CN110441311B - Multi-axis and multi-focus lens for multi-object plane imaging - Google Patents
Multi-axis and multi-focus lens for multi-object plane imaging Download PDFInfo
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- CN110441311B CN110441311B CN201910661174.5A CN201910661174A CN110441311B CN 110441311 B CN110441311 B CN 110441311B CN 201910661174 A CN201910661174 A CN 201910661174A CN 110441311 B CN110441311 B CN 110441311B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B37/00—Panoramic or wide-screen photography; Photographing extended surfaces, e.g. for surveying; Photographing internal surfaces, e.g. of pipe
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
A multi-axis and multi-focus lens for multi-object plane imaging comprises an object plane, an optical axis steering structure, an imaging optical system, a compensation flat plate and an image plane. The invention can realize the simultaneous imaging of the sample surfaces which are not in the same plane on one image plane through the combination of all parts of the lens. Compared with the traditional multi-camera-based machine vision system, the system has the advantages of more compact structure, capability of reducing the number of cameras and lenses and reducing the economic expenditure of the lenses and the expenditure of data processing resources.
Description
Technical Field
The invention relates to a multi-axis multi-focus lens, in particular to a multi-axis multi-focus lens for imaging of multiple object planes.
Background
When the appearance of a product is detected to be poor in the existing production and processing, human eye detection is adopted, and human misjudgment is caused by human subjective judgment, visual fatigue and other factors. With the development of machine vision technology, the automatic detection of machine vision is gradually realized for workpieces which cannot adopt machine vision in the past. Conventionally, there is a technique of detecting defects on a sample surface from a captured image obtained by capturing an image with a camera (see patent document 1: application No. CN03102169.7, inspection method and inspection system for an object surface), and many similar methods are used. However, only one target surface can be detected at a time, and in order to detect a plurality of target surfaces which are not in the same plane, cameras and lenses which are the same as the target surfaces to be detected in number are required to be equipped.
When the size of a workpiece is measured in the existing production and processing, the traditional method adopts a direct measurement method, and the method has the advantages of direct measurement, no need of additional calibration and low speed. The dimension measurement method based on image analysis is widely applied along with the development of machine vision technology. Conventionally, a technique for measuring a sample surface from a captured image captured by a camera is known (see patent document 2: application No. CN02107961.7, optical metrology device). As previously mentioned, similar methods typically measure for only one target surface.
Disclosure of Invention
The invention aims to provide a multi-axis multi-focus lens for imaging multiple object planes, which can realize simultaneous imaging of sample surfaces which are not in the same plane on one image plane through the combination of all parts of the lens. Compared with the traditional multi-camera-based visual system, the lens has the advantages of more compact structure, capability of reducing the number of cameras and lenses and reducing the economic expenditure of the lens and the expenditure of data processing resources.
To achieve the above object, the technical solution of the present invention is as follows:
a multi-axis and multi-focus lens for imaging of multiple object planes is characterized by comprising an object plane, an optical axis steering structure, an imaging optical system, a compensation flat plate and an image plane, wherein light emitted by the object plane sequentially passes through an optical system consisting of the optical axis steering structure, the imaging optical system and the compensation flat plate to reach the image plane.
The object plane at least comprises two sub-object planes, at least two sub-object planes are not in the same plane, and each sub-object plane is an optical conjugate plane of the image plane passing through the optical system.
The optical axis turning structure can be, but is not limited to, composed of a reflector and a prism, and beam deflection introduced by the optical axis turning structure needs to ensure that imaging beams of all sub-object planes of the object plane enter the imaging optical system after passing through the optical axis turning structure.
The imaging optical system images a limited far object plane on a limited far image plane, the object space working distance needs to be larger than the minimum distance required by the arrangement of the optical axis turning structures, the distance from the image plane to the image space end face of the imaging optical system needs to be larger than the minimum distance required by the arrangement of the compensation plates, and the pupil of the imaging optical system ensures that light rays for imaging each object plane pass through the corresponding optical axis turning structure and the corresponding compensation plate and do not interfere with each other.
The thickness d of the compensation plate is determined by the refractive index n of the compensation plate and the image distance difference delta needing compensation, and the relation d is n/(n-1) delta.
The image surface is divided into a plurality of subregions, each subregion corresponds to one sub-object surface of the object surface, and the subregions are not overlapped with each other.
Experiments show that the multi-axis multi-focus lens for multi-object plane imaging can realize simultaneous imaging of sample surfaces which are not in the same plane on one image plane through the combination of all parts of the lens. Compared with the traditional multi-camera-based machine vision system, the system has the advantages of more compact structure, capability of reducing the number of cameras and lenses and reducing the economic expenditure of the lenses and the expenditure of data processing resources.
Drawings
FIG. 1 is a schematic view of a multi-axis multi-focus lens for multi-object plane imaging according to the present invention
FIG. 2 is a schematic structural diagram of a multi-axis multi-focus lens used for multi-object plane imaging according to embodiment 1 of the present invention
FIG. 3 is a schematic structural diagram of a multi-axis multi-focus lens of the embodiment 2 for multi-object plane imaging according to the present invention
FIG. 4 is a schematic structural diagram of a multi-axis multi-focus lens in accordance with an embodiment 3 of the present invention
Detailed Description
The present invention will be further described with reference to the following examples and drawings, but the scope of the present invention should not be limited thereto.
Example 1
Fig. 2 is a schematic structural diagram of a multi-axis multi-focus lens in embodiment 1 for multi-object plane imaging according to the present invention. The sample (10) to be observed is provided with N step surfaces, namely a first step surface 101, a second step surface 102, a second step surface … … and an Nth step surface 10N. The operation principle will be described by taking this as an example.
In this embodiment, the optical imaging system is a double telecentric structure, and the focal length f of the object lens 3011Focal length f of image side lens 3022The distance between the two lenses is f1+f2. The first step surface 101 is spaced from the object side lens 301 by a distance u1Passes through the optical imaging system 30 and is imaged on a sub-region 501 of the image plane 50 with an image distance v1. According to the ideal lens object image relationship, v1And u1The following relationships exist:
if no compensating optical element is added to the optical path, the Nth step surface 10N is spaced from the object side lens 301 by a distance uNAfter passing through the optical imaging system 30, the image is formed on the Nth sub-image surface 60N with an image distance vN. According to the ideal lens object image relationship, vNAndNthe following relationships exist:
to ensure image distance v1And vNAre all larger than zero and need to satisfy the object distance
The distance between the image plane 50 and the Nth sub-image plane 60N is
From the above formula, when the first object plane 101 and the Nth object plane 10N are not coincident, i.e., (u)N-u1) When the distance is not zero, the corresponding image planes of the first object plane and the second object plane do not coincide after passing through the optical imaging system 30, and when the distance is larger than the focal depth of the optical imaging system, the first object plane and the Nth object plane cannot be imaged simultaneously by using the same camera.
Adding a compensation plate 40N with the thickness d to the imaging optical path of the Nth object planeNThe refractive index is n, the converged light beam entering the flat optical system is refracted and emitted, and the emergent convergence point is moved backward by a distance delta from the convergence pointN＝dN(n-1)/n. Image plane shift amount delta caused by inserted compensation plate 40NNThe distance delta between the image surfaces corresponding to the first object surface and the Nth object surfaceNWhen they are equal, namely:
the first object plane and the Nth object plane can be ensured to form clear images on the image plane 50. That is, the lens has a multi-focus function, and it can be considered that the lens realizes a function of simultaneously operating a plurality of working distances.
And a camera is arranged on the image surface, so that the shapes of the surfaces of a plurality of steps of the multi-step sample, including the size, the defects and the like, can be recorded simultaneously.
Example 2
Fig. 3 is a schematic structural diagram of a multi-axis multi-focus lens in embodiment 2 for multi-object plane imaging. The sample 10 to be observed has N surfaces which respectively form a certain angle, namely a first surface 101, a second surface 102, … … and an Nth surface 10N. The working principle is explained by taking this as an example.
In this embodiment, the optical imaging system is a double telecentric structure, and the focal length of the object lens 301f1Focal length f of image side lens 3022The distance between the two lenses is f1+f2. The first surface 101 is at a distance u from the object lens1The image passes through the optical imaging system and is imaged on a sub-area 501 of the image surface 50, and the image distance is v1. According to the ideal lens object image relationship, v1And u1The following relationships exist:
to ensure image distance v1Greater than zero, object distance needs to be satisfied
The Nth surface 10N travels a distance uN1Then reflected by the nth mirror 20N, and the propagation direction of the light beam rotates by a certain angle, which is consistent with the propagation direction of the imaging light beam on the first surface 101; retransmission distance uN2And then to the object lens 301. Object distance of imaging of Nth surface is uN＝uN1+uN2。
According to the Gaussian lens equation, if no compensation optical element is added in the optical path and the Nth surface 10N needs to be clearly imaged, the distance u between the Nth surface 10N and the object lens 301 needs to be ensuredN＝u1Can ensure that the image is imaged at an image distance v after passing through the optical imaging system 30N＝v1I.e., imaged at the image plane 50.
Thus, clear images of the first object plane, the second object plane … … and the nth object plane are obtained through one image plane, wherein the N object planes have the same object distance but different postures. The lens has a multi-axis function, and can realize simultaneous imaging of surfaces with a certain included angle under the condition of one working distance, so that simultaneous imaging of the surfaces in a plurality of spatial directions is realized.
By placing the camera on the image plane, the shapes of the surfaces in a plurality of spatial directions, including the sizes, defects and the like, can be recorded simultaneously.
Example 3
Fig. 4 is a schematic structural diagram of a multi-axis multi-focus lens in embodiment 3 for multi-object plane imaging according to the present invention. The basic principle has been explained in embodiment 1 and embodiment 2, where embodiment 1 is an implementation of a multi-focus lens, embodiment 2 is an implementation of a multi-axis lens, and embodiment 3 is an implementation of multi-axis multi-focus.
The sample 10 to be observed has a plurality of surfaces which form a certain angle respectively, and the object distances from the surfaces to the lens are different, and the embodiment 3 of the multi-axis multi-focus lens for multi-object plane imaging can realize simultaneous imaging of a plurality of surfaces in different directions and with different object distances. The working principle is illustrated by taking the example as follows:
in this embodiment, the optical imaging system is an object telecentric structure, and according to the principle described in embodiment 2, different light beam steering systems 20 are disposed on different surfaces, so that the central light beam is in the same direction as the optical axis of the optical system 30 when the imaging light beams on the surfaces reach the imaging system. Since the optical paths of the surfaces to the optical system 30 are different, that is, the object distances are different, according to the principle described in embodiment 1, the compensation plate 40 is disposed on the image side of the imaging beam to perform optical path compensation, so that all the target surfaces are imaged on the same image plane 50.
By arranging the camera on the image surface, the shapes of the surfaces with different object distances and a plurality of spatial directions can be recorded simultaneously, wherein the shapes comprise sizes, defects and the like.
Experiments show that the invention can realize the simultaneous imaging of the sample surfaces which are not in the same plane on one image plane through the combination of all parts of the lens. Compared with the traditional multi-camera-based machine vision system, the system has the advantages of more compact structure, capability of reducing the number of cameras and lenses and reducing the economic expenditure of the lenses and the expenditure of data processing resources.
Claims (4)
1. The multi-axis multi-focus lens for multi-object plane imaging is characterized by comprising an object plane (10), an optical axis steering structure (20), an imaging optical system (30), a compensation flat plate (40) and an image plane (50), wherein light emitted by the object plane (10) sequentially passes through the optical system consisting of the optical axis steering structure (20), the imaging optical system (30) and the compensation flat plate (40) to reach the image plane (50);
the object plane (10) at least comprises two sub-object planes, at least two sub-object planes are not in the same plane, and each sub-object plane is an optical conjugate plane of the image plane (50) passing through the optical system;
the imaging optical system (30) images a finite object plane (10) on a finite image plane (50), the working distance of the object plane needs to be greater than the minimum distance required by arranging the optical axis turning structures, the distance from the image plane (50) to the image plane end face of the imaging optical system (30) needs to be greater than the minimum distance required by arranging the compensation plate (40), and the pupil of the imaging optical system (30) ensures that light rays for imaging each object plane pass through the corresponding optical axis turning structure (20) and the compensation plate (40) and do not interfere with each other.
2. The multi-axis multi-focus lens for multi-object plane imaging according to claim 1, wherein the optical axis turning structure (20) comprises a mirror and a prism, and the beam deflection introduced by the optical axis turning structure (20) is required to ensure that the imaging beams of all the sub-object planes of the object plane (10) enter the imaging optical system (30) after passing through the optical axis turning structure (20).
3. The multi-axis multi-focus lens for multi-object plane imaging according to claim 1, wherein the thickness d of the compensation plate (40) is determined by the refractive index n of the compensation plate and the image distance difference Δ to be compensated, and satisfies the relationship d ═ n/(n-1) Δ.
4. Multiaxial multifocal lens for multi-object plane imaging according to any of claims 1 to 3 characterized in that the image plane (50) is divided into several sub-regions, each corresponding to a sub-object plane of the object plane (10), the sub-regions not coinciding with each other.
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| CN111220627B (en) * | 2020-03-20 | 2022-09-13 | 泉州师范学院 | Device and method for crystal grain double-face simultaneous aplanatic confocal imaging detection based on bicolor separation imaging method |
| CN112379516B (en) * | 2020-11-23 | 2022-04-26 | 湖北工业大学 | Multi-object-plane simultaneous imaging method based on digital multiplexing lens |
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