CN101962811A - Monocrystalline silicon piece texturizing liquid and texturizing method thereof - Google Patents
Monocrystalline silicon piece texturizing liquid and texturizing method thereof Download PDFInfo
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- CN101962811A CN101962811A CN 201010526866 CN201010526866A CN101962811A CN 101962811 A CN101962811 A CN 101962811A CN 201010526866 CN201010526866 CN 201010526866 CN 201010526866 A CN201010526866 A CN 201010526866A CN 101962811 A CN101962811 A CN 101962811A
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Abstract
The invention relates to monocrystalline silicon piece texturizing liquid and a texturizing method thereof. The formula of the texturizing liquid comprises the following components in percentage by mass: 0.1 to 3 percent of sodium hydroxide, 2 to 10 percent of isopropanol, 0.01 to 2 percent of additive and the balance of water, wherein the formula of the additive comprises the following components in percentage by mass: 0.001 to 3 percent of glucose, sodium gluconate or potassium gluconate, 100 to 8,000ppb of polyoxyethylene ether, 0.001 to 2 percent of sodium lactate or sodium citrate, 0.01 to 2 percent of propylene glycol, 0.01 to 6 percent of sodium silicate, 0.001 to 2 percent of sodium carbonate or sodium bicarbonate and the balance of water. The method for texturization comprises the steps of placing a monocrystalline silicon solar battery plate into the texturizing liquid for reaction for 10 to 30 min at the temperature of 70 to 90 DEG C. A pyramid on the monocrystalline silicon piece has a high nucleation density and is thin, small and uniform, the reduction thickness is small, texturization reflectivity is low and the rate of texturizing finished products is high.
Description
Technical field
The invention belongs to the monocrystaline silicon solar cell technical field, relate in particular to a kind of Woolen-making liquid of monocrystalline silicon piece and be used for the method for making herbs into wool.
Background technology
Utilize the anisotropic etch principle of lower concentration alkalescence corrosive fluid, form pyramidal structure, the light path of incident light is increased, increase the absorption of light, reduce reflectivity, improve the transformation efficiency of solar cell at silicon face to silicon single crystal.At present, in the Woolen-making liquid of monocrystalline silicon piece, the Woolen-making liquid that uses mainly comprises at present: caustic alkali sodium hydroxide or potassium hydroxide, buffering auxiliary agent such as Virahol, alcohol, water glass etc.There are following problem in existing Woolen-making liquid and leather producing process thereof: (1) silicon chip making herbs into wool attenuate amount is big, and battery sheet fragmentation rate height, angularity are big.(2) making herbs into wool effect instability, yield rate are difficult to control.(3) the silicon face pyramid is bigger than normal after the making herbs into wool, lack of homogeneity, and the homogeneity that is unfavorable for back road diffusion junction depth and silk-screen operation metal contact with silicon.In order to solve above problem, we have invented new silicon single crystal Woolen-making liquid and new etching method, and have obtained good making herbs into wool effect.
Summary of the invention
The Woolen-making liquid that the purpose of this invention is to provide a kind of monocrystalline silicon piece, and the method for manufacturing textured surface that this Woolen-making liquid is used for monocrystalline silicon piece, make that the pyramid that forms after the making herbs into wool is tiny, even, nucleation density improves, making herbs into wool attenuate amount is little, its process stabilizing, easy to operate, be easy to control.
Purpose of the present invention is achieved through the following technical solutions: a kind of wool making solution for monocrystalline silicon pieces, comprise sodium hydroxide, Virahol and additive, its prescription is by quality ratio: sodium hydroxide 0.1%～3%, Virahol 2%～10%, additive 0.01%～2%, all the other are water; Wherein, the prescription of described additive is by quality ratio: glucose, Sunmorl N 60S or Potassium Gluconate 0.001%～3%, Soxylat A 25-7 100ppb～8000ppb, Sodium.alpha.-hydroxypropionate or Trisodium Citrate 0.001%～2%, propylene glycol 0.001%～2%, water glass 0.01%～6%, yellow soda ash or sodium bicarbonate 0.001%～2%, all the other are water.
As a kind of preferred, described Soxylat A 25-7 is polyoxyethylene nonylphenol ether or decyl phenol polyethenoxy ether.
As a kind of preferred, by quality ratio, described sodium hydroxide is 0.5%～1.5%, and described Virahol is 4%～8%, and described additive is 0.1%～1.2%.
As a kind of preferred, in described additive, by quality ratio, glucose, Sunmorl N 60S or Potassium Gluconate are 0.1%～2%, Soxylat A 25-7 is 800ppb～6000ppb, and Sodium.alpha.-hydroxypropionate or Trisodium Citrate are 0.1%～1.5%, and propylene glycol is 0.05%～1.2%, water glass is 0.1%～4%, and yellow soda ash or sodium bicarbonate are 0.05%～1%.
Described wool making solution for monocrystalline silicon pieces is used for the method for making herbs into wool, may further comprise the steps:
⑴ carry out pre-washing to monocrystalline silicon piece;
⑵ with glucose, Sunmorl N 60S or Potassium Gluconate 0.001%～3%, Soxylat A 25-7 100ppb～8000ppb, Sodium.alpha.-hydroxypropionate or Trisodium Citrate 0.001%～2%, propylene glycol 0.001%～2%, water glass 0.01%～6%, yellow soda ash or sodium bicarbonate 0.001%～2%, all the other compare additive preparation for the quality of water;
⑶ with water metering and add texturing slot, is warming up to 70 ℃～90 ℃ of temperature of reaction, adds 0.1%～3% sodium hydroxide of water by quality ratio, 2%～10% Virahol, 0.01%～2% additive;
⑷ after interpolation finishes, the Woolen-making liquid in the texturing slot is stirred;
⑸ will react through the Woolen-making liquid that prewashed monocrystalline silicon piece is put into texturing slot, and control reaction temperature is 70 ℃～90 ℃, and the reaction times is 10min～30min.
As a kind of preferred, described temperature of reaction is controlled to be 75 ℃～85 ℃.
As a kind of preferred, add 0.5%～1.5% sodium hydroxide, 4%～8% Virahol and 0.1%～1.2% additive of water by quality ratio.
As a kind of preferred, with glucose, Sunmorl N 60S or Potassium Gluconate 0.1%～2%, Soxylat A 25-7 800ppb～6000ppb, Sodium.alpha.-hydroxypropionate or Trisodium Citrate 0.1%～1.5%, propylene glycol 0.05%～1.2%, water glass 0.1%～4%, yellow soda ash or sodium bicarbonate 0.05%～1%, all the other compare additive preparation for the quality of water.
The substantive distinguishing features of technical solution of the present invention is: add in additive and contain polyethenoxy ether class and polyhydric glucose type organic, can in the making herbs into wool process, reduce the surface tension of solution, for the pyramidal formation of monocrystalline silicon sheet surface provides the napping point, control the stability of pyramidal size and making herbs into wool process; Propylene glycol and Sodium.alpha.-hydroxypropionate or Trisodium Citrate can be removed the silicon chip surface greasy dirt, make surface cleaning situation homogeneous, more help the homogeneity of making herbs into wool, improve the making herbs into wool effect; Water glass and yellow soda ash or sodium bicarbonate make reaction evenly mild more as the matte buffer reagent.The pyramid pyramid length of side diminishes after the making herbs into wool, is evenly distributed, and covers whole surface, and the pyramid pinnacle of a pagoda is clear, and the matte reflectivity is low, and through detecting, the monocrystalline silicon piece texture reflectivity that uses the present invention to make drops to 11.5% by 12.8% of present common process.
Woolen-making liquid of the present invention and be used for the method for making herbs into wool, utilize in the additive organic group as pyramid napping point, the temperature and time of control making herbs into wool reaction (being chemical corrosion), improve the pyramid nucleation density greatly, pyramid is tiny, good uniformity, and the attenuate amount is little, the matte reflectivity is low, making herbs into wool yield rate height.
Description of drawings
The monocrystalline silicon piece pyramid matte of Fig. 1 for using existing Woolen-making liquid and common process to make.
Fig. 2 is the monocrystalline silicon piece pyramid matte of Woolen-making liquid of the present invention and leather producing process making thereof.
Fig. 3 serves as reasons and has the monocrystalline silicon piece texture reflectance curve comparison diagram of Woolen-making liquid and common process and Woolen-making liquid of the present invention and the making herbs into wool of leather producing process difference thereof now.
Embodiment
The present invention will be further described below in conjunction with embodiment, but the present invention is not limited to following examples.
Embodiment 1: a kind of wool making solution for monocrystalline silicon pieces
In mass parts, sodium hydroxide is 0.6%, and Virahol is 4.5%, and additive is 0.4%, and water is 94.5%.Wherein the proportioning of additive is in mass parts, glucose 0.5%, and polyoxyethylene nonylphenol ether 1500ppb, Sodium.alpha.-hydroxypropionate 0.5%, propylene glycol 0.1%, water glass 0.2%, yellow soda ash 0.2%, all the other are water.
Embodiment 2: another kind of wool making solution for monocrystalline silicon pieces
In mass parts, sodium hydroxide is 0.5%, and Virahol is 8%, and additive is 0.1%, and water is 94.5%.Wherein the proportioning of additive is in mass parts, glucose 2%, and decyl phenol polyethenoxy ether 6000ppb, Trisodium Citrate 0.1%, propylene glycol 0.05%, water glass 0.1%, yellow soda ash 0.05%, all the other are water.
Embodiment 3: another wool making solution for monocrystalline silicon pieces
In mass parts, sodium hydroxide is 1.5%, and Virahol is 4%, and additive is 1.2%, and water is 94.5%.Wherein the proportioning of additive is in mass parts, Potassium Gluconate 0.1%, and polyoxyethylene nonylphenol ether 800ppb, Sodium.alpha.-hydroxypropionate 1.5%, propylene glycol 1.2%, water glass 4%, sodium bicarbonate 1%, all the other are water.
Embodiment 4: another wool making solution for monocrystalline silicon pieces
In mass parts, sodium hydroxide is 0.6%, and Virahol is 4.5%, and additive is 0.4%, and water is 94.5%.Wherein the proportioning of additive is in mass parts, Sunmorl N 60S 0.5%, and polyoxyethylene nonylphenol ether 1500ppb, Trisodium Citrate 0.5%, propylene glycol 0.1%, water glass 0.2%, yellow soda ash 0.2%, all the other are water.
Embodiment 5: a kind of etching method
⑴ carry out pre-washing to monocrystalline silicon piece;
⑵ with glucose 0.5%, polyoxyethylene nonylphenol ether 1500ppb, and Sodium.alpha.-hydroxypropionate 0.5%, propylene glycol 0.1%, water glass 0.2%, yellow soda ash 0.2%, all the other compare additive preparation for the quality of water;
⑶ with water metering and add texturing slot, is warming up to 82 ℃ of temperature of reaction, adds 0.6% sodium hydroxide of water by quality ratio, 4.5% Virahol, 0.4% additive;
⑷ after interpolation finishes, the Woolen-making liquid in the texturing slot is stirred;
⑸ will react through the Woolen-making liquid that prewashed monocrystalline silicon piece is put into texturing slot, and control reaction temperature is 82 ℃, and the reaction times is 30min.
Embodiment 6: another kind of etching method
⑴ carry out pre-washing to monocrystalline silicon piece;
⑵ with Sunmorl N 60S 2%, decyl phenol polyethenoxy ether 6000ppb, and Trisodium Citrate 0.1%, propylene glycol 0.05%, water glass 0.1%, sodium bicarbonate 0.05%, all the other compare additive preparation for the quality of water;
⑶ with water metering and add texturing slot, is warming up to 85 ℃ of temperature of reaction, adds 1% sodium hydroxide of water by quality ratio, 5% Virahol, 0.1% additive;
⑷ after interpolation finishes, the Woolen-making liquid in the texturing slot is stirred;
⑸ will react through the Woolen-making liquid that prewashed monocrystalline silicon piece is put into texturing slot, and control reaction temperature is 85 ℃, and the reaction times is 25min.
Embodiment 7: another etching method
Add 1.5% sodium hydroxide of water by quality ratio, 8% Virahol, 0.7% additive; Control reaction temperature is 75 ℃, and the reaction times is 20min.All the other are identical with embodiment 5.
Embodiment 8: another etching method
Add 1.2% sodium hydroxide of water by quality ratio, 6% Virahol, 0.5% additive; Control reaction temperature is 80 ℃, and the reaction times is 15min.All the other are identical with embodiment 6.
Claims (8)
1. a wool making solution for monocrystalline silicon pieces comprises sodium hydroxide, Virahol, it is characterized in that, also comprises additive, and its prescription is by quality ratio: sodium hydroxide 0.1%～3%, and Virahol 2%～10%, additive 0.01%～2%, all the other are water; Wherein, the prescription of described additive is by quality ratio: glucose, Sunmorl N 60S or Potassium Gluconate 0.001%～3%, Soxylat A 25-7 100ppb～8000ppb, Sodium.alpha.-hydroxypropionate or Trisodium Citrate 0.001%～2%, propylene glycol 0.001%～2%, water glass 0.01%～6%, yellow soda ash or sodium bicarbonate 0.001%～2%, all the other are water.
2. wool making solution for monocrystalline silicon pieces according to claim 1 is characterized in that, described Soxylat A 25-7 is polyoxyethylene nonylphenol ether or decyl phenol polyethenoxy ether.
3. wool making solution for monocrystalline silicon pieces according to claim 1 is characterized in that, by quality ratio, described sodium hydroxide is 0.5%～1.5%, and described Virahol is 4%～8%, and described additive is 0.1%～1.2%.
4. according to claim 1,2 or 3 described wool making solution for monocrystalline silicon pieces, it is characterized in that, in described additive, by quality ratio, glucose, Sunmorl N 60S or Potassium Gluconate are 0.1%～2%, Soxylat A 25-7 is 800ppb～6000ppb, and Sodium.alpha.-hydroxypropionate or Trisodium Citrate are 0.1%～1.5%, and propylene glycol is 0.05%～1.2%, water glass is 0.1%～4%, and yellow soda ash or sodium bicarbonate are 0.05%～1%.
5. be used for the method for making herbs into wool according to each described wool making solution for monocrystalline silicon pieces of claim 1 to 4, it is characterized in that, may further comprise the steps:
⑴ carry out pre-washing to monocrystalline silicon piece;
⑵ with glucose, Sunmorl N 60S or Potassium Gluconate 0.001%～3%, Soxylat A 25-7 100ppb～8000ppb, Sodium.alpha.-hydroxypropionate or Trisodium Citrate 0.001%～2%, propylene glycol 0.001%～2%, water glass 0.01%～6%, yellow soda ash or sodium bicarbonate 0.001%～2%, all the other compare additive preparation for the quality of water;
⑶ with water metering and add texturing slot, is warming up to 70 ℃～90 ℃ of temperature of reaction, adds 0.1%～3% sodium hydroxide of water by quality ratio, 2%～10% Virahol, 0.01%～2% additive;
⑷ after interpolation finishes, the Woolen-making liquid in the texturing slot is stirred;
⑸ will react through the Woolen-making liquid that prewashed monocrystalline silicon piece is put into texturing slot, and control reaction temperature is 70 ℃～90 ℃, and the reaction times is 10min～30min.
6. the method for making herbs into wool according to claim 5 is characterized in that, described temperature of reaction is controlled to be 75 ℃～85 ℃.
7. the method for making herbs into wool according to claim 5 is characterized in that, adds 0.5%～1.5% sodium hydroxide, 4%～8% Virahol and 0.1%～1.2% additive of water by quality ratio.
8. the method for making herbs into wool according to claim 5, it is characterized in that, with glucose, Sunmorl N 60S or Potassium Gluconate 0.1%～2%, Soxylat A 25-7 800ppb～6000ppb, Sodium.alpha.-hydroxypropionate or Trisodium Citrate 0.1%～1.5%, propylene glycol 0.05%～1.2%, water glass 0.1%～4%, yellow soda ash or sodium bicarbonate 0.05%～1%, all the other compare additive preparation for the quality of water.
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