CN104570380B - Spatial filter debugging device and method - Google Patents
Spatial filter debugging device and method Download PDFInfo
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- CN104570380B CN104570380B CN201510031277.5A CN201510031277A CN104570380B CN 104570380 B CN104570380 B CN 104570380B CN 201510031277 A CN201510031277 A CN 201510031277A CN 104570380 B CN104570380 B CN 104570380B
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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Abstract
The invention provides a spatial filter debugging device running on a vacuum condition and a spatial filter debugging method. The device and method have the advantages that the structure is simple, adjustment is convenient, and the debugging accuracy is high; moreover, the optical quality of a spatial filter can be evaluated by means of transverse shear interference fringes produced in the measuring process, so the assembling and calibration level and the detection level of the spatial filter can be increased, and technical studies of laser drivers can be supported.
Description
Technical field
The present invention relates to spatial filter, particularly a kind of debugging apparatus of spatial filter and adjustment method.
Background technology
Spatial filter is the core optical system in laser aid.It is used for suppressing nonlinear effect, improves system peace
Full operating flux, is filtered to high-frequency information ending, protects laser working medium.Under normal circumstances, have in laser aid
The spatial filter of a large amount of and different bore, the performance of spatial filter and its debugging run and are for the development of device and later stage
Most important；The core optical element of spatial filter is input and the output optics convex lens possessing different bores and focal length,
The performance of therefore spatial filter depends primarily on its input and the accurate of output convex lenss is debugged and location and installation.
Optical processing technology level at present, the focal length of lens processes the error of generally existing 1 ‰～5 ‰.In order to reduce this mistake
Difference to spatial filter on-line debugging and installs the adverse effect brought, and under usual conditions, the adjustment and installation of spatial filter is adopted
Find out the focus of input convex lenss using knife-edge method under atmospheric environment, then adjust the position of output lens, realize input and
Output convex lenss possess confocal and coaxial feature in atmospheric conditions, are then calculated according to different refractive indexs in air and vacuum
Go out the particular location that vacuum pipe is in two lens during vacuum state, thus completing the adjustment and installation of spatial filter.But this
Kind of adjustment method is it is difficult to ensure that when spatial filter vacuum pipe intracavity is to apply under vacuum condition and in laser aid, defeated
Enter and possess good confocal coaxial feature with output lens, and then the engineering development to laser aid and later stage safe operation bring
Greatly risk.
Accordingly, it would be desirable to develop be applied to laser driver and effective spatial filter debugging apparatus and its method,
To realize the accurate debugging of spatial filter and to simplify it in traditional thread binding school side formula, final improving laser system output beam quality simultaneously
With safe operation ability.
Content of the invention
The purpose of the present invention is to overcome the shortcomings of that above-mentioned spatial filter is debugged under atmospheric environment, proposes one kind and exists
The debugging apparatus of spatial filter running under vacuum condition and adjustment method, this apparatus and method possesses structure simply, adjustment
Conveniently, the features such as adjustment accuracy is high, and the lateral shearing interference striped that in measurement process produce can be utilized to spatial filter
Optical quality is estimated, for spatial filter in laser driver online using the valuable detection data of offer.
For achieving the above object, this invention takes following technical scheme：
A kind of debugging apparatus of spatial filter, its feature is：This device includes fiber optic point source, along this fiber optic point light
Source laser outbound course be successively collimating lens, spatial filter adjustment frame and support platform, shear interference plate, ground glass and
The output of CCD, this CCD terminates the input of real time image collection computer, and described spatial filter adjustment frame and support are flat
Platform supplies spatial filter to be adjusted to put and adjusts, and spatial filter to be adjusted passes through vacuum corrugated pipe and cryopump Gao Zhen
Empty unit connects, and described point source is core diameter is 5.8 μm of fiber optic point sources, on described collimating lens optical axis
Front focus position, fiber optic point source and collimating lens are fixed on same optical table；Described spatial filter adjustment frame
And support platform is formed with regulation spatial filter adjustment frame by placing spatial filter supporting bable tops to be debugged, adjustment frame
Can be in level, the integrally-regulated spatial filter to be measured of vertical, beat and pitching four-dimension direction；Described shear interference plate is 45 °
The reflective wedge of glass plate placed, front surface plates semi-transparent semi-reflecting film, and rear plated surface is all-trans film.
Using the method for adjustment to spatial filter for the debugging apparatus of above-mentioned spatial filter, the method includes following step
Suddenly：
1. fine-tune fiber optic point source, make fiber optic point source be located at the front focus of described collimating lens, fiber optic point light
The divergencing laser light beam in source collimates the parallel laser light beam producing high-quality almost plane ripple after collimating lens, subsequently fixes
Fiber optic point source and high-quality collimating lens are in same optical table table top；Fiber optic point source core diameter is less than high-quality and collimates
One times of diffraction limit of the far-field focus of lens；
2. spatial filter to be adjusted is placed in spatial filter adjustment frame, fine-tunes the tune of spatial filter
Whole frame ensures that fiber optic point source and high-quality collimating lens form the input that high quality flat line light source passes through spatial filter
Thang-kng aperture at mechanical cover plate flange and output mechanical cover plate flange center axis and the filtering aperture within spatial filter,
Coaxial with high quality flat line light source to realize spatial filter；
3. input machinery cover plate flange and the mechanical cover plate flange of output of spatial filter to be adjusted are removed, described height
The source of parallel light of the high-quality almost plane ripple of quality source of parallel light output passes through incident shearing after spatial filter to be adjusted
Interfere plate, ground glass is observed shear interference plate front and rear surfaces form Shearing interference fringes, by CCD and real time imaging
Collecting computer gathers the pattern of Shearing interference fringes, and its interference fringe assumes parallel shape with the standard baseline of shear interference plate
State；
4. the input lens of spatial filter to be adjusted are reinstalled to the entrance of spatial filter to be adjusted, adjust
The examination beat of input lens and luffing angle are it is ensured that the optical axis of input lens and source of parallel light optical axis coincidence；Debugging space filtering
Device input lens ensure that incident high quality flat line light source focuses on the filtering aperture that the far-field focus being formed are located at spatial filter
By CCD and real time image collection computer, center, observes that the Shearing interference fringes on ground glass assume divergent state；
5. the output lens of spatial filter to be adjusted are reinstalled to the outlet of spatial filter, same debugging is defeated
Go out the beat of lens and pitching it is ensured that lens axis and source of parallel light optical axis coincidence；High quality flat line light source is through spatial filter
After input lens and output lens, outgoing beam incidence shear interference plate, is observed by CCD and real time image collection computer
Shearing interference fringes on ground glass present and dissipate or convergence state；
6. described spatial filter is connected with cryopump fine vacuum unit by vacuum corrugated pipe, cryopump fine vacuum machine
Group is made up of cryopump and fore vacuum unit, and spatial filter first passes through fore vacuum machine assembly air-exhausting and reaches coarse vacuum, then
Reached by cryopump and spatial filter high vacuum state can be kept.Open described spatial filter vacuum pump set, wait to manage
When in road, vacuum reaches fine vacuum requirement, by the input lens of spatial filter and the regulation of output lens, in optical axis side
To fine-tuning input lens and output lens, and observe the change of the Shearing interference fringes pattern on ground glass simultaneously：
When ground glass interference fringe presents and dissipates feature, adjust spatial filter input lens and output lens to remote
Movement from spatial filter pinhole direction；
When Shearing interference fringes assume convergence feature in ground glass, adjust spatial filter input lens and output is saturating
Mirror is to the movement near spatial filter pinhole direction；
When Shearing interference fringes assume parallel wave beam characteristics, when that is, parallel with the baseline of described shear interference plate, say
Bright high-quality almost plane popin line light source after spatial filter to be adjusted still outputting high quality almost plane ripple flat
Row light beam；Now the input lens of locking and fixed space wave filter and the orientation of output lens and axial regulating mechanism, complete
The installation of whole spatial filter and debugging.
The present invention can be widely applied to the accurate debugging of the online spatial filter of laser aid, has that equipment is simple, precision
The features such as measurement is high, interference pattern is directly perceived.
Brief description
Fig. 1 is the debugging apparatus schematic diagram of spatial filter of the present invention；
Fig. 2 is the light beam observing in CCD Shearing interference fringes schematic diagram after spatial filter；
In figure left figure striped tilts along oblique direction, and light beam has and dissipates feature；Intermediate pattern striped is parallel with datum line,
Light beam is collimated light beam；Along obliquely downward to inclination, light beam has convergence feature to right figure striped.
Specific embodiment
The present invention is further illustrated with reference to the accompanying drawings and examples.
Embodiment 1：
A kind of debugging apparatus of spatial filter it is characterised in that：This device is collimated thoroughly by fiber optic point source 1, high-quality
Mirror 2, spatial filter adjustment frame and support platform 3, shear interference plate 4, ground glass 5, CCD6, real time image collection computer
7 and spatial filter 8 form；
Described point source 1 is core diameter is 5.8 μm of fiber optic point sources, front Jiao that it is located on collimating lens 2 optical axis
Point position, fiber optic point source dissipates the collimated light beam of outputting high quality almost plane ripple after Gaussian Beam collimating lens 2 collimation,
Fiber optic point source 1 and collimating lens 2 are fixed on same optical table；
Described spatial filter adjustment frame and support platform 3 are by the supporting bable tops placing spatial filter to be debugged
Form with adjusting spatial filter adjustment frame, adjustment frame can be in level, vertically, and beat and pitching four-dimension direction adjust sky to be regulated
Between wave filter.
Described shear interference plate 4 is 45 ° and places reflective wedge of glass plate, front surface plates semi-transparent semi-reflecting film, rear table
The film that is all-trans is plated in face.By CCD6 and and real time image collection computer 7 can real-time monitored shear interference plate front and rear surfaces reflection
Interference fringe and its change that light beam is formed in ground glass 5；
Beam direction along described fiber optic point source 2 output is described collimating lens 2, spatial filter adjustment successively
Frame and support platform 3, shear interference plate 4, ground glass 5, CCD6 and real time image collection computer 7；
When adjusting spatial filter using said apparatus, described shear interference plate can be observed simultaneously and formed on ground glass
Interference fringe and its change, when interference fringe and ground glass benchmark graticule are consistent, that is, complete the tune of spatial filter
Examination simultaneously can be assessed to its optical quality simultaneously and detect；
Described spatial filter 8 is connected with cryopump fine vacuum unit 9 by vacuum corrugated pipe, cryopump fine vacuum machine
Group 9 is made up of cryopump and fore vacuum unit.
The adjustment method of spatial filter of the present invention, the method comprises the following steps：
1. fine-tune fiber optic point source 1 so as to be located at high-quality collimating lens 2 front focus, fiber optic point source 1 send out
Scattered laser beam collimates the parallel laser light beam producing high-quality almost plane ripple after collimating lens 2, subsequently fixes optical fiber
Point source 1 and high-quality collimating lens 2 are in same optical table table top；Fiber optic point source 1 core diameter is less than high-quality and collimates
One times of diffraction limit of the far-field focus of lens 2；
2. spatial filter 8 is arranged in the spatial filter adjustment frame of support platform, fine-tunes spatial filter
Adjustment frame ensure fiber optic point source 1 and high-quality collimating lens 2 composition high quality flat line light source pass through spatial filter
Thang-kng aperture at input and output mechanical cover plate flange center axis and the filtering aperture within spatial filter, to realize sky
Between wave filter and high quality flat line light source possess coaxial feature；
3. remove the mechanical cover plate flange of spatial filter 8 input and outfan, place in the end of spatial filter
Shear interference plate 4.The source of parallel light of high-quality almost plane ripple passes through incident shear interference plate 4 after spatial filter, in hair glass
Glass screen 5 can be observed shear interference plate 4 front and rear surfaces and forms Shearing interference fringes, by CCD6 and real time image collection computer
The pattern of 7 collection Shearing interference fringes, its interference fringe assumes parastate with the standard baseline of shear interference plate 4；
4. spatial filter input lens 10 are installed to the entrance of spatial filter, debugging input lens beat and pitching
Angle is it is ensured that the optical axis of input lens and source of parallel light optical axis coincidence；Debugging spatial filter input lens 10 ensure incidence
High quality flat line light source focuses on the filtering small hole center that the far-field focus being formed are located at spatial filter, and CCD6 and real time imaging are adopted
The Shearing interference fringes that collection computer 7 can observe on ground glass 5 assume divergent state；
5. spatial filter output lens 11 are installed to spatial filter outlet, the beat of same debugging lens and pitching
Ensure lens axis and source of parallel light optical axis coincidence；High quality flat line light source is through spatial filter input lens 10 and output lens
After 11, outgoing beam incidence shear interference plate 4, is observed on ground glass 5 by CCD6 and real time image collection computer 7
Shearing interference fringes present and dissipate or convergence state.
6. open spatial filter vacuum pump set, when vacuum reaches fine vacuum requirement in pipeline, by space filtering
The adjustment structure of device two ends input lens and output lens fine-tunes input lens 10 and output lens 11 in optical axis direction, and
Observe the change of the Shearing interference fringes pattern on ground glass 5 simultaneously：Dissipate feature when ground glass 5 interference fringe presents
When, adjust spatial filter input lens (10) and output lens 11 to the movement away from spatial filter pinhole direction；When cutting
Cut interference fringe when ground glass 6 assumes convergence feature, adjust spatial filter input lens 4 and output lens 5 to close
The movement in spatial filter pinhole direction；When Shearing interference fringes assume parallel wave beam characteristics, that is, parallel with shear plate baseline
When, the directional light of high-quality almost plane popin line light source still outputting high quality almost plane ripple after spatial filter is described
Bundle；Now the input lens 4 of locking and fixed space wave filter and the orientation of output lens 5 and axial regulating mechanism, complete whole
The installation of individual spatial filter and debugging.
The operation principle of the present invention is as follows：
1053nm laser fiber point source 1 is fine-tuned to high-quality collimating lens focal position, light beam is through high-quality
Outgoing almost plane ripple after amount collimating lens.The shear interference plate pairing approximation plane wave with suitable shearing displacement carries out interferometry
Interference fringe can be obtained.Again spatial filter is placed between collimating lens and shear plate, almost plane ripple passes through space filtering
New interference fringe pattern is formed after device on shearing interferometer.Interference fringe can manifest spatial filter exit plane ripple in real time
Corrugated quality, and then can accurately determine the optical quality of spatial filter and manifest its intrinsic aberration characteristics, its device is shown in explanation
Shown in book accompanying drawing 1.
Lateral shear interferometer possesses the basic feature replicating and translating original wavefront.Figure of description 2 is ground glass
Figure is illustrated in the original wavefront observing and the interference of lateral shear wavefront.When incident wavefront is for almost plane, wavefront represents
For W (x, y), (x, y) is the coordinate position of arbitrfary point P (x, y).When wavefront has, in x direction, the shearing that value is S, shearing wave
Wavefront error in front any point be W (x-S, y).On P (x, y) point, before original wavefront and shearing wave between wavefront
Discrepancy delta W (x, y)=W (x, y)-W (x-S, y).So, in shear interference metering, the amount tried to achieve is needed to be Δ W (x, y).
Wavefront error Δ W (x, y) can be expressed as the unit of wavelength according to conventional relationship formula
Δ W (x, y)=n λ (1)
Wherein, n is the level time of interference fringe, and λ is wavelength used.?Under form, the left side of above formula can be it
Several times.When shearing displacement S is minimum and in theory close to zero when, wavefront difference change relative translation amount be changing into differential shape
Formula, writeable becomes
So, the information obtaining in lateral shearing interference plate is with the optical aberrations of angle toleranceWith
Shearing displacement S goes to zero, and formula (2) can become more accurate.But during with shearing displacement S closer to zero, the sensitivity of measurement also can be dropped
Low.Therefore, have chosen suitable shearing displacement S in patent of the present invention for 1053nm optical maser wavelength it is ensured that laser aid space is filtered
Ripple device debugging process has high sensitivity and accuracy.
When high-quality collimating lens near focal point places 1053nm fiber optic point source, light beam is through spatial filter to be debugged
The spheric wave front of the very big dimpling (dissipating) of one radius of curvature of outgoing or nick (convergence) afterwards.Spheric wave front with out of focus aberration is
Principal character, it can be expressed as：
W (x, y)=D (x2+y2) (3)
Coefficient D represents the amplitude of error, is generally given with number of wavelengths.(cut when spheric wave front carries out lateral shear in x direction
The amount of cutting be S), and replicate wavefront with respect to original wavefront exist a quantitation inclination when, i.e. out of focus and inclination of wave front is deposited simultaneously
Under conditions, the optical path difference producing before shearing wave is expressed as：
Δ W (x, y)=2DxS+Ey=n λ (4)
In formula, E is the inclination angle and original wavefront between before shearing wave.Above-mentioned formula represents that the interference fringe obtaining both is
It is not parallel to the linear fringe that x-axis is also not parallel to y-axis.Only when coefficient D or E is zero, striped can be parallel to x-axis or y-axis.
In these cases, even if the out of focus of the spheric wave front very little of inspection can also be observed it is possible to accurately judge spherical wave
Front dissipate and converge feature.In spatial filter debugging, can be according to interference fringe in the angle calcu-lation defocused image of shear direction
Difference data, and in spatial filter pipeline be vacuum when fine-tune respectively input lens and output lens with meet they have
Standby confocal and coaxial feature.In actual applications, we obtain input lens and the confocal and coaxial accuracy of output lens can
Reach 0.2 ‰.
According to above-mentioned lateral shearing interference principle, in design and use, shear flat, wedge angle direction and shear direction phase
Vertically.As when tested light beam is ideal parallelism light source, then interference fringe is parallel to shear direction；If tested light beam is to assemble
Or the spheric wave front dissipating, then striped will rotate, as shown in Figure of description 2：Fig. 2 (a) is its interference fringe when dissipating,
Its interference fringe when Fig. 2 (b) is parallel, Fig. 2 (c) is its interference fringe when converging.
If in addition, incident wavefront carries other aberrations, Shearing interference fringes are no longer vertical bar stricture of vaginas, the different aberration of correspondence
Type, striped form can occur to change accordingly.Therefore, can be according to the type of shape of stripes qualitative analyses Wavefront aberration and width
Degree, decision space wave filter has the features such as other aberrations such as primary spherical aberration, primary coma and primary astigmatism.
The interpretation of beam collimation degree：Observe the incline direction of interference fringe receiving screen striped, if striped is parallel with datum line,
Then light beam is collimation, is shown to be collimated light beam；If striped tilts along oblique direction, light beam dissipates；If striped is along tiltedly
Lower direction tilts, then light beam is to assemble.When light beam is not parallel, by measuring striped with respect to the corner of datum line, can push away
Calculate the angle of divergence of light beam.Computational methods are shown below：
Wherein R is the radius of curvature (when light beam is for directional light, radius of curvature is infinity) on corrugated；Δ θ sends out for light beam
Scattered angle；D is incident beam bore；S is shearing displacement (constant, depending on shearing plate thickness)；θ is shearing striped and horizontal reference line
Between inclination angle；N is the refractive index of shearing panel material；β is the angle of wedge of shear plate.
On-line debugging is carried out to the heavy caliber spatial filter of God Light II laser driver using above-mentioned shearing interference method.Empty
Between wave filter input lens 10 and output lens 11 Design Theory focal length be respectively 11879mm and 11050mm, but optical manufacturing is by mistake
Difference is 1 ‰～5 ‰.The maximum clear aperture of the input lens of spatial filter 8 and output lens is 340mm × 340mm, optical fiber
Point source 1 is wavelength X=1.053 μm fundamental transverse mode single-mode fiber (Nufern 1060-XP), and core diameter is 5.8 μm.Described
The light beam clear aperture of collimating lens 2 is 350mm × 350mm, and the focal length of collimating lens is 159754.3mm through accurate calibration.
When incident collimating lens are to gauss laser beam and when focusing on, the focusing light of ideal parallelism light (Gaussian intensity profile)
Speckle radius is：
In formula, λ is wavelength, and f is focal length, and D is the light beam length of side.Above-mentioned data display, the diameter of fiber optic point source is much smaller than
The Gauss focus on light beam of high-quality collimating lens, can be used as preferable point source, and its fiber optic point source transmitting corrugated can be approximately
Spherical wave.When fiber optic point source 1 is located at the front focus of collimating lens 2, light beam is to be approximately ideal parallelism light through collimated 2
Bundle.
During the incident Gauss parallel laser light beam of the input lens 10 of above-mentioned spatial filter 8 and output lens 11, focus on
Spot radius winAnd woutFor：
Their theoretical depth of focus is calculated as follows：
Input lens theory depth of focus：
Output lens theory depth of focus：
Debugging flow process and actual tune-up data according to the present invention show：It is low that spatial filter vacuum pipe passes through Edward
Vacuum pump set and TTI cryopump extract to fine vacuum (vacuum 1 × 10-3Pa) and when keeping, input and output lens are in optical axis
When moving in the range of ± the 1mm of direction, shearing interferometer can substantially tell the change of interference fringe and output beam presents and sends out
Dissipate or converge state.When interference fringe and fiducial mark wire clamp angle are 3 °, spatial filter output beam corrugated curvature close to 4 ×
104m；When interference fringe and fiducial mark wire clamp angle are 1 °, spatial filter output beam corrugated curvature is close to 1.4 × 105m.
In sum, for above-mentioned spatial filter, dry when being moved using observation space wave filter lens axis of the present invention
The sensitivity relating to striped is 2mm, and certainty of measurement is 2/11050=0.18 ‰.In spatial filter debugging and laser driver work
In Cheng Yingyong, the device using the spatial filter of present invention debugging obtains in God Light II device of high power laser driver
Effectively apply, it has the features such as equipment is simple, certainty of measurement is high, shear interference pattern is directly perceived and can be widely applied to it
His optical engineering field.
Embodiment 2：
A kind of debugging apparatus of spatial filter it is characterised in that：This device is collimated thoroughly by fiber optic point source 1, high-quality
Mirror 2, spatial filter adjustment frame and support platform 3, shear interference plate 4, ground glass 5, CCD6, real time image collection computer
7 and spatial filter 8 form；
Described point source is core diameter is 5.8 μm of fiber optic point sources, and it is located on high-quality collimating lens optical axis
Front focus position, fiber optic point source dissipates the directional light of outputting high quality almost plane ripple after Gaussian Beam collimating lens collimation
Bundle, fiber optic point source and high-quality collimating lens are fixed on same optical table；
Described spatial filter adjustment frame and support platform be by place spatial filter supporting bable tops to be debugged and
Adjust spatial filter adjustment frame composition, adjustment frame can be in level, vertically, the integrally-regulated sky to be measured of beat and pitching four-dimension direction
Between wave filter；
Described shear interference plate is 45 ° and places reflective wedge of glass plate, front surface plates semi-transparent semi-reflecting film, rear surface
Plate the film that is all-trans.By CCD and and real time image collection computer can real-time monitored shear interference plate front and rear surfaces the reflected beams
Interference fringe and its change in ground glass formation；
Beam direction along described fiber optic point source output is described high-quality collimating lens, spatial filter successively
Adjustment frame and support platform, shear interference plate, ground glass, CCD and real time image collection computer；
When adjusting spatial filter using said apparatus, described shear interference plate can be observed simultaneously and formed on ground glass
Interference fringe and its change, when interference fringe and ground glass benchmark graticule are consistent, that is, complete the tune of spatial filter
Examination simultaneously can be assessed to its optical quality simultaneously and detect；
Described spatial filter is connected with cryopump fine vacuum unit by vacuum corrugated pipe, cryopump fine vacuum unit
It is made up of cryopump and fore vacuum unit, spatial filter first passes through fore vacuum machine assembly air-exhausting and reaches coarse vacuum, then leads to
Cross cryopump to reach and spatial filter high vacuum state can be kept.Described cryopump fine vacuum unit is by cryopump and prime
Vacuum pump set forms, and spatial filter first passes through fore vacuum machine assembly air-exhausting and reaches coarse vacuum, then is reached simultaneously by cryopump
Spatial filter high vacuum state can be kept.
A kind of adjustment method of described spatial filter, the method comprises the following steps：
1., fine-tune the front focus that fiber optic point source 1 is located at high-quality collimating lens 2, the sending out of fiber optic point source 1
Scattered laser beam collimates the parallel laser light beam producing high-quality almost plane ripple after collimating lens 2, subsequently fixes optical fiber
Point source 1 and high-quality collimating lens 2 are in same optical table table top；Fiber optic point source 1 core diameter is less than high-quality and collimates
One times of diffraction limit of the far-field focus of lens 2；
2., spatial filter 8 is arranged in the spatial filter adjustment frame of support platform, fine-tunes component space filtering
The adjustment frame of device ensures that fiber optic point source 1 and high-quality collimating lens 2 composition high quality flat line light source pass through space filtering
Thang-kng aperture at device input and output mechanical cover plate flange center axis and the filtering aperture within spatial filter, to realize
Spatial filter and high quality flat line light source possess coaxial feature；
3., remove the mechanical cover plate flange of spatial filter 8 input and outfan, place in the end of spatial filter
Shear interference plate 4.The source of parallel light of high-quality almost plane ripple passes through incident shear interference plate 4 after spatial filter, in hair glass
Glass screen 5 can be observed shear interference plate 4 front and rear surfaces and forms Shearing interference fringes, by CCD6 and real time image collection computer
The pattern of 7 collection Shearing interference fringes, its interference fringe assumes parastate with the standard baseline of shear interference plate 4；
4., spatial filter input lens 10 are installed to spatial filter entrance, debugging lens beat and luffing angle
Ensure lens axis and source of parallel light optical axis coincidence；Debugging spatial filter input lens 10 ensure the high-quality directional light of incidence
Source focuses on the filtering small hole center that the far-field focus being formed are located at spatial filter, and CCD6 and real time image collection computer 7 can
Observe that the Shearing interference fringes on ground glass 5 assume divergent state；
5., spatial filter output lens 11 are installed to spatial filter outlet, equally debug the beat of lens and bow
Face upward guarantee lens axis and source of parallel light optical axis coincidence；High quality flat line light source is saturating through spatial filter input lens 10 and output
After mirror 11, outgoing beam incidence shear interference plate 4, can observe ground glass by CCD (6) and real time image collection computer 7
Shearing interference fringes on 5 present and dissipate or convergence state.
6., open spatial filter vacuum pump set, when vacuum reaches fine vacuum requirement in pipeline, by space filtering
The adjustment structure of device two ends input lens and output lens fine-tunes input lens 10 and output lens 11 in optical axis direction, and
Observe the change of the Shearing interference fringes pattern on ground glass 5 simultaneously：Dissipate feature when ground glass 5 interference fringe presents
When, adjust spatial filter input lens 10 and output lens 11 to the movement away from spatial filter pinhole direction；Work as shearing
Interference fringe, when ground glass 6 assumes convergence feature, adjusts spatial filter input lens 10 and output lens 11 to close
The movement in spatial filter pinhole direction；When Shearing interference fringes assume parallel wave beam characteristics, that is, parallel with shear plate baseline
When, the directional light of high-quality almost plane popin line light source still outputting high quality almost plane ripple after spatial filter is described
Bundle；Now the input lens 10 of locking and fixed space wave filter and the orientation of output lens 11 and axial regulating mechanism, complete
The installation of whole spatial filter and debugging.
7., when the Shearing interference fringes pattern that CCD observes does not possess parallel lines striped, such as assume horizontal S curved
During bent characteristic curve, show that spatial filter to be debugged has a small amount of primary spherical aberration, spherical aberration is mainly derived from optics of lens design
And processing；When assuming oval striped as speckle pattern interferometry field center, show that spatial filter output beam has primary coma, its master
Not possess coaxial feature from the optical axis of spatial filter input and output lens.Interfere in two-dimensional direction as gathered striped
Striped is all linear fringe, but when striped quantity and density are inconsistent, shows that spatial filter output beam has primary astigmatism,
The unequal stress introducing during being mostly derived from optical manufacturing or the dress school inputting with output lens.
Claims (2)
1. a kind of debugging apparatus of spatial filter it is characterised in that：This device includes fiber optic point source (1), along this fiber optic point
Light source (1) laser outbound course is collimating lens (2), spatial filter adjustment frame and support platform (3), shear interference plate successively
(4), ground glass (5) and CCD (6), the outfan of this CCD (6) continues and connects real time image collection computer (7), described space
Wave filter adjustment frame and support platform (3) supply spatial filter (8) to be adjusted to put and adjust, spatial filter to be adjusted
(8) it is connected with cryopump fine vacuum unit (9) by vacuum corrugated pipe, described point source (1) is core diameter is 5.8 μm of light
Fine point source, the front focus position on described collimating lens (2) optical axis, fiber optic point source (1) is solid with collimating lens (2)
It is scheduled on same optical table；Fiber optic point source (1) core diameter is less than one times of diffraction of the far-field focus of collimating lens (2)
The limit, fiber optic point source (1) is adjusted to collimating lens (2) focal position, light beam collimated lens (2) outgoing almost plane afterwards
Ripple；Described spatial filter adjustment frame and support platform (3) are the spatial filter supporting bable tops to be debugged by placement and tune
Section spatial filter adjustment frame composition, adjustment frame can be in level, vertical, beat and the pitching four-dimension integrally-regulated space to be measured in direction
Wave filter；Described shear interference plate (4) is the reflective wedge of glass plate of 45 ° of placements, and front surface plates semi-transparent semi-reflecting film, after
Plated surface is all-trans film.
2. utilize the method for adjustment to spatial filter for the debugging apparatus of the spatial filter described in claim 1, its feature exists
Comprise the following steps in the method：
1. fine-tune fiber optic point source (1), make fiber optic point source (1) be located at the front focus of described collimating lens (2), optical fiber
The divergencing laser light beam of point source (1) collimates the parallel laser light producing high-quality almost plane ripple after collimating lens (2)
Bundle, subsequently fixes fiber optic point source (1) and high-quality collimating lens (2) in same optical table table top；Fiber optic point source (1) is fine
Core diameter is less than one times of diffraction limit of the far-field focus of high-quality collimating lens (2)；
2. spatial filter (8) to be adjusted is placed in spatial filter adjustment frame, fine-tunes the tune of spatial filter
Whole frame ensures that fiber optic point source (1) and high-quality collimating lens (2) composition high quality flat line light source pass through spatial filter
The mechanical cover plate flange of input and output mechanical cover plate flange center axis at thang-kng aperture and the filter within spatial filter
Ripple aperture, coaxial with high quality flat line light source to realize spatial filter；
3. input machinery cover plate flange and the mechanical cover plate flange of output of spatial filter (8) to be adjusted are removed, described height
The source of parallel light of the high-quality almost plane ripple of quality source of parallel light output passes through incident shearing after spatial filter to be adjusted
Interfere plate (4), ground glass (5) is observed shear interference plate (4) front and rear surfaces form Shearing interference fringes, by CCD
(6) and real time image collection computer (7) gathers the pattern of Shearing interference fringes, its interference fringe and shear interference plate (4)
Standard baseline assumes parastate；
4. the input lens (10) of spatial filter to be adjusted are reinstalled to the entrance of spatial filter to be adjusted, adjust
The beat of examination input lens (10) and luffing angle are it is ensured that the optical axis of input lens and source of parallel light optical axis coincidence；Debugging space
Wave filter input lens (10) ensure that incident high quality flat line light source focuses on the far-field focus being formed and is located at spatial filter
Filtering small hole center, observes the shear interference bar on ground glass (5) by CCD (6) and real time image collection computer (7)
Stricture of vagina assumes divergent state；
5. the output lens (11) of spatial filter to be adjusted are reinstalled to the outlet of spatial filter, same debugging is defeated
Go out the beat of lens (11) and pitching it is ensured that lens axis and source of parallel light optical axis coincidence；High quality flat line light source is filtered through space
Ripple device input lens (10) and output lens (11) outgoing beam incidence shear interference plate (4) afterwards, by CCD (6) and real-time figure
Observe that as collecting computer (7) Shearing interference fringes on ground glass (5) present to dissipate or convergence state；
6. open described spatial filter vacuum pump set (9), when vacuum reaches fine vacuum requirement in pipeline, by space
The input lens of wave filter and the regulation of output lens, fine-tune input lens (10) and output lens in optical axis direction
(11), and simultaneously observe the change of the Shearing interference fringes pattern on ground glass (5)：
When ground glass (5) interference fringe presents and dissipates feature, adjust spatial filter input lens (10) and output lens
(11) to the movement away from spatial filter pinhole direction；
When Shearing interference fringes assume convergence feature in ground glass (5), adjust spatial filter input lens (10) and defeated
Go out lens (11) to the movement near spatial filter pinhole direction；
When Shearing interference fringes assume parallel wave beam characteristics, when that is, parallel with the baseline of described shear interference plate (4), explanation
High-quality almost plane popin line light source after spatial filter to be adjusted still outputting high quality almost plane ripple parallel
Light beam；Now lock the orientation of the input lens (10) with fixed space wave filter (8) and output lens (11) and be adjusted axially
Mechanism, completes installation and the debugging of whole spatial filter.
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| CN105301795A (en) * | 2015-10-29 | 2016-02-03 | 中国科学院长春光学精密机械与物理研究所 | High-precision coaxial optical system computer-aided adjustment and wavefront detection method |
| CN106199996B (en) * | 2016-08-30 | 2018-12-25 | 中国科学院上海光学精密机械研究所 | Utilize the method for aperture position in diffraction pattern calibration spatial filter |
| CN107702734B (en) * | 2017-09-15 | 2020-06-16 | 大连理工大学 | Spatial phase modulation type laser interference measuring instrument and method |
| CN108459419B (en) * | 2018-01-17 | 2020-05-05 | 中国科学院上海光学精密机械研究所 | Filter pinhole alignment adjusting device and method based on grating diffraction |
| CN108563034B (en) * | 2018-01-26 | 2020-08-04 | 中国科学院上海光学精密机械研究所 | Reflective spatial filter debugging device and method |
| CN108375453B (en) * | 2018-04-27 | 2024-04-12 | 中国科学院西安光学精密机械研究所 | Vertical adjustment system and method for X-ray focusing lens |
| CN110247148B (en) * | 2019-07-17 | 2024-07-05 | 苏州淞渭智能科技有限公司 | Screw depth parameter debugging system and method of filter |
| CN112630923A (en) * | 2020-12-07 | 2021-04-09 | 中国科学院上海光学精密机械研究所 | Spatial filter end lens pose locking device and method |
| CN113595635B (en) * | 2021-09-15 | 2022-06-24 | 中国电子科技集团公司第三十四研究所 | Ground debugging method for satellite-borne laser communication equipment |
| CN114389135A (en) * | 2021-12-09 | 2022-04-22 | 中国电子科技集团公司第五十三研究所 | Three-stage amplification laser solid-state amplifier system |
| CN114217448B (en) * | 2022-02-21 | 2022-06-10 | 武汉逸飞激光股份有限公司 | Shaping device for Gaussian beam |
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| CN1175304C (en) * | 2002-05-17 | 2004-11-10 | 中国科学院上海光学精密机械研究所 | On-line debugging instrument for dynamic coaxial adjustment of spatial filter |
| CN102236174B (en) * | 2010-04-28 | 2013-05-08 | 北京国科世纪激光技术有限公司 | Spatial filtering system |
| CN103033272B (en) * | 2012-12-21 | 2014-11-19 | 南京信息工程大学 | Simultaneous phase-shifting lateral shearing interferometer and detection method |
| CN103698896B (en) * | 2013-12-26 | 2016-01-27 | 中国科学院苏州生物医学工程技术研究所 | A kind of precise pinhole aims at debug system and method |
| CN104111163B (en) * | 2014-07-23 | 2017-04-12 | 中国科学院上海光学精密机械研究所 | Convex lens focal length measuring device and method |
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