CN104570380A - Spatial filter debugging device and method - Google Patents

Spatial filter debugging device and method Download PDF

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CN104570380A
CN104570380A CN201510031277.5A CN201510031277A CN104570380A CN 104570380 A CN104570380 A CN 104570380A CN 201510031277 A CN201510031277 A CN 201510031277A CN 104570380 A CN104570380 A CN 104570380A
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spatial filter
lens
fiber optic
adjustment
quality
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CN104570380B (en
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朱海东
郭爱林
谢兴龙
朱健强
杨庆伟
高奇
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46—Systems using spatial filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30—Collimators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

The invention provides a spatial filter debugging device running on a vacuum condition and a spatial filter debugging method. The device and method have the advantages that the structure is simple, adjustment is convenient, and the debugging accuracy is high; moreover, the optical quality of a spatial filter can be evaluated by means of transverse shear interference fringes produced in the measuring process, so the assembling and calibration level and the detection level of the spatial filter can be increased, and technical studies of laser drivers can be supported.

Description

The debugging apparatus of spatial filter and adjustment method
Technical field
The present invention relates to spatial filter, particularly a kind of debugging apparatus of spatial filter and adjustment method.
Background technology
Spatial filter is the core optical system in laser aid.It is for suppressing nonlinear effect, improves system safety operation flux, carries out filter cutoff to high-frequency information, protection laser working medium.Under normal circumstances, have the spatial filter of a large amount of and different bore in laser aid, it is most important that the performance of spatial filter and debugging thereof run for the development of device and later stage; The core optical element of spatial filter is the input and output optics convex lens possessing different bore and focal length, and therefore the performance of spatial filter depends primarily on precision debugging and the location and installation of its input and output convex lens.
Current optical processing technology level, the error of focal length of lens processing ubiquity 1 ‰ ~ 5 ‰.In order to reduce the adverse effect that this error is brought spatial filter on-line debugging and installation, under usual conditions, the adjustment and installation of spatial filter adopts the focus utilizing knife-edge method to find out input convex lens under atmospheric environment, the position of regulation output lens again, realize input and output convex lens and possess confocal and coaxial feature in atmospheric conditions, then calculate the particular location of two lens when vacuum pipe is in vacuum state according to index meters different in air and vacuum, thus complete the adjustment and installation of spatial filter.But this adjustment method is difficult to ensure in spatial filter vacuum pipe chamber as under vacuum condition and when applying in laser aid, input and output lens possess good confocal coaxial feature, and then bring great risk to the engineering development of laser aid and later stage safe operation.
Therefore, development is needed to be applicable to laser driver and effective spatial filter debugging apparatus and method thereof, also simplify it in traditional thread binding school side formula, final improving laser system output beam quality and safe operation ability with the debugging of implementation space wave filter precision simultaneously.
Summary of the invention
The object of the invention is to overcome the deficiency that above-mentioned spatial filter carries out debugging under atmospheric environment, a kind of debugging apparatus and adjustment method of the spatial filter run under vacuum are proposed, it is simple that these apparatus and method possess structure, easy to adjust, adjustment accuracy high, and the optical quality of lateral shearing interference striped to spatial filter produced in measuring process can be utilized to assess, provide valuable detection data for spatial filter uses online at laser driver.
For achieving the above object, this invention takes following technical scheme:
A kind of debugging apparatus of spatial filter, its feature is: this device comprises fiber optic point source, collimation lens successively along this fiber optic point source Laser output direction, spatial filter adjustment rack and support platform, shear interference plate, ground glass and CCD, the input end of the output termination real time image collection computing machine of this CCD, described spatial filter adjustment rack and support platform are put and adjustment for spatial filter to be adjusted, spatial filter to be adjusted is connected with cryopump high vacuum unit by vacuum corrugated pipe, described pointolite is core diameter is 5.8 μm of fiber optic point sources, be positioned at the front focus position on described collimation lens optical axis, fiber optic point source and collimation lens are fixed on same optical table, described spatial filter adjustment rack and support platform are by placing spatial filter supporting bable tops to be debugged and regulating spatial filter adjustment rack to form, and adjustment rack can at level, vertical, the integrally-regulated spatial filter to be measured of beat and the four-dimensional direction of pitching, described shear interference plate is 45 ° of reflective wedge of glass plates placed, and front surface plates semi-transparent semi-reflecting film, and the film that is all-trans is plated in rear surface.
Utilize the method for adjustment of debugging apparatus to spatial filter of above-mentioned spatial filter, the method comprises the following steps:
1. meticulous adjustment fiber optic point source, fiber optic point source is made to be positioned at the front focus of described collimation lens, the divergencing laser light beam of fiber optic point source collimates the parallel laser light beam producing high-quality almost plane ripple after collimation lens, and fixed fiber pointolite and high-quality collimation lens are at same optical table table top subsequently; Fiber optic point source core diameter is less than one times of diffraction limit of the far-field focus of high-quality collimation lens;
2. spatial filter to be adjusted is placed on spatial filter adjustment rack, the adjustment rack of meticulous adjustment spatial filter ensures fiber optic point source and high-quality collimation lens composition high quality flat line light source smoothly by the input machinery cover plate flange of spatial filter and the filtering aperture of the logical light aperture and spatial filter inside that export axis place of mechanical cover plate flange center, coaxial with high quality flat line light source with implementation space wave filter;
3. remove the input machinery cover plate flange of spatial filter to be adjusted and export mechanical cover plate flange, the source of parallel light of the high-quality almost plane ripple that described high quality flat line light source exports is through incident shear interference plate after spatial filter to be adjusted, ground glass is observed shear interference plate front and rear surfaces and forms Shearing interference fringes, by the pattern of CCD and real time image collection computer acquisition Shearing interference fringes, the standard baseline of its interference fringe and shear interference plate presents parastate;
4. the input lens of spatial filter to be adjusted is reinstalled to the entrance of spatial filter to be adjusted, the beat of debugging input lens and luffing angle, ensure optical axis and the source of parallel light optical axis coincidence of input lens; Debug space wave filter input lens ensures that incident high quality flat line light source focuses on the filtering small hole center that the far-field focus formed is positioned at spatial filter, observes that the Shearing interference fringes on ground glass presents divergent state by CCD and real time image collection computing machine;
5. the output lens of spatial filter to be adjusted is reinstalled to the outlet of spatial filter, the beat of same debugging output lens and pitching, ensure lens axis and source of parallel light optical axis coincidence; The incident shear interference plate of high quality flat line light source outgoing beam after spatial filter input lens and output lens, the Shearing interference fringes observed on ground glass by CCD and real time image collection computing machine is presented to be dispersed or convergence state;
6. described spatial filter is connected with cryopump high vacuum unit by vacuum corrugated pipe, cryopump high vacuum unit is made up of cryopump and forvacuum unit, first spatial filter is reached to low vacuum by forvacuum machine assembly air-exhausting, then is reached by cryopump and can keep spatial filter high vacuum state.Spatial filter vacuum pump set described in unlatching, when in pipeline, vacuum tightness reaches high vacuum requirement, by the input lens of spatial filter and the adjustment of output lens, at the meticulous adjustment input lens of optical axis direction and output lens, and observe the change of the Shearing interference fringes pattern on ground glass simultaneously:
When ground glass interference fringe present disperse feature time, regulate spatial filter input lens and output lens to the movement away from spatial filter pinhole direction;
When Shearing interference fringes presents convergence feature at ground glass, regulate spatial filter input lens and output lens to the movement near spatial filter pinhole direction;
When Shearing interference fringes presents parallel wave beam characteristics, time namely parallel with the baseline of described shear interference plate, the parallel beam of high-quality almost plane popin line light source still outputting high quality almost plane ripple after spatial filter to be adjusted is described; Now locking and the input lens of fixed space wave filter and the orientation of output lens and axial regulating mechanism, complete the installment and debugging of whole spatial filter.
The present invention can be widely applied to the precision debugging of the online spatial filter of laser aid, has the features such as equipment is simple, precision measure is high, interference pattern is directly perceived.
Accompanying drawing explanation
Fig. 1 is the debugging apparatus schematic diagram of spatial filter of the present invention;
Fig. 2 is the light beam Shearing interference fringes schematic diagram after spatial filter observed in CCD;
In figure, left figure striped tilts along oblique direction, and light beam has disperses feature; Intermediate pattern striped is parallel with datum line, and light beam is parallel beam; Right figure striped is along tiltedly lower direction inclination, and light beam has convergence feature.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further illustrated.
Embodiment 1:
A debugging apparatus for spatial filter, is characterized in that: this device is made up of fiber optic point source 1, high-quality collimation lens 2, spatial filter adjustment rack and support platform 3, shear interference plate 4, ground glass 5, CCD6, real time image collection computing machine 7 and spatial filter 8;
Described pointolite 1 is core diameter is 5.8 μm of fiber optic point sources, it is positioned at the front focus position on collimation lens 2 optical axis, fiber optic point source disperses the parallel beam that Gaussian Beam collimation lens 2 collimates rear outputting high quality almost plane ripple, and fiber optic point source 1 and collimation lens 2 are fixed on same optical table;
Described spatial filter adjustment rack and support platform 3 are by placing the supporting bable tops of spatial filter to be debugged and regulating spatial filter adjustment rack to form, and adjustment rack can in level, and vertically, beat and the four-dimensional direction of pitching adjust spatial filter to be regulated.
Described shear interference plate 4 is 45 ° and places reflective wedge of glass plate, and front surface plates semi-transparent semi-reflecting film, and the film that is all-trans is plated in rear surface.By CCD6 and and real time image collection computing machine 7 can the interference fringe that formed at ground glass 5 of the folded light beam of real-time monitored shear interference plate front and rear surfaces and change thereof;
The beam direction exported along described fiber optic point source 2 is described collimation lens 2, spatial filter adjustment rack and support platform 3, shear interference plate 4, ground glass 5, CCD6 and real time image collection computing machine 7 successively;
When utilizing said apparatus adjustment spatial filter, interference fringe and change thereof that described shear interference plate formed on ground glass can be observed simultaneously, when interference fringe and ground glass benchmark graticule consistent time, namely complete the debugging of spatial filter and to its optical quality assessment and can detect simultaneously;
Described spatial filter 8 is connected with cryopump high vacuum unit 9 by vacuum corrugated pipe, and cryopump high vacuum unit 9 is made up of cryopump and forvacuum unit.
The adjustment method of spatial filter of the present invention, the method comprises the following steps:
1. meticulous adjustment fiber optic point source 1, be located at the front focus of high-quality collimation lens 2, the divergencing laser light beam of fiber optic point source 1 collimates the parallel laser light beam producing high-quality almost plane ripple after collimation lens 2, and fixed fiber pointolite 1 and high-quality collimation lens 2 are in same optical table table top subsequently; Fiber optic point source 1 core diameter is less than one times of diffraction limit of the far-field focus of high-quality collimation lens 2;
2. spatial filter 8 is arranged on the spatial filter adjustment rack of support platform, the adjustment rack of meticulous adjustment spatial filter ensures that fiber optic point source 1 and high-quality collimation lens 2 form high quality flat line light source smoothly by the logical light aperture at axis place of spatial filter input and output machinery cover plate flange center and the filtering aperture of spatial filter inside, possesses coaxial feature with implementation space wave filter and high quality flat line light source;
3. remove the mechanical cover plate flange of spatial filter 8 input end and output terminal, place shear interference plate 4 at the end of spatial filter.The source of parallel light of high-quality almost plane ripple is through incident shear interference plate 4 after spatial filter, can be observed shear interference plate 4 front and rear surfaces at ground glass 5 and form Shearing interference fringes, gathered the pattern of Shearing interference fringes by CCD6 and real time image collection computing machine 7, the standard baseline of its interference fringe and shear interference plate 4 presents parastate;
4. spatial filter input lens 10 is installed to the entrance of spatial filter, debugging input lens beat and luffing angle, ensures optical axis and the source of parallel light optical axis coincidence of input lens; Debug space wave filter input lens 10 ensures that incident high quality flat line light source focuses on the filtering small hole center that the far-field focus formed is positioned at spatial filter, and the Shearing interference fringes that CCD6 and real time image collection computing machine 7 can observe on ground glass 5 presents divergent state;
5. spatial filter output lens 11 is installed to spatial filter outlet, beat and the pitching of same debugging lens ensure lens axis and source of parallel light optical axis coincidence; The incident shear interference plate 4 of high quality flat line light source outgoing beam after spatial filter input lens 10 and output lens 11, the Shearing interference fringes observed on ground glass 5 by CCD6 and real time image collection computing machine 7 is presented to be dispersed or convergence state.
6. spatial filter vacuum pump set is opened, when in pipeline, vacuum tightness reaches high vacuum requirement, by the adjustment structure of spatial filter two ends input lens and output lens at the meticulous adjustment input lens 10 of optical axis direction and output lens 11, and observe the change of the Shearing interference fringes pattern on ground glass 5 simultaneously: when ground glass 5 interference fringe present disperse feature time, regulate spatial filter input lens (10) and output lens 11 to the movement away from spatial filter pinhole direction; When Shearing interference fringes presents convergence feature at ground glass 6, regulate spatial filter input lens 4 and output lens 5 to the movement near spatial filter pinhole direction; When Shearing interference fringes presents parallel wave beam characteristics, time namely parallel with shear plate baseline, the parallel beam of high-quality almost plane popin line light source still outputting high quality almost plane ripple after spatial filter is described; Now locking and the input lens 4 of fixed space wave filter and the orientation of output lens 5 and axial regulating mechanism, complete the installment and debugging of whole spatial filter.
Principle of work of the present invention is as follows:
By meticulous for 1053nm laser fiber pointolite 1 be adjusted to high-quality collimation lens focal position after, light beam is outgoing almost plane ripple after high-quality collimation lens.The shear interference plate pairing approximation plane wave with suitable shearing displacement carries out interferometry and can obtain interference fringe.Be placed between collimation lens and shear plate by spatial filter again, almost plane ripple by forming new interference fringe pattern on shearing interferometer after spatial filter.Interference fringe can manifest spatial filter exit plane wave-wave face quality in real time, and then accurately can determine the optical quality of spatial filter and manifest its intrinsic aberration characteristics, and its device is shown in shown in Figure of description 1.
Lateral shearing interferometer possesses the essential characteristic copied with translation original wavefront.The interference signal figure of the original wavefront that Figure of description 2 observes for ground glass and lateral shear wavefront.When incident wavefront is almost plane, wavefront is expressed as W (x, y), and (x, y) is the coordinate position of arbitrfary point P (x, y).When wavefront has value to be the shearing of S in x direction, the wavefront error in any point before shearing wave is W (x-S, y).On P (x, y) point, wavefront discrepancy delta W (x, y)=W (x, the y)-W (x-S, y) between before original wavefront and shearing wave.Like this, in shear interference metering, the amount of trying to achieve is needed to be Δ W (x, y).Can by wavefront error Δ W (x, y) conveniently relational expression be expressed as the unit of wavelength
ΔW(x,y)＝nλ (1)
Wherein, n is the level time of interference fringe, and λ is wavelength used.? under form, the left side of above formula can be its several times.When shearing displacement S minimum and in theory close to zero time, the change relative translation amount of wavefront difference be changing into differential form, can be write as into
∂ W ( x , y ) ∂ x S = nλ - - - ( 2 )
Like this, the information obtained in lateral shearing interference plate is with the optical aberrations of angle tolerance along with shearing displacement S goes to zero, formula (2) can become more accurate.But along with shearing displacement S more close to zero time, the sensitivity of measurement also can reduce.Therefore, have chosen suitable shearing displacement S in patent of the present invention for 1053nm optical maser wavelength, ensure that laser aid spatial filter debug process has high sensitivity and accuracy.
When high-quality collimation lens near focal point places 1053nm fiber optic point source, the spherical wave front of the light beam dimpling (dispersing) that outgoing radius-of-curvature is very large after spatial filter to be debugged or nick (convergence).Spherical wave front is with out of focus aberration for principal character, and it can be expressed as:
W(x,y)＝D(x 2+y 2) (3)
Coefficient D represents the amplitude of error, usually provides with number of wavelengths.When spherical wave front carries out lateral shear (shearing displacement is S) in x direction, and copy wavefront when there is a quantitative inclination relative to original wavefront, namely out of focus and wavetilt are simultaneously under existence condition, and the optical path difference produced before shearing wave is expressed as:
ΔW(x,y)＝2DxS+Ey＝nλ (4)
In formula, E is the pitch angle before shearing wave and between original wavefront.Above-mentioned formula represents that the interference fringe obtained is both be not parallel to the linear fringe that x-axis is also not parallel to y-axis.Only have when coefficient D or E is zero, striped can be parallel to x-axis or y-axis.In these cases, even if the very little out of focus of the spherical wave front of inspection also can be observed, and dispersing and converging feature of spherical wave front can accurately be judged.In spatial filter debugging, can according to the angle calcu-lation defocused image difference data of interference fringe in shear direction, and for during vacuum, meticulous adjustment input lens and output lens possess confocal and coaxial feature to meet them respectively in spatial filter pipeline.In actual applications, we obtain input lens and the confocal and coaxial accuracy of output lens can reach 0.2 ‰.
According to above-mentioned lateral shearing interference principle, in design and use, shear flat, wedge angle direction and shear direction perpendicular.As when tested light beam is ideal parallelism light source, then interference fringe is parallel to shear direction; If tested light beam is the spherical wave front of assembling or dispersing, then striped will rotate, as shown in Figure of description 2: its interference fringe when Fig. 2 (a) is for dispersing, Fig. 2 (b) is its interference fringe time parallel, its interference fringe when Fig. 2 (c) is for converging.
In addition, if incident wavefront carries other aberrations, then Shearing interference fringes is no longer vertical bar line, and corresponding different aberration-types, corresponding change can occur striped form.Therefore, can according to the type of shape of stripes qualitative analysis Wavefront aberration and amplitude, decision space wave filter has other aberration as features such as primary spherical aberration, elementary coma and elementary astigmatisms.
The interpretation of beam collimation degree: the vergence direction observing interference fringe receiving screen striped, if striped is parallel with datum line, then light beam is collimation, is indicated as parallel beam; If striped tilts along oblique direction, then light beam is dispersed; If striped is along tiltedly lower direction inclination, then light beam assembles.When light beam is not parallel, by measuring striped relative to the corner of datum line, the angle of divergence of light beam can be extrapolated.Computing method are shown below:
R = S nβ tan θ Δθ = D R - - - ( 5 )
Wherein R is the radius-of-curvature (when light beam is directional light, radius-of-curvature is infinitely great) on corrugated; Δ θ is beam divergence angle; D is incident beam bore; S is shearing displacement (constant depends on shear plate thickness); θ shears the inclination angle between striped and horizontal reference line; N is the refractive index of shear plate material; β is the angle of wedge of shear plate.
The heavy caliber spatial filter of above-mentioned shearing interference method to God Light II laser driver is adopted to carry out on-line debugging.Spatial filter input lens 10 and output lens 11 Theoretical Design focal length are respectively 11879mm and 11050mm, but optical manufacturing error is 1 ‰ ~ 5 ‰.The input lens of spatial filter 8 and the maximum clear aperture of output lens are 340mm × 340mm, and fiber optic point source 1 is wavelength X=1.053 μm fundamental transverse mode single-mode fiber (Nufern 1060-XP), and core diameter is 5.8 μm.The light beam clear aperture of described collimation lens 2 is 350mm × 350mm, and the focal length of collimation lens is 159754.3mm through accurate calibration.
When incident collimation lens is to gauss laser beam and when focusing on, the focal beam spot radius of ideal parallelism light (gaussian intensity profile) is:
w 0 = λf D = 1.053 × 10 - 6 × 15.97543 0.35 = 4.8 × 10 - 5 m
In formula, λ is wavelength, and f is focal length, and D is the light beam length of side.Above-mentioned data display, the diameter of fiber optic point source, much smaller than Gauss's focused beam of high-quality collimation lens, can be used as desirable pointolite, and its fiber optic point source launches corrugated can be approximately spherical wave.When fiber optic point source 1 is positioned at the front focus of collimation lens 2, light beam through collimated 2 for being approximately ideal parallelism light beam.
During incident Gauss's parallel laser light beam of the input lens 10 of above-mentioned spatial filter 8 and output lens 11, focal beam spot radius w inand w outfor:
w in = λf D = 1.053 × 10 - 6 × 11.879 0.34 = 3.68 × 10 - 5 m
w out = λf D = 1.053 × 10 - 6 × 11.050 0.34 = 3 . 42 × 10 - 5 m
Their theoretical depth of focus is calculated as follows:
The theoretical depth of focus of input lens: Z = ± 0.46 π w in 2 λ = ± 0.46 × 3.14 × 3.68 2 × 10 - 10 1.053 × 10 - 6 = ± 1.86 mm
The theoretical depth of focus of output lens: Z = ± 0.46 π w out 2 λ = ± 0.46 × 3.14 × 3 . 42 2 × 10 - 10 1.053 × 10 - 6 = ± 1.6 mm
Show according to debugging flow process of the present invention and actual debug data: spatial filter vacuum pipe is extracted to high vacuum (vacuum tightness 1 × 10 by Edward's low vacuum unit and TTI cryopump -3pa), and when keeping, when input and output lens are mobile within the scope of optical axis direction ± 1mm, shearing interferometer obviously can be told the change of interference fringe and output beam and present and disperse or convergence state.When interference fringe and fiducial mark wire clamp angle are 3 °, spatial filter output beam corrugated curvature is close to 4 × 10 4m; When interference fringe and fiducial mark wire clamp angle are 1 °, spatial filter output beam corrugated curvature is close to 1.4 × 10 5m.
In sum, for above-mentioned spatial filter, when utilizing observation space wave filter lens axis of the present invention to move, the sensitivity of interference fringe is 2mm, and measuring accuracy is 2/11050=0.18 ‰.In spatial filter debugging and laser driver engineer applied, the device of the spatial filter utilizing the present invention to debug effectively is applied at God Light II device of high power laser driver, features such as equipment is simple, measuring accuracy is high, shear interference pattern is directly perceived that it has and can be widely applied to other optical engineering fields.
Embodiment 2:
A kind of debugging apparatus of spatial filter, it is characterized in that: this device is by fiber optic point source 1, high-quality collimation lens 2, spatial filter adjustment rack and support platform 3, shear interference plate 4, ground glass 5, CCD6, and real time image collection computing machine 7 and spatial filter 8 form;
Described pointolite is core diameter is 5.8 μm of fiber optic point sources, it is positioned at the front focus position on high-quality collimation lens optical axis, fiber optic point source disperses the parallel beam of the rear outputting high quality almost plane ripple of Gaussian Beam collimation lens collimation, and fiber optic point source and high-quality collimation lens are fixed on same optical table;
Described spatial filter adjustment rack and support platform are by placing spatial filter supporting bable tops to be debugged and regulating spatial filter adjustment rack to form, and adjustment rack can in level, vertically, and the integrally-regulated spatial filter to be measured of beat and the four-dimensional direction of pitching;
Described shear interference plate is 45 ° and places reflective wedge of glass plate, and front surface plates semi-transparent semi-reflecting film, and the film that is all-trans is plated in rear surface.By CCD and and real time image collection computing machine can the interference fringe that formed at ground glass of the folded light beam of real-time monitored shear interference plate front and rear surfaces and change thereof;
The beam direction exported along described fiber optic point source is described high-quality collimation lens, spatial filter adjustment rack and support platform, shear interference plate, ground glass, CCD and real time image collection computing machine successively;
When utilizing said apparatus adjustment spatial filter, interference fringe and change thereof that described shear interference plate formed on ground glass can be observed simultaneously, when interference fringe and ground glass benchmark graticule consistent time, namely complete the debugging of spatial filter and to its optical quality assessment and can detect simultaneously;
Described spatial filter is connected with cryopump high vacuum unit by vacuum corrugated pipe, cryopump high vacuum unit is made up of cryopump and forvacuum unit, first spatial filter is reached to low vacuum by forvacuum machine assembly air-exhausting, then is reached by cryopump and can keep spatial filter high vacuum state.Described cryopump high vacuum unit is made up of cryopump and forvacuum unit, and first spatial filter is reached to low vacuum by forvacuum machine assembly air-exhausting, then is reached by cryopump and can keep spatial filter high vacuum state.
The adjustment method of described a kind of spatial filter, the method comprises the following steps:
1., meticulous adjustment fiber optic point source 1 is located at the front focus of high-quality collimation lens 2, the divergencing laser light beam of fiber optic point source 1 collimates the parallel laser light beam producing high-quality almost plane ripple after collimation lens 2, and fixed fiber pointolite 1 and high-quality collimation lens 2 are in same optical table table top subsequently; Fiber optic point source 1 core diameter is less than one times of diffraction limit of the far-field focus of high-quality collimation lens 2;
2., spatial filter 8 is arranged on the spatial filter adjustment rack of support platform, the adjustment rack of meticulous adjustment component space wave filter ensures that fiber optic point source 1 and high-quality collimation lens 2 form high quality flat line light source smoothly by the logical light aperture at axis place of spatial filter input and output machinery cover plate flange center and the filtering aperture of spatial filter inside, possesses coaxial feature with implementation space wave filter and high quality flat line light source;
3., remove the mechanical cover plate flange of spatial filter 8 input end and output terminal, place shear interference plate 4 at the end of spatial filter.The source of parallel light of high-quality almost plane ripple is through incident shear interference plate 4 after spatial filter, can be observed shear interference plate 4 front and rear surfaces at ground glass 5 and form Shearing interference fringes, gathered the pattern of Shearing interference fringes by CCD6 and real time image collection computing machine 7, the standard baseline of its interference fringe and shear interference plate 4 presents parastate;
4., by spatial filter input lens 10 be installed to spatial filter entrance, debugging lens beat and luffing angle ensure lens axis and source of parallel light optical axis coincidence; Debug space wave filter input lens 10 ensures that incident high quality flat line light source focuses on the filtering small hole center that the far-field focus formed is positioned at spatial filter, and the Shearing interference fringes that CCD6 and real time image collection computing machine 7 can observe on ground glass 5 presents divergent state;
5., by spatial filter output lens 11 be installed to spatial filter outlet, beat and the pitching of same debugging lens ensure lens axis and source of parallel light optical axis coincidence; The incident shear interference plate 4 of high quality flat line light source outgoing beam after spatial filter input lens 10 and output lens 11, is presented by CCD (6) and real time image collection computing machine 7 Shearing interference fringes that can observe on ground glass 5 and disperses or convergence state.
6., spatial filter vacuum pump set is opened, when in pipeline, vacuum tightness reaches high vacuum requirement, by the adjustment structure of spatial filter two ends input lens and output lens at the meticulous adjustment input lens 10 of optical axis direction and output lens 11, and observe the change of the Shearing interference fringes pattern on ground glass 5 simultaneously: when ground glass 5 interference fringe present disperse feature time, regulate spatial filter input lens 10 and output lens 11 to the movement away from spatial filter pinhole direction; When Shearing interference fringes presents convergence feature at ground glass 6, regulate spatial filter input lens 10 and output lens 11 to the movement near spatial filter pinhole direction; When Shearing interference fringes presents parallel wave beam characteristics, time namely parallel with shear plate baseline, the parallel beam of high-quality almost plane popin line light source still outputting high quality almost plane ripple after spatial filter is described; Now locking and the input lens 10 of fixed space wave filter and the orientation of output lens 11 and axial regulating mechanism, complete the installment and debugging of whole spatial filter.
7., when the Shearing interference fringes pattern that CCD observes does not possess parallel lines striped, during as presented horizontal S bending features curve, show that spatial filter to be debugged exists primary spherical aberration in a small amount, spherical aberration is mainly derived from optics of lens design and processing; As center, speckle pattern interferometry field present oval striped time, show that spatial filter output beam exists elementary coma, its optical axis being mainly derived from spatial filter input and output lens does not possess coaxial feature.Be all linear fringe as gathered striped in two-dimensional direction interference fringe, but striped quantity and density inconsistent time, show that spatial filter output beam exists elementary astigmatism, mainly come from the optical manufacturing of input and output lens or fill the unequal stress introduced in the process of school.

Claims (2)

1. the debugging apparatus of a spatial filter, it is characterized in that: this device comprises fiber optic point source (1), collimation lens (2) successively along this fiber optic point source (1) Laser output direction, spatial filter adjustment rack and support platform (3), shear interference plate (4), ground glass (5) and CCD (6), the output terminal of this CCD (6) continues and connects real time image collection computing machine (7), described spatial filter adjustment rack and support platform (3) are put and adjustment for spatial filter (8) to be adjusted, spatial filter (8) to be adjusted is connected with cryopump high vacuum unit (9) by vacuum corrugated pipe, described pointolite (1) is core diameter is 5.8 μm of fiber optic point sources, be positioned at the front focus position on described collimation lens (2) optical axis, fiber optic point source (1) and collimation lens (2) are fixed on same optical table, described spatial filter adjustment rack and support platform (3) are by placing spatial filter supporting bable tops to be debugged and regulating spatial filter adjustment rack to form, and adjustment rack can at level, vertical, the integrally-regulated spatial filter to be measured of beat and the four-dimensional direction of pitching, described shear interference plate (4) is 45 ° of reflective wedge of glass plates placed, and front surface plates semi-transparent semi-reflecting film, and the film that is all-trans is plated in rear surface.
2. utilize the method for adjustment of debugging apparatus to spatial filter of the spatial filter described in claim 1, it is characterized in that the method comprises the following steps:
1. meticulous adjustment fiber optic point source (1), fiber optic point source (1) is made to be positioned at the front focus of described collimation lens (2), the divergencing laser light beam of fiber optic point source (1) collimates the parallel laser light beam producing high-quality almost plane ripple after collimation lens (2), and fixed fiber pointolite (1) and high-quality collimation lens (2) are at same optical table table top subsequently; Fiber optic point source (1) core diameter is less than one times of diffraction limit of the far-field focus of high-quality collimation lens (2);
2. spatial filter (8) to be adjusted is placed on spatial filter adjustment rack, the adjustment rack of meticulous adjustment spatial filter ensures fiber optic point source (1) and high-quality collimation lens (2) composition high quality flat line light source smoothly by the input machinery cover plate flange of spatial filter and the filtering aperture of the logical light aperture and spatial filter inside that export axis place of mechanical cover plate flange center, coaxial with high quality flat line light source with implementation space wave filter;
3. remove the input machinery cover plate flange of spatial filter (8) to be adjusted and export mechanical cover plate flange, the source of parallel light of the high-quality almost plane ripple that described high quality flat line light source exports is through incident shear interference plate (4) after spatial filter to be adjusted, ground glass (5) is observed shear interference plate (4) front and rear surfaces and forms Shearing interference fringes, the pattern of Shearing interference fringes is gathered by CCD (6) and real time image collection computing machine (7), the standard baseline of its interference fringe and shear interference plate (4) presents parastate,
4. the input lens (10) of spatial filter to be adjusted is reinstalled to the entrance of spatial filter to be adjusted, the beat of debugging input lens (10) and luffing angle, ensure optical axis and the source of parallel light optical axis coincidence of input lens; Debug space wave filter input lens (10) ensures that incident high quality flat line light source focuses on the filtering small hole center that the far-field focus formed is positioned at spatial filter, observes that the Shearing interference fringes on ground glass (5) presents divergent state by CCD (6) and real time image collection computing machine (7);
5. the output lens (11) of spatial filter to be adjusted is reinstalled to the outlet of spatial filter, debug beat and the pitching of output lens (11) equally, ensure lens axis and source of parallel light optical axis coincidence; Incident shear interference plate (4) of high quality flat line light source outgoing beam after spatial filter input lens (10) and output lens (11), the Shearing interference fringes observed on ground glass (5) by CCD (6) and real time image collection computing machine (7) is presented to be dispersed or convergence state;
6. described spatial filter vacuum pump set (9) is opened, when in pipeline, vacuum tightness reaches high vacuum requirement, by the input lens of spatial filter and the adjustment of output lens, at the meticulous adjustment input lens (10) of optical axis direction and output lens (11), and observe the change of the Shearing interference fringes pattern on ground glass (5) simultaneously:
When ground glass (5) interference fringe present disperse feature time, regulate spatial filter input lens (10) and output lens (11) to the movement away from spatial filter pinhole direction;
When Shearing interference fringes presents convergence feature at ground glass (5), regulate spatial filter input lens (10) and output lens (11) to the movement near spatial filter pinhole direction;
When Shearing interference fringes presents parallel wave beam characteristics, namely, time parallel with the baseline of described shear interference plate (4), the parallel beam of high-quality almost plane popin line light source still outputting high quality almost plane ripple after spatial filter to be adjusted is described; Now locking and the input lens (10) of fixed space wave filter (8) and the orientation of output lens (11) and axial regulating mechanism, complete the installment and debugging of whole spatial filter.
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CN107702734A (en) * 2017-09-15 2018-02-16 大连理工大学 A kind of spatial phase modulation type laser interferometry instrument and method
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