CN106199996A - Utilize the method for aperture position in diffraction pattern calibration spatial filter - Google Patents
Utilize the method for aperture position in diffraction pattern calibration spatial filter Download PDFInfo
- Publication number
- CN106199996A CN106199996A CN201610766057.1A CN201610766057A CN106199996A CN 106199996 A CN106199996 A CN 106199996A CN 201610766057 A CN201610766057 A CN 201610766057A CN 106199996 A CN106199996 A CN 106199996A
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- Prior art keywords
- spatial filter
- calibration
- aperture
- laser
- diffraction pattern
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
Abstract
The invention discloses and a kind of utilize the method for aperture position in diffraction pattern calibration spatial filter, including step: be previously inserted into a calibration diaphragm at spatial filter, the far field construction pattern produced after utilizing CCD observation laser irradiation calibration diaphragm carrys out Calibration of Laser focus particular location in spatial filter at aperture, makes laser spot accurately overlap with small hole center by regulation aperture.The problem that present invention efficiently solves the shoot laser hot spot distortion that laser causes because of via deviation, has and proofreads the features such as accurate, easy to adjust, the most efficient and practical.
Description
Technical field
The present invention relates to spatial filter, physical optical arts and large-scale high power pulsed laser device field, relate to especially
And a kind of utilize the method for aperture position in diffraction pattern calibration spatial filter.
Background technology
In high power pulsed laser device field, based on Fourier transform principle with in design according to " 4f " system
Spatial filter, acts on because it has filtering interception to high-frequency information and plays the work of Image relaying during Laser Transmission
With, thus protection working-laser material and the near field light beam quality of raising laser output effectively.So, spatial filter is at height
Power pulsed laser device is especially indispensable in clapping watt level high power pulsed laser device.
Currently advanced device of high power laser all can use substantial amounts of and that bore is different spatial filter, typically comes
Say, in spatial filter the determination of aperture position be with by CCD computer or display screen display laser spot brightness
It is the most secretly standard, should be the most rough, and the most all can not accurately determine laser spot
Whether by the center of aperture.But, laser directly affects laser by the accuracy of aperture in spatial filter and exports
Near field light beam quality.Therefore, accurate calibration laser focus in spatial filter and the relative position between aperture become
Particularly important.
Chinese patent CN104570380A discloses a kind of spatial filter debugging apparatus and adjustment method, this patent of invention
Although lens are confocal coaxial before and after utilizing fiber optic point source and lateral shear interferometer to can ensure that spatial filter, but
This patent is not mentioned and how to make laser focus in spatial filter accurately by the center of aperture.
Therefore, for above-mentioned situation, it is necessary to propose one and utilize aperture position in diffraction pattern calibration spatial filter
Method.
Summary of the invention
The invention aims to solve at present owing to cannot accurately determine aperture and laser spot in spatial filter
Between relative position, there is certain deviation when causing laser vias, ultimately result in shoot laser hot spot distortion problem, carry
Utilize the method for aperture position in diffraction pattern calibration spatial filter for a kind of, be previously inserted into a calibration at spatial filter
Diaphragm, the far field construction pattern produced after utilizing CCD observation laser irradiation calibration diaphragm carrys out Calibration of Laser focus at space filtering
Particular location at aperture in device, makes laser spot accurately overlap with small hole center by regulation aperture.
In order to realize foregoing invention purpose, the technical solution of the present invention is as follows:
By being previously inserted into a calibration diaphragm at spatial filter, produce after utilizing CCD observation laser irradiation calibration diaphragm
Raw far field construction pattern carrys out Calibration of Laser focus particular location in spatial filter at aperture, makes little by regulation aperture
Center, hole accurately overlaps with laser spot.
A kind of utilize the method for aperture position in diffraction pattern calibration spatial filter, specifically comprise the following steps that
Step 1, with the cross section of aperture in spatial filter for YZ face, calibration apertured bracket is fixed on along X-direction
The front end of spatial filter, makes the frontal lens of spatial filter and the optical axis of rear lens lead to the geometry of light by calibration apertured bracket
Center, and the logical optical plane of calibration apertured bracket is parallel with the cross section of aperture；
Step 2, square diaphragm will be calibrated insert calibration apertured bracket, and make the square diaphragm of calibration lead to the geometric center of light with fixed
Mark apertured bracket leads to the geometric center of light and overlaps；When laser irradiation is when calibrating square diaphragm, and laser forms one at aperture
Cross diffraction pattern, this diffraction pattern passes through plane mirror and glass window, is finally imaged on CCD；
Step 3, by regulation aperture actuator adjust aperture position, make small hole center on CCD spread out with laser far field
The cross searching penetrating pattern overlaps；
Step 4, will calibrate square diaphragm removal.
The frontal lens of described spatial filter is coaxial confocal with rear lens.
Described aperture is laser focal point in spatial filter along X-direction position.
The clear aperture of described calibration apertured bracket is more than the cross section spot size of laser, described calibration square light
The clear aperture of door screen is slightly less than the cross section spot size of laser.
The space directivity of described laser is frontal lens and rear lens along X-direction and central ray and spatial filter
Optical axis be completely superposed.
Plane mirror described in step 2 should not hinder laser transmission in spatial filter；Described in step 2
Diffraction pattern, its physical basis is the Kirchhoff diffraction integral formula under fraunhofer approximation, i.e. fraunhofer square hole diffraction,
Concrete formula is as follows:
Wherein, U (P) is the complex amplitude at focal point any point, and k is wave vector, and λ is wavelength, and x arrives for calibrating square diaphragm
The distance of focus, f is the focal length of spatial filter frontal lens, S1For calibrating the clear field of square diaphragm, A0For calibration square light
Laser complex amplitude at Lan, y, z are the coordinate in focal point YZ plane, y0、z0For the coordinate calibrated at square diaphragm in YZ plane.
CCD described in step 3, answers coupled computer or image display panel to use；Described aperture actuator, should be in YZ plane on
Lower left and right is adjustable.
Compared with prior art, the invention has the beneficial effects as follows:
1) solve at present due to the relative position that cannot accurately determine in spatial filter between aperture with laser spot,
Certain deviation is there is, the problem ultimately resulting in emergent light spot distortion when causing laser vias；
2) being common to the spatial filter of all specifications, the laser bigger especially for diffraction limit is passing through space filtering
Effect during device is especially apparent；
3) there is the check and correction feature such as accurate, easy to adjust, the most efficient and practical.
Accompanying drawing explanation
Fig. 1 is to utilize the overall structure schematic diagram of aperture position in diffraction pattern calibration spatial filter
Detailed description of the invention
The present invention will be described in detail with being embodied as example below in conjunction with the accompanying drawings.
The present invention is to solve at present due to the phase that cannot accurately determine in spatial filter between aperture with laser spot
To position, when causing laser vias, there is certain deviation, the problem ultimately resulting in emergent light spot distortion, it is proposed that a kind of utilization
The method of aperture position in diffraction pattern calibration spatial filter.
A kind of utilize the method for aperture position in diffraction pattern calibration spatial filter, specifically comprise the following steps that
Step 1, with the cross section of aperture 5 in spatial filter 1 calibration apertured bracket 2 is fixed along X-direction for YZ face
In the front end of spatial filter 1, make the frontal lens 10 of spatial filter 1 and the optical axis of rear lens 11 by calibration apertured bracket 2
The geometric center of logical light and the logical optical plane of calibration apertured bracket 2 are parallel with the cross section of aperture 5；
Step 2, will calibrate square diaphragm 3 insert calibration apertured bracket 2, make the square diaphragm of calibration 3 lead to the geometric center of light
The geometric center leading to light with calibration apertured bracket 2 overlaps.When laser 9 irradiation is when calibrating square diaphragm 3, and laser 9 is at aperture 5
Forming a specific cross diffraction pattern, this diffraction pattern is through plane mirror 6, through window 7, is finally imaged on CCD8
On；
The relative position of step 3, the upper laser 9 diffraction pattern at focal point of comparison CCD8 and aperture 5, by regulating aperture
Actuator 4 adjusts the position of aperture 5, makes aperture 5 on CCD8 overlap with the cross searching of laser 9 far field construction pattern；
Square diaphragm 3 is calibrated in step 4, removal, makes laser 9 completely by spatial filter 1, thus efficiently solve due to
Cannot accurately determine the relative position between aperture with laser spot in spatial filter, exist certain when causing laser vias
Deviation, the problem ultimately resulting in the distortion of shoot laser hot spot.
It is last it should be noted that, above example is only in order to illustrate technical scheme and unrestricted.Although ginseng
According to embodiment, the present invention is described in detail, it will be understood by those within the art that, the technical side to the present invention
Case is modified or equivalent, and without departure from the spirit and scope of technical solution of the present invention, it all should be contained in the present invention
Right in the middle of.
Claims (9)
1. one kind utilizes the method for aperture position in diffraction pattern calibration spatial filter, it is characterised in that at spatial filter
Being previously inserted into a calibration diaphragm, the far field construction pattern produced after utilizing CCD observation laser irradiation calibration diaphragm is sharp to demarcate
Optical focus particular location at aperture in spatial filter, makes small hole center accurate with laser spot by regulation aperture position
Overlap.
The most according to claim 1 utilizing the method for aperture position in diffraction pattern calibration spatial filter, its feature exists
In, specifically comprise the following steps that
Step 1, it is YZ face with the cross section of aperture (5) in spatial filter (1), by solid along X-direction for calibration apertured bracket (2)
It is scheduled on the front end of spatial filter (1), makes the frontal lens (10) of spatial filter (1) and the optical axis of rear lens (11) by calibration
The geometric center of the logical light of apertured bracket (2), and the logical optical plane of calibration apertured bracket (2) is parallel with the cross section of aperture (5)；
Step 2, square diaphragm (3) will be calibrated insert calibration apertured bracket (2), make in the geometry of the logical light of the square diaphragm of calibration (3)
The geometric center of heart light logical with calibration apertured bracket (2) overlaps；When laser (9) irradiation is when calibrating square diaphragm (3), laser
(9) forming a cross diffraction pattern at aperture (5) place, this diffraction pattern passes through plane mirror (6) and glass window (7),
Finally it is imaged on CCD (8)；
Step 3, adjusted the position of aperture (5) by regulation aperture actuator (4), make upper aperture (5) center of CCD (8) with swash
The cross searching of light (9) far field construction pattern overlaps；
Step 4, will calibrate square diaphragm (3) removal.
The most according to claim 2 utilizing the method for aperture position in diffraction pattern calibration spatial filter, its feature exists
In, the frontal lens (10) of described spatial filter (1) is coaxial confocal with rear lens (11).
The most according to claim 2 utilizing the method for aperture position in diffraction pattern calibration spatial filter, its feature exists
In, the clear aperture of described calibration apertured bracket (2) is more than the cross section spot size of laser (9), and described calibration is square
The clear aperture of diaphragm (3) is slightly less than the cross section spot size of laser (9).
The most according to claim 2 utilizing the method for aperture position in diffraction pattern calibration spatial filter, described swashs
The space directivity of light (9) is along X-direction and central ray and frontal lens (10) along spatial filter (1) and rear lens (11)
Optical axis is completely superposed.
The most according to claim 2 utilizing the method for aperture position in diffraction pattern calibration spatial filter, its feature exists
In, described aperture (5) is the laser (9) focal point in spatial filter (1) along X-direction position.
The most according to claim 2 utilizing the method for aperture position in diffraction pattern calibration spatial filter, described is flat
Face reflecting mirror (6) does not hinder the laser (9) transmission in spatial filter (1).
The most according to claim 2 utilize the method for aperture position in diffraction pattern calibration spatial filter, described CCD
(8) it is connected with computer or image display panel.
The most according to claim 2 utilizing the method for aperture position in diffraction pattern calibration spatial filter, described is little
Hole actuator (4) is the most adjustable in YZ plane.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610766057.1A CN106199996B (en) | 2016-08-30 | 2016-08-30 | Utilize the method for aperture position in diffraction pattern calibration spatial filter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610766057.1A CN106199996B (en) | 2016-08-30 | 2016-08-30 | Utilize the method for aperture position in diffraction pattern calibration spatial filter |
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| CN106199996A true CN106199996A (en) | 2016-12-07 |
| CN106199996B CN106199996B (en) | 2018-12-25 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110146991A (en) * | 2019-04-18 | 2019-08-20 | 珠海达明科技有限公司 | A kind of laser facula shaping optical system |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3851308A (en) * | 1972-02-14 | 1974-11-26 | Asahi Optical Co Ltd | Pattern identification system utilizing coherent light |
| US20040090621A1 (en) * | 2001-03-15 | 2004-05-13 | Robert Bennett | Spectroscopy apparatus and method |
| CN101266340A (en) * | 2008-04-25 | 2008-09-17 | 中国科学院上海光学精密机械研究所 | Method for regulating high power laser apparatus light path alignment |
| CN102236174A (en) * | 2010-04-28 | 2011-11-09 | 北京国科世纪激光技术有限公司 | Spatial filtering system |
| CN103698896A (en) * | 2013-12-26 | 2014-04-02 | 中国科学院苏州生物医学工程技术研究所 | Precise pinhole alignment debugging method |
| CN104570380A (en) * | 2015-01-22 | 2015-04-29 | 中国科学院上海光学精密机械研究所 | Spatial filter debugging device and method |
-
2016
- 2016-08-30 CN CN201610766057.1A patent/CN106199996B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3851308A (en) * | 1972-02-14 | 1974-11-26 | Asahi Optical Co Ltd | Pattern identification system utilizing coherent light |
| US20040090621A1 (en) * | 2001-03-15 | 2004-05-13 | Robert Bennett | Spectroscopy apparatus and method |
| CN101266340A (en) * | 2008-04-25 | 2008-09-17 | 中国科学院上海光学精密机械研究所 | Method for regulating high power laser apparatus light path alignment |
| CN102236174A (en) * | 2010-04-28 | 2011-11-09 | 北京国科世纪激光技术有限公司 | Spatial filtering system |
| CN103698896A (en) * | 2013-12-26 | 2014-04-02 | 中国科学院苏州生物医学工程技术研究所 | Precise pinhole alignment debugging method |
| CN104570380A (en) * | 2015-01-22 | 2015-04-29 | 中国科学院上海光学精密机械研究所 | Spatial filter debugging device and method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110146991A (en) * | 2019-04-18 | 2019-08-20 | 珠海达明科技有限公司 | A kind of laser facula shaping optical system |
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| CN106199996B (en) | 2018-12-25 |
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