CN110456521A - A kind of light path system of unsteady cavity solid state laser alignment adjustment - Google Patents

A kind of light path system of unsteady cavity solid state laser alignment adjustment Download PDF

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Publication number
CN110456521A
CN110456521A CN201910710285.0A CN201910710285A CN110456521A CN 110456521 A CN110456521 A CN 110456521A CN 201910710285 A CN201910710285 A CN 201910710285A CN 110456521 A CN110456521 A CN 110456521A
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China
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mirror
laser
unsteady cavity
light
light path
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CN201910710285.0A
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CN110456521B (en
Inventor
王晓丹
武春风
白明顺
陈黎
刘晓
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Chengdu Aerospace Science And Technology Microelectronics System Research Institute Co Ltd
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Chengdu Aerospace Science And Technology Microelectronics System Research Institute Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)

Abstract

The present invention relates to the present invention relates to laser technology field, disclose a kind of light path system of unsteady cavity solid state laser alignment adjustment.Including with flowering structure: smallcolumn diaphragm being arranged between laser and half-reflecting half mirror, smallcolumn diaphragm is mounted on the first guide rail, and the two sides optical path of half-reflecting half mirror sets gradually the first relay mirror and the second relay mirror;First relay mirror and the second relay mirror orientation are adjustable, and the reflected light path of the first relay mirror is arranged telescopic system object lens, telescopic system eyepiece, autocollimator and image camera, telescopic system object lens and telescopic system eyepiece and is mounted on the second guide rail;Set gradually third relay mirror, the 4th relay mirror and laser gain medium on the reflected light path of second relay mirror, mirror after mirror and laser unsteady cavity is respectively set before laser unsteady cavity in laser gain medium two sides.The hysteroscope of unsteady cavity and the position adjustment of gain medium of solid laser are realized by above structure.

Description

A kind of light path system of unsteady cavity solid state laser alignment adjustment
Technical field
The present invention relates to laser technology field, in particular to a kind of optical path system of unsteady cavity solid state laser alignment adjustment System.
Background technique
Solid state laser is a kind of all solid state laser of diode pumping.As the development of social technology is more and more High power solid state laser has reached myriawatt grade for fields, the power of special jointed fiber laser such as industry, space flight, at Ripe is applied to welding, cutting, cladding;But (removing optical fiber laser) solid state laser all solid state for pulse laser is then It is irreplaceable, it is especially right because the advantages that its Gao Zhongying, high-energy, low-heat control, good beam quality is the only selection of industry In some special purposes, such as laser far-distance ranging, the feature performance benefit of pulse laser is then very prominent.It passes at a distance The defeated beam quality needed, the solid state laser of unsteady cavity are then a kind of method for the beam quality realized, but are non-steady The misalignment sensitivity of chamber solid-state laser is then very high, this needs the adjustment precision of laser is very high just to can guarantee laser Output stability.
Summary of the invention
The technical problems to be solved by the present invention are: in view of the above problems, it is non-steady in order to guarantee well The cavity adjustment of chamber and the optical path alignment of gain medium structure, provide a kind of optical path of unsteady cavity solid state laser alignment adjustment System.
The technical solution adopted by the invention is as follows: a kind of light path system of unsteady cavity solid state laser alignment adjustment, including Laser, half-reflecting half mirror, smallcolumn diaphragm, the first relay mirror, the second relay mirror, telescopic system object lens, looking in the distance is System eyepiece, autocollimator, image camera, third relay mirror, the 4th relay mirror, laser gain medium, laser are non- Mirror after mirror and laser unsteady cavity, is arranged smallcolumn diaphragm, smallcolumn diaphragm peace before steady chamber between the laser and half-reflecting half mirror On the first guide rail, the two sides optical path of the half-reflecting half mirror sets gradually the first relay mirror and the second relaying reflection Mirror;First relay mirror and the second relay mirror orientation are adjustable, the reflected light path of first relay mirror according to Secondary setting telescopic system object lens, telescopic system eyepiece, autocollimator and image camera, the telescopic system object lens and telescopic system Eyepiece is mounted on the second guide rail;Third relay mirror, are set gradually on the reflected light path of second relay mirror Mirror and laser before laser unsteady cavity is respectively set in four relay mirrors and laser gain medium, the laser gain medium two sides Mirror after device unsteady cavity.
Further, the autocollimator has light bar and light bulb with cross, and the light bar with cross is certainly Scale is set in a vertical and horizontal direction on the bottom plate of the graticle of collimator, and the light that light bulb issues passes through the object of autocollimator Mirror focuses on the graticle of autocollimator, and the light after graticle reflects issues parallel after collimating using another object lens Light.
Further, the telescopic system object lens are biconvex lens, and telescopic system eyepiece is plano-convex lens.
Further, the pedestal of the telescopic system eyepiece is mounted on guide rail by stepper motor, stepper motor arrangement By the moving distance of the adjustable eyepiece of electronic control unit, the mobile accuracy of dynamic step machine does not need too small, reaches 1 millimeter of precision Just meet the application of this system.
Further, the laser is gas He-Ne laser.
Further, the diameter of the smallcolumn diaphragm is 1mm.
Further, the smallcolumn diaphragm is mounted on the first guide rail, the three-dimensional by three-dimensional adjustable support construction There are depths of groove for the outer edge of adjustable support construction, for placing adjustment tooling.
Further, the adjustable reflection in 90 ° of second relay mirror or 180 ° of reflections.
Further, the adjustable support construction of setting height, the adjustable branch of height below the laser gain medium There are depths of groove for the outer edge of support structure, for placing adjustment tooling.
Further, cross light is installed respectively on the cutting ferrule of mirror after mirror and laser unsteady cavity before the laser unsteady cavity Column.
Compared with prior art, having the beneficial effect that by adopting the above technical scheme
1) light path system of this programme, to hysteroscope real time imagery, adjusts hysteroscope by the way that guide rail is arranged in optical path in real time Pitching makes the light bar alignment for adjusting hot spot and autocollimator system.
2) mirror after mirror before the laser unsteady cavity of laser and laser unsteady cavity is imaged simultaneously using telescopic system, and The dysfunctional of front to back registration can be examined by guide rail.
3) setting of the light path system based on guide rail and adjustable support can be applied with XPRS project in laser In adjustment.
4) light path system of the present invention has the advantages of simple structure and easy realization.
Detailed description of the invention
Fig. 1 is the light path system principle schematic diagram of unsteady cavity solid state laser alignment adjustment of the present invention.
Fig. 2 is the cross light bar structural schematic diagram in the present invention with light passing aperture.
Fig. 3 is the light bar structural schematic diagram in the present invention with clear aperature.
Fig. 4 is the structural schematic diagram of cross light bar in the present invention.
In Fig. 1: image camera 1, autocollimator 2, light bulb 3, the light bar 4 with cross, telescopic system object lens 5, looking in the distance is System eyepiece 6, the second guide rail 7, stepper motor 8, the first relay mirror 9, the first guide rail 10, smallcolumn diaphragm 11, He-Ne laser 12, half-reflecting half mirror 13, the second relay mirror 14, third relay mirror 15, the 4th relay mirror 16, laser are non-steady Mirror 20 after mirror 17, the adjustable support construction 18 of height, laser gain medium 19, laser unsteady cavity before chamber.
In Fig. 2: cross groove 21;Light passing aperture 22.
In Fig. 3: light passing aperture 31.
In Fig. 4: light passing aperture 41.
Specific embodiment
The purpose of the present invention, technical solution and its feature are illustrated in order to clearer, below in conjunction with attached drawing and reality Example diagram is further described in detail the present invention.
The light path system of a kind of unsteady cavity solid state laser alignment adjustment of the invention, as shown in Figure 1, including laser (preferably using He-Ne laser 12), half-reflecting half mirror 13, smallcolumn diaphragm 11, the first relay mirror 9, the second relay mirror 14, telescopic system object lens 5, telescopic system eyepiece 6, autocollimator 2, image camera 1, third relay mirror the 15, the 4th relay Mirror 20,12 He of laser after mirror 17 and laser unsteady cavity before reflecting mirror 16, laser gain medium 19, laser unsteady cavity Smallcolumn diaphragm 11 is set between half-reflecting half mirror 13, and smallcolumn diaphragm 11 is mounted on the first guide rail 10, the half-reflecting half mirror 13 Two sides optical path set gradually the first relay mirror 9 and the second relay mirror 14;First relay mirror 9 and second 14 orientation of relay mirror is adjustable, and telescopic system object lens 5, telescopic system are arranged in the reflected light path of first relay mirror 9 Eyepiece 6, autocollimator 2 and image camera 1, the telescopic system object lens and telescopic system (imaging system of looking in the distance be Galileo at As system) eyepiece is mounted on the second guide rail 7;Third relaying is set gradually on the reflected light path of second relay mirror 14 Laser is respectively set in reflecting mirror 15, the 4th relay mirror 16 and laser gain medium 19,19 two sides of laser gain medium The adjustable support construction of height can be set below gain media 19 in mirror 20 after mirror 17 and laser unsteady cavity before device unsteady cavity 18.Concrete operating principle are as follows:
Optical path is built according to the structure in above-mentioned Fig. 1, He-Ne laser 12 is placed first on optical platform, He-Ne is swashed Light device 12 is fixed on optical platform, and then the first guide rail 10 is fixed on optical platform, in order to make 12 He of He-Ne laser First guide rail 10 is coaxial, then needs to open the aperture that He-Ne light is passed through smallcolumn diaphragm 11 by He-Ne laser, then slide aperture Light bar 11 determines straight line, the light that any one of sliding position can be such that He-Ne laser 12 issues according to two o'clock The complete aperture for passing through smallcolumn diaphragm 11, then it is assumed that the slide rail of He-Ne laser 12 and the first guide rail 10 is coaxial.In order to Make optical path adjusting enhanced convenience, the smallcolumn diaphragm 11 in Fig. 1 is to be mounted on first by three-dimensional adjustable support construction to lead On rail 10, can height, left and right adjusting support construction be adjusted the aperture position of smallcolumn diaphragm.
Half-reflecting half mirror 13 and the second relay mirror 14 are installed, but the second relay mirror 14 is not installation diagram at this time The 90 degree of reflections presented in 1, but the orientation of the second relay mirror 14 is determined according to 180 degree reflection, pass through the second relaying The reflection of reflecting mirror 14, light return to the aperture of smallcolumn diaphragm 11, adjust half-reflecting half mirror 13, second relay mirror 14 is bowed It faces upward so that the light returned passes through after half-reflecting half mirror 13 reflects further through the smallcolumn diaphragm 11 on the first guide rail 10, if by anti- The light penetrated can also not blocked by the smallcolumn diaphragm 11 on guide rail completely, then it is assumed that the part system optical path adjusting is complete At if the reflected light returned, which is blocked, needs to adjust half-reflecting half mirror 13, the second relay mirror 14, so that He-Ne laser The light of 12 transmittings and the light for passing through the reflection of the second relay mirror 14 can pass through the mobile smallcolumn diaphragm 11 and nothing on guide rail Block.
First relay mirror 9 is mounted on optical platform, is got to through the light of half-reflecting half mirror 13 on optical platform On first relay mirror 9, the light after reflection deflects into the second guide rail 7 where the telescopic system in Fig. 1 according to 90 degree Position, then the second guide rail 7 is fixed on optical platform, the aperture light passing support frame of smallcolumn diaphragm 11 is placed on first On guide rail 10, the light that the mirror pitching for adjusting the position, the first relay mirror 9 of guide rail issues He-Ne laser 12 passes through Smallcolumn diaphragm 11 on first guide rail, mobile smallcolumn diaphragm 11, can make the light of He-Ne laser 12 pass through aperture on guide rail Then think that light and the first guide rail 10, the second guide rail 7 of the sending of He-Ne laser 12 are all coaxial.
The light bar with clear aperature of Fig. 3 is placed at the preceding object lens of autocollimator 2, the light bar has cross, makes It obtains light and passes through the center of object lens before autocollimator.Image camera 1 is opened, image camera 1 is a kind of photodetection imaging CCD, light The visual field of electric detection imaging CCD is greater than the visual field of autocollimator, only needs the imaging unit of black and white under normal circumstances Meet the adjustment application of laser.The position for adjusting imaging CCD makes the light by alignment in the central vision of imaging CCD.
After being regulated according to above step, then by the second relay mirror 14 rotate back into 90 degree reflection so that light deflection according to The secondary reflecting mirror by third relay mirror 15 (90 ° of reflections) and the 4th relay mirror 16 (90 ° of reflections), according to Fig. 1's Optical path installs third relay mirror 15 and the 4th relay mirror 16, in the reflected light path and the 4th of the second relay mirror 14 Reflected light path after reflecting mirror 16 is parallel, and the adjustable support construction 18 of installation height and laser gain medium 19.Do not have at this time Mirror 20 after mirror 17 and laser unsteady cavity is installed before laser unsteady cavity, laser is the refraction in strict accordance with light when design Law has the light bar of clear aperature in the front-end and back-end of laser gain medium all installations diagram 3 to design, and adjusts figure In the second relay mirror 14, third relay mirror 15, the 4th relay mirror 16 and laser position so that light according to Refraction theorem passes through the aperture of gain media front and back end completely, then it is assumed that this light path light axis, which is adjusted, to be completed.
Autocollimator needs a luminous light bulb, and the light of sending focuses on autocollimator by the object lens of autocollimator On graticle, the light after graticle reflects is issuing directional light after another object lens collimation;The light of laser is closed, Image camera 1 is opened, the light that light bulb 3 issues is imaged on graticle after auto-collimation, and graticle is with scale and indicates ten Word picture, the focusing mirror by adjusting image camera 1 see the cross picture on 2 graticle of autocollimator.The laser of pitching will be had Mirror 17 is mounted on before laser gain medium before device unsteady cavity, and it is non-that the cross light bar in Fig. 4 is then mounted on laser Before steady chamber on the cutting ferrule of mirror 17, the relative distance of telescopic system object lens 5, telescopic system eyepiece 6 is adjusted by stepper motor 8, then It can be seen that before laser unsteady cavity mirror 17 about the cross light bar picture in Fig. 4, adjust bowing for mirror 17 before laser unsteady cavity It faces upward and is then overlapped the cross of mirror 17 before laser unsteady cavity with the cross picture of autocollimator 2, it will be before laser unsteady cavity after coincidence 17 cross light bar of mirror is rotated by 360 °, and the cross light bar picture of the cross light bar of mirror 17 and autocollimator is 360 before laser unsteady cavity It can be overlapped well on the direction of degree, think that the adjusting of this mirror finishes;The tool of laser gain medium front and back end is removed at this time There is the light bar of clear aperature, same principle adjusts mirror 20 after laser unsteady cavity, and the laser equipped with cross light bar is non-steady Mirror 20, which is placed on, after chamber is adjusted on framework, and the relative distance by adjusting telescopic system object lens 5, telescopic system eyepiece 6 allows laser The cross picture of mirror 20 is imaged on image camera 1 after unsteady cavity, and mirror is until all cross pictures after adjusting in the way of preceding mirror It is all overlapped, thinks that the hysteroscope of the laser and gain media adjusting finish.
The cross light bar with light passing aperture in Fig. 2 is mounted on to the front and back end of laser gain medium 19 again, by Fig. 4 Cross light bar be mounted on the front and back end of laser hysteroscope (mirror after mirror and unsteady cavity before unsteady cavity), open He-Ne laser 12 and examine Look into whether the light by 4 light bars can pass through completely the front and back aperture of laser gain medium 19, if so, closing He-Ne Lasers Device 12, by adjust telescopic system object lens 5, telescopic system eyepiece 6 relative distance, check on image camera 1 each swash The cross of light device hysteroscope seem it is no be overlapped with the cross picture of autocollimator, can be by swashing if repeating detection He-Ne light above The aperture of optical gain medium 19, cross picture can be overlapped, and think to finish to laser adjusting, product is qualified, not then continues to adjust Section is until reach requirement.
The invention is not limited to specific embodiments above-mentioned.The present invention, which expands to, any in the present specification to be disclosed New feature or any new combination, and disclose any new method or process the step of or any new combination.If this Field technical staff is altered or modified not departing from the unsubstantiality that spirit of the invention is done, should belong to power of the present invention The claimed range of benefit.

Claims (10)

1. a kind of light path system of unsteady cavity solid state laser alignment adjustment, it is characterised in that: including laser, half-reflection and half-transmission Mirror, smallcolumn diaphragm, the first relay mirror, the second relay mirror, telescopic system object lens, telescopic system eyepiece, autocollimator, Mirror and laser before image camera, third relay mirror, the 4th relay mirror, laser gain medium, laser unsteady cavity Smallcolumn diaphragm is arranged in mirror after unsteady cavity between the laser and half-reflecting half mirror, smallcolumn diaphragm is mounted on the first guide rail, institute The two sides optical path for stating half-reflecting half mirror sets gradually the first relay mirror and the second relay mirror;The first relaying reflection Mirror and the second relay mirror orientation are adjustable, the reflected light path of first relay mirror set gradually telescopic system object lens, Telescopic system eyepiece, autocollimator and image camera, the telescopic system object lens and telescopic system eyepiece are mounted on the second guide rail On;Third relay mirror, the 4th relay mirror and laser are set gradually on the reflected light path of second relay mirror Mirror after mirror and laser unsteady cavity is respectively set before laser unsteady cavity in gain media, the laser gain medium two sides.
2. the light path system of unsteady cavity solid state laser alignment adjustment as described in claim 1, it is characterised in that: the autocollimatic Straight instrument has light bar and light bulb with cross, and the light bar with cross is on the bottom plate of the graticle of autocollimator perpendicular Scale is set in straight and horizontal direction, and the light that light bulb issues focuses on the graticle of autocollimator by the object lens of autocollimator On, the light after graticle reflects issues directional light after collimating using another object lens.
3. the light path system of unsteady cavity solid state laser alignment adjustment as described in claim 1, it is characterised in that: described to look in the distance System object lens are biconvex lens, and telescopic system eyepiece is plano-convex lens.
4. the light path system of unsteady cavity solid state laser alignment adjustment as described in claim 1, it is characterised in that: described to look in the distance The pedestal of system eyepiece is mounted on guide rail by stepper motor.
5. the light path system of unsteady cavity solid state laser alignment adjustment as described in claim 1, it is characterised in that: the laser Device is gas He-Ne laser.
6. the light path system of unsteady cavity solid state laser alignment adjustment as described in claim 1, it is characterised in that: the aperture The diameter of light bar is 1mm.
7. the light path system of unsteady cavity solid state laser alignment adjustment as described in claim 1, it is characterised in that: the aperture Light bar is mounted on the first guide rail by three-dimensional adjustable support construction, and the outer edge of the adjustable support construction of three-dimensional stays Fluted depth, for placing adjustment tooling.
8. the light path system of unsteady cavity solid state laser alignment adjustment as described in claim 1, it is characterised in that: described second Reflection in 90 ° that relay mirror is adjustable or 180 ° of reflections.
9. the light path system of unsteady cavity solid state laser alignment adjustment as described in claim 1, it is characterised in that: the laser The adjustable support construction of setting height below gain media, there are groove depths for the outer edge of the adjustable support construction of height Degree, for placing adjustment tooling.
10. the light path system of unsteady cavity solid state laser alignment adjustment as described in claim 1, it is characterised in that: described to swash Cross light bar is installed respectively on the cutting ferrule of mirror after mirror and laser unsteady cavity before light device unsteady cavity.
CN201910710285.0A 2019-08-02 2019-08-02 Light path system for aligning, installing and adjusting unstable cavity solid laser Active CN110456521B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112596233A (en) * 2020-12-16 2021-04-02 航天科工微电子系统研究院有限公司 Optical cavity collimation method and collimation adjusting device for annular cavity slab laser
CN112596230A (en) * 2020-12-16 2021-04-02 航天科工微电子系统研究院有限公司 Light path system for photoelectric tracking active chromatographic illumination

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112596233A (en) * 2020-12-16 2021-04-02 航天科工微电子系统研究院有限公司 Optical cavity collimation method and collimation adjusting device for annular cavity slab laser
CN112596230A (en) * 2020-12-16 2021-04-02 航天科工微电子系统研究院有限公司 Light path system for photoelectric tracking active chromatographic illumination
CN112596230B (en) * 2020-12-16 2022-09-20 航天科工微电子系统研究院有限公司 Light path system for photoelectric tracking active chromatographic illumination

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