CN106500629B - Microscopic three-dimensional measuring device and system - Google Patents
Microscopic three-dimensional measuring device and system Download PDFInfo
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
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Abstract
The invention is suitable for the technical field of three-dimensional measurement, and provides a microscopic three-dimensional measurement device and a system, wherein the device comprises: the device comprises a structured light generating device, a light path steering component, an imaging lens group and a CCD (charge coupled device); the structured light generating means is for generating structured light; the light path steering component is used for guiding the structured light to an object to be measured and guiding light carrying object image information to the imaging lens group after passing through the object to be measured; the imaging lens group comprises a main lens and a micro lens array and is used for transmitting the light; the CCD is used for recording light rays transmitted by adjacent micro lenses in the micro lens array to obtain a recorded image. The microscopic three-dimensional measuring device and the microscopic three-dimensional measuring system solve the problem of shadow shielding in structured light three-dimensional measurement; meanwhile, the light field camera and the structured light three-dimensional measurement are combined, so that the pixel utilization rate of the light field camera is greatly improved, and the precision is higher.
Description
Technical Field
The invention belongs to the technical field of three-dimensional measurement, and particularly relates to a microscopic three-dimensional measurement device and system.
Background
The three-dimensional technology is more and more widely applied, three-dimensional images can enable people to better perceive diversification of the real world, how to acquire three-dimensional point cloud data of an object in a more convenient and rapid mode is a hotspot in the field of three-dimensional measurement, the current common three-dimensional measurement method is a structured light measurement method based on the triangulation principle, and a common triangulation method is influenced by the surface shape of the object due to the fact that a projection optical axis and a camera optical axis form a certain angle, and can be projected by projectors in the surface area of the object but cannot be shot by a camera; however, some cameras shoot the regions, and the projectors cannot project the regions, which finally results in incomplete three-dimensional surface data of the reconstructed object, and the inherent occlusion and shadow problems of the triangulation principle limit the application of the method.
And the light field camera opens up a new field for researching three-dimensional imaging by using the advantage of recording multi-dimensional light ray information in the imaging aspect. At present, a three-dimensional reconstruction method for a light field camera generally adopts a Fourier slice theorem to analyze four-dimensional light field data, a proper filter function is constructed according to different focusing positions of image points at different depths to obtain a large number of tomographic images changing along with the depth change of an image focusing area, then a three-dimensional surface type of an object surface is reconstructed according to the relation between the depth and a focusing point, the precision depends on the number of layers of tomography, and the relative precision is low.
Disclosure of Invention
The invention aims to provide a microscopic three-dimensional measuring device and a microscopic three-dimensional measuring system, and aims to realize high-precision three-dimensional measurement of the surface shape of a microstructure of an object to be measured by combining a light field camera with structured light three-dimensional measurement.
The invention provides a microscopic three-dimensional measuring device, which comprises: the device comprises a structured light generating device, a light path steering component, an imaging lens group and a CCD (charge coupled device);
the structured light generating device is used for generating structured light;
the light path steering component is used for guiding the structured light to an object to be measured and guiding light rays carrying object image information to the imaging lens group after passing through the object to be measured;
the imaging lens group comprises a main lens and a micro lens array and is used for transmitting the light;
the CCD is used for recording light rays transmitted by adjacent micro lenses in the micro lens array to obtain a recorded image.
Further, the structured light generating device is a projection device, and the projection device sequentially includes along the light path direction: the projection device comprises a light source, a first lens, a grating and a second lens, wherein the projection device is used for projecting a grating image.
Furthermore, the light path steering component comprises an adjustable plane mirror, a first light path steering component, a second light path steering component and frosted glass.
Further, the first optical path steering component comprises a first plane mirror, a half-transmitting and half-reflecting mirror and a first lens group along the optical path direction;
when the adjustable plane mirror is used for guiding the light path to the first light path steering assembly, the adjustable plane mirror and the propagation direction of the structured light are placed at a first angle, and the adjustable plane mirror is parallel to the first plane mirror and is complementary with the semi-transparent semi-reflecting mirror.
Further, the second optical path turning component comprises a second flat mirror, a third flat mirror and a second lens group along the optical path direction;
when the adjustable plane mirror is used for guiding the light path to the second light path steering assembly, the adjustable plane mirror and the propagation direction of the structured light are placed at a second angle, and the adjustable plane mirror is parallel to the second plane mirror and is complementary to the third plane mirror;
the first and second angles are complementary.
Further, the first angle is 45 degrees and the second angle is 135 degrees.
Further, the object to be measured is placed between the first lens group and the ground glass and attached to the ground glass;
if the object to be measured is a non-transparent object, the light emitted by the projection device passes through the first light path steering component;
and if the object to be measured is a transparent object, the light emitted by the projection device passes through the second light path steering component.
Further, the distance between the micro lens array and the main lens is the focal length of the main lens, and the distance between the micro lens array and the CCD is the focal length of a single micro lens.
The invention also provides a microscopic three-dimensional measurement system, which comprises: the microscopic three-dimensional measuring device comprises an image processing unit and an image processing unit, wherein the image processing unit comprises an image processing module, an equiphase point searching module, a connecting module and a solving module;
the image processing module is used for processing the recorded image to obtain an absolute phase diagram;
the equiphase point searching module is used for obtaining equiphase points with equal phase values in the absolute phase diagram through equiphase searching;
the connecting module is used for establishing a plurality of three-dimensional space straight lines by calibrating and determining the coordinates of the central point of the micro lens in the micro lens array and connecting the central point of the micro lens to the equal phase point in the corresponding macro pixel;
and the solving module is used for solving the intersection points of the three-dimensional space straight lines to obtain three-dimensional space point coordinates with depth information, namely the three-dimensional point cloud data of the object to be measured is obtained.
Compared with the prior art, the invention has the beneficial effects that: according to the microscopic three-dimensional measuring device and the microscopic three-dimensional measuring system, a light field imaging technology and structured light three-dimensional measurement are combined, a transparent object or a non-transparent object can be measured to obtain an image, the image is processed to obtain a continuous absolute phase diagram, and then phase point matching is carried out to reconstruct a three-dimensional surface type; the device and the system solve the problem of shadow occlusion in structured light three-dimensional measurement; meanwhile, the light field camera and the structured light three-dimensional measurement are combined, the pixel utilization rate of the light field camera is greatly improved, the data processing reaches the sub-pixel level, and the sensitivity and the accuracy are higher.
Drawings
FIG. 1 is a schematic diagram of a microscopic three-dimensional measuring device provided by an embodiment of the invention;
FIG. 2 is a schematic diagram of a microscopic three-dimensional measurement system provided by an embodiment of the invention;
FIG. 3 is a block schematic diagram of an image processing unit in the microscopic three-dimensional measurement system provided in FIG. 2;
fig. 4 is a schematic diagram of a module for solving image points from equiphase points according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
The main realization idea of the invention is as follows: according to the microscopic three-dimensional measuring device and system provided by the invention, light emitted by a single three-dimensional coordinate point in an object space is imaged after passing through the first lens group, the semi-transparent and semi-reflective lens and the main lens, the light is continuously transmitted forwards and can be captured by a CCD (charge coupled device) behind a plurality of micro lenses, and a recorded image is obtained. Each microlens corresponds to an N x N macropixel, an object space point finally corresponds to a plurality of recorded image upper image points, and an absolute phase diagram is obtained by continuously shooting a plurality of phase shift images and combining a difference frequency phase expansion algorithm; finding out all pixel points with the same phase by searching the equal phases in a plurality of adjacent macro pixels, replacing the micro-lens array with a small hole model, determining the central coordinate of the micro-lens by calibration, connecting the central point of the micro-lens to the pixel points with the equal phases in the corresponding macro pixels, and constructing a plurality of three-dimensional space straight lines; and solving the intersection point of a plurality of three-dimensional space straight lines to obtain the three-dimensional space point coordinates with depth information, namely solving the three-dimensional point cloud data.
The following describes in detail the microscopic three-dimensional measuring device, as shown in fig. 1, including: a structured light generating device (the structured light generating device in the embodiment of the present invention is a projection device 1), a light path turning component 2, an imaging lens group 3, and a CCD 4;
the structured light generating means is for generating structured light.
The projection device 1 sequentially includes along the light path direction: a light source 11, a first lens 12, a grating 13 and a second lens 14 for projecting a grating image, wherein the grating 13 may be replaced with a DMD or an LCD.
The light path turning component 2 is configured to guide the structured light to an object to be measured, and guide light carrying object image information to the imaging lens group after passing through the object to be measured.
In the embodiment of the present invention, the optical path turning component 2 is configured to guide the grating image projected by the projection apparatus to the object to be measured, and guide the fringe pattern on the surface of the projected object to the imaging lens group 3 after passing through the object to be measured.
The imaging lens group 3 includes a main lens 31, a microlens array 32, and is configured to transmit the light.
The CCD4 is used to record light transmitted from adjacent microlenses in the microlens array 32, resulting in a recorded image.
Specifically, the distance between the microlens array 32 and the main lens 31 is the main lens focal length, and the distance from the microlens array 32 to the CCD4 is the focal length of a single microlens.
Specifically, the optical path steering assembly 2 includes components of an adjustable plane mirror 21, a first optical path steering assembly, a second optical path steering assembly, and ground glass 28.
More specifically, the first optical path turning component includes a first plane mirror 22, a half mirror 23, a first lens group 24; the second optical path turning component comprises a second plane mirror 25, a third plane mirror 26 and a second lens group 27 along the optical path direction; the object to be measured is placed between the first lens group 24 and the ground glass 28 and attached to the ground glass 28.
When the adjustable plane mirror is used for guiding the light path to the first light path steering assembly, the adjustable plane mirror 21 is placed at a first angle with respect to the propagation direction of the structured light, and the adjustable plane mirror 21 is parallel to the first plane mirror 22 and is complementary to the half-mirror 23; when the adjustable plane mirror is used to guide the light path to the second light path turning component, the adjustable plane mirror 21 is placed at a second angle with respect to the propagation direction of the structured light, and the adjustable plane mirror 21 is parallel to the second plane mirror 25 and is complementary to the third plane mirror 26.
Further, the first angle and the second angle are complementary.
In an embodiment of the present invention, the first angle is 45 degrees, and the second angle is 135 degrees.
And if the object to be measured is a non-transparent object, realizing high-precision measurement of the surface shape of the non-transparent microscopic object. Specifically, when the object to be measured is a non-transparent object, the light emitted from the projection device 1 passes through the first light path turning component; the adjustable plane mirror 21 above the projection device 1 is placed at the position of the first, the projection device 1 projects a grating image, light passes through the adjustable plane mirror 21, the first plane mirror 22, the half-transmitting and half-reflecting mirror 23 and the first lens group 24 and then projects on the surface of an object to be measured, the light is subjected to diffuse reflection on the surface of the object to be measured to generate a fringe pattern on the surface of the projected object, the fringe pattern passes through the first lens group 24 and the half-transmitting and half-reflecting mirror 23 and is transmitted to the main lens 31, one point on the surface of the object to be measured can be imaged behind the plurality of micro lenses through the main lens 31 and finally is recorded by the CCD4 behind the imaging lens group 3 to obtain a recorded image.
And if the object to be measured is a transparent object, realizing high-precision measurement of the surface shape of the surface of the transparent microscopic object. Specifically, when the object to be measured is transparent, the light emitted by the projection device 1 passes through the second light path steering component; the adjustable plane mirror 21 above the projection device 1 is arranged at the position of the second lens group 24, the projection device 1 projects a grating image, light passes through the adjustable plane mirror 21, is reflected by the second plane mirror 25 and the third plane mirror 26, passes through the second lens group 27 and then strikes on the ground glass 28, the fringe image is subjected to diffuse reflection on the ground glass 28, then the light passes through an object to be measured to generate a fringe image on the surface of the projected object, passes through the first lens group 24 and the half-transmitting and half-reflecting mirror 23 and is transmitted to the main lens 31, one point on the surface of the object to be measured can be imaged behind the plurality of micro-lenses through the main lens 31, and finally is recorded by the CCD4 behind the imaging lens group 3.
The microscopic three-dimensional measuring device provided by the invention combines the light field imaging technology with the structured light three-dimensional measurement, and can measure a transparent object or a non-transparent object to obtain an image.
A microscopic three-dimensional measuring system is specifically described below, and as shown in fig. 2, the microscopic three-dimensional measuring system includes the microscopic three-dimensional measuring apparatus 1, and further includes an image processing unit 2; the image processing unit 2 comprises an image processing module 21, an equiphase point searching module 22, a connecting module 23 and a solving module 24, which are specifically shown in fig. 3;
the image processing module 21 is configured to process the recorded image to obtain an absolute phase map;
specifically, a double-frequency phase shift image is obtained by using the microscopic three-dimensional measuring device, and an absolute phase image is obtained by processing the obtained double-frequency phase shift image through a difference frequency phase expansion algorithm.
More specifically, the idea of the difference frequency phase unwrapping algorithm is as follows: two groups of phase shift fringe images with different periods are projected respectively, the two truncated phase images with different periods are obtained through solving, the periods of the two fringe images are different, so that the phase difference image generated by the difference of the two phase image is related to the level of the fringe image with a narrow period, and according to the level, the period code of the narrow fringe image can be obtained through calculation, and the absolute phase is expanded according to the code.
The equiphase searching module 22 is configured to obtain equiphase points with equal phase values in the absolute phase diagram through equiphase searching;
specifically, because of the limitation of the cutoff frequency of the main lens, light rays at object space points penetrate through the main lens, continue to propagate forwards after converging imaging points, and reach the microlens array to form a circular area (a conical section), the light rays passing through the center (a small hole) of the microlens finally form an image on a CCD (charge coupled device) behind the microlens, the light rays from the same object point form an image on the CCD behind a plurality of adjacent microlenses, and the image points have the same absolute phase value; given a certain characteristic point pixel coordinate and horizontal and vertical absolute phase values, other pixel coordinates with the same phase value point are determined through horizontal and vertical interpolation.
More specifically, the process of determining the same phase value point is as follows: setting a proper window size for the obtained continuous absolute phase diagram, searching points with equal phase in adjacent macropixels, searching points with equal horizontal phase and vertical phase by an interpolation method, and finally determining equal phase points; the pixel coordinates P1, P2, P3 in fig. 3 indicate that pixels with the same horizontal and vertical phase are found.
Specifically, regarding macro-pixels, an image of NxN pixel size (e.g., 20x20 size) is formed behind each microlens, the image of NxN pixel size behind each microlens is called a macro-pixel, and a microlens corresponds to a macro-pixel.
The connecting module 23 is configured to determine coordinates of a central point of a microlens in the microlens array by calibration, and connect the central point of the microlens to an equiphase point in a corresponding macropixel to construct a plurality of three-dimensional space straight lines;
specifically, the micro lens is replaced by a small hole model, the central coordinate of the micro lens is determined through calibration, and the central point of the micro lens is connected to the equal phase point in the corresponding macro pixel to construct a plurality of three-dimensional space straight lines.
In particular, with respect to the pinhole model, the microlens can be replaced by a pinhole whose coordinates are the geometric center of the microlens when the near optical axis condition is satisfied, i.e., the object distance is much larger than the image distance.
The solving module 24 is configured to solve an intersection point of the multiple three-dimensional space straight lines to obtain a three-dimensional space point coordinate P (X, Y, Z) with depth information, that is, to obtain three-dimensional point cloud data of the object to be measured.
Specifically, the coordinates P (X, Y, Z) in fig. 4 are the coordinates of the resulting three-dimensional spatial point with depth information, i.e., the coordinates of the image point.
The invention provides a microscopic three-dimensional measurement device and a microscopic three-dimensional measurement system based on a light field camera and structured light, which combine the structured light three-dimensional measurement with the light field camera, on one hand, the pixel utilization rate of the light field camera is improved, the processed pixels reach the sub-pixel level, the reconstruction sampling rate is improved, and the precision is also improved; on the other hand, a coaxial measuring system is constructed, and the influence of shielding and shadow is eliminated.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. A microscopic three-dimensional measuring device, comprising: the device comprises a structured light generating device, a light path steering component, an imaging lens group and a CCD (charge coupled device);
the structured light generating device is used for generating structured light;
the light path steering component is used for guiding the structured light to an object to be measured and guiding light rays carrying object image information to the imaging lens group after passing through the object to be measured; the light path steering component comprises an adjustable plane mirror, a first light path steering component and a second light path steering component;
the imaging lens group comprises a main lens and a micro lens array and is used for transmitting the light rays;
the CCD is used for recording light rays transmitted by adjacent micro lenses in the micro lens array to obtain a recorded image;
the first light path steering component comprises a first plane mirror, a semi-transparent semi-reflective mirror and a first lens group along the light path direction;
the second light path steering component comprises a second flat mirror, a third flat mirror and a second lens group along the light path direction;
the object to be measured is placed between the first lens group and the second lens group; if the object to be measured is a non-transparent object, the light emitted by the structured light generating device is guided to the first light path steering component through the adjustable plane mirror; and if the object to be measured is a transparent object, guiding the light emitted by the structured light generating device to the second light path steering component through the adjustable plane mirror.
2. The microscopic three-dimensional measuring device according to claim 1, wherein the structured light generating means is a projecting means, and the projecting means comprises, in order along the optical path: the projection device is used for projecting a grating image.
3. The microscopic three-dimensional measuring device according to claim 1, wherein when the adjustable flat mirror is used to direct the optical path to the first optical path turning assembly, the adjustable flat mirror is positioned at a first angle to the direction of propagation of the structured light, and the adjustable flat mirror is parallel to the first flat mirror and is complementary to the half mirror.
4. The microscopic three-dimensional measuring device according to claim 3, wherein when said tuneable flat mirror is used to direct the optical path to said second optical path turning assembly, said tuneable flat mirror is positioned at a second angle to the direction of propagation of said structured light, said tuneable flat mirror and said second flat mirror are parallel and complementary to said third flat mirror;
the first and second angles are complementary.
5. The microscopic three-dimensional measuring device according to claim 4, wherein the optical path turning assembly further comprises ground glass, and when the optical path passes through the second optical path turning assembly, the light ray passes through the second plane mirror, the third plane mirror, the second lens group and the ground glass in the direction of the optical path; the object to be measured is arranged between the first lens group and the ground glass and is attached to the ground glass.
6. The microscopic three-dimensional measuring device according to claim 4, wherein said first angle is 45 degrees and said second angle is 135 degrees.
7. The microscopic three-dimensional measuring device according to claim 1, wherein the distance between said microlens array and said main lens is the focal length of the main lens, and the distance from said microlens array to said CCD is the focal length of a single microlens.
8. A microscopic three-dimensional measurement system, the system comprising: the microscopic three-dimensional measuring device according to any one of claims 1 to 7 and an image processing unit, the image processing unit comprising an image processing module, an equiphase point finding module, a connecting module and a solving module;
the image processing module is used for processing the recorded image to obtain an absolute phase diagram;
the equal phase point searching module is used for obtaining equal phase points with equal phase values in the absolute phase diagram through equal phase searching;
the connecting module is used for establishing a plurality of three-dimensional space straight lines by calibrating and determining the coordinates of the central point of the micro lens in the micro lens array and connecting the central point of the micro lens to the equal phase point in the corresponding macro pixel;
and the solving module is used for solving the intersection points of the three-dimensional space straight lines to obtain three-dimensional space point coordinates with depth information, namely, the three-dimensional point cloud data of the object to be measured is obtained.
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| CN108303040B (en) * | 2018-02-27 | 2019-04-09 | 武汉理工大学 | Three-dimension measuring system and application method based on plane compound eye and coaxial configuration light |
| CN108881717B (en) * | 2018-06-15 | 2020-11-03 | 深圳奥比中光科技有限公司 | Depth imaging method and system |
| CN108924407B (en) * | 2018-06-15 | 2020-12-18 | 深圳奥比中光科技有限公司 | Depth imaging method and system |
| CN110715732B (en) * | 2019-10-17 | 2021-03-26 | 北京理工大学 | Multifunctional Stokes-Mueller imaging and spectrum detection system and detection method |
| CN111063022B (en) * | 2019-11-27 | 2023-07-18 | 陕西朗空惯导科技有限公司 | Phase body three-dimensional reconstruction method combining phase gradient and direct linear transformation |
| CN112945141B (en) * | 2021-01-29 | 2023-03-14 | 中北大学 | Structured light rapid imaging method and system based on micro-lens array |
| CN114111626B (en) * | 2021-11-26 | 2023-08-22 | 深圳技术大学 | Light field camera three-dimensional measurement device and system based on coaxial projection |
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