CN206757098U - A kind of MEMS-type can adjust optical filter - Google Patents
A kind of MEMS-type can adjust optical filter Download PDFInfo
- Publication number
- CN206757098U CN206757098U CN201720682794.3U CN201720682794U CN206757098U CN 206757098 U CN206757098 U CN 206757098U CN 201720682794 U CN201720682794 U CN 201720682794U CN 206757098 U CN206757098 U CN 206757098U
- Authority
- CN
- China
- Prior art keywords
- mems
- grating
- type
- optical filter
- collimater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
It the utility model is related to optical communication field, disclose a kind of MEMS-type and can adjust optical filter, including optical fiber collimator, grating and MEMS mirror, light incides the grating from the collimater with the nominal incidence angle of the grating, the grating provides wavelength correlation dispersion function, and the light of different wave length is projected with the different angles of diffraction and incides the MEMS mirror again, and the MEMS mirror selects filtering output by angular adjustment.The beneficial effects of the utility model are simple in construction, and bandwidth is appropriate, small volume, is had a wide range of applications in the occasion such as high-speed transceiver and light amplification module.
Description
Technical field
Optical communication field is the utility model is related to, more particularly to a kind of MEMS-type can adjust optical filter.
Background technology
Optical filter is a staple product in optical communication product, and tunable optical filter is even more current main development
Direction.With the development of MEMS technology and technique, the tunable filter based on MEMS platforms has become adjustable optical filtering
An important member in device family.But for the wave filter of different core technical scheme, MEMS-type optical filter is due to tool
Standby Insertion Loss is small, adjustable range is wide, isolation is high, tuning speed is fast, stability is high, polarization correlated small etc. a little, and as wide
General concern.
It is to pursue narrow bandwidth or flat-top mostly but the MEMS-type tunable filter seen at present, is limited to its application scenarios
The performances such as filtering, so as to cause the complicated of product, and volume is larger, under the application trend of current highly integrated optical module
Encounter bottleneck.
The content of the invention
The purpose of this utility model is the MEMS tunable filters for putting forward a kind of simple structure, except with above-mentioned
It is appropriate with more bandwidth outside the advantages of MEMS-type wave filter, the advantages that small volume.
To reach above-mentioned purpose, technical scheme provided by the utility model is：A kind of MEMS-type can adjust optical filter,
It is characterized in that including optical fiber collimator, grating and MEMS mirror, light nominally entering with the grating from the collimater
Firing angle incides the grating, and the grating provides wavelength correlation dispersion function, and the light of different wave length is again with the different angles of diffraction
Project and incide the MEMS mirror, the MEMS mirror selects filtering output by angular adjustment.
Further, the optical fiber collimator is single optical fiber calibrator, and filtering signal filters out from former port.
Further, the optical fiber collimator is double-fiber collimator, output end of the filtering signal from double-fiber collimator
Mouth filters out.
Further, a speculum is inserted between the optical fiber collimator and the grating, by collimater and
MEMS mirror realizes encapsulation in upright arrangement.
Further, a prism is inserted between the optical fiber collimator and the grating, light is realized by reflecting
Road turnover function, collimater and MEMS mirror are realized into encapsulation in upright arrangement.
Further, the MEMS mirror can be driven by voltage and be rotated.
Further, the grating uses 966 line fused silica transmission gratings.
The beneficial effects of the utility model are simple in construction, and bandwidth is appropriate, small volume, in high-speed transceiver and light amplification module
Had a wide range of applications etc. occasion.
Brief description of the drawings
Fig. 1 is embodiment one of the present utility model；
Fig. 2 is typical, filtered oscillogram of the present utility model；
Fig. 3 is embodiment two of the present utility model；
Fig. 4 positions embodiment three of the present utility model.
Reference：1st, collimater；2nd, grating；3rd, MEMS mirror；4th, speculum；5th, deflecting prism.
Embodiment
With reference to the accompanying drawings and detailed description, the utility model is described further.
The utility model MEMS-type tunable optical filter, its agent structure include collimater, grating and MEMS mirror,
The characteristics of with simple in construction and small size.It can be used for the application such as optical channel monitoring, ASE noise filterings, the utility model filter
Ripple waveform is Gaussian filtering output, and its amount of bandwidth depends on two factors of collimater spot size and grating resolution.Should
The relatively conventional at present MEMS-type tunable optical filter of invention, has small volume, easily realizes the advantages that module integrates.
Specifically, embodiment one, collimater 1 incide 966 lines of transmission with the nominal incidence angle of transmission grating as shown in Figure 1
Fused silica transmission grating 2,49.9 degree of nominal incidence angle, different wave length signal is after grating according to grating formula：
λ=d* (sin (θi)+sin(θd))
λ --- signal wavelength；D--- grating constants；θ i--- incidence angles；The θ d----- angles of diffraction
Project and incide on MEMS mirror face 3 with the different angles of diffraction.MEMS mirror 3 can be driven by voltage to be revolved
Turn different angle, now the wavelength signals original road for selecting filtering can be reflected back into the letter according to the filtering demands of reality
Number it can be filtered out from the output port of double-fiber collimator 1.If the single optical fiber calibrator used, filtering signal are filtered from former port
Go out.
Embodiment two as shown in Figure 3, by inserting a speculum 4 in the optical path, collimater 1 and MEMS can be reflected
Mirror 3 realizes encapsulation in upright arrangement.The meaning of the encapsulation is smaller device profile can be achieved, and in-line arrangement profile is more conventional, more
It is easy to the integrated application in some modules.Speculum herein can also be replaced using a trans prism of Inner.
Embodiment three as shown in Figure 4, by inserting a prism 4 in the optical path, light path turnover work(is realized by reflecting
Can, it can be obtained than reflecting the smaller outside dimension of turnover scheme in Fig. 3 in theory.
Although specifically showing and describing the utility model with reference to preferred embodiment, those skilled in the art should
This is understood, is not departing from the spirit and scope of the present utility model that appended claims are limited, in form and details
On the present invention is made a variety of changes, be the scope of protection of the utility model.
Claims (7)
1. a kind of MEMS-type can adjust optical filter, it is characterised in that including optical fiber collimator, grating and MEMS mirror,
Light incides the grating from the collimater with the nominal incidence angle of the grating, and the grating provides wavelength correlation dispersion work(
Can, the light of different wave length is projected with the different angles of diffraction and incides the MEMS mirror again, and the MEMS mirror passes through
Angular adjustment selection filtering output.
2. MEMS-type as claimed in claim 1 can adjust optical filter, it is characterised in that the optical fiber collimator is single fiber
Collimater, filtering signal filter out from former port.
3. MEMS-type as claimed in claim 1 can adjust optical filter, it is characterised in that the optical fiber collimator is double optical fiber
Collimater, filtering signal filter out from the output port of double-fiber collimator.
4. MEMS-type as claimed in claim 1 can adjust optical filter, it is characterised in that the optical fiber collimator with it is described
A speculum is inserted between grating, collimater and MEMS speculums are realized into encapsulation in upright arrangement.
5. MEMS-type as claimed in claim 1 can adjust optical filter, it is characterised in that the optical fiber collimator with it is described
A prism is inserted between grating, light path turnover function is realized by reflecting, collimater and MEMS speculums are realized straight
Row encapsulation.
6. MEMS-type can adjust optical filter as described in claim 1-5 is any, it is characterised in that the MEMS mirror can
Driven and rotated by voltage.
7. MEMS-type can adjust optical filter as described in claim 1-5 is any, it is characterised in that the grating uses 966
Line fused silica transmission grating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720682794.3U CN206757098U (en) | 2017-06-13 | 2017-06-13 | A kind of MEMS-type can adjust optical filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720682794.3U CN206757098U (en) | 2017-06-13 | 2017-06-13 | A kind of MEMS-type can adjust optical filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206757098U true CN206757098U (en) | 2017-12-15 |
Family
ID=60622566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720682794.3U Active CN206757098U (en) | 2017-06-13 | 2017-06-13 | A kind of MEMS-type can adjust optical filter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206757098U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108459419A (en) * | 2018-01-17 | 2018-08-28 | 中国科学院上海光学精密机械研究所 | Filter aperture alignment adjusting apparatus based on optical grating diffraction and method |
| WO2020000773A1 (en) * | 2018-06-29 | 2020-01-02 | 昂纳信息技术（深圳）有限公司 | Flat-topped optical filter |
-
2017
- 2017-06-13 CN CN201720682794.3U patent/CN206757098U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108459419A (en) * | 2018-01-17 | 2018-08-28 | 中国科学院上海光学精密机械研究所 | Filter aperture alignment adjusting apparatus based on optical grating diffraction and method |
| WO2020000773A1 (en) * | 2018-06-29 | 2020-01-02 | 昂纳信息技术（深圳）有限公司 | Flat-topped optical filter |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9256073B2 (en) | Optical cross-coupling mitigation system for multi-wavelength beam combining systems | |
| CN102033312B (en) | Tunable optical filter based on MEMS (micro electro mechanical system) technology | |
| CN206757098U (en) | A kind of MEMS-type can adjust optical filter | |
| EP3355422B1 (en) | Wavelength tunable external cavity quantum cascade laser utilizing an angle tuned immersion grating as a wavelength selection filter element | |
| US9596032B2 (en) | Bi-directional optical transceiver module | |
| CN103616074B (en) | Wavelength calibration method for digital micromirror grating spectrometer | |
| US20170299858A1 (en) | Wavelength Selective Switch | |
| CN201051159Y (en) | Adjustable light attenuator with monitor | |
| CN105846308A (en) | Spectrum synthesis device and method based on 45-degree incident dichroscope | |
| CN106405745A (en) | Attenuation adjustable broadband wavelength tunable filter | |
| US9720250B1 (en) | Tunable optical filter with adjustable bandwidth | |
| US20130022313A1 (en) | Optical Devices and Methods of Making and Using the Same | |
| US10459169B2 (en) | Dispersion-compensative optical assembly | |
| CN204694885U (en) | A kind of multi-wavelength assembly for optical-fibre communications | |
| JP6893039B2 (en) | Optical device | |
| US6560249B1 (en) | Laser source with integral filtering of the amplified spontaneous emission | |
| CN203983726U (en) | A kind of high power pulse optical fiber laser | |
| CN214151131U (en) | Broadband wavelength tunable optical filter | |
| CN103731210A (en) | Multifunctional integrated device for ASE optical fiber source | |
| CN107037575A (en) | A kind of off-axis reflection optical antenna and system | |
| JP2007336253A (en) | Optical transmission system | |
| CN101933255B (en) | In-channel residual chromatic dispersion measurement | |
| CN217879719U (en) | High-order Gaussian optical filter | |
| US20220196916A1 (en) | Optical fiber filter with ultra-wide tuning range | |
| CN109217086A (en) | Tunable wave length passive mode-locking ytterbium-doping optical fiber laser based on volume Bragg grating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |