecting surface azimuth, and the second optical processing includes causing the initial probe light incident to the second optical element to exit at a predetermined angle by adjusting the position or azimuth of the second optical element, forming the first probe light and the second probe light;
or, the second optical element is configured to perform a second optical processing on the original probe light to form a first probe light and an initial probe light; the third optical element is configured to perform a third optical processing on the initial detection light to form second detection light and third detection light;
the second optical processing includes splitting original probe light incident to a second optical element to form the first probe light and the initial probe light; or, the second optical element is configured to be adjustable in position or reflecting surface azimuth, and the second optical processing includes causing the original probe light incident to the second optical element to exit at a predetermined angle by adjusting the position or azimuth of the first optical element, forming the first probe light and the initial probe light;
the third optical processing includes splitting the initial probe light incident on a third optical element to form the second probe light and the third probe light; alternatively, the third optical element is configured to be adjustable in position or reflective surface azimuth, and the third optical processing includes causing the initial probe light incident on the third optical element to exit at a predetermined angle by adjusting the position or azimuth of the third optical element to form the second probe light and the third probe light.
Optionally, the second optical element is a light splitting element; the third optical element is a light splitting element; the system further comprises: a first shutter for passing or blocking the first detection light; a second shutter for passing or blocking the second detection light; and a third shutter for passing or blocking the third detection light.
Optionally, an included angle between the first probe light and the surface normal of the sample to be detected ranges from 10 ° to 50 °; the range of the included angle between the second detection light and the surface normal of the sample to be detected is 50-90 degrees.
Optionally, the signal light includes a first signal light and a second signal light, the first probe light forms a first signal light after passing through a sample to be detected, and the second probe light forms a second signal light after passing through the sample to be detected;
the detection channel includes a first detection channel and a second detection channel, the first detection channel is used for receiving the first signal light, and the second detection channel is used for receiving the second signal light.
An optical inspection method comprising:
emitting detection light to the surface of a sample to be detected, wherein the detection light at least comprises first detection light and second detection light, the first detection light and the second detection light are respectively emitted to the surface of the sample to be detected from two sides of the light emitting surface of the signal light, and the detection light forms signal light after passing through the surface of the sample to be detected;
and collecting the signal light, and acquiring the information of the surface characteristics of the sample to be detected according to the signal light.
Optionally, the signal light includes first signal light and second signal light;
the step of emitting the probe light to the surface of the sample to be measured and collecting the signal light includes: carrying out first scanning treatment on the surface of a sample to be detected through first detection light to obtain first information of the surface characteristics of the sample to be detected; performing second scanning processing on the surface of the sample to be detected through second detection light to obtain second information of the surface characteristics of the sample to be detected; acquiring the surface characteristic information of the sample to be detected according to the first information and the second information; the step of the first scanning process includes: emitting first probe light to the surface of the sample to be detected, wherein the first probe light forms first signal light after passing through the sample to be detected; collecting the first signal light, and acquiring first information of the surface characteristics of the sample to be detected according to the collected first signal light; the step of the second scanning process includes: emitting second detection light to the surface of the sample to be detected, wherein the second detection light forms second signal light after passing through the sample to be detected; collecting the second signal light, and acquiring second information of the surface characteristics of the sample to be detected according to the collected first signal light;
after the first scanning treatment, forming a second scanning treatment on the surface of the sample to be detected through a second detection light; the end point of the scanning path of the first scanning processing is coincided with the starting point of the scanning path of the second scanning processing; the directions of the scanning paths of the first scanning process and the second scanning process are opposite; alternatively, the first and second electrodes may be,
the detection channels comprise a first detection channel and a second detection channel, the first detection channel is used for receiving the first signal light, and the second detection channel is used for receiving the second signal light; the first detection light and the second detection light form light spots on the surface of the sample to be detected, and the light spots are completely separated or partially overlapped; the first scanning process and the second scanning process overlap in time partially or completely in layers.
Optionally, the emitting the probe light to the surface of the sample to be measured includes:
emitting the detection light;
performing a first optical process on the probe light to form the first probe light and the second probe light;
wherein the first optical processing includes splitting the probe light; alternatively, the first optical processing includes causing the probe light to exit at a predetermined angle.
Optionally, the emitting the probe light to the surface of the sample to be measured includes:
emitting original detection light;
performing third optical processing on the original detection light to form third detection light and initial detection light;
performing a second optical process on the initial probe light to form the first probe light and the second probe light;
wherein the third optical processing comprises splitting the raw probe light; alternatively, the third optical processing includes causing the original probe light to exit at a predetermined angle;
the second optical processing comprises splitting the initial probe light; alternatively, the second optical processing includes causing the initial probe light to exit at a predetermined angle;
or, the emitting the probe light to the surface of the sample to be measured includes:
emitting original detection light;
performing second optical processing on the original detection light to form first detection light and initial detection light;
performing third optical processing on the initial detection light to form second detection light and third detection light;
wherein the second optical processing comprises splitting the raw probe light; alternatively, the second optical processing includes causing the original probe light to exit at a predetermined angle;
the third optical processing includes splitting the initial probe light; alternatively, the third optical processing includes causing the initial probe light to exit at a predetermined angle.
Compared with the prior art, the technical scheme provided by the invention has the following advantages:
according to the optical detection system and the optical detection method provided by the invention, the detection light comprises the first detection light and the second detection light, and the first detection light and the second detection light are respectively incident to the surface of the sample to be detected from two sides of the signal light emergent surface, so that the light brightness of the detection area on the surface of the sample to be detected can be improved, and the optical detection precision can be improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an optical detection system according to an embodiment of the present invention;
fig. 2 is a schematic perspective view of an optical detection system according to an embodiment of the present invention;
FIG. 3 is a schematic perspective view of another optical inspection system according to an embodiment of the present invention;
fig. 4 is a schematic side view of a detection system according to an embodiment of the present invention;
fig. 5 is a flowchart of an optical detection method according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, so that the above is the core idea of the present invention, and the above objects, features and advantages of the present invention can be more clearly understood. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An optical detection system according to an embodiment of the present invention is shown in fig. 1, and includes a light source module 1 and a detection channel 2.
The light source module 1 is used for emitting detection light to the surface of the sample 3 to be detected, and the detection light is reflected or scattered by the surface of the sample 3 to be detected to form signal light. The sample 3 to be measured includes a wafer, a substrate of a display, and the like. The detection channel 2 is used for collecting the signal light and obtaining information of surface characteristics of the sample 3 to be detected according to the signal light, wherein the characteristics comprise defects and the like, and the information of the characteristics comprises positions, sizes and the like of the defects.
In the embodiment of the present invention, as shown in fig. 1, the probe light includes at least a first probe light S1 and a second probe light S2, and the first probe light S1 and the second probe light S2 are incident on the surface of the sample 3 to be measured from both sides of the signal light exit plane ABOC, respectively.
It should be noted that the signal light emitting surface ABOC is a plane formed by the signal light emitted from the surface of the sample 3 to be measured and the surface normal AO at the emitting point. The same signal light emitting surface ABOC is obtained by coincidence of the signal light emitting surface formed by the first probe light S1 passing through the surface of the sample 3 to be measured and the signal light emitting surface formed by the second probe light S2 passing through the surface of the sample 3 to be measured.
In the embodiment of the present invention, the probe light at least includes the first probe light S1 and the second probe light S2, and the first probe light S1 and the second probe light S2 are respectively incident on the surface of the sample 3 to be detected from two sides of the signal light emitting surface ABOC, so that the light brightness of the detection area of the surface of the sample 3 to be detected, that is, the area where the intersection point a is located, can be increased, thereby avoiding the problem of detection accuracy reduction caused by dark light on the surface of the wafer, that is, improving the accuracy of the optical detection.
Optionally, in an embodiment of the present invention, the signal light includes a first signal light and a second signal light, the first probe light S1 forms the first signal light after passing through the sample 3 to be measured, and the second probe light S2 forms the second signal light after passing through the sample 3 to be measured; the detection channel 2 includes a first detection channel for receiving the first signal light and a second detection channel for receiving the second signal light.
Specifically, the light source module 1 emits a first probe light S1 to the surface of the sample 3 to be detected, and performs a first scanning process on the surface of the sample 3 to be detected through the first probe light S1, where the first probe light S1 forms a first signal light after passing through the sample 3 to be detected. The first detection channel collects the first signal light, obtains first information of the surface characteristics of the sample 3 to be detected according to the collected first signal light, and obtains characteristic information of the surface of the sample 3 to be detected according to the first information.
The light source module 1 emits a second probe light S2 to the surface of the sample 3 to be detected, the second probe light S2 performs a second scanning process on the surface of the sample 3 to be detected, and the second probe light S2 forms a second signal light after passing through the sample 3 to be detected. The second detection channel collects the second signal light, and obtains second information of the surface characteristics of the sample 3 to be detected according to the collected second signal light, and obtains the characteristic information of the surface of the sample 3 to be detected according to the second information.
Wherein an end point of a scan path of the first scan process coincides with a start point of a scan path of a second scan process; the directions of the scanning paths of the first scanning process and the second scanning process are opposite; or, the first probe light S1 and the second probe light S2 form a light spot on the surface of the sample 3 to be detected, which is completely separated or partially overlapped; the first scanning process and the second scanning process overlap in time partially or completely.
Alternatively, in an embodiment of the present invention, the incident directions of the first probe light S1 and the second probe light S2 are symmetrical with respect to the signal light exit surface, that is, an angle α between the first probe light S1 and the signal light exit surface and an angle β between the second probe light S2 and the signal light exit surface are equal, and the intersection points of the first probe light S1 and the second probe light S2 and the signal light exit surface are the same point a.
Of course, the present invention is not limited to this, and in other embodiments, the included angle α between the first probe light S1 and the signal light emitting surface and the included angle β between the second probe light S2 and the signal light emitting surface may not be equal, as long as the intersection points of the first probe light S1 and the second probe light S2 and the signal light emitting surface are the same point, or the intersection points of the first probe light S1 and the second probe light S2 and the surface of the sample 3 to be detected are located in the same detection region.
Optionally, an included angle α between the first probe light S1 and the surface normal of the sample 3 to be measured ranges from 10 ° to 50 °, an included angle β between the second probe light S2 and the surface normal of the sample 3 to be measured ranges from 50 ° to 90 °, further optionally, an included angle α between the first probe light S1 and the surface normal of the sample 3 to be measured ranges from 20 °, and an included angle β between the second probe light S2 and the surface normal of the sample 3 to be measured ranges from 90 °.
In the embodiment of the present invention, the number of the detection channels 2 is multiple, the emission directions of the signal lights collected by the multiple detection channels 2 are located on the same plane, that is, the multiple detection channels 2 collect the signal lights emitted from the same signal light emission surface, wherein included angles between the emission directions of the signal lights collected by different detection channels 2 and the surface normal of the sample 3 to be detected are different, so that the different detection channels 2 detect the signal lights with different emission angles and different intensities, and obtain the characteristic information of different sizes, so that the optical detection system has a larger dynamic detection range and higher detection accuracy.
Optionally, as shown in fig. 2, the plurality of detection channels 2 includes five detection channels 2, and the ranges of the included angles between the exit directions of the signal lights collected by the five detection channels 2 and the surface normal of the sample 3 to be detected are 45 ° to 75 °, 15 ° to 45 °, -15 ° to 15 °, -45 ° to-15 °, -75 ° to-45 °, respectively. Further optionally, the ranges of the included angles between the exit directions of the signal lights collected by the five detection channels 2 and the surface normal of the sample 3 to be detected are 70 °, 35 °, 0 °, -35 °, and 70 °, respectively. Of course, the present invention is not limited to this, and in other embodiments, the number and the size of the included angle of the detection channels 2 may be set according to the actual application requirement.
Alternatively, in an embodiment of the present invention, as shown in fig. 1, the incident surface AOF of the first probe light S1 coincides with the incident surface AOE of the second probe light S2, and the incident surface AOF of the first probe light S1 is perpendicular to the signal light exit surface ABOC. The incident plane refers to a plane formed by the incident light and the normal at the incident point, for example, the incident plane AOF is a plane formed by the first probe light S1 and the normal AO. And, the first probe light S1 forms a first linear light spot on the surface of the sample 3 to be measured, the second probe light S2 forms a second linear light spot on the surface of the sample 3 to be measured, and the first linear light spot and the second linear light spot have the same extending direction, for example, both extend along the EF linear direction, and at least partially overlap each other. Therefore, the brightness of the overlapped part of the light spots can be enhanced, and the detection precision can be improved when the area irradiated by the overlapped part is detected.
On the basis, in the embodiment of the present invention, the number of the detection channels 2 is multiple, and as shown in fig. 4, the emission surfaces of the signal lights collected by the multiple detection channels 2 are overlapped, and the emission surface of the signal light collected by the detection channel 2 is perpendicular to the extending direction of the first linear light spot, so that the intensities of the signal lights collected by different detection channels 2 at different emission angles are stronger, so as to improve the detection accuracy of the system.
In the embodiment of the present invention, as shown in fig. 2, the detection channel 2 includes a light collection assembly 20 and a light detection assembly 21. The light collection assembly 20 is used for collecting the signal light and transmitting the signal light to the light detection assembly 21; the optical detection component 21 is configured to receive the signal light and obtain information of surface characteristics of the sample 3 to be measured according to the signal light.
Optionally, the light collection assembly 20 includes a focusing lens group to focus the signal light to the detection surface of the light detection assembly 21. Alternatively, the optical detection component 21 is a photodetector or the like to image according to the signal light, and the image includes an image of the surface of the sample 3 to be measured, so as to obtain characteristic information of the surface of the sample 3 to be measured according to the image.
The optical axis of the detection channel 2 is a straight line and is parallel to the emitting direction of the signal light. It should be noted that the optical axis of the detection channel 2 is the central axis of the optical path propagating inside the detection channel, that is, the signal light collected by the detection channel 2 enters the light collection assembly 20 and the light detection assembly 21 along the optical path propagating inside the detection channel.
In the embodiment of the present invention, the light source module 1 includes an emission light source 10 and an optical element group located on the emission light source 10, where the emission light source 10 is used to emit the probe light, and the optical element group includes at least one optical element.
As shown in fig. 2, the optical element group includes a first optical element 11, and the first optical element 11 is configured to perform a first optical process on a light beam incident on the first optical element 11, such as a first optical process on a light beam emitted from the emission light source 10, to form a first detection light S1 and a second detection light S2.
The first optical processing includes splitting the light beam incident to the first optical element 11 to form a first probe light S1 and a second probe light S2. If the first optical element 11 is a light splitting element, it reflects part of the light beam incident on the first optical element 11 to the first optical path to form the first detection light S1, and transmits another part of the light beam to the second optical path to form the second detection light S2.
Alternatively, in another embodiment of the present invention, the first optical element 11 is configured to be adjustable in position or azimuth of the reflecting surface, and in this case, the first optical processing includes forming the first probe light S1 and the second probe light S2 by adjusting the position or azimuth of the first optical element 11 to make the light beam incident on the first optical element 11 exit at a predetermined angle.
Specifically, the position of the first optical element 11 is first adjusted to the first position or the azimuth angle of the first optical element 11 is adjusted to the first azimuth angle, so that the first optical element 11 reflects the light beam incident to the first optical element 11 to the first optical path, that is, the light beam is emitted at the first predetermined angle, and the first probe light S1 is formed. Then, the position of the first optical element 11 is adjusted to the second position or the azimuth angle of the first optical element 11 is adjusted to the second azimuth angle, so that the first optical element 11 reflects the light beam incident to the first optical element 11 to the second optical path, i.e., causes the light beam to exit at the second predetermined angle, forming the second probe light S2.
Optionally, in this embodiment, the first optical element 11 is a light splitting element, and optionally, the optical detection system provided in this embodiment further includes a first shutter, configured to pass or block the first probe light S1; and a second shutter for passing or blocking the second probe light S2. For example, when the first shutter passes through the first probe light S1 and the second shutter passes through the second probe light S2, the first probe light S1 and the second probe light S2 are irradiated to the surface of the sample 3 to be measured, and when the first shutter blocks the second probe light S2 through the first probe light S1 and the second shutter, the first probe light S1 is irradiated to the surface of the sample 3 to be measured to adjust the probe light incident to the surface of the sample 3 to be measured through the shutters.
In another embodiment of the present invention, as shown in fig. 3, the probe light further includes a third probe light S3, the light source module 1 includes an emitting light source 10 and an optical element group located on the emitting light source 10, the optical element group includes a second optical element 12 and a third optical element 13, and an angle between the third probe light S3 and a normal of the surface of the sample 3 to be detected is zero or an acute angle, so that the third probe light S3 is incident in a direction approximately perpendicular to the surface of the sample 3 to be detected, and the brightness of the detection area is further improved by the third probe light S3.
Wherein, the emission light source 10 is used for emitting original detection light;
the third optical element 13 is configured to perform a third optical process on the original probe light to form a third probe light S3 and an initial probe light, and the second optical element 12 is configured to perform a second optical process on the initial probe light to form the first probe light S1 and a second probe light S2.
Wherein the third optical processing includes splitting the original probe light incident on the third optical element 13 to form the third probe light S3 and the original probe light. Alternatively, the third optical element 13 is configured to be adjustable in position or reflective surface azimuth, and the third optical processing includes forming the third probe light S3 and the initial probe light by adjusting the position or azimuth of the third optical element 13 so that the original probe light incident on the third optical element 13 exits at a predetermined angle. The light splitting process and the process of adjusting the position or the azimuth angle of the third optical element 13 are the same as the second optical process, and are not described again here.
Alternatively, in another embodiment of the present invention, the second optical element 12 is configured to perform a second optical process on the original probe light to form a first probe light S1 and an original probe light; the third optical element 13 is configured to perform a third optical process on the initial probe light to form a second probe light S2 and a third probe light S3.
Wherein the second optical processing includes splitting the original probe light incident on the second optical element 12 to form the first probe light S1 and the original probe light. Alternatively, the second optical element 12 is configured to be adjustable in position or reflective surface azimuth, and in this case, the second optical processing includes causing the original probe light incident on the second optical element 12 to exit at a predetermined angle by adjusting the position or azimuth of the second optical element 12, to form the first probe light S1 and the original probe light.
The third optical processing includes splitting the primary probe light incident on the third optical element 13 to form a second probe light S2 and a third probe light S3. Alternatively, the third optical element 13 is configured to be adjustable in position or azimuth of the reflecting surface, and the third optical processing includes forming the second probe light S2 and the third probe light S3 by causing the initial probe light incident on the third optical element 13 to exit at a predetermined angle by adjusting the position or azimuth of the third optical element 13.
Of course, in another embodiment of the present invention, the second optical element 12 may be further configured to perform a second optical process on the original probe light to form a second probe light S2 and an original probe light; the third optical element 13 is configured to perform a third optical process on the initial probe light to form a first probe light S1 and a third probe light S3.
Optionally, in this embodiment, the third optical element 13 is also a light splitting element. Alternatively, the second optical element 12 and the third optical element 13 may be the same optical element, such as a fiber coupler. Optionally, the optical detection system provided in this embodiment further includes: a first shutter for passing or blocking the first probe light S1; a second shutter for passing or blocking the second probe light S2; and a third shutter for passing or blocking the third probe light S3.
It should be noted that the optical element group in the embodiment of the present invention further includes a plurality of mirrors and the like to change the direction of the probe light by disposing the mirrors on the optical path, so that the probe light is incident on the surface of the sample 3 to be measured at a set angle.
An embodiment of the present invention further provides an optical detection method, as shown in fig. 5, including:
s101: emitting detection light to the surface of a sample to be detected, wherein the detection light at least comprises first detection light and second detection light, the first detection light and the second detection light are respectively emitted to the surface of the sample to be detected from two sides of the light emitting surface of the signal, and the detection light forms signal light after the surface of the sample to be detected.
In one embodiment, the signal light includes first signal light and second signal light; the step of emitting the probe light to the surface of the sample to be measured and collecting the signal light includes:
carrying out first scanning treatment on the surface of a sample to be detected through first detection light to obtain first information of the surface characteristics of the sample to be detected; performing second scanning processing on the surface of the sample to be detected through second detection light to obtain second information of the surface characteristics of the sample to be detected; and acquiring the surface characteristic information of the sample to be detected according to the first information and the second information.
The step of the first scanning process includes: emitting first probe light to the surface of the sample to be detected, wherein the first probe light forms first signal light after passing through the sample to be detected; collecting the first signal light, and acquiring first information of the surface characteristics of the sample to be detected according to the collected first signal light;
the step of the second scanning process includes: emitting second detection light to the surface of the sample to be detected, wherein the second detection light forms second signal light after passing through the sample to be detected; and collecting the second signal light, and acquiring second information of the surface characteristics of the sample to be detected according to the collected first signal light.
Specifically, the first scanning process includes: annular step scanning, spiral scanning and S-shaped step scanning;
in one embodiment, after the first scanning process, a second scanning process is performed on the surface of the sample to be measured by the second probe light.
Wherein a start point of a scanning path of the second scanning process coincides with an end point of the first scanning process, and a scanning direction of the first scanning process is opposite to a scanning direction of the second scanning process.
In another embodiment, the signal light includes a first signal light and a second signal light, the first probe light forms a first signal light after passing through a sample to be detected, and the second probe light forms a second signal light after passing through the sample to be detected;
the detection channel includes a first detection channel and a second detection channel, the first detection channel is used for receiving the first signal light, and the second detection channel is used for receiving the second signal light.
The field of view area of the first detection channel is completely separated from the field of view area of the second detection channel; the light spot formed by the first detection light on the surface of the object to be detected and the light spot formed by the second detection light on the surface of the object to be detected are at least partially not overlapped. Specifically, the light spot formed on the surface of the object to be detected by the first detection light is completely separated from the light spot formed on the surface of the object to be detected by the second detection light.
In this embodiment, the times of the first and second scanning processes at least partially overlap.
Optionally, the emitting the probe light to the surface of the sample to be measured includes:
emitting the detection light;
performing a first optical process on the probe light to form the first probe light and the second probe light;
wherein the first optical processing includes splitting the probe light; alternatively, the first optical processing includes causing the probe light to exit at a predetermined angle.
Specifically, after the probe light is emitted, the probe light is split into a first probe light and a second probe light; or after the detection light is emitted, the detection light is firstly emitted at a first preset angle to form first detection light, and then the detection light is emitted at a second preset angle to form second detection light.
Optionally, the emitting the probe light to the surface of the sample to be measured includes:
emitting original detection light;
performing third optical processing on the original detection light to form third detection light and initial detection light;
performing a second optical process on the initial probe light to form the first probe light and the second probe light;
wherein the third optical processing comprises splitting the raw probe light; alternatively, the third optical processing includes causing the original probe light to exit at a predetermined angle;
the second optical processing comprises splitting the initial probe light; alternatively, the second optical processing includes causing the initial probe light to exit at a predetermined angle.
Specifically, after the original probe light is emitted, splitting the original probe light to form third probe light and the original probe light, or emitting the original probe light at a first predetermined angle to form third probe light, and then emitting the original probe light at a second predetermined angle to form the original probe light; after the initial probe light is formed, the initial probe light is split to form a first probe light and a second probe light, or the initial probe light is emitted at a third predetermined angle to form a first probe light, and the initial probe light is emitted at a fourth predetermined angle to form a second probe light.
Optionally, the emitting the probe light to the surface of the sample to be measured includes:
emitting original detection light;
performing second optical processing on the original detection light to form first detection light and initial detection light;
performing third optical processing on the initial detection light to form second detection light and third detection light;
wherein the second optical processing comprises splitting the raw probe light; alternatively, the second optical processing includes causing the original probe light to exit at a predetermined angle;
the third optical processing includes splitting the initial probe light; alternatively, the third optical processing includes causing the initial probe light to exit at a predetermined angle.
Specifically, after the original probe light is emitted, the original probe light is split to form a first probe light and an initial probe light, or the original probe light is emitted at a first predetermined angle to form a first probe light, and then the original probe light is emitted at a second predetermined angle to form an initial probe light; after the initial detection light is formed, the initial detection light is split to form second detection light and third detection light, or the initial detection light is emitted at a third predetermined angle to form second detection light, and the initial detection light is emitted at a fourth predetermined angle to form third detection light.
S102: and collecting the signal light, and acquiring the information of the surface characteristics of the sample to be detected according to the signal light.
In the embodiment of the invention, the detection light at least comprises the first detection light and the second detection light, and the first detection light and the second detection light are respectively incident to the surface of the sample to be detected from two sides of the signal light emergent surface, so that the light brightness of a detection area of the surface of the sample to be detected, namely an area where the intersection point is located, can be improved, the problem of detection precision reduction caused by darker light on the surface of the wafer can be avoided, and the precision of optical detection can be improved.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (18)
1. An optical inspection system, comprising:
the light source module is used for emitting probe light to the surface of a sample to be detected, and the probe light forms signal light after passing through the surface of the sample to be detected;
the detection channel is used for collecting the signal light and acquiring the information of the surface characteristics of the sample to be detected according to the signal light;
the detection light at least comprises first detection light and second detection light, and the first detection light and the second detection light are respectively incident to the surface of the sample to be detected from two sides of the signal light emergent surface.
2. The system according to claim 1, wherein the incident directions of the first probe light and the second probe light are symmetrical with respect to the exit plane of the signal light.
3. The system according to claim 1, wherein the number of the detection channels is plural, the emission directions of the signal lights collected by the plural detection channels are located on the same plane, and the emission directions of the signal lights collected by different detection channels have different included angles with the surface normal of the sample to be tested.
4. The system of claim 3, wherein the plurality of detection channels comprises five detection channels, and the angles between the emergent direction of the signal light collected by the five detection channels and the surface normal of the sample to be detected are in the ranges of 45-75 °, 15-45 °, -15 °, -45 ° -15 °, -75 ° -45 °.
5. The system according to claim 1, wherein an incident surface of the first detection light coincides with an incident surface of the second detection light, and the incident surface of the first detection light is perpendicular to the signal light exit surface.
6. The system of claim 1, wherein the first probe light forms a first linear spot on the surface of the sample to be measured, and the second probe light forms a second linear spot on the surface of the sample to be measured, and the first linear spot and the second linear spot extend in the same direction and at least partially overlap.
7. The system according to claim 6, wherein the number of the detection channels is plural, the exit surfaces of the signal lights collected by the plurality of detection channels coincide, and the exit surface of the signal light collected by the detection channel is perpendicular to the extending direction of the first linear light spot.
8. The system of claim 1, wherein the detection channel comprises a light collection assembly and a light detection assembly; the light collection component is used for collecting the signal light and transmitting the signal light to the light detection component; the optical detection component is used for receiving the signal light and obtaining the information of the surface characteristics of the sample to be detected according to the signal light;
the optical axis of the detection channel is a straight line and is parallel to the emitting direction of the signal light.
9. The system of claim 1, wherein the light source module comprises an emitting light source and a set of optical elements positioned on a path of the emitting light source;
the emission light source is used for emitting detection light;
the optical element group comprises a first optical element, and the first optical element is used for carrying out first optical processing on detection light incident to the first optical element to form first detection light and second detection light;
the first optical processing includes splitting the probe light incident to the first optical element to form first probe light and second probe light; alternatively, the first optical element is configured to be adjustable in position or reflecting surface azimuth, and the first optical processing includes causing the probe light incident to the first optical element to exit at a predetermined angle by adjusting the position or azimuth of the first optical element, forming the first probe light and the second probe light.
10. The system of claim 9, wherein the first optical element is a beam splitting element, the system further comprising a first shutter for passing or blocking the first probe light; and a second shutter for passing or blocking the second detection light.
11. The system of claim 1, wherein the probe light further comprises a third probe light, and the third probe light forms an angle of zero or acute angle with the normal of the surface of the sample to be measured; the light source module comprises an emitting light source and an optical element group positioned on a light path of the emitting light source, wherein the optical element group comprises a second optical element and a third optical element;
the emission light source is used for emitting original detection light;
the third optical element is configured to perform a third optical processing on the original detection light to form a third detection light and an initial detection light, and the second optical element is configured to perform a second optical processing on the initial detection light to form the first detection light and the second detection light;
the third optical processing includes splitting the original probe light incident to a third optical element to form the third probe light and the initial probe light; or, the third optical element is configured to be adjustable in position or azimuth of the reflecting surface, and the third optical processing includes forming the third detection light and the initial detection light by causing the original detection light incident to the third optical element to exit at a predetermined angle by adjusting the position or azimuth of the third optical element;
the second optical processing includes splitting the initial probe light incident on a second optical element to form the first probe light and the second probe light; or, the second optical element is configured to be adjustable in position or reflecting surface azimuth, and the second optical processing includes causing the initial probe light incident to the second optical element to exit at a predetermined angle by adjusting the position or azimuth of the second optical element, forming the first probe light and the second probe light;
or, the second optical element is configured to perform a second optical processing on the original probe light to form a first probe light and an initial probe light; the third optical element is configured to perform a third optical processing on the initial detection light to form second detection light and third detection light;
the second optical processing includes splitting original probe light incident to a second optical element to form the first probe light and the initial probe light; or, the second optical element is configured to be adjustable in position or reflecting surface azimuth, and the second optical processing includes causing the original probe light incident to the second optical element to exit at a predetermined angle by adjusting the position or azimuth of the first optical element, forming the first probe light and the initial probe light;
the third optical processing includes splitting the initial probe light incident on a third optical element to form the second probe light and the third probe light; alternatively, the third optical element is configured to be adjustable in position or reflective surface azimuth, and the third optical processing includes causing the initial probe light incident on the third optical element to exit at a predetermined angle by adjusting the position or azimuth of the third optical element to form the second probe light and the third probe light.
12. The system of claim 11, wherein the second optical element is a light splitting element; the third optical element is a light splitting element; the system further comprises: a first shutter for passing or blocking the first detection light; a second shutter for passing or blocking the second detection light; and a third shutter for passing or blocking the third detection light.
13. The system of claim 1, wherein the angle between the first probe light and the surface normal of the sample to be measured is in the range of 10 ° to 50 °; the range of the included angle between the second detection light and the surface normal of the sample to be detected is 50-90 degrees.
14. The system of claim 1, wherein the signal light comprises a first signal light and a second signal light, the first probe light forms a first signal light after passing through a sample to be tested, and the second probe light forms a second signal light after passing through the sample to be tested;
the detection channel includes a first detection channel and a second detection channel, the first detection channel is used for receiving the first signal light, and the second detection channel is used for receiving the second signal light.
15. An optical inspection method, comprising:
emitting detection light to the surface of a sample to be detected, wherein the detection light at least comprises first detection light and second detection light, the first detection light and the second detection light are respectively emitted to the surface of the sample to be detected from two sides of the light emitting surface of the signal light, and the detection light forms signal light after passing through the surface of the sample to be detected;
and collecting the signal light, and acquiring the information of the surface characteristics of the sample to be detected according to the signal light.
16. The method of claim 15, wherein the signal light comprises a first signal light and a second signal light;
the step of emitting the probe light to the surface of the sample to be measured and collecting the signal light includes: carrying out first scanning treatment on the surface of a sample to be detected through first detection light to obtain first information of the surface characteristics of the sample to be detected; performing second scanning processing on the surface of the sample to be detected through second detection light to obtain second information of the surface characteristics of the sample to be detected; acquiring the surface characteristic information of the sample to be detected according to the first information and the second information; the step of the first scanning process includes: emitting first probe light to the surface of the sample to be detected, wherein the first probe light forms first signal light after passing through the sample to be detected; collecting the first signal light, and acquiring first information of the surface characteristics of the sample to be detected according to the collected first signal light; the step of the second scanning process includes: emitting second detection light to the surface of the sample to be detected, wherein the second detection light forms second signal light after passing through the sample to be detected; collecting the second signal light, and acquiring second information of the surface characteristics of the sample to be detected according to the collected first signal light;
after the first scanning treatment, forming a second scanning treatment on the surface of the sample to be detected through a second detection light; the end point of the scanning path of the first scanning processing is coincided with the starting point of the scanning path of the second scanning processing; the directions of the scanning paths of the first scanning process and the second scanning process are opposite; alternatively, the first and second electrodes may be,
the detection channels comprise a first detection channel and a second detection channel, the first detection channel is used for receiving the first signal light, and the second detection channel is used for receiving the second signal light; the first detection light and the second detection light form light spots on the surface of the sample to be detected, and the light spots are completely separated or partially overlapped; the first scanning process and the second scanning process overlap in time partially or completely.
17. The method of claim 15, wherein emitting probe light toward a surface of a sample to be measured comprises:
emitting the detection light;
performing a first optical process on the probe light to form the first probe light and the second probe light;
wherein the first optical processing includes splitting the probe light; alternatively, the first optical processing includes causing the probe light to exit at a predetermined angle.
18. The method of claim 15, wherein emitting probe light toward a surface of a sample to be measured comprises:
emitting original detection light;
performing third optical processing on the original detection light to form third detection light and initial detection light;
performing a second optical process on the initial probe light to form the first probe light and the second probe light;
wherein the third optical processing comprises splitting the raw probe light; alternatively, the third optical processing includes causing the original probe light to exit at a predetermined angle;
the second optical processing comprises splitting the initial probe light; alternatively, the second optical processing includes causing the initial probe light to exit at a predetermined angle;
or, the emitting the probe light to the surface of the sample to be measured includes:
emitting original detection light;
performing second optical processing on the original detection light to form first detection light and initial detection light;
performing third optical processing on the initial detection light to form second detection light and third detection light;
wherein the second optical processing comprises splitting the raw probe light; alternatively, the second optical processing includes causing the original probe light to exit at a predetermined angle;
the third optical processing includes splitting the initial probe light; alternatively, the third optical processing includes causing the initial probe light to exit at a predetermined angle.
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