CN108459419A - Filter aperture alignment adjusting apparatus based on optical grating diffraction and method - Google Patents

Filter aperture alignment adjusting apparatus based on optical grating diffraction and method Download PDF

Info

Publication number
CN108459419A
CN108459419A CN201810045968.4A CN201810045968A CN108459419A CN 108459419 A CN108459419 A CN 108459419A CN 201810045968 A CN201810045968 A CN 201810045968A CN 108459419 A CN108459419 A CN 108459419A
Authority
CN
China
Prior art keywords
filter aperture
aperture
filter
detector
computer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810045968.4A
Other languages
Chinese (zh)
Other versions
CN108459419B (en
Inventor
刘代中
闫世森
林强
李红
龚蕾
张攀正
朱宝强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Optics and Fine Mechanics of CAS
Original Assignee
Shanghai Institute of Optics and Fine Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CN201810045968.4A priority Critical patent/CN108459419B/en
Publication of CN108459419A publication Critical patent/CN108459419A/en
Application granted granted Critical
Publication of CN108459419B publication Critical patent/CN108459419B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

Filter aperture based on optical grating diffraction is directed at adjusting apparatus, and composition includes:One insertable transmission grating for being close to place before filter aperture;The diffracted beam direction that detector is placed in the transmission grating constitutes imaging system, and the output of the detector connects computer.Computer control needs the filter aperture that auto-collimation adjusts.The present invention has the characteristics that equipment letter, adjustment are easy and with high accuracy.

Description

Filter aperture alignment adjusting apparatus based on optical grating diffraction and method
Technical field
The invention belongs to device of high power laser technical fields, especially one kind light path in device of high power laser In two spaces filter aperture alignment adjusting apparatus and method.
Background technology
God Light П currently used for the device of high power laser of inertial confinement fusion, such as China both at home and abroad, the U.S. NIF devices, the two spaces filter aperture alignment adjustment that will be related in a light path.Traditional filter aperture alignment Technology monitors system using a far field is established behind the leaky mirror of main optical path, is inserted at light path two respectively recessed Lens realization, as depicted in figs. 1 and 2.Traditional filter aperture alignment procedures are as follows, first before the first spatial filter 2 Concavees lens 1 are inserted into, as shown in Figure 1, parallel laser is completely filled with filter aperture 3 after the diverging of concavees lens 1, then filter is small The profile in hole 3 is ultimately imaged by slightly bigger filter aperture 6 on far field detection device 9, and filter aperture 3 is obtained Center location information.Concavees lens 1 are removed later, concavees lens 4 are inserted into before second space filter 5, as shown in Fig. 2, light exists It is completely filled with filter aperture at filter aperture 6, is ultimately imaged on far field detection device 9, far field detection device 9 records aperture 6 Center location information.By comparing small hole center location information twice, mobile aperture realizes the aperture to two filters It is aligned.
This scheme is more demanding to filter aperture, and it is small that previous filter aperture is necessarily less than the latter filter Hole, otherwise cannot achieve alignment.
Invention content
The present invention technology be to overcome above-mentioned problem of the prior art, it is small to provide a kind of filter based on optical grating diffraction Hole is directed at adjusting apparatus, which has the characteristics that equipment letter, adjustment are easy, with high accuracy.
Technical solution of the invention is as follows:
A kind of filter aperture alignment adjusting apparatus based on optical grating diffraction, includes the first filtering being sequentially placed along light path Device aperture, second filter aperture and speculum, feature are, are placed in the front for being close to the second filter aperture There is transmission grating, the second detector is placed in the diffracted beam direction of the transmission grating, the external computer of the second detector, The computer is connected with the first filter aperture and second filter aperture respectively.
It is realized in device of high power laser and is filtered using the filter aperture alignment adjusting apparatus based on optical grating diffraction Wave device aperture alignment methods, feature is, includes the following steps:
1. being close to its aperture before second filter aperture places transmission grating, make the center of second filter aperture It is overlapped with the center of transmission grating;
2. opening laser, laser is reflected by projection grating on the second detector, and the second detector will collect coke Spot, which is used as, refers to optical axis position, and focal spot position is transmitted to computer;
3. the first concavees lens are placed in the light path between laser and the first lens, so that transmission grating is generated level-one and spread out Light is penetrated, first filter aperture profile is imaged on the second detector, and the second detector is by first filter aperture contour images It is transmitted to computer;
4. according to the first filter aperture contour images presented on computer, first filter aperture is adjusted, makes first Filter aperture contour images center is overlapped with reference optical axis position;
5. first concavees lens are removed light path, and convex anti-mirror is moved into the light between the 4th lens and speculum On the road, make laser after the anti-mirror reflection of excess convexity, transmission grating is injected by second filter aperture, transmission grating is made to generate level-one Second filter aperture profile is imaged on the second detector by diffraction light, and the second detector is by second filter aperture profile diagram As being transmitted to computer;
6. according to the second filter aperture contour images presented on computer, second filter aperture is adjusted, makes second Filter aperture contour images center is overlapped with reference optical axis position.
Technique effect of the invention is as follows compared with prior art:
1) by the transmission grating placed before being close to filter aperture, the first-order diffraction light that transmission grating generates makes filtering Device aperture profile is imaged on the detector, according to the aperture contour images on detector, accurately by filter aperture profile tune It is easy to operate into detector center.
2) have the characteristics that equipment letter, adjustment are easy, with high accuracy.
Description of the drawings
Fig. 1 is the light path schematic diagram of traditional filter aperture alignment adjusting apparatus alignment first filter aperture.
Fig. 2 is the light path schematic diagram of traditional filter aperture alignment adjusting apparatus alignment second filter aperture.
Fig. 3 is the filter aperture alignment adjusting apparatus alignment first filter aperture of base transmission grating diffraction of the present invention Light path schematic diagram.
Fig. 4 is the filter aperture alignment adjusting apparatus alignment second filter aperture of base transmission grating diffraction of the present invention Light path schematic diagram.
In figure:1- the first concavees lens 2- the first lens 3- first filter aperture the second lens of 4- 5- second The 4th far fields lens 9- speculum 10- shrink beam lens of concavees lens 6- the third lens 7- second filter apertures 8- The convex anti-mirrors of 11- the first detector 12- the second detector 13- transmission gratings 14-
Specific implementation mode
With reference to embodiment and attached drawing, the invention will be further described, but the protection model of the present invention should not be limited with this It encloses.
First please refer to Fig. 3 and Fig. 4, it is illustrated that be that the present invention is based on the light that the filter aperture of optical grating diffraction is directed at adjusting apparatus Road schematic diagram, as seen from the figure, the present invention is based on the filter apertures of optical grating diffraction to be directed at adjusting apparatus, and composition includes:
One is close to the transmission grating placed before filter aperture 7 13;
The diffracted beam direction that the transmission grating 13 is placed in by the second detector 12 constitutes imaging system, and described the The output of two detectors 12 connects a computer;
The filter aperture 3 and filter aperture 7 for needing auto-collimation adjustment of computer control.
It is realized in device of high power laser and is filtered using the filter aperture alignment adjusting apparatus based on optical grating diffraction Wave device aperture alignment methods, it is characterised in that include the following steps:
1. being close to its aperture before second filter aperture 7 places transmission grating 13, make second filter aperture Center and the center of transmission grating 13 overlap;
2. opening laser, laser is reflected by transmission grating 13 on the second detector 12, and the second detector 12 will be adopted Collect focal spot to be used as with reference to optical axis position, focal spot position is transmitted to computer, confirms optical axis position;
3. the first concavees lens 1 are inserted into the light path between laser and the first lens 2, transmission grating 13 is made to generate one Order diffraction light, 3 profile of first filter aperture are imaged on the second detector 12, and the second detector 12 is by first filter aperture 3 contour images are transmitted to computer;
4. according to 3 contour images of first filter aperture presented on computer, adjustment first filter aperture 3 makes the One filter aperture profile, 3 image center location is overlapped with reference optical axis position;
5. first concavees lens 1 are removed into light path, and by convex anti-mirror 14 move into the 4th lens 8 and speculum 9 it Between light path on, make laser after the anti-mirror 14 of excess convexity reflects, transmission grating 13 injected by second filter aperture 7, makes transmission Grating 13 generates first-order diffraction light, and 7 profile of second filter aperture is imaged on the second detector 12, and the second detector 12 is by the Two filter apertures, 7 contour images are transmitted to computer;
6. according to 7 contour images of second filter aperture presented on computer, adjustment second filter aperture 7 makes the Two filter apertures, 7 contour images center is overlapped with reference optical axis position.
In conclusion apparatus of the present invention and method have the characteristics that equipment letter, adjustment are easy, with high accuracy.

Claims (2)

  1. Include the first filter being sequentially placed along light path 1. a kind of filter aperture based on optical grating diffraction is directed at adjusting apparatus Aperture, second filter aperture and speculum, which is characterized in that be close to be placed in front of the second filter aperture Transmission grating is placed with the second detector in the diffracted beam direction of the transmission grating, the external computer of the second detector, should Computer is connected with the first filter aperture and second filter aperture respectively.
  2. 2. realizing that high power laser light fills using the filter aperture alignment adjusting apparatus described in claim 1 based on optical grating diffraction Set median filter aperture alignment methods, which is characterized in that include the following steps:
    1. be close to before second filter aperture its aperture place transmission grating, make second filter aperture center and thoroughly The center for penetrating grating overlaps;
    2. opening laser, laser is reflected by transmission grating on the second detector, and the second detector will collect focal spot work For reference optical axis position, and it is transmitted to computer;
    3. the first concavees lens are placed in the light path between laser and the first lens, transmission grating is made to generate first-order diffraction Light, first filter aperture profile are imaged on the second detector, and the second detector passes first filter aperture contour images Transport to computer;
    4. according to the first filter aperture contour images presented on computer, first filter aperture is adjusted, the first filtering is made Device aperture contour images center is overlapped with reference optical axis position;
    5. first concavees lens are removed light path, and convex anti-mirror is moved into the light path between the 4th lens and speculum On, make laser after the anti-mirror reflection of excess convexity, transmission grating is injected by second filter aperture, so that transmission grating is generated level-one and spread out Light is penetrated, second filter aperture profile is imaged on the second detector, the second detector is by second filter aperture contour images It is transmitted to computer;
    6. according to the second filter aperture contour images presented on computer, second filter aperture is adjusted, the second filtering is made Device aperture contour images center is overlapped with reference optical axis position.
CN201810045968.4A 2018-01-17 2018-01-17 Filter pinhole alignment adjusting device and method based on grating diffraction Active CN108459419B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810045968.4A CN108459419B (en) 2018-01-17 2018-01-17 Filter pinhole alignment adjusting device and method based on grating diffraction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810045968.4A CN108459419B (en) 2018-01-17 2018-01-17 Filter pinhole alignment adjusting device and method based on grating diffraction

Publications (2)

Publication Number Publication Date
CN108459419A true CN108459419A (en) 2018-08-28
CN108459419B CN108459419B (en) 2020-05-05

Family

ID=63221000

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810045968.4A Active CN108459419B (en) 2018-01-17 2018-01-17 Filter pinhole alignment adjusting device and method based on grating diffraction

Country Status (1)

Country Link
CN (1) CN108459419B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112197943A (en) * 2020-09-17 2021-01-08 中国科学院上海光学精密机械研究所 High-precision off-line debugging method for high-power laser far-field imaging system

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5076689A (en) * 1991-03-27 1991-12-31 Rockwell International Off axis mirror alignment
JPH09229635A (en) * 1996-02-23 1997-09-05 Matsushita Electric Ind Co Ltd Actual space length measuring method by photographing means, calibrating method in optical system and reference standard used for calibration in optical system
CN1971232A (en) * 2006-12-13 2007-05-30 中国科学院光电技术研究所 Hartmann wavefront sensor with active alignment function and detection method therefor
CN101216610A (en) * 2008-01-09 2008-07-09 中国科学院上海光学精密机械研究所 Spatial filter light path alignment adjusting apparatus and regulation method
CN101266340A (en) * 2008-04-25 2008-09-17 中国科学院上海光学精密机械研究所 Method for regulating high power laser apparatus light path alignment
US20110228366A1 (en) * 2010-03-22 2011-09-22 Shou LIU Hoe optical system for holographic sight
CN102354055A (en) * 2011-11-08 2012-02-15 上海激光等离子体研究所 Light path collimation integrated device and method for high-power laser device
WO2014078356A1 (en) * 2012-11-13 2014-05-22 AMI Research & Development, LLC Wideband light energy waveguide and detector
WO2015034950A2 (en) * 2013-09-03 2015-03-12 Michael Deutsch Smile correction using fac lens deformation
CN104503100A (en) * 2014-12-16 2015-04-08 中国科学院上海光学精密机械研究所 Crystal auto-collimation regulation device and method on basis of optical grating diffraction
CN104570380A (en) * 2015-01-22 2015-04-29 中国科学院上海光学精密机械研究所 Spatial filter debugging device and method
CN104748686A (en) * 2015-04-21 2015-07-01 中国科学院光电技术研究所 Device and method for using pinhole diffraction waves to position to-be-measured part
CN106681014A (en) * 2017-02-16 2017-05-17 中国科学院上海光学精密机械研究所 High-precision light path collimation method suitable for high-power laser device
CN206757098U (en) * 2017-06-13 2017-12-15 福州高意通讯有限公司 A kind of MEMS-type can adjust optical filter
CN107577023A (en) * 2017-10-11 2018-01-12 中国工程物理研究院上海激光等离子体研究所 A kind of adjusting method of heavy-caliber optical grating pulse shortener posture

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5076689A (en) * 1991-03-27 1991-12-31 Rockwell International Off axis mirror alignment
JPH09229635A (en) * 1996-02-23 1997-09-05 Matsushita Electric Ind Co Ltd Actual space length measuring method by photographing means, calibrating method in optical system and reference standard used for calibration in optical system
CN100401376C (en) * 1996-02-23 2008-07-09 松下电器产业株式会社 Reference gauge for magnetic recording track check apparatus
CN1971232A (en) * 2006-12-13 2007-05-30 中国科学院光电技术研究所 Hartmann wavefront sensor with active alignment function and detection method therefor
CN101216610A (en) * 2008-01-09 2008-07-09 中国科学院上海光学精密机械研究所 Spatial filter light path alignment adjusting apparatus and regulation method
CN101266340A (en) * 2008-04-25 2008-09-17 中国科学院上海光学精密机械研究所 Method for regulating high power laser apparatus light path alignment
US20110228366A1 (en) * 2010-03-22 2011-09-22 Shou LIU Hoe optical system for holographic sight
CN102354055A (en) * 2011-11-08 2012-02-15 上海激光等离子体研究所 Light path collimation integrated device and method for high-power laser device
WO2014078356A1 (en) * 2012-11-13 2014-05-22 AMI Research & Development, LLC Wideband light energy waveguide and detector
WO2015034950A2 (en) * 2013-09-03 2015-03-12 Michael Deutsch Smile correction using fac lens deformation
CN104503100A (en) * 2014-12-16 2015-04-08 中国科学院上海光学精密机械研究所 Crystal auto-collimation regulation device and method on basis of optical grating diffraction
CN104570380A (en) * 2015-01-22 2015-04-29 中国科学院上海光学精密机械研究所 Spatial filter debugging device and method
CN104748686A (en) * 2015-04-21 2015-07-01 中国科学院光电技术研究所 Device and method for using pinhole diffraction waves to position to-be-measured part
CN106681014A (en) * 2017-02-16 2017-05-17 中国科学院上海光学精密机械研究所 High-precision light path collimation method suitable for high-power laser device
CN206757098U (en) * 2017-06-13 2017-12-15 福州高意通讯有限公司 A kind of MEMS-type can adjust optical filter
CN107577023A (en) * 2017-10-11 2018-01-12 中国工程物理研究院上海激光等离子体研究所 A kind of adjusting method of heavy-caliber optical grating pulse shortener posture

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
韩建等: ""全息光栅曝光系统中空间滤波器孔径与激光束腰关系的选择方法"", 《物理学报》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112197943A (en) * 2020-09-17 2021-01-08 中国科学院上海光学精密机械研究所 High-precision off-line debugging method for high-power laser far-field imaging system
CN112197943B (en) * 2020-09-17 2022-03-08 中国科学院上海光学精密机械研究所 High-precision off-line debugging method for high-power laser far-field imaging system

Also Published As

Publication number Publication date
CN108459419B (en) 2020-05-05

Similar Documents

Publication Publication Date Title
CN102354055B (en) Light path collimation integrated device and method for high-power laser device
CN101266340A (en) Method for regulating high power laser apparatus light path alignment
CN102564611B (en) High-power laser wave front measuring instrument and wave front measuring method
CN106291580A (en) Laser infrared radar imaging system
US9690105B2 (en) Calibratable beam shaping system and method
CN107852475A (en) Optical projection system
CN113092070B (en) Beam quality factor M 2 Quick measuring device and method
JP2004045266A (en) Three-dimensional information detection method and apparatus
CN106233125A (en) Copolymerization focal line detection optical system
CN105675151A (en) Application device based on light intensity transmission equation phase retrieval
CN107450179B (en) Active correlation imaging optical system based on multi-channel semiconductor laser
CN108459419A (en) Filter aperture alignment adjusting apparatus based on optical grating diffraction and method
CN106093913B (en) A kind of adjusting method of the common visual field of laser radar binary channels
US20160037024A1 (en) Liquid crystal lens imaging method and apparatus
CN104501972A (en) Compound shack-hartmann wave-front sensor
CN100334463C (en) Optical calibrating apparatus and method of laser ranging system
CN105675265B (en) Heavy caliber beam collimation measurement apparatus
CN104503100B (en) Crystal auto-collimation adjusting apparatus and method based on optical grating diffraction
WO2017145629A1 (en) Multi-core fiber cross talk measuring method and measuring apparatus
CN210038347U (en) Light spot homogenizing and beam expanding device and imaging device
US9007689B2 (en) Method and apparatus for forming multiple images
CN209878133U (en) Calibration device for focal spot dynamic range by schlieren method
CN113156654B (en) Low-repetition-frequency laser auto-collimation device and collimation method thereof
EP3220185B1 (en) Device and process for the plenoptic capture of images
CN102866498B (en) Method for designing photographing device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant