CN101266340A - Method for regulating high power laser apparatus light path alignment - Google Patents
Method for regulating high power laser apparatus light path alignment Download PDFInfo
- Publication number
- CN101266340A CN101266340A CNA2008100366385A CN200810036638A CN101266340A CN 101266340 A CN101266340 A CN 101266340A CN A2008100366385 A CNA2008100366385 A CN A2008100366385A CN 200810036638 A CN200810036638 A CN 200810036638A CN 101266340 A CN101266340 A CN 101266340A
- Authority
- CN
- China
- Prior art keywords
- aperture
- focal spot
- light path
- spatial filter
- transmission grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
A regulating method for laser device light path collimating includes the following steps: firstly, adhering a transmission grating larger than the aperture at the aperture plate behind the aperture plate of the spatial filter; secondly, starting up the laser light source, inserting a negative lens in the main light path, which allows the aperture to be fulfilled with the laser beam; the aperture profile is diffracted by the transmission grating and is imaged to the far-field detector by the imaging lens, thereby obtaining the central position of the aperture; shifting the negative lens out the light path, which allows the focal spot of the laser beam to thrill through the aperture, the focal spot is diffracted by the transmission grating and is imaged to the far-field detector by the imaging lens, thereby obtaining the central position of the focal spot; regulating the first reflecting mirror and the second reflecting mirror to superpose the central position of the focal spot of the laser beam and the central position of the aperture of the spatial filter, thereby the regulation is in good condition. The invention has features of simple equipment, easy regulate and high accuracy.
Description
Technical field
The present invention is relevant with high power laser light, particularly a kind of method of adjusting high power laser apparatus light path alignment.
Background technology
The device of high power laser that is used for inertial confinement fusion both at home and abroad at present, the refreshing light П of China for example, the NIF device of the U.S., adjust light path and all will use the far field sniffer of beam collimation, the optical axis of these far field sniffers generally all with the main laser light path coaxial, in order not influence main optical path, its position can only be in the catoptron back, light leak by catoptron is taken a sample, as shown in Figure 1, first catoptron 1, second catoptron 2, spatial filter 3, the 3rd catoptron 5 is parts of device of high power laser main optical path, the far field sniffer is made of imaging len 6 and far field detector 7 and places the 3rd catoptron 5 back, spatial filter 3 has aperture 4, the step that beam path alignment is adjusted in main optical path far field monitoring is: allow aperture 4 be thrown light on by main beam, aperture 4 is imaged onto on the far field detector 7 through imaging len 6, because the face of aperture 4 also is laser beam focal plane position, the laser beam focal spot also is imaged onto on the far field detector 7 simultaneously like this, by comparing the error at aperture center and focal spot center, the catoptron 2 of adjusting spatial filter 3 fronts just can make aperture center and focal spot center overlap, and realizes far field collimation adjustment.
The subject matter of the method for present this beam path alignment is:
Imaging len 6 and far field detector 7 must and main optical path coaxial, detection system need be placed on the back sampling of the 3rd catoptron 5 of main optical path, this just big leap ahead the length of main optical path, be not easy to this arranging of space with regard to the narrow space wave filter.
Summary of the invention
The technical problem to be solved in the present invention is to overcome above-mentioned prior art problems, and the method for adjusting high power laser apparatus light path alignment is provided, and reaches equipment letter, easy adjustment, the high characteristics of precision.
Technical solution of the present invention is as follows:
A kind of method of adjusting high power laser apparatus light path alignment is characterized in that it comprises the steps:
1. be close to aperture plate in the aperture plate back of spatial filter and post a transmission grating, the size of this transmission grating is bigger than the aperture of spatial filter;
2. start laser light source, the insertion negative lens in the main optical path between second catoptron and spatial filter makes laser beam be full of described aperture; The profile of this aperture is imaged onto on the detector of far field through imaging len through the transmission grating diffraction, obtains the center of aperture then by the Flame Image Process of computing machine;
3. described negative lens is shifted out light path, make the focal spot of laser beam pass described aperture,, be imaged onto on the detector of described far field through imaging len equally, obtain the center of focal spot by the Flame Image Process of computing machine by the diffraction of transmission grating;
4. adjust first catoptron and second catoptron repeatedly, the center of the aperture of the focal spot center of laser beam and spatial filter is overlapped, then adjust intact.
This scheme is applicable to is not having the space to set up under the situation of far field detection system on the main optical path optical axis direction, can pass through the far field detection system of grating sampling in the sidewall setting of spatial filter.Can realize the far field from axial adjustment, sampled-grating is affiliated on sidewall neatly, make full use of the solid space of spatial filter.
Technique effect of the present invention is as follows:
Can move in and out grating by inserting, laser or illumination light are arrived the far field detector by the grating diffration photoimaging, grating can be affiliated to neatly on the sidewall of spatial filter, thereby the drawback of the detection system lengthening main optical path of also having avoided on primary optical axis, arranging, only the far field detection system need be got final product with the spatial arrangement that forms an angle with primary optical axis, experiment shows, the characteristics that the present invention has the equipment letter, easily adjusts, precision is high.
Description of drawings
Fig. 1 is that the light path synoptic diagram is surveyed in traditional far field
Fig. 2 is that the light path synoptic diagram is surveyed in far field of the present invention
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing.
See also Fig. 2, Fig. 2 surveys the light path synoptic diagram in far field of the present invention, and the present invention adjusts the method for high power laser apparatus light path alignment, comprises the steps:
1. be close to aperture plate in the aperture plate back of spatial filter 3 and post a transmission grating 8, the size of this transmission grating 8 is bigger than the aperture 4 of spatial filter 3;
2. start laser light source, the insertion negative lens 9 in the main optical path between second catoptron 2 and spatial filter 3 makes laser beam be full of described aperture 4; With the profile of this aperture 4 through transmission grating 8 diffraction after imaging len 6 is imaged onto on the far field detector 7, obtain the center of aperture then by the Flame Image Process of computing machine;
3. described negative lens 9 is shifted out light path, make the focal spot of laser beam pass described aperture 4,, be imaged onto on the far field detector 7 through imaging len 6 equally, obtain the center of focal spot by the Flame Image Process of computing machine by the diffraction of transmission grating 8;
4. carefully adjust first catoptron 1 and second catoptron 2, the center of the aperture 4 of the focal spot center of laser beam and spatial filter 3 is overlapped, then adjust and finish, beam path alignment.
Claims (1)
1, a kind of method of adjusting high power laser apparatus light path alignment is characterized in that it comprises the steps:
1. be close to aperture plate in the aperture plate back of spatial filter (3) and post a transmission grating (8), the size of this transmission grating (8) is bigger than the aperture (4) of spatial filter (3);
2. start laser light source, the insertion negative lens (9) in the main optical path between second catoptron (2) and spatial filter (3) makes laser beam be full of described aperture (4); The profile of aperture (4) is imaged onto on the far field detector (7) through imaging len (6) through transmission grating (8) diffraction, obtains the center of aperture then by the Flame Image Process of computing machine;
3. described negative lens (9) is shifted out light path, make the focal spot of laser beam pass described aperture (4), by the diffraction of transmission grating (8), be imaged onto on the far field detector (7) through imaging len (6) equally, obtain the center of focal spot by the Flame Image Process of computing machine;
4. carefully adjust first catoptron (1) and second catoptron (2), the center of the aperture (4) of the focal spot center of laser beam and spatial filter (3) is overlapped, then adjust beam path alignment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100366385A CN101266340A (en) | 2008-04-25 | 2008-04-25 | Method for regulating high power laser apparatus light path alignment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100366385A CN101266340A (en) | 2008-04-25 | 2008-04-25 | Method for regulating high power laser apparatus light path alignment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101266340A true CN101266340A (en) | 2008-09-17 |
Family
ID=39988868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100366385A Pending CN101266340A (en) | 2008-04-25 | 2008-04-25 | Method for regulating high power laser apparatus light path alignment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101266340A (en) |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102354055A (en) * | 2011-11-08 | 2012-02-15 | 上海激光等离子体研究所 | Light path collimation integrated device and method for high-power laser device |
| CN102519305A (en) * | 2011-10-31 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Device for monitoring and aligning infrared multispectral laser |
| CN102540497A (en) * | 2011-04-02 | 2012-07-04 | 北京国科世纪激光技术有限公司 | Spatial filter and high energy laser system thereof |
| CN102937513A (en) * | 2012-11-05 | 2013-02-20 | 上海激光等离子体研究所 | Method and system for monitoring three dimensional angle disturbance of optical gratings on line |
| CN103543527A (en) * | 2013-11-11 | 2014-01-29 | 上海激光等离子体研究所 | Line focusing spatial filter |
| CN104143495A (en) * | 2013-05-07 | 2014-11-12 | 许洋 | Automatic control system of mass spectrometer core component |
| CN104503100A (en) * | 2014-12-16 | 2015-04-08 | 中国科学院上海光学精密机械研究所 | Crystal auto-collimation regulation device and method on basis of optical grating diffraction |
| CN105675265A (en) * | 2016-01-25 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Large-aperture light beam collimating and measuring device |
| CN106199996A (en) * | 2016-08-30 | 2016-12-07 | 中国科学院上海光学精密机械研究所 | Utilize the method for aperture position in diffraction pattern calibration spatial filter |
| CN105215544B (en) * | 2014-06-19 | 2017-02-15 | 大族激光科技产业集团股份有限公司 | Collimation method of three-dimensional galvanometer and collimation system adopted by collimation method |
| CN108459419A (en) * | 2018-01-17 | 2018-08-28 | 中国科学院上海光学精密机械研究所 | Filter aperture alignment adjusting apparatus based on optical grating diffraction and method |
| CN110441311A (en) * | 2019-07-22 | 2019-11-12 | 中国科学院上海光学精密机械研究所 | The multifocal camera lens of multiaxis for the imaging of more object planes |
| CN111082298A (en) * | 2020-01-17 | 2020-04-28 | 中国工程物理研究院激光聚变研究中心 | Automatic light path collimation method of off-axis eight-pass amplification laser system |
| CN112197943A (en) * | 2020-09-17 | 2021-01-08 | 中国科学院上海光学精密机械研究所 | High-precision off-line debugging method for high-power laser far-field imaging system |
| CN112859359A (en) * | 2021-02-05 | 2021-05-28 | 中国工程物理研究院激光聚变研究中心 | Focal spot control method |
| CN116068751A (en) * | 2023-01-28 | 2023-05-05 | 深圳赛陆医疗科技有限公司 | Beam directivity stabilizing system, sequencer and debugging method |
-
2008
- 2008-04-25 CN CNA2008100366385A patent/CN101266340A/en active Pending
Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102540497A (en) * | 2011-04-02 | 2012-07-04 | 北京国科世纪激光技术有限公司 | Spatial filter and high energy laser system thereof |
| CN102519305A (en) * | 2011-10-31 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Device for monitoring and aligning infrared multispectral laser |
| CN102519305B (en) * | 2011-10-31 | 2014-03-12 | 中国科学院长春光学精密机械与物理研究所 | Device for monitoring and aligning infrared multispectral laser |
| CN102354055A (en) * | 2011-11-08 | 2012-02-15 | 上海激光等离子体研究所 | Light path collimation integrated device and method for high-power laser device |
| CN102354055B (en) * | 2011-11-08 | 2013-02-27 | 上海激光等离子体研究所 | Light path collimation integrated device and method for high-power laser device |
| CN102937513A (en) * | 2012-11-05 | 2013-02-20 | 上海激光等离子体研究所 | Method and system for monitoring three dimensional angle disturbance of optical gratings on line |
| CN102937513B (en) * | 2012-11-05 | 2014-11-26 | 上海激光等离子体研究所 | Method and system for monitoring three dimensional angle disturbance of optical gratings on line |
| CN104143495A (en) * | 2013-05-07 | 2014-11-12 | 许洋 | Automatic control system of mass spectrometer core component |
| CN104143495B (en) * | 2013-05-07 | 2017-09-01 | 许洋 | A kind of automatic control system of mass spectrograph core component |
| CN103543527A (en) * | 2013-11-11 | 2014-01-29 | 上海激光等离子体研究所 | Line focusing spatial filter |
| CN105215544B (en) * | 2014-06-19 | 2017-02-15 | 大族激光科技产业集团股份有限公司 | Collimation method of three-dimensional galvanometer and collimation system adopted by collimation method |
| CN104503100A (en) * | 2014-12-16 | 2015-04-08 | 中国科学院上海光学精密机械研究所 | Crystal auto-collimation regulation device and method on basis of optical grating diffraction |
| CN104503100B (en) * | 2014-12-16 | 2017-12-15 | 中国科学院上海光学精密机械研究所 | Crystal auto-collimation adjusting apparatus and method based on optical grating diffraction |
| CN105675265A (en) * | 2016-01-25 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Large-aperture light beam collimating and measuring device |
| CN105675265B (en) * | 2016-01-25 | 2018-03-20 | 中国科学院上海光学精密机械研究所 | Heavy caliber beam collimation measurement apparatus |
| CN106199996B (en) * | 2016-08-30 | 2018-12-25 | 中国科学院上海光学精密机械研究所 | Utilize the method for aperture position in diffraction pattern calibration spatial filter |
| CN106199996A (en) * | 2016-08-30 | 2016-12-07 | 中国科学院上海光学精密机械研究所 | Utilize the method for aperture position in diffraction pattern calibration spatial filter |
| CN108459419B (en) * | 2018-01-17 | 2020-05-05 | 中国科学院上海光学精密机械研究所 | Filter pinhole alignment adjusting device and method based on grating diffraction |
| CN108459419A (en) * | 2018-01-17 | 2018-08-28 | 中国科学院上海光学精密机械研究所 | Filter aperture alignment adjusting apparatus based on optical grating diffraction and method |
| CN110441311B (en) * | 2019-07-22 | 2021-10-08 | 中国科学院上海光学精密机械研究所 | Multi-axis and multi-focus lens for multi-object plane imaging |
| CN110441311A (en) * | 2019-07-22 | 2019-11-12 | 中国科学院上海光学精密机械研究所 | The multifocal camera lens of multiaxis for the imaging of more object planes |
| CN111082298A (en) * | 2020-01-17 | 2020-04-28 | 中国工程物理研究院激光聚变研究中心 | Automatic light path collimation method of off-axis eight-pass amplification laser system |
| CN112197943A (en) * | 2020-09-17 | 2021-01-08 | 中国科学院上海光学精密机械研究所 | High-precision off-line debugging method for high-power laser far-field imaging system |
| CN112197943B (en) * | 2020-09-17 | 2022-03-08 | 中国科学院上海光学精密机械研究所 | High-precision off-line debugging method for high-power laser far-field imaging system |
| CN112859359A (en) * | 2021-02-05 | 2021-05-28 | 中国工程物理研究院激光聚变研究中心 | Focal spot control method |
| CN116068751A (en) * | 2023-01-28 | 2023-05-05 | 深圳赛陆医疗科技有限公司 | Beam directivity stabilizing system, sequencer and debugging method |
| CN116068751B (en) * | 2023-01-28 | 2023-09-05 | 深圳赛陆医疗科技有限公司 | Beam directivity stabilizing system, sequencer and debugging method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101266340A (en) | Method for regulating high power laser apparatus light path alignment | |
| KR102448698B1 (en) | Local telecentricity and focus optimization for overlay metrology | |
| CN102354055B (en) | Light path collimation integrated device and method for high-power laser device | |
| CN101592787B (en) | Device for adjusting light path and method thereof | |
| JP2007151622A5 (en) | ||
| US9690105B2 (en) | Calibratable beam shaping system and method | |
| CN102175594A (en) | Device for measuring damage threshold under combined action of three-wavelength pulse laser and debugging method | |
| CN106233125B (en) | Confocal line inspection optical system | |
| TW201606284A (en) | Method, apparatus and system for generating multiple spatially separated inspection regions on a substrate | |
| CN105518512A (en) | Laser scanner | |
| CN101216610A (en) | Spatial filter light path alignment adjusting apparatus and regulation method | |
| WO2016084418A1 (en) | Aspherical mirror, optical axis aligning device for aspherical mirror, aspherical lens, optical axis aligning device for aspherical lens, and cassegrain telescope | |
| CN103365103A (en) | Focusing and leveling device and method | |
| CN110632768B (en) | Parallel Gaussian beam double telecentric system and alignment method | |
| CN101650159A (en) | Measuring system of gap between two ends of magnetic roller and photosensitive drum | |
| CN201166743Y (en) | Apparatus for adjusting spatial filter light path collimation | |
| US20190113729A1 (en) | Microscope apparatus | |
| JP2022504212A (en) | Measurement systems and methods for measuring excited laser beams in EUV plasma sources | |
| US10495579B2 (en) | System and method for compensation of illumination beam misalignment | |
| CN214174750U (en) | External auto-collimation receiving device | |
| CN104503100B (en) | Crystal auto-collimation adjusting apparatus and method based on optical grating diffraction | |
| CN108363217B (en) | Method for adjusting and monitoring grating parallelism by utilizing automatic leveling laser striping machine and application | |
| CN108459419B (en) | Filter pinhole alignment adjusting device and method based on grating diffraction | |
| EP3088125A1 (en) | High-output-light attenuator, measuring device, and three-dimensional modeling device | |
| US20190137750A1 (en) | Optical unit and method for adjusting optical unit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20080917 |