WO2021238496A1 - Monocrystalline silicon wafer texturing additive and use thereof - Google Patents

Monocrystalline silicon wafer texturing additive and use thereof Download PDF

Info

Publication number
WO2021238496A1
WO2021238496A1 PCT/CN2021/087700 CN2021087700W WO2021238496A1 WO 2021238496 A1 WO2021238496 A1 WO 2021238496A1 CN 2021087700 W CN2021087700 W CN 2021087700W WO 2021238496 A1 WO2021238496 A1 WO 2021238496A1
Authority
WO
WIPO (PCT)
Prior art keywords
texturing
silicon wafer
additive
monocrystalline silicon
hydrolyzed polyacrylonitrile
Prior art date
Application number
PCT/CN2021/087700
Other languages
French (fr)
Chinese (zh)
Inventor
周树伟
张丽娟
陈培良
Original Assignee
常州时创能源股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 常州时创能源股份有限公司 filed Critical 常州时创能源股份有限公司
Publication of WO2021238496A1 publication Critical patent/WO2021238496A1/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/08Etching
    • C30B33/10Etching in solutions or melts
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)

Abstract

Disclosed is a monocrystalline silicon wafer texturing additive, the mass percentage of each component thereof being: 0.25%-5% of a hydrolyzed polyacrylonitrile ammonium salt, 0.25%-5% of a hydrolyzed polyacrylonitrile sodium salt, 0.1%-2% of S-triazine, 0.5%-5% of glycolic acid, 1%-5% of sodium lactate, 0.5%-5% of dipotassium glycyrrhizinate, and the balance of water. Adding the additive of the present invention to a texturing liquid of a monocrystalline silicon wafer can shorten a texturing time to 5 min, and greatly improve productivity, and a textured wafer with a textured face having an irregular polygonal pyramid structure and a reflectivity as low as 8% can be obtained, and same can improve the light absorption of the silicon wafer and thus improve the conversion efficiency of the silicon wafer.

Description

一种单晶硅片制绒添加剂及其应用A monocrystalline silicon wafer texturing additive and its application 技术领域Technical field
本发明涉及光伏领域,具体涉及一种单晶硅片制绒添加剂及其应用。The invention relates to the field of photovoltaics, in particular to a single crystal silicon wafer texturing additive and its application.
背景技术Background technique
近年来,单晶硅太阳能电池在晶体硅太阳能电池中的占比越来越高。各大单晶硅太阳能电池厂商也在不停的进行扩张。在激烈的竞争中,各生产厂家为保持自身在行业内有力的竞争力,都在致力于提高太阳能电池的效率。In recent years, monocrystalline silicon solar cells account for an increasing proportion of crystalline silicon solar cells. Major monocrystalline silicon solar cell manufacturers are also constantly expanding. In the fierce competition, various manufacturers are committed to improving the efficiency of solar cells in order to maintain their strong competitiveness in the industry.
在单晶硅太阳能电池的生产工艺中,制绒是必不可少的一个重要步骤。单晶硅制绒是在单晶硅片的表面进行织构化处理,最常用的方法是碱刻蚀,在单晶硅片表面形成密布的类金字塔结构,降低硅片对光的反射率,从而提高硅片对太阳光的吸收率,进而提高光电转换效率。In the production process of monocrystalline silicon solar cells, texturing is an essential and important step. Monocrystalline silicon texturing is to texture the surface of monocrystalline silicon wafers. The most commonly used method is alkaline etching to form dense pyramid-like structures on the surface of monocrystalline silicon wafers to reduce the reflectance of the silicon wafers to light. Thereby, the absorption rate of the silicon wafer to sunlight is improved, and the photoelectric conversion efficiency is improved.
目前,单晶硅制绒片的制绒反应时间为7~15min,形成的绒面结构都是比较常见的近似于金字塔的四棱锥结构,这种结构由于太规则且对太阳光的反射面偏少,导致反射率偏高,反射率基本在11%~12%。At present, the texturing reaction time of the monocrystalline silicon texturing sheet is 7 to 15 minutes, and the formed texturing structure is a relatively common pyramid structure similar to a pyramid. This structure is too regular and deflects the reflection of sunlight. Less, resulting in high reflectivity, which is basically between 11% and 12%.
技术解决方案Technical solutions
本发明的目的在于提供一种单晶硅片制绒添加剂及其应用,在单晶硅片的制绒液中添加本发明的添加剂,能缩短制绒时间,且能得到低反射率的制绒片。The purpose of the present invention is to provide a monocrystalline silicon wafer texturing additive and its application. Adding the additive of the invention to the monocrystalline silicon wafer texturing liquid can shorten the texturing time and obtain low reflectivity texturing. piece.
为实现上述目的,本发明提供一种单晶硅片制绒添加剂,其各组分的质量百分含量为:水解聚丙烯腈铵盐0.25%~5%,水解聚丙烯腈钠盐0.25%~5%,均三嗪0.1%~2%,乙醇酸0.5%~5%,乳酸钠1%~5%,甘草酸二钾0.5%~5%,余量为水。In order to achieve the above objective, the present invention provides a monocrystalline silicon wafer texturing additive, the mass percentage of each component is: hydrolyzed polyacrylonitrile ammonium salt 0.25%~5%, hydrolyzed polyacrylonitrile sodium salt 0.25%~ 5%, serotriazine 0.1% to 2%, glycolic acid 0.5% to 5%, sodium lactate 1% to 5%, dipotassium glycyrrhizinate 0.5% to 5%, the balance is water.
优选的,所述水解聚丙烯腈铵盐的含量与水解聚丙烯腈钠盐的含量相同。Preferably, the content of the hydrolyzed polyacrylonitrile ammonium salt is the same as the content of the hydrolyzed polyacrylonitrile sodium salt.
优选的,所述水为去离子水。Preferably, the water is deionized water.
本发明还提供一种单晶硅片制绒液,其含有碱溶液和上述制绒添加剂,制绒添加剂与碱溶液的质量比为0.2~2.5:100,碱溶液为无机碱的水溶液。The present invention also provides a single crystal silicon wafer texturing liquid, which contains an alkali solution and the above texturing additive, the mass ratio of the texturing additive to the alkali solution is 0.2-2.5:100, and the alkali solution is an aqueous solution of inorganic alkali.
优选的,所述碱溶液为0.5~2.0wt%的氢氧化钠或氢氧化钾水溶液。Preferably, the alkaline solution is 0.5 to 2.0 wt% sodium hydroxide or potassium hydroxide aqueous solution.
本发明还提供一种单晶硅片制绒方法,利用上述制绒液对单晶硅片进行表面制绒。The invention also provides a single crystal silicon wafer texturing method, which uses the above-mentioned texturing liquid to perform surface texturing on the single crystal silicon wafer.
优选的,上述单晶硅片制绒方法,其具体步骤包括:Preferably, in the above-mentioned single crystal silicon wafer texturing method, the specific steps include:
1)配制制绒添加剂:将质量百分含量为0.25%~5%的水解聚丙烯腈铵盐、0.25%~5%的水解聚丙烯腈钠盐,0.1%~2%的均三嗪,0.5%~5%的乙醇酸,1%~5%的乳酸钠,0.5%~5%的甘草酸二钾加入到余量的水中,混合均匀配成制绒添加剂;1) Preparation of texturing additives: the mass percentage of 0.25% to 5% of hydrolyzed polyacrylonitrile ammonium salt, 0.25% to 5% of hydrolyzed polyacrylonitrile sodium salt, 0.1% to 2% s-triazine, 0.5 %~5% glycolic acid, 1%~5% sodium lactate, 0.5%~5% dipotassium glycyrrhizinate are added to the balance of water, mixed evenly to form a texturing additive;
2)配制制绒液:将步骤1)制成的制绒添加剂加到碱溶液中,混合均匀配成制绒液;制绒添加剂与碱溶液的质量比为0.2~2.5:100;碱溶液为无机碱的水溶液;2) Prepare the texturing liquid: add the texturing additive made in step 1) to the alkali solution and mix it evenly to form a texturing liquid; the mass ratio of the texturing additive to the alkali solution is 0.2~2.5:100; the alkali solution is Aqueous solution of inorganic base;
3)将单晶硅片浸入步骤2)制得的制绒液中进行表面制绒,制绒温度为75~85℃,制绒时间为5~6min。3) Immerse the monocrystalline silicon wafer in the texturing liquid prepared in step 2) for surface texturing, the texturing temperature is 75-85°C, and the texturing time is 5-6 minutes.
有益效果Beneficial effect
本发明的优点和有益效果在于:提供一种单晶硅片制绒添加剂及其应用,在单晶硅片的制绒液中添加本发明的添加剂,能将制绒时间缩短至5min,可大大提高产能,还能得到绒面为不规则多棱锥结构、且反射率低至8%的制绒片,可提高硅片对光的吸收,进而提高硅片的转换效率。The advantages and beneficial effects of the present invention are: providing a monocrystalline silicon wafer texturing additive and its application. Adding the additive of the present invention to the monocrystalline silicon wafer texturing liquid can shorten the texturing time to 5 minutes, which can greatly Increasing production capacity can also obtain a textured sheet with an irregular polygonal pyramid structure and a reflectivity as low as 8%, which can increase the light absorption of the silicon wafer, thereby increasing the conversion efficiency of the silicon wafer.
采用本发明添加剂制绒产生的绒面结构为不规则多棱锥结构(多棱锥的侧棱/侧面个数大于4,即多棱锥至少为五棱锥),对光的反射面多,因而反射率很低。The suede structure produced by the additive of the present invention is an irregular polygonal pyramid structure (the number of side edges/sides of the polygonal pyramid is greater than 4, that is, the polygonal pyramid is at least a pentagonal pyramid), and has many light reflecting surfaces, so the reflectivity is very high. Low.
本发明制绒添加剂的配方中,水解聚丙烯腈铵盐和水解聚丙烯腈钠盐具有很好的出绒性和一定的脱泡性,作为基底出绒物质;均三嗪和乙醇酸具有调节绒面的作用,通过控制其用量调整可以实现绒面形貌和金字塔上微结构的变化,从而达到降低反射率的作用;乳酸钠和甘草酸二钾作为补充出绒的物质,具有完善绒面和调节制绒外观的功能。In the formulation of the texturing additive of the present invention, the hydrolyzed polyacrylonitrile ammonium salt and the hydrolyzed polyacrylonitrile sodium salt have good flocking properties and certain defoaming properties, and serve as the base flocking material; s-triazine and glycolic acid can adjust The effect of suede can be adjusted by controlling its dosage to achieve changes in suede morphology and microstructure on the pyramid, thereby achieving the effect of reducing reflectivity; sodium lactate and dipotassium glycyrrhizinate are used to supplement the suede and have perfect suede and The function of adjusting the appearance of the velvet.
水解聚丙烯腈铵盐和水解聚丙烯腈钠盐,它是由聚丙烯腈废料,经碱性水解而得到的阴离子聚合物,分子链上含有-CONH2、-COO-和-CN等强极性基团,与硅片表面的Si-H键形成强氢键作用,可以很好的吸附在硅片表面,并且由于分子链合适的长度,不会因为分子链过长而对其他物质的吸附有明显的干扰作用,因而具有良好的出绒性能,结合绒面调节作用的均三嗪和乙醇酸,(对比图1和图2可以看出)金字塔的绒面形貌发生了较大的变化,首先塔尖的形貌明显的不同,由于水解聚丙烯腈铵盐和水解聚丙烯腈钠盐分子链的缠绕吸附,反应生成物不能很快速的从硅片表面脱除,从而在塔尖位置形成了不规则的结构,这一结构增加了光的二次反射甚至三次反射过程,因而可以明显的降低反射率;另外,形成的金字塔不是常规的四棱锥结构,而是扭曲的多棱锥结构,一般认为多棱锥结构是金字塔形成过程中的中间态,但是通常情况下中间态存在的时间很短,在制绒完成前不会出现大量的中间态,但是由于本发明的添加剂配方中,基底出绒性稳定性很好,时间窗口宽,加上绒面调节剂的存在,致使中间态停留的时间变长,从而形成了全部为中间态的多棱锥形貌(多棱锥的侧棱/侧面个数大于4,即多棱锥至少为五棱锥),相比常规的四棱锥结构,多棱椎对光的反射率面更多,无论光路从任何方向照射,更多的反射面都会使光具有更多的二次反射和三次反射过程,从而进一步提高硅片对光的吸收,降低反射率。Hydrolyzed polyacrylonitrile ammonium salt and hydrolyzed polyacrylonitrile sodium salt. It is an anionic polymer obtained from polyacrylonitrile waste through alkaline hydrolysis. The molecular chain contains strong polarities such as -CONH2, -COO- and -CN. The group forms a strong hydrogen bond with the Si-H bond on the surface of the silicon wafer, which can be well adsorbed on the surface of the silicon wafer, and due to the appropriate length of the molecular chain, it will not adsorb other substances due to the excessively long molecular chain. Obvious interference effect, so it has good flocking performance, combined with s-triazine and glycolic acid, which have the effect of suede adjustment, (compare Figure 1 and Figure 2 can be seen) the suede morphology of the pyramid has undergone major changes. First of all, the morphology of the spire is obviously different. Due to the entanglement and adsorption of the molecular chains of the hydrolyzed polyacrylonitrile ammonium salt and the hydrolyzed polyacrylonitrile sodium salt, the reaction products cannot be quickly removed from the surface of the silicon wafer, and form at the spire. In addition to the irregular structure, this structure increases the secondary reflection or even the third reflection process of light, which can significantly reduce the reflectivity; in addition, the formed pyramid is not a conventional quadrangular pyramid structure, but a twisted multi-pyramid structure. It is considered that the polypyramid structure is the intermediate state during the formation of the pyramid, but usually the intermediate state exists for a short time, and there will not be a large number of intermediate states before the texturing is completed. The sexual stability is very good, the time window is wide, and the presence of the suede regulator makes the intermediate state stay longer, thus forming a polypyramid shape with all the intermediate states (the number of side edges/sides of the polygonal pyramid) More than 4, that is, the polygonal pyramid is at least a pentagonal pyramid). Compared with the conventional quadrangular pyramid structure, the polygonal pyramid has more light reflectivity surfaces. No matter the light path is irradiated from any direction, more reflective surfaces will make the light have more The second reflection and third reflection process, thereby further improving the light absorption of the silicon wafer and reducing the reflectivity.
附图说明Description of the drawings
图1是本发明实施例2的绒面形貌;Figure 1 is a suede morphology of Example 2 of the present invention;
图2是对比例的绒面形貌。Figure 2 is the suede morphology of the comparative example.
本发明的实施方式Embodiments of the present invention
下面结合附图和实施例,对本发明的具体实施方式作进一步描述。以下实施例仅用于更加清楚地说明本发明的技术方案,而不能以此来限制本发明的保护范围。The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings and embodiments. The following embodiments are only used to illustrate the technical solutions of the present invention more clearly, and cannot be used to limit the protection scope of the present invention.
实施例1Example 1
将水解聚丙烯腈铵盐0.5质量份,水解聚丙烯腈钠盐5质量份,均三嗪1质量份,乙醇酸2质量份,乳酸钠2质量份,甘草酸二钾2质量份,去离子水87.5质量份混合搅拌均匀配成添加剂溶液;然后在制绒槽体中按照质量比为0.8:1:100依次加入添加剂、氢氧化钠和去离子水,搅拌均匀配成制绒液;然后放入硅片制绒,制绒温度80℃,反应时间6min。0.5 parts by mass of hydrolyzed polyacrylonitrile ammonium salt, 5 parts by mass of sodium salt of hydrolyzed polyacrylonitrile, 1 part by mass of serotonin, 2 parts by mass of glycolic acid, 2 parts by mass of sodium lactate, 2 parts by mass of dipotassium glycyrrhizinate, deionized water 87.5 parts by mass are mixed and stirred to form an additive solution; then the additives, sodium hydroxide and deionized water are added to the texturing tank in a mass ratio of 0.8:1:100, and the mixture is stirred to form a texturing solution; Silicon wafer texturing, texturing temperature 80℃, reaction time 6min.
实施例2Example 2
将水解聚丙烯腈铵盐2.5质量份,水解聚丙烯腈钠盐2.5质量份,均三嗪1质量份,乙醇酸2质量份,乳酸钠4质量份,甘草酸二钾4质量份,去离子水84质量份混合搅拌均匀配成添加剂溶液;然后在制绒槽体中按照质量比为0.8:1:100依次加入添加剂、氢氧化钠和去离子水,搅拌均匀配成制绒液;然后放入硅片制绒,制绒温度80℃,反应时间6min。2.5 parts by mass of hydrolyzed polyacrylonitrile ammonium salt, 2.5 parts by mass of hydrolyzed polyacrylonitrile sodium salt, 1 part by mass of serotonin, 2 parts by mass of glycolic acid, 4 parts by mass of sodium lactate, 4 parts by mass of dipotassium glycyrrhizinate, deionized water 84 parts by mass are mixed and stirred to form an additive solution; then the additives, sodium hydroxide and deionized water are added to the texturing tank according to the mass ratio of 0.8:1:100, and the mixture is stirred to form a texturing solution; Silicon wafer texturing, texturing temperature 80℃, reaction time 6min.
实施例3Example 3
将水解聚丙烯腈铵盐5质量份,水解聚丙烯腈钠盐0.5质量份,均三嗪1质量份,乙醇酸2质量份,乳酸钠5质量份,甘草酸二钾5质量份,去离子水81.5质量份混合搅拌均匀配成添加剂溶液;然后在制绒槽体中按照质量比为0.8:1:100依次加入添加剂、氢氧化钠和去离子水,搅拌均匀配成制绒液;然后放入硅片制绒,制绒温度80℃,反应时间6min。5 parts by mass of hydrolyzed polyacrylonitrile ammonium salt, 0.5 parts by mass of sodium salt of hydrolyzed polyacrylonitrile, 1 part by mass of s-triazine, 2 parts by mass of glycolic acid, 5 parts by mass of sodium lactate, 5 parts by mass of dipotassium glycyrrhizinate, deionized water 81.5 parts by mass are mixed and stirred to form an additive solution; then the additives, sodium hydroxide and deionized water are added to the texturing tank in a mass ratio of 0.8:1:100, and the mixture is stirred to form a texturing solution; Silicon wafer texturing, texturing temperature 80℃, reaction time 6min.
实施例4Example 4
将水解聚丙烯腈铵盐2.5质量份,水解聚丙烯腈钠盐2.5质量份,均三嗪1质量份,乙醇酸2质量份,乳酸钠4质量份,甘草酸二钾4质量份,去离子水84质量份混合搅拌均匀配成添加剂溶液;然后在制绒槽体中按照质量比为0.8:1:100依次加入添加剂、氢氧化钠和去离子水,搅拌均匀配成制绒液;然后放入硅片制绒,制绒温度80℃,反应时间5min。2.5 parts by mass of hydrolyzed polyacrylonitrile ammonium salt, 2.5 parts by mass of hydrolyzed polyacrylonitrile sodium salt, 1 part by mass of serotonin, 2 parts by mass of glycolic acid, 4 parts by mass of sodium lactate, 4 parts by mass of dipotassium glycyrrhizinate, deionized water 84 parts by mass are mixed and stirred to form an additive solution; then the additives, sodium hydroxide and deionized water are added to the texturing tank according to the mass ratio of 0.8:1:100, and the mixture is stirred to form a texturing solution; Silicon wafer texturing, texturing temperature 80℃, reaction time 5min.
实施例5Example 5
将水解聚丙烯腈铵盐2.5质量份,水解聚丙烯腈钠盐2.5质量份,均三嗪1.5质量份,乙醇酸3质量份,乳酸钠4质量份,甘草酸二钾4质量份,去离子水82.5质量份混合搅拌均匀配成添加剂溶液;然后在制绒槽体中按照质量比为0.8:1:100依次加入添加剂、氢氧化钠和去离子水,搅拌均匀配成制绒液;然后放入硅片制绒,制绒温度80℃,反应时间6min。2.5 parts by mass of hydrolyzed polyacrylonitrile ammonium salt, 2.5 parts by mass of sodium salt of hydrolyzed polyacrylonitrile, 1.5 parts by mass of s-triazine, 3 parts by mass of glycolic acid, 4 parts by mass of sodium lactate, 4 parts by mass of dipotassium glycyrrhizinate, deionized water 82.5 parts by mass are mixed and stirred to form an additive solution; then the additives, sodium hydroxide and deionized water are added to the texturing tank in a mass ratio of 0.8:1:100, and the mixture is stirred to form a texturing solution; Silicon wafer texturing, texturing temperature 80℃, reaction time 6min.
对比例Comparison
在制绒槽体中按照质量比为0.8:1:100依次加入制绒用添加剂(常州时创能源股份有限公司生产,产品型号:TS50)、氢氧化钠和去离子水,搅拌均匀配成制绒液;然后放入硅片制绒,制绒温度80℃,反应时间7min。Add texturing additives (produced by Changzhou Shichuang Energy Co., Ltd., product model: TS50), sodium hydroxide and deionized water according to the mass ratio of 0.8:1:100 in the texturing tank, and mix them evenly to prepare the system. Fluff liquid; then put silicon wafers into texturing, the texturing temperature is 80℃, and the reaction time is 7min.
对上述各实施例以及对比例所得制绒片进行反射率测试,反射率测试仪器采用NXT Helios-rc反射率测试仪,将硅片的正反面分别测试得到的反射率取平均值作为平均反射率,测试结果如下表所示:The reflectance test of the texturing sheet obtained in the above embodiments and the comparative example is carried out. The reflectance tester adopts the NXT Helios-rc reflectance tester, and the reflectance measured on the front and back of the silicon wafer is averaged as the average reflectance. , The test results are shown in the following table:
Figure 794567dest_path_image001
Figure 794567dest_path_image001
对比测试结果可知,本发明添加剂具有明显的降反效果,能大大降低制绒片的反射率。Comparing the test results, it can be seen that the additive of the present invention has an obvious anti-reflection effect and can greatly reduce the reflectivity of the texturing sheet.
另外,发明人经研究发现,在添加剂其他组分含量不变的情况下,随着水解聚丙烯腈铵盐和水解聚丙烯腈钠盐的配比的变化,反射率先降低后升高,在两者1:1用量比例的时候达到最低值,所以本发明添加剂优选为水解聚丙烯腈铵盐的含量与水解聚丙烯腈钠盐的含量相同。In addition, the inventors have found through research that under the condition that the content of other components of the additive remains unchanged, as the ratio of the hydrolyzed polyacrylonitrile ammonium salt and the hydrolyzed polyacrylonitrile sodium salt changes, the reflectance first decreases and then increases. When the ratio is 1:1, it reaches the lowest value, so the additive of the present invention is preferably the content of the hydrolyzed polyacrylonitrile ammonium salt and the content of the hydrolyzed polyacrylonitrile sodium salt.
以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明技术原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above are only the preferred embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the technical principles of the present invention, several improvements and modifications can be made. These improvements and modifications It should also be regarded as the protection scope of the present invention.

Claims (7)

  1. 一种单晶硅片制绒添加剂,其特征在于,其各组分的质量百分含量为:水解聚丙烯腈铵盐0.25%~5%,水解聚丙烯腈钠盐0.25%~5%,均三嗪0.1%~2%,乙醇酸0.5%~5%,乳酸钠1%~5%,甘草酸二钾0.5%~5%,余量为水。A monocrystalline silicon wafer texturing additive, characterized in that the mass percentage of each component is: hydrolyzed polyacrylonitrile ammonium salt 0.25% to 5%, hydrolyzed polyacrylonitrile sodium salt 0.25% to 5%, both Triazine 0.1%~2%, glycolic acid 0.5%~5%, sodium lactate 1%~5%, dipotassium glycyrrhizinate 0.5%~5%, the balance is water.
  2. 根据权利要求1所述的单晶硅片制绒添加剂,其特征在于,所述水解聚丙烯腈铵盐的含量与水解聚丙烯腈钠盐的含量相同。The monocrystalline silicon wafer texturing additive according to claim 1, wherein the content of the hydrolyzed polyacrylonitrile ammonium salt is the same as the content of the hydrolyzed polyacrylonitrile sodium salt.
  3. 根据权利要求1或2所述的单晶硅片制绒添加剂,其特征在于,所述水为去离子水。The monocrystalline silicon wafer texturing additive according to claim 1 or 2, wherein the water is deionized water.
  4. 单晶硅片制绒液,其特征在于,其含有碱溶液和权利要求1至3中任一项所述的制绒添加剂,制绒添加剂与碱溶液的质量比为0.2~2.5:100,碱溶液为无机碱的水溶液。The monocrystalline silicon wafer texturing liquid is characterized in that it contains an alkali solution and the texturing additive according to any one of claims 1 to 3, and the mass ratio of the texturing additive to the alkali solution is 0.2 to 2.5:100. The solution is an aqueous solution of an inorganic base.
  5. 根据权利要求4所述的单晶硅片制绒液,其特征在于,所述碱溶液为0.5~2.0wt%的氢氧化钠或氢氧化钾水溶液。The single crystal silicon wafer texturing liquid according to claim 4, wherein the alkaline solution is 0.5 to 2.0 wt% sodium hydroxide or potassium hydroxide aqueous solution.
  6. 单晶硅片制绒方法,其特征在于,利用权利要求4或5所述的制绒液对单晶硅片进行表面制绒。The single crystal silicon wafer texturing method is characterized in that the surface of the single crystal silicon wafer is texturized by using the texturing liquid according to claim 4 or 5.
  7. 根据权利要求6所述的单晶硅片制绒方法,其特征在于,其具体步骤包括:The method for making monocrystalline silicon wafer texturing according to claim 6, wherein the specific steps include:
    1)配制制绒添加剂:将质量百分含量为0.25%~5%的水解聚丙烯腈铵盐、0.25%~5%的水解聚丙烯腈钠盐,0.1%~2%的均三嗪,0.5%~5%的乙醇酸,1%~5%的乳酸钠,0.5%~5%的甘草酸二钾加入到余量的水中,混合均匀配成制绒添加剂;1) Preparation of texturing additives: the mass percentage of 0.25% to 5% of hydrolyzed polyacrylonitrile ammonium salt, 0.25% to 5% of hydrolyzed polyacrylonitrile sodium salt, 0.1% to 2% s-triazine, 0.5 %~5% glycolic acid, 1%~5% sodium lactate, 0.5%~5% dipotassium glycyrrhizinate are added to the balance of water, mixed evenly to form a texturing additive;
    2)配制制绒液:将步骤1)制成的制绒添加剂加到碱溶液中,混合均匀配成制绒液;制绒添加剂与碱溶液的质量比为0.2~2.5:100;碱溶液为无机碱的水溶液;2) Prepare the texturing liquid: add the texturing additive made in step 1) to the alkali solution and mix it evenly to form a texturing liquid; the mass ratio of the texturing additive to the alkali solution is 0.2~2.5:100; the alkali solution is Aqueous solution of inorganic base;
    3)将单晶硅片浸入步骤2)制得的制绒液中进行表面制绒,制绒温度为75~85℃,制绒时间为5~6min。3) Immerse the monocrystalline silicon wafer in the texturing liquid prepared in step 2) for surface texturing, the texturing temperature is 75-85°C, and the texturing time is 5-6 minutes.
PCT/CN2021/087700 2020-05-25 2021-04-16 Monocrystalline silicon wafer texturing additive and use thereof WO2021238496A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202010448009.4A CN111501105B (en) 2020-05-25 2020-05-25 Monocrystalline silicon piece texturing additive and application thereof
CN202010448009.4 2020-05-25

Publications (1)

Publication Number Publication Date
WO2021238496A1 true WO2021238496A1 (en) 2021-12-02

Family

ID=71868409

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2021/087700 WO2021238496A1 (en) 2020-05-25 2021-04-16 Monocrystalline silicon wafer texturing additive and use thereof

Country Status (2)

Country Link
CN (1) CN111501105B (en)
WO (1) WO2021238496A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114351258A (en) * 2022-01-11 2022-04-15 江苏捷捷半导体新材料有限公司 High-reflectivity monocrystalline silicon wafer alkali polishing additive, preparation method and application thereof
CN114823943A (en) * 2022-03-22 2022-07-29 湖州飞鹿新能源科技有限公司 Texture structure, monocrystalline silicon wafer comprising texture structure, texture manufacturing method and application
CN115449900A (en) * 2022-09-23 2022-12-09 浙江奥首材料科技有限公司 Texturing treating agent, preparation method thereof and method for texturing monocrystalline silicon wafer

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111501105B (en) * 2020-05-25 2021-02-05 常州时创能源股份有限公司 Monocrystalline silicon piece texturing additive and application thereof
CN112144122A (en) * 2020-10-21 2020-12-29 常州时创能源股份有限公司 Texturing additive and texturing liquid suitable for large-size monocrystalline silicon wafers and application
CN113668066A (en) * 2021-08-19 2021-11-19 常州时创能源股份有限公司 Texturing additive for rapid texturing and application

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101962811A (en) * 2010-11-01 2011-02-02 浙江晶科能源有限公司 Monocrystalline silicon piece texturizing liquid and texturizing method thereof
JP2011146432A (en) * 2010-01-12 2011-07-28 Noritake Co Ltd Method of manufacturing silicon substrate for solar battery
CN102181935A (en) * 2010-10-26 2011-09-14 江阴浚鑫科技有限公司 Method and corrosive liquid for making texture surface of monocrystalline silicon
CN102586887A (en) * 2012-03-15 2012-07-18 苏州先拓光伏科技有限公司 Suede-making additive for low-reflectivity monocrystalline silicon
CN102943307A (en) * 2012-11-27 2013-02-27 韩华新能源(启东)有限公司 Single crystal silicon alcohol-free wool making additive
JP2013098256A (en) * 2011-10-28 2013-05-20 Mitsubishi Electric Corp Etchant pretreatment method, silicon substrate etching method, and silicon substrate etching device
JP2014090086A (en) * 2012-10-30 2014-05-15 Mitsubishi Electric Corp Method for etching silicon substrate, etchant for silicon substrate, and method for manufacturing solar cell
CN105133034A (en) * 2015-08-27 2015-12-09 安徽祈艾特电子科技有限公司 Antibacterial silicon wafer texturing agent and preparation method therefor
CN107955974A (en) * 2018-01-09 2018-04-24 常州时创能源科技有限公司 The flocking additive of inverted pyramid textured mono-crystalline silicon piece and its application
CN111501105A (en) * 2020-05-25 2020-08-07 常州时创能源股份有限公司 Monocrystalline silicon piece texturing additive and application thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103614778A (en) * 2013-11-25 2014-03-05 英利能源(中国)有限公司 Alcohol-free alkaline texturing solution for mono-crystalline silicon wafer, texturing method for mono-crystalline silicon wafer, solar cell and manufacturing method for solar cell

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011146432A (en) * 2010-01-12 2011-07-28 Noritake Co Ltd Method of manufacturing silicon substrate for solar battery
CN102181935A (en) * 2010-10-26 2011-09-14 江阴浚鑫科技有限公司 Method and corrosive liquid for making texture surface of monocrystalline silicon
CN101962811A (en) * 2010-11-01 2011-02-02 浙江晶科能源有限公司 Monocrystalline silicon piece texturizing liquid and texturizing method thereof
JP2013098256A (en) * 2011-10-28 2013-05-20 Mitsubishi Electric Corp Etchant pretreatment method, silicon substrate etching method, and silicon substrate etching device
CN102586887A (en) * 2012-03-15 2012-07-18 苏州先拓光伏科技有限公司 Suede-making additive for low-reflectivity monocrystalline silicon
JP2014090086A (en) * 2012-10-30 2014-05-15 Mitsubishi Electric Corp Method for etching silicon substrate, etchant for silicon substrate, and method for manufacturing solar cell
CN102943307A (en) * 2012-11-27 2013-02-27 韩华新能源(启东)有限公司 Single crystal silicon alcohol-free wool making additive
CN105133034A (en) * 2015-08-27 2015-12-09 安徽祈艾特电子科技有限公司 Antibacterial silicon wafer texturing agent and preparation method therefor
CN107955974A (en) * 2018-01-09 2018-04-24 常州时创能源科技有限公司 The flocking additive of inverted pyramid textured mono-crystalline silicon piece and its application
CN111501105A (en) * 2020-05-25 2020-08-07 常州时创能源股份有限公司 Monocrystalline silicon piece texturing additive and application thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114351258A (en) * 2022-01-11 2022-04-15 江苏捷捷半导体新材料有限公司 High-reflectivity monocrystalline silicon wafer alkali polishing additive, preparation method and application thereof
CN114823943A (en) * 2022-03-22 2022-07-29 湖州飞鹿新能源科技有限公司 Texture structure, monocrystalline silicon wafer comprising texture structure, texture manufacturing method and application
CN114823943B (en) * 2022-03-22 2024-01-02 湖州飞鹿新能源科技有限公司 Suede structure, monocrystalline silicon wafer containing same, and texturing method and application
CN115449900A (en) * 2022-09-23 2022-12-09 浙江奥首材料科技有限公司 Texturing treating agent, preparation method thereof and method for texturing monocrystalline silicon wafer
CN115449900B (en) * 2022-09-23 2023-11-21 浙江奥首材料科技有限公司 Texturing treating agent, preparation method thereof and method for texturing monocrystalline silicon wafer

Also Published As

Publication number Publication date
CN111501105B (en) 2021-02-05
CN111501105A (en) 2020-08-07

Similar Documents

Publication Publication Date Title
WO2021238496A1 (en) Monocrystalline silicon wafer texturing additive and use thereof
TWI494416B (en) Acidic etching solution and method for texturing the surface of single crystal and polycrystal silicon substrates
CN113529174A (en) Texturing method and application of monocrystalline silicon wafer
WO2016019767A1 (en) Acidic texturing solution for etching solar cell silicon wafer, texturing method, solar cell and manufacturing method for solar cell
WO2019242242A1 (en) Preparation method for surface micro and nano composite structure of mono-crystalline cell
CN112144122A (en) Texturing additive and texturing liquid suitable for large-size monocrystalline silicon wafers and application
WO2023071585A1 (en) Additive for alkaline polishing of silicon wafers, and use thereof
CN112226819A (en) Texturing additive suitable for thin monocrystalline silicon wafer and application
CN112877784A (en) Additive for silicon wafer texturing by alkali liquor
WO2023019934A1 (en) Texturing additive for rapid texturing, and application
CN111593412B (en) Additive for chain type texture surface making of monocrystalline silicon piece and application thereof
CN111455468B (en) Additive for single crystal texturing and application thereof
CN108221050B (en) Monocrystalline silicon piece with double-peak pyramid suede structure
CN111020707A (en) Monocrystalline silicon texturing auxiliary agent and application thereof
CN116815313A (en) Crystalline silicon alkali texturing additive and use method thereof
TWI589655B (en) An additive for crystalline silicon alkaline polishing liquid and use thereof
CN115820132A (en) Chain type alkali polishing process additive and application thereof
CN114990700B (en) Additive and process for preparing terrace pyramid microstructure silicon wafer and obtained silicon wafer
CN114267581A (en) Method and liquid for smoothly modifying crystalline silicon solar cell
CN114267580A (en) Etching method and etching liquid for back structure of double-sided PERC solar cell
CN113113500A (en) Preparation method of full-angle light trapping suede and crystalline silicon solar cell
CN113257931A (en) Preparation method of full-angle light trapping crystalline silicon solar cell suede
CN108250363B (en) Monocrystalline silicon texturing additive
CN117438502B (en) Preparation method of monocrystalline silicon wafer textured surface with light conversion and full-angle light trapping
CN102212825A (en) Method for preparing non-additive type slow-release etching fluid for mono-crystalline silicon slice

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21811835

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 21811835

Country of ref document: EP

Kind code of ref document: A1